Patent application number | Description | Published |
20090010560 | METHOD FOR IMAGE CALIBRATION AND APPARATUS FOR IMAGE ACQUIRING - The present invention relates to a method for image calibration and an apparatus for image acquiring. In the method for image calibration, the image formation position for an image acquiring unit of the apparatus is calibrated according to the relative location of the image acquiring unit to a objective lens of the apparatus, wherein the relative location is determined by calculating the focus index of the image acquired by the image acquiring unit so that a clear and sharp interferogram can be obtained for three dimensional surface profile measuring. In addition, it is possible to obtain a clear and sharp image without any interference fringe outside the coherent range by adjusting the image formation position, which is capable of being utilized for two dimensional defect detection and dimension measurement. | 01-08-2009 |
20090079995 | TILTING ADJUSTABLE SURFACE PROFILOMETER - The invention relates to a tilting adjustable surface profilometer, comprising an apparatus capable of adjusting an image acquiring angle. The apparatus includes two types of frameworks. One is a translation-stage-type tilting adjustable surface profilometer, which is enabled by the translations of two translation stage with the rotation of a rotary rack, a surface profile with an omni-directional angle of a sample can be obtained. The other framework is a surface profilometer with an arc-trajectory tilting apparatus, which is enabled by guiding the surface profilometer to slide along the arc rails with the rotations of the rotary rack, a surface profile with an omni-directional angle of a sample can be obtained. | 03-26-2009 |
20090147334 | MULTI-COLOR OFF-AXIS DIGITAL HOLOGRAPHIC SYSTEM AND THE IMAGING METHOD THEREOF - A multi-color off-axis digital holographic system and the imaging method thereof are disclosed. The multi-color off-axis digital holographic system comprises: a plurality of light emitting diodes, for provide a red (R) beam, a green (G) beam and a blue (B) beam; an interference object lens module, for receiving the R, G, and B beams to generate a beam containing an interference signal; a color imaging device, for receiving the beam containing the interference signal and thus forming a hologram on a surface of the color imaging device by holographic interference while registering the hologram; and a processing device, for receiving the registered hologram form the color imaging device; wherein the processing device perform a zero-filling and reconstructing operations upon the received hologram to obtain phase information of the R, G and B beams. With the aforesaid system, a three-dimensional surface profile with respect to a RG synthetic wavelength is obtained according to a calculation using the phase information of the R and G beams as well as the wavelengths thereof, and similarly, a three-dimensional surface profile with respect to a GB synthetic wavelength is obtained according to a calculation using the phase information of the G and B beams as well as the wavelengths thereof. Thereafter, by performing a calculation using the RG synthetic wavelength and its phase as well as the GB synthetic wavelength and its phase, an overall three-dimensional surface profile with respect to a complete synthetic wavelength is obtained. | 06-11-2009 |
20100321773 | METHOD AND SYSTEM FOR THREE-DIMENSIONAL POLARIZATION-BASED CONFOCAL MICROSCOPY - A method and system for three-dimensional polarization-based confocal microscopy are provided in the present disclosure for analyzing the surface profile of an object. In the present disclosure, a linear-polarizing structured light formed by an optical grating is projected on the object underlying profile measurement. By means of a set of polarizers and steps of shifting the structured light, a series of images with respect to the different image-acquired location associated with the object are obtained using confocal principle. Following this, a plurality of focus indexes respectively corresponding to a plurality of inspected pixels of each image are obtained for forming a focus curve with respect to the measuring depth and obtaining a peak value associated with each depth response curve. Finally, a depth location with respect to the peak value for each depth response curve is obtained for reconstructing the surface profile of the object. | 12-23-2010 |
20110157458 | METHOD AND APPARATUS FOR FOCUSING - The present disclosure provides a method and system for focusing, which modulates a broadband light into a dispersive light having a higher dispersion characteristic and a lower dispersion characteristic, and the dispersion light is projected onto an object so as to form an object light. By means of the filtering and dividing procedure, a first optical spectrum of the dispersion light with respect to the higher dispersion characteristic is utilized to detect a height information of the surface profile of the object. Then, according to the height information, a second optical spectrum of the dispersion light with respect to the lower dispersion characteristic is adjusted to focus onto the object so that an imaging sensing device is capable of sensing the object light with respect to the lower dispersion characteristic, and thereby obtaining a clear and focusing image corresponding to the surface of the object. | 06-30-2011 |
20110261362 | METHOD FOR IMAGE CALIBRATION AND APPARATUS FOR IMAGE ACQUIRING - The present invention relates to a method for image calibration and an apparatus for image acquiring. In the method for image calibration, the image formation position for an image acquiring unit of the apparatus is calibrated according to the relative location of the image acquiring unit to a objective lens of the apparatus, wherein the relative location is determined by calculating the focus index of the image acquired by the image acquiring unit so that a clear and sharp interferogram can be obtained for three dimensional surface profile measuring. In addition, it is possible to obtain a clear and sharp image without any interference fringe outside the coherent range by adjusting the image formation position, which is capable of being utilized for two dimensional defect detection and dimension measurement. | 10-27-2011 |
20120170052 | MEASURING METHOD FOR TOPOGRAPHY OF MOVING SPECIMEN AND A MEASURING APPARATUS THEREOF - A measuring method for topography of moving specimen and a measuring apparatus thereof is disclosed, providing a measuring module that moves along with a testing specimen to narrow relative velocity of the testing specimen and the measuring module so that the measuring module is able to have enough luminous intensity signal at the same position in time, to measure the topography or the thickness of the testing specimen. | 07-05-2012 |
20140092295 | AUTOFOCUS SYSTEM AND AUTOFOCUS METHOD - An embodiment of an autofocus system is provided, including a height detection module, an image detection module, a movement unit and a processing unit. The height detection module is arranged to output a plurality of detection lights along a Z axis direction, wherein each of the detection lights has different focal lengths and different wavelengths such that the height detection module generates a dispersion region along the Z axis direction. The image detection module is arranged to capture an image of the focus position. The movement unit is arranged to move an object along the Z axis direction, wherein the object has an internal surface and an external surface. The processing unit determines whether the external surface and the internal surface are within the dispersion region according to the quantity of the energy peaks of a reflectance spectrum received by the height detection module. | 04-03-2014 |