Soemers
Herman Soemers, Mierlo NL
Patent application number | Description | Published |
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20090103199 | HIGH POSITIONING REPRODUCIBLE LOW TORQUE MIRROR - ACTUATOR INTERFACE - The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror. The flexible elements of the mirror mount provides a number of advantages and increases the performance capabilities of the first mechanical interface between the mirror mount and the actuator. | 04-23-2009 |
20090303626 | HOUSING STRUCTURE - A housing structure has a frame structure | 12-10-2009 |
20110176234 | HIGH POSITIONING REPRODUCIBLE LOW TORQUE MIRROR - ACTUATOR INTERFACE - The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror. The flexible elements of the mirror mount provides a number of advantages and increases the performance capabilities of the first mechanical interface between the mirror mount and the actuator. | 07-21-2011 |
Herman Soemers, Np Mierlo NL
Patent application number | Description | Published |
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20110216428 | HOUSING STRUCTURE - A housing structure has a frame structure | 09-08-2011 |
Herman M.j.r. Soemers, Mierlo NL
Patent application number | Description | Published |
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20090185148 | SUPPORT FOR AN OPTICAL ELEMENT - The disclosure relates to a support structure for an optical element and an optical element module including such a support structure. The disclosure also relates to a method of supporting an optical element. The disclosure may be used in the context of photolithography processes for fabricating microelectronic devices, such as semiconductor devices, or in the context of fabricating devices, such as masks or reticles, used during such photolithography processes. | 07-23-2009 |
20100149671 | HIGH POSITIONING REPRODUCIBLE LOW TORQUE MIRROR - ACTUATOR INTERFACE - The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror. The flexible elements of the mirror mount provides a number of advantages and increases the performance capabilities of the first mechanical interface between the mirror mount and the actuator. | 06-17-2010 |
Hermanus Mathias Joannes Rene Soemers, Eindhoven NL
Patent application number | Description | Published |
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20100053271 | ELECTROSTATIC ACTUATOR FOR INK JET HEADS - An electrostatic inkjet head providing high pressure to ink in order to enable high quality printing. The electrostatic actuator providing the pressure to the membrane ( | 03-04-2010 |
Hermanus M.j.r. Soemers, Eindhoven NL
Patent application number | Description | Published |
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20100290142 | MEMS SCANNING MICROMIRROR WITH REDUCED DYNAMIC DEFORMATION - A MEMS scanning micromirror with reduced dynamic deformation with a mirror support including a rotation axis beam | 11-18-2010 |
20100296146 | MEMS SCANNING MICROMIRROR - A MEMS scanning micromirror including a mirror body | 11-25-2010 |