Patent application number | Description | Published |
20090025753 | Lithographic Apparatus And Contamination Removal Or Prevention Method - A lithographic apparatus is disclosed having an in situ ozonizer, which is used to produce ozone gas, for example, by UV irradiation of an oxygen-containing gas. The thus produced ozone is dissolved in ultra-pure water by contacting the ozone with the ultra-pure water through a permeable membrane. | 01-29-2009 |
20090027635 | Lithographic Apparatus and Contamination Removal or Prevention Method - An immersion lithographic apparatus is cleaned by use of a cleaning liquid consisting essentially of ultra-pure water and (a) a mixture of hydrogen peroxide and ozone, or (b) hydrogen peroxide at a concentration of up to 5%, or (c) ozone at a concentration of up to 50 ppm, or (d) oxygen at concentration of up to 10 ppm, or (e) any combination selected from (a)-(d). | 01-29-2009 |
20090174871 | Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus - A method of cleaning a lithography apparatus using an aerosol spray is described. The spray from the aerosol is contained in a space. | 07-09-2009 |
20110126630 | VIBRATION SENSOR AND A SYSTEM TO ISOLATE VIBRATIONS - A vibration sensor comprises a reference mass, a resilient element supporting the reference mass, and a base supporting the resilient element, and further comprises a displacement sensor for determining the distance between the reference mass and the base. In accordance with the invention the vibration sensor comprises an actuator that is situated between the resilient element and the base, a second displacement sensor, and a controller for providing an output signal to the actuator. | 06-02-2011 |
20110137337 | Instrument for Minimally Invasive Surgery - The invention relates to an instrument, preferably for minimally invasive surgery, comprising a frame ( | 06-09-2011 |
20110188013 | LITHOGRAPHIC APPARATUS AND CONTAMINATION REMOVAL OR PREVENTION METHOD - An immersion lithographic apparatus is cleaned by use of a cleaning liquid consisting essentially of ultra-pure water and (a) a mixture of hydrogen peroxide and ozone, or (b) hydrogen peroxide at a concentration of up to 5%, or (c) ozone at a concentration of up to 50 ppm, or (d) oxygen at concentration of up to 10 ppm, or (e) any combination selected from (a)-(d). | 08-04-2011 |
20120158191 | ACTIVE VIBRATION ISOLATION AND DAMPING SYSTEM - An active vibration isolation and damping system ( | 06-21-2012 |
20150185248 | HIGH THROUGHPUT SCANNING PROBE MICROSCOPY DEVICE - A scanning probe microscopy device for mapping nanostructures on a sample surface of a sample is provided. The device may comprise a plurality probes for scanning the sample surface, and one or more motion actuators for enabling motion of the probes relative to the sample, wherein each of the plurality of probes comprises a probing tip mounted on a cantilever arranged for bringing the probing tip in contact with the sampling surface for enabling the scanning. The device may further comprise a plurality of Z-position detectors for determining a position of each probing tip along a Z-direction when the probing tip is in contact with the sample surface, wherein the Z-direction is a direction transverse to the sample surface, for enabling mapping of the nanostructures. | 07-02-2015 |