Patent application number | Description | Published |
20090068083 | PROCESS FOR SYNTHESIS OF HALOGENATED NITROGEN - A process for synthesizing a halogenated nitrogen represented by a formula of NF | 03-12-2009 |
20120006487 | System for In-Situ Mixing and Diluting Fluorine Gas - [Task] It is a task to provide a fluorine gas supply system which can stably supply fluorine gas generated by a fluorine gas generation device to a semiconductor processing device in a large quantity and in a precise concentration. | 01-12-2012 |
20120031752 | Fluorine Gas Generating Device - A fluorine gas generating device | 02-09-2012 |
20120085640 | Fluorine Gas Generation Device - A fluorine gas generation device includes an electrolytic cell that electrolyzes hydrogen fluoride in an electrolytic bath constituted of a molten salt containing hydrogen fluoride. The fluorine gas generation device liquefies and circulates a hydrogen fluoride gas vaporized from the molten salt and mist derived from the molten salt which is entrained on the gases generated by using a circulating device connected to a pipe on an upper portion of the electrolytic cell, thereby returning the hydrogen fluoride gas and the mist derived from the molten salt to the electrolytic cell. | 04-12-2012 |
20120100491 | Semiconductor Production Equipment Including Fluorine Gas Generator - A semiconductor production equipment includes a fluorine gas generator, and a detoxification device for combusting a waste gas containing a fluorine-based gas. The fluorine gas generator is configured to electrolyze hydrogen fluoride in an electrolytic bath of a molten salt containing hydrogen fluoride to generate a main product gas whose major component is fluorine gas at an anode side and generate a by-product gas whose major component is hydrogen at a cathode side. The semiconductor production equipment further includes a lead-out line for introducing the by-product gas generated from the fluorine gas generator to the detoxification device. The detoxification device includes a mechanism for using the by-product gas sent to the detoxification device as a combustion agent. | 04-26-2012 |
Patent application number | Description | Published |
20120318665 | Apparatus for Generating Fluorine Gas - [Object] To provide a fluorine gas generating system which can stably supply high purity fluorine gas while preventing blockade of a purification apparatus for adsorbing and removing hydrogen fluoride. | 12-20-2012 |
20130032600 | Valve For Container Filled With Halogen Gas Or Halogen Compound Gas - A direct-touch diaphragm valve according to the present invention includes a valve body having inlet and outlet passages, a valve chamber being in communication with the inlet and outlet passages, a valve seat located around an open inner end of the inlet passage and a diaphragm arranged on the valve seat so as to hermetically seal the valve chamber and open or close the inlet and outlet passages, wherein the valve seat and the diaphragm have respective contact surfaces formed therebetween such that: such that: the contact surface of the valve seat has a surface roughness Ra of 0.1 to 10.0 μm and a curvature radius Ra of 100 to 1000 mm; and the area ratio Sb/Sa of a contact area Sb of the valve seat with the diaphragm to a gas contact surface area Sa of the diaphragm ranges from 0.2 to 10%. | 02-07-2013 |
20140083844 | Fluorine Gas Generator - A fluorine gas generating device | 03-27-2014 |
20140171678 | Fluoroalkanesulfonic Acid Production Method - Disclosed is a method for producing a fluoroalkanesulfonic acid including (1) the step of reacting concentrated sulfuric acid and/or fuming sulfuric acid with a fluoroalkanesulfonate to cause an acid decomposition, thereby obtaining a reaction mixture containing the fluoroalkanesulfonic acid and a sulfur component; and (2) the step of adding an oxidizing agent to the reaction mixture obtained by the above step and then conducting a distillation, thereby obtaining the fluoroalkanesulfonic acid from the reaction mixture. It is possible by this method to efficiently reduce the sulfur component, thereby industrially advantageously obtaining fluoroalkanesulfonic acid of high purity. | 06-19-2014 |
20140360884 | Fluorine Gas Generating Device - A fluorine gas generating device | 12-11-2014 |