Patent application number | Description | Published |
20100003629 | Substrate firing device - A substrate firing device having an increased contact area between the substrate and substrate support portions, thereby preventing the substrate support portions from generating scratches on the substrate when the substrate expands and contracts due to heating and cooling. By increasing the contact area to the substrate and by using quartz on items that contact the substrate, it is possible to prevent scratches occurring on a substrate, even after an etching process of the substrate, thereby improving quality of the slimmer final product. | 01-07-2010 |
20100014807 | LASER BEAM MIXING APPARATUS AND METHOD OF SEALING ORGANIC LIGHT EMITTING DIODE DISPLAY USING THE SAME - A laser beam mixing apparatus to convert a laser beam bundle into a single laser beam having a uniform energy density. The laser beam mixing apparatus includes: a barrel to adjust a distance between a multi-core optical cable and an optical lens included therein, to convert a laser beam bundle into a single beam; and a stage to adjust the position and angle a single-core optical cable with respect to the optical lens, to align the core of the single-core optical cable with the center of the single beam. | 01-21-2010 |
20100188794 | Electrostatic chuck and device of manufacturing organic light emitting diode having the same - The present invention discloses an electrostatic chuck sucking and supporting a substrate with an electrostatic force and an OLED manufacturing apparatus having the same. The electrostatic chuck includes an insulating plate having at least one opening penetrating a center thereof, a pair of electrodes mounted on the insulating plate, a first controller applying a voltage to the pair of electrodes, and an electrostatic charge removing unit disposed near the insulating plate and emitting ions into the at least one opening to remove electrostatic charges distributed around a side of the insulating plate. | 07-29-2010 |
20110079350 | LASER IRRADIATION SYSTEM AND LASER IRRADIATION METHOD - A laser irradiation system includes a laser beam generator to generate laser beams, a laser beam irradiator to radiate the laser beams onto a target, a laser beam guide to detect whether one of the laser beams is reflected back toward the laser beam irradiator, a detector to convert the reflected laser beam into electrical signal data, and a controller to control the output of the laser beam generator, based on the signal data. | 04-07-2011 |
20110080926 | Laser irradiation system - A laser irradiation system includes a laser configured to irradiate light, a laser transfer unit configured to transfer the laser along a target irradiation area, the target irradiation area being divided into a plurality of sections, a laser transfer controller configured to control a speed of the laser in each of the plurality of sections of the target irradiation area, a laser output controller configured to control an output level of the laser in each of the plurality of sections of the target irradiation area, and a main controller configured to control the laser output controller and the laser transfer controller. | 04-07-2011 |
20110083788 | SUBSTRATE BONDING APPARATUS AND SUBSTRATE BONDING METHOD - A substrate bonding apparatus includes a vacuum chamber having a bonding space where a first substrate and a second substrates are bonded together, a first pump for sucking air of the bonding space at a first intensity, a second pump for sucking the air of the bonding space at a second intensity greater than the first intensity, a nitrogen supply for supplying nitrogen to the bonding space, a sensor for sensing the pressure of the bonding space; and a controller for controlling the first pump, the second pump, and the nitrogen supply. | 04-14-2011 |
20110242021 | FLAT PANEL DISPLAY INTEGRATED TOUCH SCREEN PANEL AND FABRICATION METHOD THEREOF - A structure for forming a touch screen panel directly on an upper substrate of a flat panel display device, and more particularly a touch screen panel integrated flat panel display device in which an insulating layer formed on the touch screen panel is implemented by a spin on glass (SOG layer having stable thermal property suitable for high temperature plastic process of a sealing material for encapsulating the upper substrate and a lower substrate of the flat panel display device, and a method of fabricating the same. | 10-06-2011 |
20130319597 | SUBSTRATE BONDING APPARATUS AND SUBSTRATE BONDING METHOD - A substrate bonding apparatus includes a vacuum chamber having a bonding space where a first substrate and a second substrates are bonded together, a first pump for sucking air of the bonding space at a first intensity, a second pump for sucking the air of the bonding space at a second intensity greater than the first intensity, a nitrogen supply for supplying nitrogen to the bonding space, a sensor for sensing the pressure of the bonding space; and a controller for controlling the first pump, the second pump, and the nitrogen supply. | 12-05-2013 |