Patent application number | Description | Published |
20080202418 | ENTRY LOCK SYSTEM, WEB PROCESSING INSTALLATION, AND METHOD FOR USING THE SAME - An entry lock system for feeding web from a web supply to a web processing installation, the entry lock system comprising a first chamber having an inlet port and an outlet port, a second chamber having an inlet port, a first seal positioned at the inlet port of the first chamber, a second seal positioned between the first chamber and the second chamber, a first web storage unit positioned in the first chamber; and a second web storage unit positioned in the second chamber. | 08-28-2008 |
20090199767 | DEVICE FOR CLAMPING AND POSITIONING AN EVAPORATOR BOAT - The invention relates to a vacuum treatment plant comprising an evaporator ( | 08-13-2009 |
20100038468 | WEB GUIDE CONTROL, WEB PROCESSING APPARATUS AND METHOD FOR OPERATING THE SAME - A web guide control for guiding a web, the web guide control having a first guide roller ( | 02-18-2010 |
20100080901 | EVAPORATOR FOR ORGANIC MATERIALS - An evaporator for vaporizing organic material is described. The evaporator includes a first chamber having a nozzle adapted to be directed to a substrate to be coated; at least one second chamber for vaporizing the organic material; at least one vapor channel for guiding vaporized organic material from the at least one second chamber to the first chamber; wherein the first chamber is adapted to provide vaporized organic material to the nozzle corresponding to a first virtual sublimation surface, and the at least one second chamber being adapted to provide during operation a second sublimation surface area, wherein the second sublimation surface area corresponds to at least 70 percent of the first virtual sublimation surface. | 04-01-2010 |
20100081104 | EVAPORATOR FOR ORGANIC MATERIALS AND METHOD FOR EVAPORATING ORGANIC MATERIALS - An evaporator for vaporizing an organic material to be deposited on a flexible substrate where the evaporator includes an evaporation tube having a wall encompassing a cavity for vaporizing the organic material, at least one heating device arranged adjacent to the wall and being adapted to heat the evaporation tube, and at least one nozzle assembly protruding from the evaporation tube. The nozzle assembly further comprises a nozzle cover with an opening, and a shutter for selectively opening and closing the opening of the nozzle cover. The shutter is adapted to have in operation of the evaporation tube a temperature within a shutter temperature range of 140° C. such that the temperature of the nozzle cover is within the shutter temperature range. | 04-01-2010 |
20100186671 | ARRANGEMENT FOR WORKING SUBSTRATES BY MEANS OF PLASMA - The invention relates to an arrangement for working substrates by means of plasma (PECVD), wherein at least two electrodes are provided which are located in a common plane and are spaced apart from one another. Between the particular electrodes are provided interspaces which serve as gas inlets or gas outlets. | 07-29-2010 |
20100196591 | MODULAR PVD SYSTEM FOR FLEX PV - A system for thin film deposition on a flexible substrate having at least a first deposition region is described. The system includes a first chamber being based on a platform, wherein the first deposition region is within the first chamber, wherein the first chamber has a first support member configuration configured for supporting at least two different substrate guiding systems and wherein one substrate guiding system is supported by the first support member configuration, and wherein the platform is configured for at least two different deposition units and wherein one deposition unit of the at least two different deposition units is enclosed by the first chamber. | 08-05-2010 |
20100266766 | GUIDING DEVICES AND METHODS FOR CONTACTLESS GUIDING OF A WEB IN A WEB COATING PROCESS - According to embodiments described herein, a guiding device for contactless guiding of a web in a web coating process under vacuum conditions is provided. The guiding device includes a curved surface for facing the web and a group of gas outlets disposed in the curved surface and adapted for giving off a gas flow to form a hover cushion between the curved surface and the web. The guiding device further includes a gas distribution system for selectively providing the gas flow to a first subgroup of the gas outlets and for preventing the gas from flowing to a second subgroup of the gas outlets. | 10-21-2010 |
20100297361 | PLASMA DEPOSITION SOURCE AND METHOD FOR DEPOSITING THIN FILMS - A plasma deposition source for transferring a deposition gas into a plasma phase and for depositing, from the plasma phase, a thin film onto a substrate moving in a substrate transport direction in a vacuum chamber is described. The plasma deposition source includes a multi-region electrode device adapted to be positioned in the vacuum chamber and including at least one RF electrode arranged opposite to the moving substrate, and an RF power generator adapted for supplying RF power to the RF electrode. The RF electrode has at least one gas inlet arranged at one edge of the RF electrode and at least one gas outlet arranged at the opposed edge of the RF electrode. A normalized plasma volume is provided by a plasma volume defined between an electrode surface and an opposite substrate position, divided by an electrode length. The normalized plasma volume is tuned to a depletion length of the deposition gas. | 11-25-2010 |
20110003072 | BENDING FIXTURE FOR HOMOGENOUS AND SMOOTH OPERATION OF AN EVAPORATION SOURCE - An evaporation apparatus for coating a substrate having an evaporation structure for evaporating material, the evaporation structure having an evaporation structure surface for receiving a wire; a wire feed for providing the wire; and a bending fixture with the bending fixture including a first and a second roller for giving the wire a reproducible curvature so that in operation of the evaporation apparatus the contact spot of the wire on the evaporation structure is at a desired position. | 01-06-2011 |
20110070375 | MODULAR SUBSTRATE PROCESSING SYSTEM AND METHOD - A modular substrate processing system is provided for processing a flexible substrate. The system includes at least two process modules arranged adjacent to each other in a horizontal direction. The process modules include gas cushion rollers adapted for contactless guiding of the flexible substrate and for diverting the flexible substrate in vertical directions. | 03-24-2011 |
20140030435 | EVAPORATION UNIT AND VACUUM COATING APPARATUS - Vacuum coating apparatus for coating a web includes a first rotatable coating drum and a second rotatable coating drum disposed parallel to the first drum with a gap formed between the first and the second coating drums for transporting at least one web. A first evaporator has at least one evaporation source for generating a first evaporation beam, wherein the first evaporator is arranged next to the first coating drum. A second evaporator has at least one evaporation source for generating a second evaporation beam, wherein the second evaporator is arranged next to the second coating drum. The first and the second evaporators are inclined relative to each other. | 01-30-2014 |
20140208565 | GAS SEPARATION BY ADJUSTABLE SEPARATION WALL - An apparatus for coating a thin film on a flexible substrate is described. The apparatus includes a coating drum having an outer surface for guiding the flexible substrate through a first vacuum processing region and at least one second vacuum processing region, a gas separation unit for separating the first vacuum processing region and at least one second vacuum processing region and adapted to form a slit through which the flexible substrate can pass between the outer surface of the coating drum and the gas separation unit, wherein the gas separation unit is adapted to control fluid communication between the first processing region and the second processing region by adjusting the position of the gas separation unit. | 07-31-2014 |
20140209731 | WEB GUIDE CONTROL UNIT, WEB PROCESSING APPARATUS AND METHOD FOR OPERATING THE SAME - A web guide control unit for guiding a web is provided. The web guide control unit includes a web guide control unit for guiding a web. The web guide control unit includes a guide roller. The guide roller includes an adjustment unit and two tension measurement units for measuring the tension of the web at a first location and a second location of the guide roller. The present disclosure also provides a web processing apparatus with at least one web guide control unit as described herein is provided. A method for guiding a web by means of the web guide control or the web processing apparatus is also disclosed. | 07-31-2014 |
20140212600 | COMMON DEPOSITION PLATFORM, PROCESSING STATION, AND METHOD OF OPERATION THEREOF - An apparatus includes a substrate support having an outer surface for guiding the substrate through a first vacuum processing region and at least one second vacuum processing region. First and second deposition sources correspond to the first processing region and at least one second deposition source corresponds to the at least one second vacuum processing region, wherein at least the first deposition source includes an electrode having a surface that opposes the substrate support. A processing gas inlet and a processing gas outlet are arranged at opposing sides of the surface of the electrode. At least one separation gas inlet how one or more openings, wherein the one or more openings are at least provided at one of opposing sides of the electrode surface such that the processing gas inlet and/or the processing gas outlet are provided between the one or more openings and the surface of the electrode. | 07-31-2014 |
20140290861 | DEPOSITION PLATFORM FOR FLEXIBLE SUBSTRATES AND METHOD OF OPERATION THEREOF - An apparatus for processing a flexible substrate is described. The apparatus includes a vacuum chamber having a first chamber portion, a second chamber portion and a third chamber portion, an unwinding shaft, a coating drum having a rotation axis and a curved outer surface for guiding the substrate along the curved outer surface through a first vacuum processing region and at least one second vacuum processing region, wherein a first portion of the coating drum is provided in the second chamber portion and the remaining portion of the coating drum is provided in the third chamber portion, a first processing station corresponding to the first processing region and at least one second processing station corresponding to the at least one second vacuum processing region, wherein the first processing station and the second processing station each includes a flange portion. | 10-02-2014 |
20150020847 | CLEANING METHOD FOR THIN-FILM PROCESSING APPLICATIONS AND APPARATUS FOR USE THEREIN - According to the present disclosure, a method for cleaning the processing chamber of a flexible substrate processing apparatus without breaking the vacuum in the processing chamber is provided. The method for cleaning the processing chamber includes guiding a sacrificial foil into the processing chamber; initiating a first pump process in the processing chamber; plasma cleaning the processing chamber while the sacrificial foil is provided in the processing chamber; initiating a second pump process in the processing chamber; and guiding a flexible substrate into the processing chamber. | 01-22-2015 |