Tokuri
Kentaro Tokuri, Kyoto JP
Patent application number | Description | Published |
---|---|---|
20100236579 | SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD - A substrate processing apparatus and a substrate processing method are capable of restraining or preventing the generation of streaky particles on a substrate surface by excellent removal of a rinsing liquid therefrom. The substrate processing apparatus has a substrate inclining mechanism for inclining a substrate held by a substrate holding mechanism. After a rinsing liquid has been supplied onto a substrate to form a liquid mass, the substrate is inclined at a small angle by the substrate inclining mechanism. Then, the liquid mass is downwardly moved without being fragmented and then falls down without leaving minute droplets on the substrate top. Thereafter, the substrate is returned to a horizontal posture and then dried. | 09-23-2010 |
20130167877 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - In a substrate processing apparatus, a liquid film of a supercooled liquid of pure water is formed on the upper surface of a substrate and then cooled with cooling gas into a frozen film. The temperature of the liquid film is lower than the freezing point of pure water, and thus the liquid film is in an easy-to-freeze state. Thus, the time required to freeze the liquid film can be shortened. Even if the temperature of the cooling gas is increased, the liquid film can be speedily frozen as compared with the case in which a liquid film is formed of pure water having a temperature higher than its freezing point. Thus, heat insulating facilities such as piping that supply cooling gas can be simplified. This results in a reduction of the cooling cost required to freeze the liquid film. | 07-04-2013 |
Kentaro Tokuri, Kyoto-Shi JP
Patent application number | Description | Published |
---|---|---|
20120312333 | Substrate Treating Apparatus And Substrate Treating Method - A substrate processing apparatus and a substrate processing method are capable of restraining or preventing the generation of streaky particles on a substrate surface by excellent removal of a rinsing liquid therefrom. The substrate processing apparatus has a substrate inclining mechanism for inclining a substrate held by a substrate holding mechanism. After a rinsing liquid has been supplied onto a substrate to form a liquid mass, the substrate is inclined at a small angle by the substrate inclining mechanism. Then, the liquid mass is downwardly moved without being fragmented and then falls down without leaving minute droplets on the substrate top. Thereafter, the substrate is returned to a horizontal posture and then dried. | 12-13-2012 |
20130199578 | Substrate Treating Apparatus And Substrate Treating Method - A substrate processing apparatus and a substrate processing method are capable of restraining or preventing the generation of streaky particles on a substrate surface by excellent removal of a rinsing liquid therefrom. The substrate processing apparatus has a substrate inclining mechanism for inclining a substrate held by a substrate holding mechanism. After a rinsing liquid has been supplied onto a substrate to form a liquid mass, the substrate is inclined at a small angle by the substrate inclining mechanism. Then, the liquid mass is downwardly moved without being fragmented and then falls down without leaving minute droplets on the substrate top. Thereafter, the substrate is returned to a horizontal posture and then dried. | 08-08-2013 |
Suman Tokuri, Banalore IN
Patent application number | Description | Published |
---|---|---|
20080313236 | Process for cataloging data objects backed up from a content addressed storage system - A process for organizing data objects backed up from a content-addressed storage systems is disclosed. Content-addressed storage systems back up data objects in a flat directory, labeling them with non-intuitive user-unfriendly content addresses. Such directories can be large and difficult to browse, making selective recovery of desired data objects inefficient and laborious. When the content-addressed storage system is further archived to a secondary storage device, such as tape, navigation of archived data objects is especially tedious and difficult. An embodiment of the present invention enables easy navigation of a data object directory created by building a pseudo-file structure as content addressed data objects are archived to a secondary backup device. The file structure of the data object director is based upon timestamp metadata extracted from each data object, resulting in a navigable directory tree that is more intuitive and user-friendly. | 12-18-2008 |
Suman Tokuri, Bangalore IN
Patent application number | Description | Published |
---|---|---|
20080313385 | Process for contiguously streaming data from a content addressed storage system - What is disclosed is process for backing data objects from a content addressed storage system to a tape storage device such that the data objects are written in a contiguous sequential fashion. Data objects are kept together on the storage medium, rather than fragmented. An embodiment of the present invention describes the software modules and memory buffers required to implement this process. Additionally, what is disclosed is a process that restores data objects that have been contiguously written to tape. According to one embodiment of the present invention, recovery of non-fragmented data objects is made more efficient and less prone to failure. | 12-18-2008 |