Patent application number | Description | Published |
20080265330 | TECHNIQUE FOR ENHANCING TRANSISTOR PERFORMANCE BY TRANSISTOR SPECIFIC CONTACT DESIGN - By locally adapting the size and/or density of a contact structure, for instance, within individual transistors or in a more global manner, the overall performance of advanced semiconductor devices may be increased. Hence, the mutual interaction between the contact structure and local device characteristics may be taken into consideration. On the other hand, a high degree of compatibility with conventional process strategies may be maintained. | 10-30-2008 |
20080268597 | TECHNIQUE FOR ENHANCING DOPANT ACTIVATION BY USING MULTIPLE SEQUENTIAL ADVANCED LASER/FLASH ANNEAL PROCESSES - By performing multiple radiation-based anneal processes on the basis of less critical process parameters, the overall risk for creating anneal-induced damage, such as melting of gate portions, may be substantially avoided while nevertheless the respective degree of dopant activation may be enhanced for each individual anneal process. Consequently, the sheet resistance of advanced transistor devices may be reduced with a decreasing number of sequential anneal processes. | 10-30-2008 |
20080299733 | METHOD OF FORMING A SEMICONDUCTOR STRUCTURE COMPRISING AN IMPLANTATION OF IONS IN A MATERIAL LAYER TO BE ETCHED - A method of forming a semiconductor structure comprises providing a semiconductor substrate. A feature having a side surface and a top surface is formed over the substrate. A material layer is formed over the substrate. The material layer covers at least the side surface of the feature. An ion implantation process is performed to create an ion-implanted portion in the material layer. An etch process adapted to remove the ion-implanted portion at a greater etch rate than other portions of the material layer is performed. | 12-04-2008 |
20090001484 | REDUCING TRANSISTOR JUNCTION CAPACITANCE BY RECESSING DRAIN AND SOURCE REGIONS - By recessing portions of the drain and source areas on the basis of a spacer structure, the subsequent implantation process for forming the deep drain and source regions may result in a moderately high dopant concentration extending down to the buried insulating layer of an SOI transistor. Furthermore, the spacer structure maintains a significant amount of a strained semiconductor alloy with its original thickness, thereby providing an efficient strain-inducing mechanism. By using sophisticated anneal techniques, undue lateral diffusion may be avoided, thereby allowing a reduction of the lateral width of the respective spacers and thus a reduction of the length of the transistor devices. Hence, enhanced charge carrier mobility in combination with reduced junction capacitance may be accomplished on the basis of reduced lateral dimensions. | 01-01-2009 |
20090035924 | METHOD OF FORMING A SEMICONDUCTOR STRUCTURE COMPRISING AN IMPLANTATION OF IONS OF A NON-DOPING ELEMENT - A method of forming a semiconductor structure includes providing a substrate having a first feature and a second feature. A mask is formed over the substrate. The mask covers the first feature. An ion implantation process is performed to introduce ions of a non-doping element into the second feature. The mask is adapted to absorb ions impinging on the first feature. After the ion implantation process, an annealing process is performed. | 02-05-2009 |
20100237431 | REDUCING TRANSISTOR JUNCTION CAPACITANCE BY RECESSING DRAIN AND SOURCE REGIONS - By recessing portions of the drain and source areas on the basis of a spacer structure, the subsequent implantation process for forming the deep drain and source regions may result in a moderately high dopant concentration extending down to the buried insulating layer of an SOI transistor. Furthermore, the spacer structure maintains a significant amount of a strained semiconductor alloy with its original thickness, thereby providing an efficient strain-inducing mechanism. By using sophisticated anneal techniques, undue lateral diffusion may be avoided, thereby allowing a reduction of the lateral width of the respective spacers and thus a reduction of the length of the transistor devices. Hence, enhanced charge carrier mobility in combination with reduced junction capacitance may be accomplished on the basis of reduced lateral dimensions. | 09-23-2010 |
20110121398 | TECHNIQUE FOR ENHANCING DOPANT PROFILE AND CHANNEL CONDUCTIVITY BY MILLISECOND ANNEAL PROCESSES - During the fabrication of advanced transistors, significant dopant diffusion may be suppressed by performing a millisecond anneal process after completing the basic transistor configuration, wherein a stress memorization technique may also be obtained by forming a strain-inducing area within a sidewall spacer structure. Due to the corresponding void formation in the spacer structure, a high tensile strain component may be obtained in the adjacent channel region. | 05-26-2011 |
20110215415 | Technique for Enhancing Transistor Performance by Transistor Specific Contact Design - By locally adapting the size and/or density of a contact structure, for instance, within individual transistors or in a more global manner, the overall performance of advanced semiconductor devices may be increased. Hence, the mutual interaction between the contact structure and local device characteristics may be taken into consideration. On the other hand, a high degree of compatibility with conventional process strategies may be maintained. | 09-08-2011 |
20110269293 | Reduced STI Loss for Superior Surface Planarity of Embedded Stressors in Densely Packed Semiconductor Devices - A reduction in material loss of trench isolation structures prior to forming a strain-inducing semiconductor alloy in transistor elements may result in superior device uniformity, for instance with respect to drive current and threshold voltage. To this end, at least one etch process using diluted hydrofluoric acid may be omitted when forming the shallow trench isolations, while at the same time providing a high degree of compatibility with conventional process strategies. | 11-03-2011 |
20120146155 | TECHNIQUE FOR ENHANCING DOPANT PROFILE AND CHANNEL CONDUCTIVITY BY MILLISECOND ANNEAL PROCESSES - During the fabrication of advanced transistors, significant dopant diffusion may be suppressed by performing a millisecond anneal process after completing the basic transistor configuration, wherein a stress memorization technique may also be obtained by forming a strain-inducing area within a sidewall spacer structure. Due to the corresponding void formation in the spacer structure, a high tensile strain component may be obtained, in the adjacent channel region. | 06-14-2012 |
20130029464 | METHODS FOR FABRICATING INTEGRATED CIRCUITS USING NON-OXIDIZING RESIST REMOVAL - Methods are provided for fabricating integrated circuits using non-oxidizing resist removal. In accordance with one embodiment the method includes forming a gate electrode structure overlying a semiconductor substrate and applying and patterning a layer of resist to expose a portion of the semiconductor substrate adjacent the gate electrode structure. Conductivity determining ions are implanted into the semiconductor substrate using the gate electrode structure and the layer of resist as an implant mask. The layer of resist is removed in a non-oxidizing ambient and the implanted conductivity determining ions are activated by thermal annealing. | 01-31-2013 |