Patent application number | Description | Published |
20090068851 | SUSCEPTOR, MANUFACTURING APPARATUS FOR SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE - A susceptor of the present invention includes an inner susceptor having a diameter smaller than a diameter of a wafer w and a protruding part for placing the wafer w on a surface thereof, and an outer susceptor having an opening in the central portion thereof, a first step section for placing the inner susceptor so as to block the opening and a second step section provided above the first step section for placing the wafer. | 03-12-2009 |
20090239362 | APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - An apparatus for manufacturing a semiconductor device, including in a reaction chamber: a rotor provided with a holding member holding a wafer thereon and a heater heating the wafer therein; a rotation drive mechanism; a gas supply mechanism; a gas exhaust mechanism; and a rectifying plate for rectifying the supplied process gas to supply the rectified gas, and including: an annular rectifying fin mounted on a lower portion of the plate, having a larger lower end inside diameter than an upper end inside diameter thereof and downward rectifying gas exhausted in an outer circumferential direction from above the wafer; and a distance control mechanism controlling a vertical distance between the plate and the wafer and a vertical distance between the fin and the rotor top face to be predetermined distances, respectively, thereby providing higher film formation efficiency. | 09-24-2009 |
20100055925 | HEATER, MANUFACTURING APPARATUS FOR SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE - A heater for heating a wafer includes elements that are arranged at a distance from one another in a rotationally symmetrical fashion with respect to a shaft extending through a center of the wafer, an electrode being provided to each of the elements to heat the wafer uniformly. | 03-04-2010 |
20110092075 | MANUFACTURING APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE - A semiconductor device manufacturing apparatus includes a chamber in which a wafer is loaded; a first gas supply unit for supplying a process gas into the chamber; a gas exhaust unit for exhausting a gas from the chamber; a wafer support member on which the wafer is placed; a ring on which the wafer support member is placed; a rotation drive control unit connected to the ring to rotate the wafer; a heater disposed in the ring and comprising a heater element for heating the wafer to a predetermined temperature and including an SiC layer on at least a surface, and a heater electrode portion molded integrally with a heater element and including an SiC layer on at least a surface; and a second gas supply unit for supplying an SiC source gas into the ring. | 04-21-2011 |
20130000546 | METHOD OF VAPOR PHASE EPITAXY AND VAPOR PHASE EPITAXY DEVICE - A method of vapor phase epitaxy that is one embodiment of the present invention characteristically includes loading a wafer in a reaction chamber and mounting the wafer on a supporting section; heating the wafer by a heater provided under the supporting section; performing deposition on the wafer by supplying a process gas onto the wafer while rotating the wafer; detecting a temperature distribution at least in a circumferential direction at a peripheral edge section of the wafer; and determining a presence/absence of adhesion between the wafer and the supporting section based on the detected temperature distribution. | 01-03-2013 |
Patent application number | Description | Published |
20080245349 | Internal Combustion Engine and Control Method Thereof - An operating gas circulation type internal combustion engine that uses argon as the operating gas, for example, and includes a hydrogen and oxygen supply portion, an argon supply amount regulating portion, and an electric control unit. The electric control unit determines the amount of hydrogen and oxygen to be supplied to a combustion chamber based on a required torque, which is the torque required of the internal combustion engine, and supplies the determined amounts of hydrogen and oxygen to the combustion chamber using the hydrogen supply portion and the oxygen supply portion. Further, the electric control unit determines an amount of operating gas to be supplied to the combustion chamber according to the required torque, and controls the argon supply amount regulating portion such that the determined amount of operating gas is supplied to the combustion chamber. | 10-09-2008 |
20090013686 | Exhaust heat recovery apparatus - An exhaust heat recovery apparatus includes a reciprocating internal combustion engine in which a piston reciprocates in a cylinder to generate motive power; and a Stirling engine that recovers the thermal energy of the exhaust gas discharged from the internal combustion engine and converts the thermal energy into kinetic energy. The Stirling engine is united with the internal combustion engine. A heater that the Stirling engine includes is disposed in an exhaust manifold of the internal combustion engine. With this configuration, it is possible to restrict reduction in the power output from the exhaust heat recovery means. | 01-15-2009 |
20090094980 | Exhaust Heat Recovery Apparatus - An exhaust heat recovery apparatus includes a Stirling engine and a clutch. The Stirling engine produces motive power by recovering thermal energy from exhaust gas discharged from an internal combustion engine from which exhaust heat is recovered. The motive power produced by the Stirling engine is transmitted to an internal combustion engine transmission through the clutch and an exhaust heat recovery device transmission, and combined with the motive power produced by the internal combustion engine through the internal combustion engine transmission, and is output from an output shaft. If rapid acceleration is required, and the increase in the rotation speed of the Stirling engine therefore lags behind the increase in the rotation speed of the internal combustion engine, the clutch is released. With this configuration, reduction in the power output from the heat engine, from which exhaust heat is recovered, is restricted, and the degradation of the acceleration performance is minimized. | 04-16-2009 |
20100236509 | HYDROGEN ENGINE USING A RECIRCULATING WORKING MEDIUM - A hydrogen engine | 09-23-2010 |
20110067383 | WORKING GAS CIRCULATION ENGINE - A working gas circulation engine includes a combustion chamber that is supplied with fuel, the combustion product of which is condensed, and working gas that generates power with the use of combustion of the fuel and that has a specific heat ratio higher than that of air, a circulation path that connects an inlet and an outlet of the combustion chamber to each other in such a manner that the working gas is circulated back to the combustion chamber without being released into the atmosphere, and two condensers that are provided in the circulation path, that are supplied with exhaust gas which contains the combustion product and the working gas, and that condense and remove the combustion product. | 03-24-2011 |
20110067664 | GAS CIRCULATION ENGINE - A gas circulation engine includes a combustion chamber to which high-pressure fuel in a first high-pressure fuel supply passage, an oxidant and working gas are supplied; a circulation path that connects an intake-side portion and an exhaust-side portion of the combustion chamber to each other; a fuel bleed-off tank into which the high-pressure fuel in the first high-pressure fuel supply passage is bled off; a fuel bleed-off valve that permits or shuts off communication between the first high-pressure fuel supply passage and the fuel bleed-off tank; and a fuel bleed-off control unit that permits communication between the first high-pressure fuel supply passage and the fuel bleed-off tank by opening the fuel bleed-off valve when the engine is stopped, the communication between the first high-pressure fuel supply passage and the fuel bleed-off tank being shut off during operation of the engine. | 03-24-2011 |
20120244685 | Manufacturing Apparatus and Method for Semiconductor Device - A semiconductor manufacturing apparatus includes: a plurality of reaction chambers into which wafers are introduced and deposition process is performed; a material gas supply mechanism that includes a plurality of material gas supply lines that respectively supply a material gas to the plurality of reaction chambers and a flow rate control mechanism that controls a flow rate of the marital gas in the material gas supply lines; a carrier gas supply mechanism that includes a plurality of carrier gas supply lines that respectively supplies a carrier gas into the plurality of reaction chambers; and a material gas switching mechanism that intermittently opens and closes the plurality of material gas supply lines respectively so that at least one of the plurality of material gas supply lines comes to be in an opened state at a same time, and sequentially switches the reaction chamber to which the material gas is supplied. | 09-27-2012 |
20130084690 | MANUFACTURING APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE - A semiconductor device manufacturing apparatus includes a chamber in which a wafer is loaded; a first gas supply unit for supplying a process gas into the chamber; a gas exhaust unit for exhausting a gas from the chamber; a wafer support member on which the wafer is placed; a ring on which the wafer support member is placed; a rotation drive control unit connected to the ring to rotate the wafer; a heater disposed in the ring and comprising a heater element for heating the wafer to a predetermined temperature and including an SiC layer on at least a surface, and a heater electrode portion molded integrally with a heater element and including an SiC layer on at least a surface; and a second gas supply unit for supplying an SiC source gas into the ring. | 04-04-2013 |
Patent application number | Description | Published |
20090008191 | Piston Apparatus - In order to decrease internal friction of a heat engine that converts a reciprocating motion of a piston into a rotational motion, a piston apparatus ( | 01-08-2009 |
20110232275 | INTERNAL COMBUSTION ENGINE EXHAUST COOLING SYSTEM - An internal combustion engine exhaust cooling system includes an exhaust gas cooling adapter that is arranged between an exhaust port that opens in a cylinder head, and an exhaust branch pipe, and cools exhaust gas that flows through an exhaust passage by running coolant through a coolant passage formed inside of a wall that surrounds the exhaust passage. The coolant passage includes a first passage and a second passage being provided according to an offset of an amount of heat received from exhaust gas in a circumferential direction of an inner surface of the exhaust passage, and two middle passages that connect the first passage with the second passage at both ends of the two middle passages, and a coolant delivery direction is a direction from the second passage side of a first middle passage, of the two middle passages, toward the first passage side. | 09-29-2011 |
20110247593 | CONTROL APPARATUS FOR INTERNAL COMBUSTION ENGINE - A control apparatus for an internal combustion engine includes a fuel tank; a vaporized fuel tank that is connected to an intake passage; an in-tank fuel supplying portion that supplies fuel in the fuel tank to the vaporized fuel tank; a vaporized fuel supply valve that opens and closes a connecting portion between the vaporized fuel tank and the intake passage; an air introduction valve provided in the vaporized fuel tank; a throttle valve; a vaporized fuel producing portion that produces vaporized fuel in the vaporized fuel tank; a vaporized fuel supplying portion that supplies vaporized fuel stored in the vaporized fuel tank; and a supply amount controlling portion that controls a supply amount of vaporized fuel according to an opening amount of the throttle valve by driving the throttle valve when supplying vaporized fuel. | 10-13-2011 |
20110308500 | CONTROL APPARATUS AND CONTROL METHOD FOR INTERNAL COMBUSTION ENGINE - A control apparatus and control method is provided for an internal combustion engine that includes a vaporized fuel tank in which vaporized fuel is stored, and a normally-closed vaporized fuel supply valve that opens and closes a connecting portion between the vaporized fuel tank and a surge tank. This apparatus and method produce vaporized fuel by injecting fuel into the tank while the vaporized fuel supply valve is closed while the engine is operating, then open the vaporized fuel supply valve at engine startup and supply the vaporized fuel stored in the tank to the surge tank. If there is no vaporized fuel remaining in the vaporized fuel tank when the engine stops, vacuum is generated in the vaporized fuel tank by temporarily opening the vaporized fuel supply valve before the engine stops. Vaporized fuel is then produced by injecting fuel into the vaporized fuel tank in this vacuum state. | 12-22-2011 |
20120035829 | CONTROL DEVICE FOR INTERNAL COMBUSTION ENGINE - A control device for an internal combustion engine according to an embodiment includes: cooling units arranged on a path where a coolant is circulated, and cooling an exhaust gas of the internal combustion engine with the coolant flowing through the cooling units; a pump circulating the coolant; and ECUs estimating a heat quantity of the exhaust gas and deciding whether or not to operate the pump after an ignition switch is detected to be OFF in response to the estimated heat quantity of the exhaust gas. | 02-09-2012 |
20120035830 | CONTROL DEVICE FOR INTERNAL COMBUSTION ENGINE - A control device for an internal combustion engine according to the present embodiment, includes: cooling units | 02-09-2012 |
20120059566 | CONTROL DEVICE FOR INTERNAL COMBUSTION ENGINE - In a control device for an internal combustion engine according to the present embodiment, the control device includes: cooling units arranged on a path where a coolant is circulated, and cooling an exhaust gas of an engine with the coolant flowing through the cooling units; an atmospheric pressure sensor detecting an atmosphere pressure; and ECUs deciding whether or not to perform an exhaust gas temperature control for suppressing a temperature of the exhaust gas based on whether or not a heat quantity is more than a decision value, and correcting the decision value to be lower as the atmosphere pressure is lower. | 03-08-2012 |
20120255284 | PARTICULATE MATTER TREATMENT SYSTEM - A particulate matter treatment system includes an electrode provided in an exhaust passage of an internal combustion engine, a power supply connected to the electrode and operable to apply a voltage to the electrode, a particle number detector that detects the number of particles of particulate matter downstream of the electrode, and a determining device that determines that the system is at fault when an absolute value of the amount of change in the number of particles of particulate matter detected by the particle number detector when the voltage applied from the power supply to the electrode is changed is smaller than a threshold value. | 10-11-2012 |
20120272641 | PARTICULATE MATTER CONTROL SYSTEM AND ITS FAILURE DETERMINATION METHOD - A particulate matter control system includes: an electrode that is provided in an exhaust pipe of an internal combustion engine; a power supply that is connected to the electrode and that applies voltage; a particle number detecting unit that detects the particle number of particulate matter on a downstream side of the electrode; a calculation unit that calculates a reduction rate of the particle number at the time when voltage is applied on the basis of the particle number detected by the particle number detecting unit at the time when voltage is applied and the particle number detected by the particle number detecting unit at the time when no voltage is applied; and a determination unit that determines that there is a failure when the reduction rate of the particle number, calculated by the calculation unit, is smaller than a threshold. | 11-01-2012 |
20130013173 | FUEL SUPPLY SYSTEM FOR INTERNAL COMBUSTION ENGINE - An engine includes a normal fuel tank, fuel gas tank, an in-tank injection valve and a fuel gas supply valve. During operation of the engine, in a state where the fuel gas supply valve is closed, a fuel is injected into the fuel gas tank through the in-tank injection valve to generate a fuel gas by vaporizing the fuel. The fuel gas is stored in the fuel gas tank and is maintained in the gas phase due to the natural decompression even after the engine is stopped. To start the engine, the fuel gas supply valve is opened to supply the fuel gas in the fuel gas tank to a surge tank. Thus, compared with the case where the fuel gas is generated at the start of the engine, the fuel gas can be quickly supplied into the cylinder, so that the ability to start the engine is improved. | 01-10-2013 |
20130340415 | PARTICULATE MATTER PROCESSING APPARATUS (AS AMENDED) - An excessively large electric current is suppressed from flowing to an electrode. A particulate matter processing apparatus in which a processing part with an electrode installed therein is arranged in an exhaust passage of an internal combustion engine, wherein particulate matter is caused to aggregate by generating a potential difference between the electrode and the processing part, is provided with a power supply that is connected to the electrode and applies a voltage thereto, a current detection device that detects an electric current which passes through the electrode, an air fuel ratio detection device that detects or estimates an air fuel ratio of an exhaust gas which flows through the exhaust passage, and a voltage control device that makes the voltage applied to the electrode from the power supply smaller in cases where the air fuel ratio detected by the air fuel ratio detection device is a rich air fuel ratio, than in cases where it is a stoichiometric air fuel ratio or a lean air fuel ratio. | 12-26-2013 |
20130340416 | PARTICULATE MATTER PROCESSING APPARATUS - Aggregation of particulate matter is facilitated. Provision is made for an electrode that is arranged in an exhaust passage of an internal combustion engine with a voltage to be applied thereto being able to be changed, a detection device that detects an electric current passing through the electrode, a determination device that determines whether a pulse current has been generated in the electric current detected by the detection device, and a control device that reduces the voltage to be applied more than that at this time in cases where a determination has been made by the determination device that a pulse current has been generated. | 12-26-2013 |
20140000243 | PARTICULATE MATTER PROCESSING APPARATUS | 01-02-2014 |
20140000244 | PARTICULATE MATTER PROCESSING APPARATUS | 01-02-2014 |
20140000248 | PARTICULATE MATTER PROCESSING APPARATUS | 01-02-2014 |
20140007650 | PARTICULATE MATTER PROCESSING APPARATUS - An amount of aggregation of particulate matter is estimated with a high degree of accuracy. A particulate matter processing apparatus in which a processing part with an electrode installed therein is arranged in an exhaust passage of an internal combustion engine, wherein particulate matter is caused to aggregate by generating a potential difference between the electrode and the processing part, is provided with a power supply that is connected to the electrode and applies a voltage thereto, a current detection device that detects an electric current which passes through the electrode, an estimation device that estimates an amount of aggregation of the particulate matter based on the electric current detected at the time when the voltage is applied to the electrode, an air fuel ratio detection device that detects or estimates an air fuel ratio of an exhaust gas which flows through the exhaust passage, and a prohibition device which prohibits an estimation by the estimation device in the case of a rich air fuel ratio. | 01-09-2014 |
20140318501 | CONTROL DEVICE FOR INTERNAL COMBUSTION ENGINE - An objective of the present invention is to stabilize the fuel injection amount for each cylinder and to execute fuel injection control accurately in a single-pressure-feed dual-injection type alcohol fuel injection system. An engine includes two injection valves and and a single-pressure-feed dual-injection type fuel supply system. The fuel supply system is configured such that fuel is injected sequentially in two cylinders during the pressure-feed-interval period from the execution of one fuel pressure-feed operation to the execution of the next fuel pressure-feed operation. If the alcohol concentration in the fuel is higher than a predetermined determination value γ at a startup operation time, an ECU executes only a cylinder injection for the first of the two cylinders described above, and executes both an intake passage injection and a cylinder injection for the second cylinder. Thus, even if the fuel pressure decreases due to the fuel injection for the first cylinder, the required fuel injection amount can be reserved for the second cylinder. | 10-30-2014 |
20150113959 | PARTICULATE MATTER PROCESSING APPARATUS - Aggregation of the particulate matter is facilitated. A particulate matter processing apparatus ( | 04-30-2015 |