Patent application number | Description | Published |
20090130432 | HEAT-RESISTANT RESIN - The present invention provides a low-modulus low-stress resin which has such heat resistance that cohesive force and reliability can be retained even at high temperatures and which is applicable as various functional materials. | 05-21-2009 |
20090253891 | CLEANING SUBSTRATE OF SUBSTRATE PROCESSING EQUIPMENT AND HEAT RESISTANT RESIN PREFERABLE THEREOF - The present invention provides a cleaning substrate of a substrate processing equipment, which comprises a cleaning layer comprising a heat resistant resin with a storage modulus (1 Hz) at 20° C. up to 150° C. being 5×10 | 10-08-2009 |
20100092714 | Pressure-Sensitive Adhesive Tape - Provided is a pressure-sensitive adhesive tape which has a sufficient pressure-sensitive adhesive strength for an adherend, is excellent in heat resistance, and can be easily peeled without leaving a pressure-sensitive adhesive residue on the adherend particularly upon peeling. The pressure-sensitive adhesive tape includes, on a substrate, a pressure-sensitive adhesive layer containing a lipophilic layered clay mineral, in which the layered clay mineral is in a state of being peeled and dispersed, and the interlayer distance of the layered clay mineral is 50 Å or more. | 04-15-2010 |
20100170533 | Cleaning Member, Carrying Member with Cleaning Function, and Method of Cleaning Substrate Processing Equipment - Provided is a cleaning member capable of removing minute foreign matter, in particular foreign matter of a submicron level simply, exactly, and sufficiently without contaminating a cleaning site. Further provided is a carrying member provided with a cleaning function having the cleaning member and a method of cleaning a substrate processing equipment with the use of the cleaning member or the carrying member provided with a cleaning function. The cleaning member includes a layer member having a plurality of protrusions of a columnar structure on a surface, in which each of the protrusions of a columnar structure has a carbon-based nanostructure. | 07-08-2010 |
20100175716 | Cleaning Member, Delivery Member with Cleaning Function, and Method of Cleaning Substrate Processing Apparatus - Provided is a cleaning member, which is capable of removing minute foreign matter, preferably foreign matter of a submicron level simply, exactly, and sufficiently, without contaminating a cleaning site. Further provided is a delivery member with a cleaning function having the cleaning member and a method of cleaning a substrate processing apparatus using the delivery member with a cleaning function. The cleaning member of the present invention includes a cleaning layer having a plurality of protrusions of a columnar structure on the surface, in which an aspect ratio of the protrusions of a columnar structure is 5 or more. | 07-15-2010 |
20100203323 | PRESSURE-SENSITIVE ADHESIVE TAPE AND METHOD OF PRODUCING THE TAPE - Provided are a pressure-sensitive adhesive tape, which has a needed pressure-sensitive adhesive force for an adherend, can remove even foreign matter at a submicron level without contaminating a cleaning site, is excellent in heat resistance, exerts a sufficient pressure-sensitive adhesive force and a sufficient cohesive force even at a high temperature, and can be easily peeled without generating any adhesive residue on the adherend upon peeling from the adherend after its use, and a method of producing the tape. The pressure-sensitive adhesive tape of the present invention includes, on a surface of a support, an assembly layer of oblique columnar structures each protruding at an elevation angle of less than 90° from the surface of the support, the oblique columnar structures each having an aspect ratio of 1 or more. The method of producing a pressure-sensitive adhesive tape of the present invention is a method of producing, on a surface of a support, a pressure-sensitive adhesive tape including an assembly layer of oblique columnar structures each protruding at an elevation angle of less than 90° from the surface of the support, the oblique columnar structures each having an aspect ratio of 1 or more, the method including forming the oblique columnar structures on the surface of the support by an oblique deposition process. | 08-12-2010 |
20100319151 | CLEANING SHEET, CONVEYING MEMBER USING THE SAME, AND SUBSTRATE PROCESSING EQUIPMENT CLEANING METHOD USING THEM - A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm | 12-23-2010 |
20100323151 | Pressure-Sensitive Adhesive Tape - Disclosed is a pressure-sensitive adhesive tape which has a sufficient pressure-sensitive adhesive strength for an adherend, is excellent in heat resistance, and can be easily peeled without leaving a pressure-sensitive adhesive residue on the adherend particularly upon peeling. The pressure-sensitive adhesive tape includes, on a base material sheet, a pressure-sensitive adhesive layer containing a pressure-sensitive adhesive composition and a lipophilic layered clay mineral dispersed in the pressure-sensitive adhesive composition, in which pieces of the layered clay mineral are arranged substantially perpendicular to the base material sheet. | 12-23-2010 |
20100323191 | Pressure-Sensitive Adhesive Tape - A pressure-sensitive adhesive tape, which has a pressure-sensitive adhesive layer with its storage modulus controlled within an adequate range, and which suitably prevents resin leakage during a sealing step in the production of a semiconductor device using a metal lead frame. The pressure-sensitive adhesive tape includes, on a base sheet, a pressure-sensitive adhesive layer containing a silicone-based pressure-sensitive adhesive composition and a lipophilic layered clay mineral dispersed in the silicone-based pressure-sensitive adhesive composition. | 12-23-2010 |
20110014432 | HYDROPHILIC SHEET AND METHOD OF IMPARTING ULTRAHIGH HYDROPHILICITY TO SURFACE OF BASE MATERIAL - Provided is a hydrophilic sheet which has high wettability by water, from which an adherent fouling substance or adherent foreign matter can be easily removed by washing with water, and which can be prevented from fogging due to water-drop adhesion. Also provided is a method of imparting high wettability by water to the surface of any appropriate base material. A hydrophilic sheet of the present invention includes, on a surface of a support, an assembly layer of oblique columnar structures each protruding at an elevation angle from the surface of less than 90°, and the surface of the assembly layer has a water contact angle of 10° or less. In addition, a method of imparting ultrahigh hydrophilicity to a surface of a base material the present invention is a method of imparting ultrahigh hydrophilicity to the surface of the base material, the method including forming, on the surface of the base material, an assembly layer of oblique columnar structures each protruding at an elevation angle from the surface of less than 90° by an oblique deposition process. | 01-20-2011 |
20110229675 | LABEL SHEET FOR CLEANING AND CONVEYING MEMBER HAVING CLEANING FUNCTION - A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer. | 09-22-2011 |
20110229697 | LABEL SHEET FOR CLEANING AND CONVEYING MEMBER HAVING CLEANING FUNCTION - A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer. | 09-22-2011 |
20120219838 | THERMALLY CONDUCTIVE MEMBER AND BATTERY PACK DEVICE USING SAME - An object is to, in a battery pack device in which battery cells are lined up, provide a thermally conductive member that can reduce the risk of heat being conducted to an adjacent battery cell in order to make the cooling property of each battery cell uniform, and a battery pack device using this thermally conductive member. Provided is a thermally conductive member arranged between battery cells when assembling the battery cells into a battery pack, wherein the thermally conductive member includes thermally conductive layers each having a thermal conductivity of 0.5 W/mK or more provided respectively on both sides of a backing layer having a thermal conductivity of less than 0.5 W/mK. Especially, it is preferred that a resin member forming the backing layer has a flexural modulus of 1 GPa or more. | 08-30-2012 |
20120301716 | THERMALLY-CONDUCTIVE DOUBLE-SIDED ADHESIVE SHEET - Provided is a thermally-conductive double-sided adhesive sheet capable of improving the workability when adherends are bonded to or detached from each other. The thermally-conductive double-sided adhesive sheet includes an adhesive agent layer formed of a thermally-conductive adhesive agent composition formed into a sheet, which composition including a thermally-conductive material and an acrylic polymer component, wherein a strong adhesive agent layer forming one side and a weak adhesive agent layer forming the other side of the thermally-conductive double-sided adhesive sheet are laminated in such a way that the adhesive force of the one side of the thermally-conductive double-sided adhesive sheet to an adherend is stronger than the adhesive force of the other side of the thermally-conductive double-sided adhesive sheet to the adherend. | 11-29-2012 |
20120309879 | METHOD FOR PRODUCING THERMALLY-CONDUCTIVE ADHESIVE SHEET - Provided is a method for producing a thermally-conductive adhesive sheet including a thermally-conductive adhesive agent layer by performing: a composition preparation step of preparing a thermally-conductive adhesive agent composition including a thermally-conductive particle and an acrylic polymer component; and an adhesive agent layer formation step of forming a sheet-shaped thermally-conductive adhesive agent layer with the thermally-conductive adhesive agent composition, wherein in the composition preparation step, a cyclic organic compound of 8 or less carbon atoms, or an organic compound of 3 or less carbon atoms having a hydroxy, ketone, aldehyde, carboxyl or nitrile group is mixed as a constitutional component of the thermally-conductive adhesive agent composition. | 12-06-2012 |
20130041093 | THERMALLY CONDUCTIVE ADHESIVE SHEET - An object is to provide a thermally conductive adhesive sheet capable of making a heat generating body and a heat radiating body adhere to each other easily and with a sufficient adhesive force. Provided is a thermally conductive adhesive sheet including an adhesive agent layer formed by molding a thermally conductive adhesive agent composition including an acrylic polymer component into a sheet-like shape, wherein the adhesive force at the time of 180° peeling is 1 N/20 mm or more and the contact thermal resistance is 0.6 cm | 02-14-2013 |
20130078406 | SHEET PRODUCT - A sheet product including a sheet-shaped pressure-sensitive adhesive sheet having pressure-sensitive adhesiveness; a base separator disposed on one surface side of the sheet so as to be peelable from the sheet, and supporting the sheet and serving as a base; and a protective separator disposed on the other surface side of the sheet so as to be peelable from the sheet, wherein the peel force between the sheet and the base separator is smaller than the peel force between the sheet and the protective separator; and a cut is given to the sheet and the protective separator in the direction of the thickness of the sheet such that the sheet and the protective separator can be peeled from the base separator as a separate piece in the state where the sheet and the protective separator are layered. | 03-28-2013 |