Sinke
Arnold Sinke, Eindhoven NL
Patent application number | Description | Published |
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20110102774 | Focus Sensor, Inspection Apparatus, Lithographic Apparatus and Control System - A focus sensor comprises a confocal sensor. Within the confocal sensor there are a plurality of aperture plates positioned in front of a plurality of detectors. Rather than a conventional pinhole aperture shape there is a central aperture surrounded by a plurality of outer aperture portions. | 05-05-2011 |
Arnold Sinke, Veldhoven NL
Patent application number | Description | Published |
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20110007316 | Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method - An inspection apparatus configured to measure a property of a substrate includes an illumination source, a beam splitter, a first polarizer positioned between the illumination source and the beam splitter, an objective lens and an optical device that alters a polarization state of radiation traveling through it positioned between the beam splitter and the substrate and a second polarizer positioned between the beam splitter and a detector. An axis of the second polarizer is rotated with respect to an axis of the first polarizer. Radiation polarized by the first polarizer that reflects off any optical elements between the beam splitter and the optical device is prevented from entering the detector by the second polarizer. Only radiation that passes twice through the optical device has its polarization direction rotated so that it passes through the second polarizer and enters the detector. | 01-13-2011 |
20110261339 | SCATTEROMETER AND LITHOGRAPHIC APPARATUS - A scatterometer for measuring a property of a substrate includes a focus sensing arrangement including an arrangement ( | 10-27-2011 |
Chad Anthony Sinke, Hartland, MI US
Patent application number | Description | Published |
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20100241298 | Electric powered outdrive - A self contained electric powered out drive system that can be charged overnight by means of a standard 120 volt AC wall outlet. The electric powered out drive system is capable of being attached to the rear of any motor vehicle by means of a standard trailer hitch receiver. The self contained electric drive system assists in propelling a motor vehicle under predetermined driving conditions which will greatly improve a motor vehicles fuel economy. | 09-23-2010 |
Raymond Anthony Sinke, Hartland, MI US
Patent application number | Description | Published |
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20100241298 | Electric powered outdrive - A self contained electric powered out drive system that can be charged overnight by means of a standard 120 volt AC wall outlet. The electric powered out drive system is capable of being attached to the rear of any motor vehicle by means of a standard trailer hitch receiver. The self contained electric drive system assists in propelling a motor vehicle under predetermined driving conditions which will greatly improve a motor vehicles fuel economy. | 09-23-2010 |