Patent application number | Description | Published |
20120196424 | METHOD OF FABRICATING A DEEP TRENCH (DT) METAL-INSULATOR-METAL (MIM) CAPACITOR - A method includes providing an SOI substrate including a layer of silicon disposed atop a layer of an oxide, the layer of an oxide being disposed atop the semiconductor substrate; forming a deep trench having a sidewall extending through the layer of silicon and the layer of an oxide and into the substrate; depositing a continuous spacer on the sidewall to cover the layer of silicon, the layer of an oxide and a part of the substrate; depositing a first conformal layer of a conductive material throughout the inside of the deep trench; creating a silicide within the deep trench in regions extending through the sidewall into an uncovered part of the substrate; removing the first conformal layer from the continuous spacer; removing the continuous spacer; depositing a layer of a high k dielectric material throughout the inside of the deep trench, and depositing a second conformal layer of a conductive material onto the layer of a high-k dielectric material. | 08-02-2012 |
20120329230 | FABRICATION OF SILICON OXIDE AND OXYNITRIDE HAVING SUB-NANOMETER THICKNESS - A method of fabricating a silicon-containing oxide layer that includes providing a chemical oxide layer on a surface of a semiconductor substrate, removing the chemical oxide layer in an oxygen-free environment at a temperature of 1000° C. or greater to provide a bare surface of the semiconductor substrate, and introducing an oxygen-containing gas at a flow rate to the bare surface of the semiconductor substrate for a first time period at the temperature of 1000° C. The temperature is then reduced to room temperature during a second time period while maintaining the flow rate of the oxygen containing gas to provide a silicon-containing oxide layer having a thickness ranging from 0.5 Å to 10 Å. | 12-27-2012 |
20130277765 | SEMICONDUCTOR DEVICE INCLUDING GRADED GATE STACK, RELATED METHOD AND DESIGN STRUCTURE - A semiconductor device is disclosed. The semiconductor device includes a substrate; and a gate structure disposed directly on the substrate, the gate structure including: a graded region with a varied material concentration profile; and a metal layer disposed on the graded region. | 10-24-2013 |
20130330843 | METHOD OF MANUFACTURING SCALED EQUIVALENT OXIDE THICKNESS GATE STACKS IN SEMICONDUCTOR DEVICES AND RELATED DESIGN STRUCTURE - A method of forming a semiconductor device is disclosed. The method includes: forming a dielectric region on a substrate; annealing the dielectric region in an environment including ammonia (NH | 12-12-2013 |
20140001570 | COMPOSITE HIGH-K GATE DIELECTRIC STACK FOR REDUCING GATE LEAKAGE | 01-02-2014 |
20140070334 | SEMICONDUCTOR DEVICE INCLUDING GRADED GATE STACK, RELATED METHOD AND DESIGN STRUCTURE - A semiconductor device is disclosed. The semiconductor device includes a substrate; and a gate structure disposed directly on the substrate, the gate structure including: a graded region with a varied material concentration profile; and a metal layer disposed on the graded region. | 03-13-2014 |
20140183051 | DEPOSITION OF PURE METALS IN 3D STRUCTURES - A system and method generate atomic hydrogen (H) for deposition of a pure metal in a three-dimensional (3D) structure. The method includes forming a monolayer of a compound that includes the pure metal. The method also includes depositing the monolayer on the 3D structure and immersing the 3D structure with the monolayer in an electrochemical cell chamber including an electrolyte. Applying a negative bias voltage to the 3D structure with the monolayer and a positive bias voltage to a counter electrode generates atomic hydrogen from the electrolyte and deposits the pure metal from the monolayer in the 3D structure. | 07-03-2014 |
20140187028 | Concurrently Forming nFET and pFET Gate Dielectric Layers - Embodiments include methods of forming an nFET-tuned gate dielectric and a pFET-tuned gate dielectric. Methods may include forming a high-k layer above a substrate having a pFET region and an nFET region, forming a first sacrificial layer, a pFET work-function metal layer, and a second sacrificial layer above the first high-k layer in the pFET region, and an nFET work-function metal layer above the first high-k layer in the nFET region and above the second sacrificial layer in the pFET region. The first high-k layer then may be annealed to form an nFET gate dielectric layer in the nFET region and a pFET gate dielectric layer in the pFET region. The first high-k layer may be annealed in the presence of a nitrogen source to cause atoms from the nitrogen source to diffuse into the first high-k layer in the nFET region. | 07-03-2014 |
20140308821 | HYDROXYL GROUP TERMINATION FOR NUCLEATION OF A DIELECTRIC METALLIC OXIDE - A surface of a semiconductor-containing dielectric material/oxynitride/nitride is treated with a basic solution in order to provide hydroxyl group termination of the surface. A dielectric metal oxide is subsequently deposited by atomic layer deposition. The hydroxyl group termination provides a uniform surface condition that facilitates nucleation and deposition of the dielectric metal oxide, and reduces interfacial defects between the oxide and the dielectric metal oxide. Further, treatment with the basic solution removes more oxide from a surface of a silicon germanium alloy with a greater atomic concentration of germanium, thereby reducing a differential in the total thickness of the combination of the oxide and the dielectric metal oxide across surfaces with different germanium concentrations. | 10-16-2014 |
Patent application number | Description | Published |
20090308670 | HYBRID DINGHY PUSHER - A hybrid dinghy pusher for pushing motorhomes is provided. A hybrid vehicle can be connected to a motorhome by a tow bar for towing the hybrid vehicle. When being towed behind a motorhome, the hybrid vehicle can be switched into hybrid dinghy pusher mode. In this mode, during acceleration of the motorhome, the electrical batteries and motors of the hybrid vehicle can provide a propulsive force through the tow bar to the motorhome, which assists the motorhome in accelerating and improves fuel efficiency. Additionally, the dinghy motors can act as generators when appropriate, creating energy which can be stored in batteries for later use during acceleration. The resistance created by the hybrid vehicle can also provide an additional braking force to the motorhome via the tow bar. | 12-17-2009 |
20120136522 | HYBRID DINGHY PUSHER - A hybrid dinghy pusher for pushing motorhomes is provided. A hybrid vehicle can be connected to a motorhome by a tow bar for towing the hybrid vehicle. When being towed behind a motorhome, the hybrid vehicle can be switched into hybrid dinghy pusher mode. In this mode, during acceleration of the motorhome, the electrical batteries and motors of the hybrid vehicle can provide a propulsive force through the tow bar to the motorhome, which assists the motorhome in accelerating and improves fuel efficiency. Additionally, the dinghy motors can act as generators when appropriate, creating energy which can be stored in batteries for later use during acceleration. The resistance created by the hybrid vehicle can also provide an additional braking force to the motorhome via the tow bar. | 05-31-2012 |