Patent application number | Description | Published |
20100136924 | ANTENNA DEVICE AND WIRELESS COMMUNICATION SYSTEM - An antenna device includes a ground plane, an antenna element, and a metal wall. The antenna element is having a distance of (m×λ/2-λ/4) away from the ground plane, where “m” is an integer which is equal or larger than “1” and “λ” is a wave length of operating frequency. The metal wall is surrounding the antenna element. One end of the metal wall is attached to along the ground plane. The other end of the metal wall is forming an aperture with a height from the ground plane. The height of the metal wall is (n×λ/2), where “n” is an integer which is equal or larger than “m”. | 06-03-2010 |
20100148892 | ANTENNA DEVICE AND TRANSFORMER - A transformer between waveguide and transmission-line includes a high-frequency circuit module, transmission-lines, a waveguide, and feed pins. The high-frequency circuit module has differential-pair terminals to input and output a differential signal. The transmission-lines are connected to the differential-pair terminals. The waveguide includes a first to third metal walls. The feed pins are connected to the transmission-lines inside of the waveguide. The feed pins have a first distance of approximately (λg/2) from each other. One of the feed pins has a second distance of approximately (λg*(1+2 α)/4) from the third metal plane. “λg” is a wavelength in the waveguide and “α” is an integer which is equal or larger than “0”. Each of the feed pins has a third distance of approximately (a/2) from the first or second wall. “a” is length of the waveguide along the third metal wall. | 06-17-2010 |
20100171669 | Measurement apparatus and method thereof - A measurement apparatus includes an anechoic chamber, a DUT board, rotation units, and a feeding arm. The anechoic chamber has inner-walls. Each inner-wall is covered with a radio wave absorber. One of the inner-wall is a first wall with an aperture and the other inner-walls are second walls. The DUT board holds a first antenna to be measured with radiation property and a probe to detect a signal from the first antenna. A part of the DUT board is inserted into the anechoic chamber through the aperture opened in the first wall. One end of the feeding arm holds a second antenna radiating a radio wave to the first antenna in the anechoic chamber. Each rotation unit provides on each second wall and is selectively attached to the other end of the feeding arm for rotating the second antenna and for feeding to the second antenna. | 07-08-2010 |
20120075147 | RADIO DEVICE - According to one embodiment, a radio device includes: a mounting board having a conductive plane; a semiconductor package mounted on the mounting board and having a interposer having a conductive plane, a semiconductor chip mounted on one surface of the interposer, and an antenna having a conductive element formed on the one surface and connected to the semiconductor chip; and a plurality of connection portions connecting the mounting board and the interposer. A first electrical length of the first connection portion which is nearest the conductive element among the plurality of connection portions or a second electrical length of the first connection portion including a conductive plane of the mounting board or interposer connected to the first connection portion is less than ½ wavelength of the operating frequency of the antenna. | 03-29-2012 |
20120161544 | WIRELESS POWER TRANSMISSION DEVICE AND POWER RECEIVING DEVICE - A wireless power transmission device that supplies power to a power receiving device including a second self-resonant coil having a winding structure in which a conductive wire is wound one turn or more perpendicularly to a second central axis, the wireless power transmission device comprising: a first self-resonant coil having the winding structure in which the conductive wire is wound one turn or more perpendicularly to a first central axis to supply the power to the second self-resonant coil that is not located on the first central axis; and a third self-resonant coil having the winding structure in which the conductive wire is wound one turn or more perpendicularly to a third central axis that is not perpendicular to the first central axis and arranged on the first central axis. | 06-28-2012 |
20130027255 | RADIO APPARATUS - A radio apparatus according to one aspect of the embodiments includes a substrate configured to have a high-frequency circuit formed thereon. The high-frequency circuit includes an electromagnetic wave radiation source to radiate an electromagnetic wave. The radio apparatus also includes a shielding case configured to house the substrate and have a plurality of openings each having a length of half a wavelength of the electromagnetic wave in a direction orthogonal to a polarization of the electromagnetic wave. Each of the openings is provided to make each distance between centers of the openings to be shorter than one wavelength of the electromagnetic wave. | 01-31-2013 |
20130214981 | ANTENNA DEVICE AND TRANSFORMER - A transformer between waveguide and transmission-line includes a high-frequency circuit module, transmission-lines, a waveguide, and feed pins. The high-frequency circuit module has differential-pair terminals to input and output a differential signal. The transmission-lines are connected to the differential-pair terminals. The waveguide includes a first to third metal walls. The feed pins are connected to the transmission-lines inside of the waveguide. The feed pins have a first distance of approximately (λg/2) from each other. One of the feed pins has a second distance of approximately (λg*(1+2α)/4) from the third metal plane. “λg” is a wavelength in the waveguide and “α” is an integer which is equal or larger than “0”. Each of the feed pins has a third distance of approximately (a/2) from the first or second wall. “a” is length of the waveguide along the third metal wall. | 08-22-2013 |
Patent application number | Description | Published |
20120161532 | WIRELESS POWER TRANSMITTING DEVICE AND WIRELESS POWER RECEIVING DEVICE - A loop antenna includes: a pair of first linear elements, a feed point connected with each of the first linear elements, a first variable impedance element, one end of which is connected with one end of the first linear elements, a second variable impedance element, one end and the other end of which are electrically connected with the other end of the first variable impedance element and the other end of the first linear elements, and a second linear element, one end and the other end of which are electrically connected with the other end of the first variable impedance element and the other end of the first linear elements. A self-resonance coil receives power fed to the feed point of the loop antenna and transmits the received power to a receiving self-resonance coil. | 06-28-2012 |
20120193810 | WIRELESS APPARATUS AND WIRELESS SYSTEM - According to one embodiment, a wireless apparatus includes an integrated circuit package, a board having a first layer. The integrated circuit package includes an integrated circuit and at least one antenna. The board has a first surface and a second surface opposite to the first surface, the integrated circuit package is mounted on the board and is electrically connected to the board. The first layer is formed on the second surface, a part of the first layer in a first region is formed of a conductor, the first region is a region on which the antenna is projected in a thickness direction of the board, the part of the first layer in the first region is electrically connected to a particular region included in a third region, the third region is formed of a second region included in the board and the first surface. | 08-02-2012 |
20120223595 | WIRELESS POWER TRANSMISSION APPARATUS - According to one embodiment, a wireless power transmission apparatus includes a housing and a plurality of transmitting coils. The housing is capable of containing one or more power receiving apparatuses includes one or more receiving coils which receive power. The plurality of transmitting coils are provided inside the housing and are configured to transmit the power to the power receiving apparatuses by making electromagnetic coupling with the receiving coils, at least two of the plurality of transmitting coils having orientations of axes different from each other, the axes each indicating a line perpendicular to a plane which is defined by windings of a coil. | 09-06-2012 |
20120242161 | RADIO POWER TRANSMITTING APPARATUS AND RADIO POWER TRANSMITTING SYSTEM - There is provided a radio power transmitting apparatus including: a power transmitting coil, a band signal generating unit, a reflected signal measuring unit, an oscillator and a communication control unit. The coil is supplied with a signal and transmits the signal to a power receiving coil on a radio power receiving apparatus through magnetic coupling. The generating unit generates a band signal having an allowable transmission band and supplies the band signal to the power transmitting coil. The reflected signal measuring unit measures a reflected signal of the band signal from the power transmitting coil. The oscillator generates a carrier signal having a controllable oscillating frequency. The control unit determines a transmission frequency based on a frequency characteristic of the reflected signal and performs control so that a transmission signal generated by modulating the carrier signal of the transmission frequency is supplied to the power transmitting coil. | 09-27-2012 |
20130002035 | WIRELESS POWER TRANSMISSION SYSTEM, POWER TRANSMISSION APPARATUS AND POWER RECEPTION APPARATUS - According to one embodiment, a wireless power transmission system, includes a power transmission antenna and a power reception antenna. The power transmission antenna has a first resonance frequency and a first frequency bandwidth, and wirelessly transmits high-frequency energy having a first transmission frequency. The power reception antenna has a second resonance frequency and a second frequency bandwidth, and wirelessly receives the high-frequency energy. The second resonance frequency is higher than a highest frequency within the first frequency bandwidth. The first transmission frequency falls within the first frequency bandwidth. | 01-03-2013 |
20130249299 | POWER TRANSMITTING APPARATUS, POWER RECEIVING APPARATUS, CONTROL APPARATUS, AND WIRELESS POWER TRANSFER SYSTEM - There is provided a power transmitting apparatus including: a power supply, a power transmitting inductor, a mutual coupling adjusting unit and a control unit, in which the power supply supplies AC power, the power transmitting inductor transfers the AC power to a power receiving apparatus through magnetic coupling with a power receiving inductor in the power receiving apparatus, the mutual coupling adjusting unit adjusts a relative position between the power transmitting inductor and the power receiving inductor, and the control unit controls the mutual coupling adjusting unit, based on a mutual coupling coefficient between the power transmitting inductor and the power receiving inductor. | 09-26-2013 |
20130249305 | POWER TRANSMISSION APPARATUS, POWER RECEPTION APPARATUS, AND POWER TRANSMISSION METHOD - There is provided a power transmission apparatus which transmits power generated by a power source to one or more power reception apparatuses. The power transmission apparatus includes a power allocation processing unit and a power transmission unit. The power allocation processing unit allocates first resources which are parts of resources for transmitting the power to the power reception apparatuses, based on requested power of the power reception apparatuses, and allocates second resources which are resources with the exception of first resources to a power reception apparatus selected from the power reception apparatuses based on power transmission characteristics of the power reception apparatuses. The power transmission unit transmits the power to the power reception apparatuses using first resources and second resources. | 09-26-2013 |
20140252867 | COIL, POWER RECEIVING APPARATUS, AND POWER TRANSMITTING APPARATUS - In one embodiment, a coil includes a magnetic core and a winding. The magnetic core includes at least one block provided with a groove or an opening. Each block is arranged so as to make the groove or the opening extend along a direction of magnetic flux. The coil is used as a power transmitting coil or a power receiving coil. | 09-11-2014 |
20140252868 | Resonator and Wireless Power Transmitting Apparatus - In one embodiment, a resonator includes a magnetic core, a winding wound around the magnetic core, and a parasitic loop element. The parasitic loop element is arranged so as to be interlinked with magnetic field generated by current flowing through the winding. In the parasitic loop element, an amount of flux linkage is adjusted. | 09-11-2014 |
Patent application number | Description | Published |
20080248409 | Reflective Mask Blank, Reflective Mask and Methods of Producing the Mask Blank and the Mask - A reflective mask blank has a substrate ( | 10-09-2008 |
20110027703 | REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD OF MANUFACTURING THE SAME - A reflective mask blank includes a substrate, a multilayer reflective film formed on the substrate and having a structure in which a high refractive index layer and a low refractive index layer are alternately laminated, and an absorbing film stacked on the multilayer reflective film and adapted to absorb EUV exposure light. The absorbing film includes a phase shift layer adapted to give a predetermined phase difference to the EUV exposure light having passed therethrough and reflected by the multilayer reflective film with respect to the EUV exposure light directly incident on and reflected by the multilayer reflective film, and an absorber layer stacked on the phase shift layer and adapted to absorb and attenuate the EUV exposure light passing therethrough, either alone or jointly with the phase shift layer. | 02-03-2011 |
20110059391 | REFLECTIVE MASK, REFLECTIVE MASK BLANK AND METHOD OF MANUFACTURING REFLECTIVE MASK - A reflective mask of this invention includes a multilayer reflective film ( | 03-10-2011 |
20110217634 | MULTILAYER REFLECTIVE FILM COATED SUBSTRATE, REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING A REFLECTIVE MASK - Provided is a reflective mask blank, wherein even if inspection light for defect inspection is irradiated onto an uppermost surface of a multilayer reflective film or of an absorber film formed over a reference point mark, sufficient contrast is obtained between a position of the reference point mark and its peripheral portion so that the position of the reference point mark can be identified with high accuracy. By forming a reference point mark ( | 09-08-2011 |
20140302429 | MULTILAYER REFLECTIVE FILM FORMED SUBSTRATE, REFLECTIVE MASK BLANK, MASK BLANK, METHODS OF MANUFACTURING THE SAME, REFLECTIVE MASK, AND MASK - Provided is a multilayer reflective film formed substrate formed with a fiducial mark for accurately managing coordinates of defects. A multilayer reflective film formed substrate is formed with a multilayer reflective film, which is adapted to reflect EUV light, on a substrate and a fiducial mark which serves as a reference for a defect position in defect information is formed on the multilayer reflective film. The fiducial mark includes a main mark for determining a reference point for the defect position and auxiliary marks arranged around the main mark. The main mark has a point-symmetrical shape and has a portion with a width of 200 nm or more and 10 μm or less with respect to a scanning direction of an electron beam writing apparatus or defect inspection light. | 10-09-2014 |
20150205196 | METHOD OF MANUFACTURING SUBSTRATE WITH A MULTILAYER REFLECTIVE FILM, METHOD OF MANUFACTURING A REFLECTIVE MASK BLANK, SUBSTRATE WITH A MULTILAYER REFLECTIVE FILM, REFLECTIVE MASK BLANK, REFLECTIVE MASK AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE - An object of the present invention is to provide a substrate with a multilayer reflective film that enables the number of detected pseudo defects, to be reduced even when using highly sensitive defect inspection apparatuses using light of various wavelengths, and in particular, is capable of achieving a level of smoothness required of substrates with a multilayer reflective film while reliably detecting critical defects as a result of reducing the number of detected pseudo defects, as well as a method of manufacturing the same. | 07-23-2015 |
20150301441 | REFLECTIVE MASK BLANK AND METHOD FOR MANUFACTURING SAME, METHOD FOR MANUFACTURING REFLECTIVE MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - This invention provides a reflective mask blank capable of preventing peeling-off of a multilayer reflective film due to cleaning or the like in a mask manufacturing process or during mask use. The reflective mask blank includes a multilayer reflective film, a protective film, an absorber film, and a resist film formed in this order on a substrate. Assuming that a distance from the center of the substrate to an outer peripheral end of the multilayer reflective film is L(ML), that a distance from the center of the substrate to an outer peripheral end of the protective film is L(Cap), that a distance from the center of the substrate to an outer peripheral end of the absorber film is L(Abs), and that a distance from the center of the substrate to an outer peripheral end of the resist film is L(Res), L(Abs)>L(Res)>L(Cap)≧L(ML) and the outer peripheral end of the resist film is located inward of an outer peripheral end of the substrate. | 10-22-2015 |
20150331312 | MASK BLANK SUBSTRATE, SUBSTRATE WITH MULTILAYER REFLECTIVE FILM, REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING MASK BLANK SUBSTRATE, METHOD OF MANUFACTURING SUBSTRATE WITH REFLECTIVE FILM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - An object of the present invention is to provide a mask blank substrate and the like that enables critical defects to be reliably detected as a result of reducing the number of detected defects, including pseudo defects, even when using highly sensitive defect inspection apparatuses that use light of various wavelengths. The present invention relates to a mask blank substrate that is used in lithography, wherein the power spectral density at a spatial frequency of 1×10 | 11-19-2015 |
20160004153 | METHOD FOR MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD FOR MANUFACTURING REFLECTIVE MASK - A method of manufacturing a reflective mask blank comprising a multilayer reflective film formed on a substrate so as to reflect EUV light; and a laminated film formed on the multilayer reflective film. The method includes the steps of depositing the multilayer reflective film on the substrate to form a multilayer reflective film formed substrate; carrying out defect inspection for the multilayer reflective film formed substrate; depositing the laminated film on the multilayer reflective film of the multilayer reflective film formed substrate; forming a fiducial mark for an upper portion of the laminated film to thereby form a reflective mask blank comprising the fiducial mark, the fiducial mark serving as a reference for a defect position in defect information; and carrying out defect inspection of the reflective mask blank by using the fiducial mark as a reference. | 01-07-2016 |
Patent application number | Description | Published |
20090017387 | REFLECTIVE MASK BLANK FOR EXPOSURE, REFLECTIVE MASK FOR EXPOSURE, METHOD OF PRODUCING A SEMICONDUCTOR DEVICE, AND SUBSTRATE PROVIDED WITH MULTILAYER REFLECTIVE FILM - To provide a reflective mask blank for exposure that can solve a problem of adsorption failure in fixing a reflective mask using an electrostatic chuck and thus can flatten the surface of the mask using the electrostatic chuck, thereby realizing high-accuracy pattern transfer. In a reflective mask blank for exposure having a multilayer reflective film formed on a board and adapted to reflect exposure light and an absorbent layer formed on the multilayer reflective film and adapted to absorb the exposure light, the shape of a surface of the mask blank on its side opposite to its transfer pattern forming surface is a shape having a convex surface. | 01-15-2009 |
20120019916 | MULTILAYER REFLECTIVE FILM COATED SUBSTRATE FOR A REFLECTIVE MASK, REFLECTIVE MASK BLANK, AND METHODS OF MANUFACTURING THE SAME - By forming on a substrate a reference point mark having a concave or convex shape with its side walls being generally upright, even if a multilayer reflective film, an absorber film, and so on are formed over the reference point mark, sufficient contrast for inspection light is obtained so that the position of the reference point mark can be identified with high accuracy. | 01-26-2012 |
20120276474 | METHOD OF CLEANING SUBSTRATE - The present invention is a method of cleaning a substrate, comprising cleaning at least one surface of a substrate located in a liquid by injecting pressurized cleaning liquid containing bubbles or cleaning particles from a injection nozzle to at least one surface of the substrate. | 11-01-2012 |
20130078555 | MASK BLANK GLASS SUBSTRATE, MULTILAYER REFLECTIVE FILM COATED SUBSTRATE, MASK BLANK, MASK, AND METHODS OF MANUFACTURING THE SAME - Provided is a mask blank glass substrate that has high surface smoothness, that is formed with a fiducial mark capable of improving the detection accuracy of a defect position or the like, and that enables reuse or recycling of a glass substrate included therein. An underlayer is formed on a main surface, on the side where a transfer pattern is to be formed, of a glass substrate for a mask blank. The underlayer serves to reduce surface roughness of the main surface of the glass substrate or to reduce defects of the main surface of the glass substrate. A surface of the underlayer is a precision-polished surface. A fiducial mark which provides a reference for a defect position in defect information is formed on the underlayer. | 03-28-2013 |
20140230848 | METHOD OF CLEANING SUBSTRATE - The present invention is a method of cleaning a substrate, comprising cleaning at least one surface of a substrate located in a liquid by injecting pressurized cleaning liquid containing bubbles or cleaning particles from a injection nozzle to at least one surface of the substrate. | 08-21-2014 |
20140329174 | MASK BLANK SUBSTRATE, SUBSTRATE WITH MULTILAYER REFLECTION FILM, TRANSMISSIVE MASK BLANK, REFLECTIVE MASK BLANK, TRANSMISSIVE MASK, REFLECTIVE MASK, AND SEMICONDUCTOR DEVICE FABRICATION METHOD - Disclosed is a mask blank substrate for use in lithography, wherein a main surface of the substrate satisfies a relational equation of (BA | 11-06-2014 |
20150017574 | MASK BLANK SUBSTRATE, SUBSTRATE WITH MULTILAYER REFLECTION FILM, TRANSMISSIVE MASK BLANK, REFLECTIVE MASK, AND SEMICONDUCTOR DEVICE FABRICATION METHOD - Disclosed is a mask blank substrate for use in lithography, wherein the main surface on which the transfer pattern of the substrate is formed has a root mean square roughness (Rms) of not more than 0.15 nm obtained by measuring an area of 1 μm×1 μm with an atomic force microscope, and has a power spectrum density of not more than 10 nm | 01-15-2015 |
20150079501 | METHOD FOR PRODUCING SUBSTRATE WITH MULTILAYER REFLECTIVE FILM, METHOD FOR PRODUCING REFLECTIVE MASK BLANK AND METHOD FOR PRODUCING REFLECTIVE MASK - Disclosed is a method for producing a substrate with a multilayer reflective film for EUV lithography including a multilayer reflective film disposed on a principal surface of a substrate, the method including a multilayer reflective film formation step of forming the multilayer reflective film on the principal surface of the substrate in such a manner that the multilayer reflective film has a slope region in which the film thickness is decreased in a direction from the inside to the outside of the substrate on a peripheral portion of the principal surface, and a fiducial mark formation step of forming fiducial marks in the slope region by removing at least a portion of the multilayer reflective film, the fiducial marks serving as references for a defective location indicated by defect information with respect to the surface of the substrate with the multilayer reflective film. | 03-19-2015 |