Patent application number | Description | Published |
20100289085 | Asymmetric Semiconductor Devices and Method of Fabricating - A semiconductor structure is provided that includes an asymmetric gate stack located on a surface of high k gate dielectric. The asymmetric gate stack includes a first portion and a second portion, wherein the first portion has a different threshold voltage than the second portion. The first portion of the inventive asymmetric gate stack includes, from bottom to top, a threshold voltage adjusting material and at least a first conductive spacer, while the second portion of the inventive asymmetric gate stack includes at least a second conductive spacer over the gate dielectric. In some embodiments, the second conductive spacer is in direct contact with the underlying high k gate dielectric, while in other embodiments, in which the first and second conductive spacers are comprised of different conductive materials, the base of the second conductive spacer is in direct contact with the threshold adjusting material. | 11-18-2010 |
20110082680 | COMPACT MODEL FOR DEVICE/CIRCUIT/CHIP LEAKAGE CURRENT (IDDQ) CALCULATION INCLUDING PROCESS INDUCED UPLIFT FACTORS - A system, method and computer program product for implementing a quiescent current leakage specific model into semiconductor device design and circuit design flows. The leakage model covers all device geometries with wide temperature and voltage ranges and, without the need for stacking factor calculations nor spread sheet based IDDQ calculations. The leakage model for IDDQ calculation incorporates further parasitic and proximity effects. The leakage model implements leakage calculations at different levels of testing, e.g., from a single device to a full chip design, and are integrated within one single model. The leakage model implements leakage calculations at different levels of testing with the leverage of a single switch setting. The implementation is via a hardware definition language code or object oriented code that can be compiled and operated using a netlist of interest, e.g., for conducting a performance analysis. | 04-07-2011 |
20110163385 | ASYMMETRIC FET INCLUDING SLOPED THRESHOLD VOLTAGE ADJUSTING MATERIAL LAYER AND METHOD OF FABRICATING SAME - A semiconductor structure is provided that includes at least one asymmetric gate stack located on a surface of a semiconductor structure. The at least one asymmetric gate stack includes, from bottom to top, a high k gate dielectric, a sloped threshold voltage adjusting material layer and a gate conductor. A method of forming such a semiconductor structure is also provided in which a line of sight deposition process is used in forming the sloped threshold voltage adjusting material layer in which the deposition is tilted within respect to a horizontal surface of a semiconductor structure. | 07-07-2011 |
20120171831 | ASYMMETRIC FET INCLUDING SLOPED THRESHOLD VOLTAGE ADJUSTING MATERIAL LAYER AND METHOD OF FABRICATING SAME - A method of forming a semiconductor structure is provided. The method includes providing a structure including at least one dummy gate region located on a surface of a semiconductor substrate and a dielectric material layer located on sidewalls of the at least one dummy gate region. Next, a portion of the dummy gate region is removed exposing an underlying high k gate dielectric. A sloped threshold voltage adjusting material layer is then formed on an upper surface of the high k gate dielectric, and thereafter a gate conductor is formed atop the sloped threshold voltage adjusting material layer. | 07-05-2012 |
20130168673 | Intra Die Variation Monitor Using Through-Silicon Via - An apparatus comprising connecting IDVMON monitors with through silicon vias (TSV) to allow the monitors to be connected to probe pads located on the backside of the wafer. Because the backside of the wafer have significantly more space than the front side, the probe pads for IDVMON can be accommodated without sacrificing the silicon area. | 07-04-2013 |
Patent application number | Description | Published |
20090256211 | METAL GATE COMPATIBLE FLASH MEMORY GATE STACK - A first gate stack comprising two stacked gate electrodes in a first device region, a second gate stack comprising a metal gate electrode in a second device region, and a third gate stack comprising a semiconductor gate electrode in a third device region are formed by forming and removing portions of a silicon-oxide based gate dielectric layer, a first doped semiconductor layer, an interfacial dielectric layer, a high-k gate dielectric layer, a metal gate layer, and an optional semiconductor material layer in various device regions. The first gate stack may be employed to form a flash memory, and the second and third gate stacks may be employed to form a pair of p-type and n-type field effect transistors. | 10-15-2009 |
20100032732 | ELECTRICAL ANTIFUSE HAVING A MULTI-THICKNESS DIELECTRIC LAYER - An electrical antifuse comprising a field effect transistor includes a gate dielectric having two gate dielectric portions. Upon application of electric field across the gate dielectric, the magnitude of the electrical field is locally enhanced at the boundary between the thick and thin gate dielectric portions due to the geometry, thereby allowing programming of the electrical antifuse at a lower supply voltage between the two electrodes, i.e., the body and the gate electrode of the transistor, across the gate dielectric. | 02-11-2010 |
20100118611 | DELAYED ACTIVATION OF SELECTED WORDLINES IN MEMORY - Apparatus, systems, and methods may operate to receive an external read command at a control circuit coupled to a memory array. Individual wordline activation may be delayed according to a delay period determined by a read level voltage magnitude associated with a plurality of memory cells included in the array. | 05-13-2010 |
20100135084 | WORDLINE VOLTAGE TRANSFER APPARATUS, SYSTEMS, AND METHODS - The apparatus and systems described herein may comprise a plurality of memory cells coupled to a local wordline, and a wordline drive circuit that includes a regulator coupled to a plurality of pass transistors and a string driver. The regulator may comprise a regulator transistor having a threshold voltage that is substantially the same as the threshold voltage of the string driver during memory cell program operations. In some embodiments, the regulator may comprise a cascode-connected pair of transistors. Methods of manufacturing and operating the apparatus and systems are also described. | 06-03-2010 |
20100276753 | Threshold Voltage Adjustment Through Gate Dielectric Stack Modification - Multiple types of gate stacks are formed on a doped semiconductor well. A high dielectric constant (high-k) gate dielectric is formed on the doped semiconductor well. A metal gate layer is formed in one device area, while the high-k gate dielectric is exposed in other device areas. Threshold voltage adjustment oxide layers having different thicknesses are formed in the other device areas. A conductive gate material layer is then formed over the threshold voltage adjustment oxide layers. One type of field effect transistors includes a gate dielectric including a high-k gate dielectric portion. Other types of field effect transistors include a gate dielectric including a high-k gate dielectric portion and a first threshold voltage adjustment oxide portions having different thicknesses. Field effect transistors having different threshold voltages are provided by employing different gate dielectric stacks and doped semiconductor wells having the same dopant concentration. | 11-04-2010 |
20100296348 | ERASE OPERATION CONTROL SEQUENCING APPARATUS, SYSTEMS, AND METHODS - Apparatus, systems, and methods may operate to receive an external erase command at a control circuit coupled to an erasable memory array located on a substrate. A global select gate voltage may thereafter be enabled for application to wordline transistors coupled to the erasable memory array after a voltage applied to the substrate has reached a preselected initiation voltage level between about zero volts and an ultimate erase voltage. | 11-25-2010 |
20110215321 | POLYSILICON RESISTOR AND E-FUSE FOR INTEGRATION WITH METAL GATE AND HIGH-K DIELECTRIC - A method is provided for making a resistive polycrystalline semiconductor device, e.g., a poly resistor of a microelectronic element such as a semiconductor integrated circuit. The method can include: (a) forming a layered stack including a dielectric layer contacting a surface of a monocrystalline semiconductor region of a substrate, a metal gate layer overlying the dielectric layer, a first polycrystalline semiconductor region adjacent the metal gate layer having a predominant dopant type of either n or p, and a second polycrystalline semiconductor region spaced from the metal gate layer by the first polycrystalline semiconductor region and adjoining the first polycrystalline semiconductor region; and (b) forming first and second contacts in conductive communication with the second polycrystalline semiconductor region, the first and second contacts being spaced apart so as to achieve a desired resistance. In a variation thereof, an electrical fuse is formed which includes a continuous silicide region through which a current can be passed to blow the fuse. Some of the steps of fabricating the poly resistor or the electrical fuse can be employed simultaneously in fabricating metal gate field effect transistors (FETs) on the same substrate. | 09-08-2011 |
20120108017 | THRESHOLD VOLTAGE ADJUSTMENT THROUGH GATE DIELECTRIC STACK MODIFICATION - Multiple types of gate stacks are formed on a doped semiconductor well. A high dielectric constant (high-k) gate dielectric is formed on the doped semiconductor well. A metal gate layer is formed in one device area, while the high-k gate dielectric is exposed in other device areas. Threshold voltage adjustment oxide layers having different thicknesses are formed in the other device areas. A conductive gate material layer is then formed over the threshold voltage adjustment oxide layers. One type of field effect transistors includes a gate dielectric including a high-k gate dielectric portion. Other types of field effect transistors include a gate dielectric including a high-k gate dielectric portion and a first threshold voltage adjustment oxide portions having different thicknesses. Field effect transistors having different threshold voltages are provided by employing different gate dielectric stacks and doped semiconductor wells having the same dopant concentration. | 05-03-2012 |
20120218825 | WORDLINE VOLTAGE TRANSFER APPARATUS, SYSTEMS, AND METHODS - The apparatus and systems described herein may comprise a plurality of memory cells coupled to a local wordline, and a wordline drive circuit that includes a regulator coupled to a plurality of pass transistors and a string driver. The regulator may comprise a regulator transistor having a threshold voltage that is substantially the same as the threshold voltage of the string driver during memory cell program operations. In some embodiments, the regulator may comprise a cascode-connected pair of transistors. Methods of manufacturing and operating the apparatus and systems are also described. | 08-30-2012 |
20120320685 | ERASE OPERATION CONTROL SEQUENCING APPARATUS, SYSTEMS, AND METHODS - Apparatus, systems, and methods may operate to receive an external erase command at a control circuit coupled to an erasable memory array located on a substrate. A global select gate voltage may thereafter be enabled for application to wordline transistors coupled to the erasable memory array after a voltage applied to the substrate has reached a preselected initiation voltage level between about zero volts and an ultimate erase voltage. | 12-20-2012 |
20130087832 | Tucked Active Region Without Dummy Poly For Performance Boost and Variation Reduction - In one embodiment, a semiconductor device is provided that includes a semiconductor substrate including an active region and at least one trench isolation region at a perimeter of the active region, and a functional gate structure present on a portion of the active region of the semiconductor substrate. Embedded semiconductor regions are present in the active region of the semiconductor substrate on opposing sides of the portion of the active region that the functional gate structure is present on. A portion of the active region of the semiconductor substrate separates the outermost edge of the embedded semiconductor regions from the at least one isolation region. Methods of forming the aforementioned device are also provided. | 04-11-2013 |
20130099281 | POST-GATE SHALLOW TRENCH ISOLATION STRUCTURE FORMATION - Doped wells, gate stacks, and embedded source and drain regions are formed on, or in, a semiconductor substrate, followed by formation of shallow trenches in the semiconductor substrate. The shallow trenches can be formed by forming a planarized material layer over the doped wells, the gate stacks, and the embedded source and drain regions; patterning the planarized material layer; and transferring the pattern in the planarized material layer into the gate stacks, embedded source and drain regions, and the doped wells. The shallow trenches are filled with a dielectric material to form shallow trench isolation structures. Alternately, the shallow trenches can be formed by applying a photoresist over the doped wells, the gate stacks, and the embedded source and drain regions, and subsequently etching exposed portions of the underlying structures. After removal of the photoresist, shallow trench isolation structures can be formed by filling the shallow trenches. | 04-25-2013 |
20130126976 | SELECTIVE PARTIAL GATE STACK FOR IMPROVED DEVICE ISOLATION - A complementary metal oxide semiconductor (CMOS) device that may include a substrate having a first active region and a second active region that are separated from one another by an isolation region. An n-type semiconductor device is present on the first active region that includes a first gate structure having a first gate dielectric layer and an n-type work function metal layer, wherein the n-type work function layer does not extend onto the isolation region. A p-type semiconductor device is present on the second active region that includes a second gate structure having a second gate dielectric layer and a p-type work function metal layer, wherein the p-type work function layer does not extend onto the isolation region. A connecting gate structure extends across the isolation region into direct contact with the first gate structure and the second gate structure. | 05-23-2013 |
20130168695 | CMOS HAVING A SIC/SIGE ALLOY STACK - A delta doping of silicon by carbon is provided on silicon surfaces by depositing a silicon carbon alloy layer on silicon surfaces, which can be horizontal surfaces of a bulk silicon substrate, horizontal surfaces of a top silicon layer of a semiconductor-on-insulator substrate, or vertical surfaces of silicon fins. A p-type field effect transistor (PFET) region and an n-type field effect transistor (NFET) region can be differentiated by selectively depositing a silicon germanium alloy layer in the PFET region, and not in the NFET region. The silicon germanium alloy layer in the PFET region can overlie or underlie a silicon carbon alloy layer. A common material stack can be employed for gate dielectrics and gate electrodes for a PFET and an NFET. Each channel of the PFET and the NFET includes a silicon carbon alloy layer, and is differentiated by the presence or absence of a silicon germanium layer. | 07-04-2013 |
20130168776 | Complementary Metal Oxide Semiconductor (CMOS) Device Having Gate Structures Connected By A Metal Gate Conductor - A complementary metal oxide semiconductor (CMOS) device including a substrate including a first active region and a second active region, wherein each of the first active region and second active region of the substrate are separated by from one another by an isolation region. A n-type semiconductor device is present on the first active region of the substrate, in which the n-type semiconductor device includes a first portion of a gate structure. A p-type semiconductor device is present on the second active region of the substrate, in which the p-type semiconductor device includes a second portion of the gate structure. A connecting gate portion provides electrical connectivity between the first portion of the gate structure and the second portion of the gate structure. Electrical contact to the connecting gate portion is over the isolation region, and is not over the first active region and/or the second active region. | 07-04-2013 |
20130273699 | MOS HAVING A SIC/SIGE ALLOY STACK - A delta doping of silicon by carbon is provided on silicon surfaces by depositing a silicon carbon alloy layer on silicon surfaces, which can be horizontal surfaces of a bulk silicon substrate, horizontal surfaces of a top silicon layer of a semiconductor-on-insulator substrate, or vertical surfaces of silicon fins. A p-type field effect transistor (PFET) region and an n-type field effect transistor (NFET) region can be differentiated by selectively depositing a silicon germanium alloy layer in the PFET region, and not in the NFET region. The silicon germanium alloy layer in the PFET region can overlie or underlie a silicon carbon alloy layer. A common material stack can be employed for gate dielectrics and gate electrodes for a PFET and an NFET. Each channel of the PFET and the NFET includes a silicon carbon alloy layer, and is differentiated by the presence or absence of a silicon germanium layer. | 10-17-2013 |
20140191295 | DUMMY GATE INTERCONNECT FOR SEMICONDUCTOR DEVICE - A method of forming a semiconductor device comprising a dummy gate interconnect includes forming a dummy gate on a substrate, the dummy gate comprising a dummy gate metal layer located on the substrate, and a dummy gate polysilicon layer located on the dummy gate metal layer; forming an active gate on the substrate, the active gate comprising an active gate metal layer located on the substrate, and an active gate polysilicon layer located on the active gate metal layer; and etching the dummy gate polysilicon layer to remove at least a portion of the dummy gate polysilicon layer to form the dummy gate interconnect, wherein the active gate polysilicon layer is not etched during the etching of the dummy gate polysilicon layer. | 07-10-2014 |
Patent application number | Description | Published |
20140070274 | POST-GATE SHALLOW TRENCH ISOLATION STRUCTURE FORMATION - Doped wells, gate stacks, and embedded source and drain regions are formed on, or in, a semiconductor substrate, followed by formation of shallow trenches in the semiconductor substrate. The shallow trenches can be formed by forming a planarized material layer over the doped wells, the gate stacks, and the embedded source and drain regions; patterning the planarized material layer; and transferring the pattern in the planarized material layer into the gate stacks, embedded source and drain regions, and the doped wells. The shallow trenches are filled with a dielectric material to form shallow trench isolation structures. Alternately, the shallow trenches can be formed by applying a photoresist over the doped wells, the gate stacks, and the embedded source and drain regions, and subsequently etching exposed portions of the underlying structures. After removal of the photoresist, shallow trench isolation structures can be formed by filling the shallow trenches. | 03-13-2014 |
20140123097 | COMPACT MODEL FOR DEVICE/CIRCUIT/CHIP LEAKAGE CURRENT (IDDQ) CALCULATION INCLUDING PROCESS INDUCED UPLIFT FACTORS - A system, method and computer program product for implementing a quiescent current leakage specific model into semiconductor device design and circuit design flows. The leakage model covers all device geometries with wide temperature and voltage ranges and, without the need for stacking factor calculations nor spread sheet based IDDQ calculations. The leakage model for IDDQ calculation incorporates further parasitic and proximity effects. The leakage model implements leakage calculations at different levels of testing, e.g., from a single device to a full chip design, and are integrated within one single model. The leakage model implements leakage calculations at different levels of testing with the leverage of a single switch setting. The implementation is via a hardware definition language code or object oriented code that can be compiled and operated using a netlist of interest, e.g., for conducting a performance analysis. | 05-01-2014 |
20140349451 | COMPLEMENTARY METAL OXIDE SEMICONDUCTOR (CMOS) DEVICE HAVING GATE STRUCTURES CONNECTED BY A METAL GATE CONDUCTOR - A complementary metal oxide semiconductor (CMOS) device including a substrate including a first active region and a second active region, wherein each of the first active region and second active region of the substrate are separated by from one another by an isolation region. A n-type semiconductor device is present on the first active region of the substrate, in which the n-type semiconductor device includes a first portion of a gate structure. A p-type semiconductor device is present on the second active region of the substrate, in which the p-type semiconductor device includes a second portion of the gate structure. A connecting gate portion provides electrical connectivity between the first portion of the gate structure and the second portion of the gate structure. Electrical contact to the connecting gate portion is over the isolation region, and is not over the first active region and/or the second active region. | 11-27-2014 |
20150279692 | SEMICONDUCTOR PROCESS TEMPERATURE OPTIMIZATION - A method including forming a structure including a plurality of semiconductor devices surrounded by a dielectric layer such that a top surface of the dielectric layer is substantially flush with a top surface of the plurality of semiconductor devices, depositing a thermal optimization layer above the structure, patterning the thermal optimization layer such that a portion of the thermal optimization layer is removed from a above first region of the structure and another portion of the thermal optimization layer remains above a second region of the structure, the first region having a different thermal conductivity than the second region, and heating the structure, the patterned thermal optimization layer causing substantially uniform thermal absorption of the structure. | 10-01-2015 |
20150349089 | TUCKED ACTIVE REGION WITHOUT DUMMY POLY FOR PERFORMANCE BOOST AND VARIATION REDUCTION - In one embodiment, a semiconductor device is provided that includes a semiconductor substrate including an active region and at least one trench isolation region at a perimeter of the active region, and a functional gate structure present on a portion of the active region of the semiconductor substrate. Embedded semiconductor regions are present in the active region of the semiconductor substrate on opposing sides of the portion of the active region that the functional gate structure is present on. A portion of the active region of the semiconductor substrate separates the outermost edge of the embedded semiconductor regions from the at least one isolation region. Methods of forming the aforementioned device are also provided. | 12-03-2015 |
Patent application number | Description | Published |
20150221712 | TILED OLED DISPLAY AND MANUFACTURING METHOD THEREOF - The present invention is applicable to the field of display technologies and provides a tiled OLED display, and the tiled OLED display includes an OLED front panel and a single-structure TFT driving backplane, where a protection substrate is disposed on a light-emitting side of the OLED front panel; the OLED front panel includes multiple OLED front panel units that are tiled to each other; and the OLED front panel unit is joined to the TFT driving backplane by using conductive film. In the present invention, by tiling the OLED front panel on the TFT backplane, production efficiency and a yield rate of the display are improved, thereby reducing a cost. By tiling the OLED front panel, a tiling gap is narrowed, thereby implementing seamless tiling. Compared with a traditional structure that uses an optical lens to eliminate a tiling gap, the yield rate of the tiled display is improved. By joining the OLED front panel to the TFT driving backplane by using the conductive film, a display aperture ratio is improved, and a problem that it is difficult to control alignment precision and stability is poor is overcome. | 08-06-2015 |
20150270290 | METAL OXIDE TFT DEVICE AND METHOD FOR MANUFACTURING THE SAME - A method for manufacturing a metal oxide TFT device is provided. The method includes: selecting a substrate and forming a gate electrode on a first side of the substrate; sequentially depositing an insulating layer, a semiconductor layer, and a photoresist layer on the gate electrode; using the gate electrode as a photomask, exposing from a second side of the substrate and reserving the photoresist layer aligning to the gate electrode; depositing an electrode layer on the semiconductor layer and the reserved photoresist layer; stripping the reserved photoresist layer and lifting off the electrode layer stacked on the reserved photoresist layer; etching a part of the reserved electrode layer and the semiconductor layer, and forming a source electrode, a drain electrode, and a semiconductor island. The method realizes a self-alignment using the gate electrode as the photomask when forming the source, drain electrodes and the channel. Therefore, the manufacturing processes become simple and more accurate. | 09-24-2015 |
20150295015 | DOUBLE-SIDED DISPLAY AND METHOD OF MANUFACTURING SAME - A double-sided display and a method of manufacturing the double-side display are provided. The double-sided display includes a substrate having a plurality of holes penetrating through the substrate, a TFT driving circuit, a front-side light-emitting structure, a back-side light-emitting structure, and a plurality of driving electrodes. The front-side and the back-side light-emitting structures are respectively disposed on two opposite sides of the substrate. The TFT driving circuit is disposed on one of the two opposite sides, and the driving electrodes are disposed on the other one of the two opposite sides. The TFT driving circuit is configured to drive one of the front-side and back-side light-emitting structures to display images, and is further configured to drive the other one of the front-side and back-side light-emitting structures to display images in cooperation with the driving electrodes connected to the TFT driving circuit via the holes. | 10-15-2015 |
20150295016 | DOUBLE-SIDED DISPLAY AND CONTROL METHOD THEREOF - A double-sided display and a method for controlling the same are provided. The double-sided display includes a plurality of pixel units and a plurality of circuits. The pixel units are disposed on each of a front side and a back side of the double-sided display, and the pixel units on the front side are opposite to the pixel units on the back side in a one-to-one manner. A pixel unit on the front side and a pixel unit on the back side opposite to the pixel unit on the front side are controlled by an identical circuit. Each of the circuits includes a switching transistor. The switching transistor includes a first input terminal connected to a scan line, a second input terminal connected to a data line, and an output terminal connected to the opposite pixel units on the front side and the back side. | 10-15-2015 |
20150303308 | SELF-ALIGNED METAL OXIDE THIN-FILM TRANSISTOR COMPONENT AND MANUFACTURING METHOD THEREOF - The present invention is applicable to the field of electronic component technologies and provides a manufacturing method of a self-aligned metal oxide TFT component, including: selecting a substrate and preparing a gate on the substrate; successively disposing an insulation layer, a transparent electrode layer, and a photoresist on the gate; using the gate as a mask to perform exposure from a back side of the substrate, so as to form a source and a drain that are aligned with the gate; depositing a metal oxide semiconductor layer on the transparent electrode layer; performing etching on the semiconductor layer, the source, and the drain, so that outer ends of the source and the drain are exposed out of the metal oxide semiconductor layer; and depositing a passivation layer and leading out the source and the drain. In the present invention, a transparent conductor is used as the electrode layer, and a bottom gate is used as a mask to perform back exposure, so as to perform etching on the source and the drain, thereby implementing a self-alignment between the source or the drain and the gate, effectively reducing parasitic capacitance, and improving component performance. The component is of a bottom-gate bottom-contact structure, and there is no need to manufacture an etch-stop layer, thereby simplifying a process, reducing use of a photolithographic mask, improving production efficiency, and improving an electrical property of the component. | 10-22-2015 |
20150349098 | A MANUFACTURING METHOD OF A THIN FILM TRANSISTOR AND PIXEL UNIT THEREOF - The present invention provides a method of manufacturing a thin film transistor and a pixel unit thereof, comprising: forming a metal oxide layer, a gate insulating layer, a gate metal layer and an etching barrier layer on a substrate; through the same mask, etching a part of the etching barrier layer, the gate metal layer and the gate insulating layer on the substrate, while retaining: the metal oxide layer, the gate insulating layer, the gate metal layer and the etching barrier layer in a gate region, and the part of the metal oxide layer, the gate insulating layer and the gate metal layer in source and drain regions for forming contact vias; and exposing the remaining metal oxide layer in the source region and in the drain region; depositing a passivation layer, etching and metallizing the exposed oxide in the source and drain regions to form the source and drain contact vias. | 12-03-2015 |
20150382474 | METHOD FOR FABRICATING FLEXIBLE ELECTRONIC DEVICE AND SUBSTRATE FOR FABRICATING THE SAME - The present invention relates to the field of electronic device fabrication, provides a method for fabricating a flexible electronic device, and is intended to address the problems present in the prior art that the adhesive cannot be completely peeled off and the flexible substrate is damaged during peeling the flexible substrate from the rigid substrate in the flexible electronic device fabrication. The fabrication method comprises providing a channel on a rigid substrate; adhering a flexible substrate to the rigid substrate with an adhesive; fabricating an electronic device on the flexible substrate; injecting a chemical substance into the channel; and reacting the chemical substance with the adhesive, and peeling the flexible substrate from the rigid substrate. The present invention also provides a substrate for fabricating a flexible electronic device. In the present invention, a channel is provided on the rigid substrate to enhance the efficiency and speed of the reaction between the chemical substance with the adhesive, so that the flexible substrate can be completely and automatically peeled from the rigid substrate rapidly, and the chemical substance which reacts with the adhesive will not cause a damage to the flexible substrate or the electronic device. | 12-31-2015 |
20160049500 | METHOD FOR MANUFACTURING THIN FILM TRANSISTOR AND PIXEL UNIT THEREOF - The present invention is suitable to the field of electronic technology, and provides a method of manufacturing a thin film transistor and a pixel unit thereof, wherein when the thin film transistor is manufactured, the gate metal layer is used as a mask, and exposed from the back of the substrate to position the channel and the source and drain of the thin film transistor, so that the channel is self-aligned with the gate, and the source and drain are self-aligned with the gate and are symmetrical, and the thin film transistor thus manufactured has a small parasitic capacitance, and the circuit manufactured therewith is fast in operation, and less prone to occurring short circuit or open circuit. In the present invention, the characteristics that the channel is self-aligned with the gate, and the source and drain are self-aligned with the gate and are symmetrical avoid the alignment precision requirement on the mask plate in the production, thus reducing the need for the high precision lithographic apparatus, and reducing the costs and increasing the yield. In addition, the present process is suitable for manufacturing a pixel unit of a thin film transistor, the manufacturing process only requires four mask sets which do not require the critical alignment. As compared with other four mask processes which use the gray tone masks, the present process can increase the yield and reduce the costs. | 02-18-2016 |