Patent application number | Description | Published |
20090262325 | Positioning System, Lithographic Apparatus and Device Manufacturing Method - A positioning system to position a table within a base frame of a lithographic apparatus, the positioning system including first and second actuators and a controller. The first actuator exerting an actuation force on the table. The first actuator being connected to a balance mass constructed and arranged to absorb a reaction force of the first actuator. The controller and second actuator constructed and arranged to exert a compensation force and/or torque to compensate a torque caused by the actuation force exerted by the first actuator on the balance mass. | 10-22-2009 |
20100033098 | METHOD AND DEVICE FOR DRIVING A GAS DISCHARGE LAMP | 02-11-2010 |
20100091262 | POSITIONING SYSTEM, METHOD, AND LITHOGRAPHIC APPARATUS - A lithographic apparatus includes a positioner configured to position a first part of the apparatus relative to a second part of the apparatus, the positioner including a motor having a motor position dependent motor constant defining a relation between a motor input and a motor output, and a control system to drive the motor, the control system including a set-point generator to provide a reference signal based on a desired position of the first part relative to the second part, and a controller to provide a drive signal to the motor based on the reference signal, wherein the controller includes a compensator which is configured to at least partially compensate the drive signal for the motor position dependent motor constant. The invention further relates to a positioner, a method to optimize the positioning system, and a method to derive a motor position dependent motor constant. | 04-15-2010 |
20100149516 | Lithographic Apparatus and A Method to Compensate for the Effect of Disturbances on the Projection System of a Lithographic Apparatus - Embodiments of the invention provide a lithographic apparatus including an illumination system configured to condition a radiation beam, a patterning device support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, a projection system configured to project the patterned radiation beam onto a target portion of the substrate, an active air mount to support the projection system, the active air mount including at least one actuator, and a feed-forward device, the feed-forward device being configured to provide on the basis of a set-point signal of a movable object, a feed-forward signal to the at least one actuator, wherein the feed-forward signal is designed to decrease a disturbance effect on the projection system due to movement of the movable object. | 06-17-2010 |
20110194088 | Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method - A projection system (PS) is provided that includes a sensor system ( | 08-11-2011 |
20120147355 | Positioning System, Lithographic Apparatus and Device Manufacturing Method - A positioning system to position a table within a base frame of a lithographic apparatus, the positioning system including first and second actuators and a controller. The first actuator exerting an actuation force on the table. The first actuator being connected to a balance mass constructed and arranged to absorb a reaction force of the first actuator. The controller and second actuator constructed and arranged to exert a compensation force and/or torque to compensate a torque caused by the actuation force exerted by the first actuator on the balance mass. | 06-14-2012 |
20120169246 | ILLUMINATION DEVICE - An illumination device ( | 07-05-2012 |
20120170270 | LIGHTING DEVICE - A lighting device comprises at least a light source ( | 07-05-2012 |
20120186271 | NOISE REDUCTION FOR AN ACOUSTIC COOLING SYSTEM - The present invention relates to an acoustic cooling system ( | 07-26-2012 |
20120293077 | ENERGY MANAGEMENT CONTROL FOR SOLAR-POWERED LIGHTING DEVICES - This invention relates to a method of controlling the light output of a solar-powered lighting device. The lighting device comprises a light source, a battery connected to the light source, a solar-power generator including a charger connected to the battery, and a control unit for performing the light output control. The method comprises:—charging the battery while solar-power is generated;—acquiring local day-light data;—repeatedly:—acquiring, at predetermined time intervals, local weather fore-cast data covering a predetermined time period, and determining a lighting output profile for the predetermined time period; and—driving the lighting device according to the lighting output profile, wherein said determining a lighting output profile comprises:—predicting a lighting demand for the predetermined time period on basis of first environment light data, which first environment light data comprises the local day-light data;—predicting a battery capacity for the predetermined time period on basis of a present energy storage level and second environment light data, which second environment light data comprises the weather forecast data and the local day-light data; and—determining the lighting output profile on basis of the lighting demand and the battery capacity under consideration of keeping the energy storage level above a predetermined minimum level during the predetermined time period. | 11-22-2012 |
20140293251 | Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method - A projection system is provided that includes a sensor system that measures at least one parameter that relates to the physical deformation of a frame that supports the optical elements within the projection system, and a control system that, based on the measurements from the sensor system, determines an expected deviation of the position of the beam of radiation projected by the projection system that is caused by the physical deformation of the frame. | 10-02-2014 |