Patent application number | Description | Published |
20090093908 | Target Position detection apparatus for robot - A target position detection apparatus for a robot includes: a robot including an arm configured to be freely moved in at least two directions of X and Y axes, the arm having a wrist axis provided at a distal end of the arm and configured to be freely moved in a horizontal direction, and the wrist axis being provided with an end effector; and a control unit adapted for driving a memory to store a teaching point therein and controlling an operation of the robot such that the end effector will be moved toward the teaching point stored in the memory. The control unit is further adapted for changing a pressing force of the end effector against a target by changing a control loop gain, and bringing the end effector into contact with the target, while setting the control loop gain of the wrist axis lower than a predetermined value at least from a position adjacent to the teaching point at which the target is located, so as to capture a position in a state in which the end effector is in contact with the target, thereby detecting the position of the target. | 04-09-2009 |
20100290886 | Robot having end effector and method of operating the same - The present invention relates to an end effector including: blade members for holding substrates, each configured to hold the substrate, and configured such that each interval between the blade members can be changed; a blade support unit configured to support the blade members, the blade support unit being configured to be driven integrally with the blade members by the robot; and blade drive means configured to change the interval between the blade members by moving at least one of the blade members relative to another blade member. | 11-18-2010 |
20110054683 | ARTICLE CARRIER ROBOT - An article carrier robot includes: a horizontal base; a horizontally movable unit supported by the horizontal base so as to be movable in a horizontal direction; a robot main body supported by the horizontally movable unit; at least one of wiring and piping introduced into the robot main body from the horizontal base; and a restriction unit supported by the horizontally movable unit so as to be swayable about a pivot provided to the horizontally movable unit. The restriction unit is configured to restrict deformation of a part of the at least one of wiring and piping. | 03-03-2011 |
20110118873 | ROBOT AND INSTRUCTION METHOD THEREOF - A robot arm having a distal end to which a wrist axis is rotatably provided; arm drive unit, each configured to move the robot arm; a wrist axis drive unit configured to rotate the wrist axis; and a robot control unit configured to control the arm drive unit and wrist axis drive unit. The robot control unit is configured to control the arm drive unit to move the distal end of the robot arm to bring a contact member attached to the wrist axis into contact with an instruction target, thereby detecting a posture of the robot arm and an angular position of the wrist axis when the wrist axis begins to be angularly displaced due to the contact between the contact member and the instruction target, thus determining a position of an instruction point. | 05-19-2011 |
20110123300 | METHOD OF ASSEMBLING SUBSTRATE TRANSFER DEVICE AND TRANSFER SYSTEM UNIT FOR THE SAME - An assembly method of assembling a substrate transfer device including: a transfer system unit forming step of fixing a robot and a substrate container retainer to a divided body which composes a part of the substrate transfer device and is formed separably on a main structural body as a residual part of the substrate transfer device, thereby forming a transfer system unit; an operation examination step of examining whether the robot fixed to the transfer system unit can operate as a part of the substrate transfer device or not; and a mounting step of mounting the transfer system unit on the main structural body of the substrate transfer device after the operation examination step. | 05-26-2011 |
20110166704 | MONITORING APPARATUS FOR ROBOT - The invention is a monitoring apparatus for monitoring a condition of an end-effector of a robot having a vacuum absorption pad to hold an article. The pad is elastically supported by the end-effector. The apparatus includes a pad receiving part having a front surface and a through hole, the pad receiving part being movable in a direction perpendicular to the front surface; an elastically supporting unit for elastically supporting the pad receiving part in a direction perpendicular to the front surface; a movement detection unit for detecting a movement of the pad receiving part; a vacuum sensor connected to the through hole; and a judging unit for judging conditions of an elastic support of the pad and a vacuum absorption of the pad based on detection results of the movement detection unit and the vacuum sensor. | 07-07-2011 |
20110182702 | SUBSTRATE TRANSFER ROBOT AND SUBSTRATE TRANSFER SYSTEM - A robot that includes an end effector for holding a substrate in a substantially horizontal state; a vertical driving unit for driving the end effector to move in a vertical direction; a horizontal driving unit for driving the vertical driving unit to move in a horizontal direction; and a rotation driving unit for rotating the horizontal driving unit about a rotation axis extending in the vertical direction. In this case, one end of the end effector is connected with the vertical driving unit. One end of the vertical driving unit is connected with the horizontal driving unit. | 07-28-2011 |
20110187140 | EDGE GRIP DEVICE AND ROBOT INCLUDING THE SAME - A chuck hand | 08-04-2011 |
20110218663 | PRE-ALIGNER APPARATUS - The apparatus includes a rotary mechanism for holding a semiconductor wafer and rotating the same, a detection mechanism for detecting a positioning cutout portion formed in the wafer, and a wafer transfer mechanism for lifting the wafer from a wafer mounting portion of the rotary mechanism or mounting the wafer on the same. The wafer transfer mechanism has a movable holding portion for holding the wafer at a position just above the wafer mounting portion and is constituted such that the movable holding portion moves up or down while avoiding the wafer held by the rotary mechanism. | 09-08-2011 |
20110313571 | ROBOT SYSTEM - The present invention provides a robot system including a robot having a plurality of move axes and a safeguard apparatus provided independently of a control system of the robot and adapted for limiting a movable range of the robot. The safeguard apparatus includes at least two individual-axis-detection external sensors configured to be respectively turned ON/OFF in response to a rotational position or a transfer position of respective at least two move axes among the plurality of move axes of the robot, and an apparatus body configured to limit a move of the robot based on a combination of ON/OFF conditions of at least two output signals obtained from the at least two individual-axis-detection external sensors. | 12-22-2011 |
20130156531 | PLATE-SHAPED MEMBER STORAGE RACK, PLATE-SHAPED MEMBER TRANSFER FACILITY, AND PLATE-SHAPED MEMBER STORING METHOD - A rack includes: a rack main body including a storage space configured to store a plurality of plate-shaped members and a carry-in opening; a plurality of upper supporting portions configured to respectively support upper edge portions of the plurality of plate-shaped members; lower supporting portions respectively provided under the plurality of upper supporting portions and configured to respectively support lower edge portions of the plurality of standing plate-shaped members; and lower edge portion storage portions provided to be each located at an outer side of an end of the upper supporting portion and an end of the lower supporting portion in the arrangement direction and configured to store the lower edge portions of the plate-shaped members, and at least one of the upper supporting portions is configured to be able to support the upper edge portion of the plate-shaped member. | 06-20-2013 |
20130202393 | PLATE-SHAPED MEMBER TRANSFER FACILITY - A stocker facility includes a rack configured to store glass plates in a standing state such that the glass plates are arranged in a front-rear direction and a stocker configured to cause the glass plate to move in a left-right direction to transfer the glass plate to and from the rack. Thus, the present invention provides a plate-shaped member transfer facility capable of carrying the plate-shaped member in between two spaced-apart plate-shaped members between which a storage pitch is short and carrying any one of a plurality of plate-shaped members out from the rack without inserting an end effect in a substrate storage portion of the rack. | 08-08-2013 |
20130202394 | PLATE-SHAPED MEMBER TRANSFER FACILITY - Provided is a plate-shaped member transfer facility capable of inserting a plate-shaped member in a raised state into a rack and retrieving the plate-shaped member in the raised state from the rack. A stocker facility includes: a rack configured to store glass plates such that the stored glass plates are arranged in a front-rear direction in a raised state; and a track robot configured to transfer the glass plates between the track robot and the rack by moving the glass plates to the left and right. The track robot includes a track-side running base, a flip, a track-side conveyance base, and rollers. | 08-08-2013 |
20140210224 | END EFFECTOR DEVICE AND SUBSTRATE CONVEYING ROBOT INCLUDING END EFFECTOR DEVICE - An end effector device attached to a tip end portion of a robot arm includes a plurality of support units provided on a blade. Each of the support units includes: a plurality of nail pieces configured to support peripheral portions of a plurality of semiconductor wafers such that the semiconductor wafers are parallel to one another and spaced apart from one another; and a pitch changing mechanism configured to change upper-lower intervals of the nail pieces. The pitch changing mechanism includes: a coil spring configured to support the plurality of nail pieces such that the plurality of nail pieces are spaced apart from one another in an upper-lower direction and elastically deform in the upper-lower direction; and an operating mechanism configured to cause the coil spring to elastically deform in the upper-lower direction. The operating mechanism includes a piston pin fitted in the coil spring to move up and down. | 07-31-2014 |
20150016935 | SUBSTRATE RETAINING DEVICE - Included are: a support mechanism configured to change a pitch at which a plurality of substrate retaining units are arranged; urging mechanisms provided for the respective substrate retaining units and configured to urge the movable units to cause movable retaining members to press-hold substrates; and a push back mechanism configured to release the press-holding of the substrates by the movable retaining members. It is configured to position a push back portion of the push back mechanism at a standby position, at which the push back portion makes no contact with the movable units. | 01-15-2015 |