Patent application number | Description | Published |
20090066438 | IMPEDANCE MATCHING METHODS AND SYSTEMS PERFORMING THE SAME - Provided are an impedance matching method and a matching system performing the same. The method includes: measuring an electrical characteristic of the power transmission line; determining a pulse mode of the power source; extracting a control parameter for impedance matching from the electrical characteristic of the power transmission line; and controlling the matching system through the control parameter, wherein the matching system is controlled differently according to the pulse mode. | 03-12-2009 |
20090183834 | PLASMA GENERATION APPARATUS - A plasma generation apparatus includes: a chamber having a chamber lid and defining an airtight reaction region; a susceptor in the chamber; a gas supply means supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor through the chamber lid, comprising: a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion; a radio frequency (RF) power supply connected to the chamber; an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and a matching circuit matching an impedance between the RF power supply and the induction coil. | 07-23-2009 |
20110297627 | STRAINER WALL STRUCTURE, FILTRATION METHOD USING THE SAME, AND METHOD OF FABRICATING THE SAME - A strainer wall structure that removes foreign substances from a fluid suctioned into a pipe and a re-circulation pump that is part of an emergency core cooling system (ECCS). The strainer wall structure has an inlet side and an outlet side through which cooling water is introduced and discharged, respectively, and includes a body having an opening in a direction of the inlet side, closed side surfaces, and an outlet port disposed at one of the closed side surfaces. The strainer includes a punched plate filter screen inserted into the opening. A modular cassette apparatus including grooved first filter plates is inserted into the body, and second filter plates having second grooves is inserted into the first grooves. | 12-08-2011 |
20120037559 | STRAINER FILTERING APPARATUS INCLUDING FILTERING TUBE - A strainer filtering apparatus including a filtering tube providing a substantially larger effective filtering area for its length and width, substantially reducing foreign substances covering a suction surface and flow resistance of the foreign substances, and reducing pressure drop at a cooling water passage. The strainer filtering apparatus includes at least one inlet side into which cooling water is introduced and an outlet side through which the cooling water is discharged, hollow filtering tubes with filtering holes along their lengths, an upper plate having first grooves located at a lower surface and coupled to upper ends of the filtering tubes and an inlet part into which the cooling water is introduced, and a lower plate having punched holes to which lower ends of the filtering tubes are coupled. The cooling water in the filtering tubes is introduced through the punched holes and discharged at the outlet side. | 02-16-2012 |
20120037572 | STRAINER WALL STRUCTURE INCLUDING CURVED SECTIONS, METHOD OF MANUFACTURING THE SAME, AND FILTERING METHOD USING THE SAME - A strainer wall structure includes curved sections, a method of manufacturing the same, and a filtering method using the strainer wall structure to provide a substantially larger effective filtering area in the same length and width, substantially reducing foreign substances covering a suction surface and flow resistance of the foreign substances, and reducing pressure drop at a cooling water pass corresponding thereto. The strainer wall structure includes an inlet side through which cooling water is introduced and an outlet side through which the filtered cooling water is discharged, includes a body having openings in directions of the inlet side and the outlet side, and a first filter plate inserted into the body and including curved sections formed by alternately bending a first punched plate having filtering holes in opposite directions and at a predetermined interval. | 02-16-2012 |
20120306367 | IMPEDANCE MATCHING APPARATUS - Provided is an impedance matching apparatus for matching impedance to a plasma load. The impedance matching apparatus includes a first frequency impedance matching circuit unit that transfers an output of a first frequency RF power source unit, operating at a first frequency, to the plasma load; and a second frequency impedance matching circuit unit that transfers an output of a second frequency RF power source unit, operating at a second frequency higher than the first frequency, to the plasma load. The first frequency impedance matching circuit unit includes a T-type matching circuit, and the second frequency impedance matching circuit unit includes a standard L-type matching circuit or Π-type matching circuit. | 12-06-2012 |
20130134877 | RF POWER DISTRIBUTION DEVICE AND RF POWER DISTRIBUTION METHOD - Provided are an RF power distribution device and an RF power distribution method. The RF power distribution device includes an impedance matching network for transferring power from an RF power source and a power distribution unit for distributing the output power from the impedance matching network to at least one electrode generating capacitively-coupled plasma. The power distribution unit includes a first reactive element connected in series to a first electrode, a variable capacitor having one end connected in parallel to the first reactive element and the first electrode and the other end grounded, and a second reactive element having one end connected to a first node where the one end of the variable capacitor and one end of the first reactance device are in contact with each other and the other end connected to a second node where a second electrode and an output terminal of the impedance matching network are connected. | 05-30-2013 |
20140130980 | PLASMA GENERATION APPARATUS AND PLASMA GENERATION METHOD - Provided are a plasma generation apparatus and a plasma generation method. The plasma generation apparatus includes a chamber including a dielectric window and a toroidal discharge space, a magnetic core disposed to surround a portion of the chamber, an induction coil disposed to wind the magnetic core, and a waveguide radiating a microwave through the dielectric window. Alternating current flowing in the induction coil forms a magnetic flux at the magnetic core, and the magnetic flux generates inductively-coupled plasma. A microwave propagating along the waveguide generates microwave plasma inside the chamber. | 05-15-2014 |
20140218076 | Synchronization of RF Pulsing With RF Metrology, Processing, and Control - A radio frequency (RF) system is disclosed. The RF system includes an RF sensor, an analog to digital converter (ADC) module, a processing module, and a synchronization module. The RF sensor measures a parameter of an RF output and generates an RF signal based on the parameter. The ADC module converts samples of the RF signal into digital values. The processing module generates processed values based on the digital values. The synchronization module outputs one of the processed values in response to a transition in the RF output. | 08-07-2014 |