Patent application number | Description | Published |
20090111276 | Temperature control module using gas pressure to control thermal conductance between liquid coolant and component body - A temperature control module for a semiconductor processing chamber comprises a thermally conductive component body, one or more channels in the component body and one or more tubes concentric therewith, such that gas filled spaces surround the tubes. By flowing a heat transfer liquid in the tubes and adjusting the gas pressure in the spaces, localized temperature of the component body can be precisely controlled. One or more heating elements can be arranged in each zone and a heat transfer liquid can be passed through the tubes to effect heating or cooling of each zone by activating the heating elements and/or varying pressure of the gas in the spaces. | 04-30-2009 |
20120070914 | TEMPERATURE CONTROL MODULE USING GAS PRESSURE TO CONTROL THERMAL CONDUCTANCE BETWEEN LIQUID COOLANT AND COMPONENT BODY - A temperature control module for a semiconductor processing chamber comprises a thermally conductive component body, one or more channels in the component body and one or more tubes concentric therewith, such that gas filled spaces surround the tubes. By flowing a heat transfer liquid in the tubes and adjusting the gas pressure in the spaces, localized temperature of the component body can be precisely controlled. One or more heating elements can be arranged in each zone and a heat transfer liquid can be passed through the tubes to effect heating or cooling of each zone by activating the heating elements and/or varying pressure of the gas in the spaces. | 03-22-2012 |
20140263177 | System and Method for Heating Plasma Exposed Surfaces - A substrate support apparatus for a plasma processing system includes a layer of dielectric material having a top surface and a bottom surface. The top surface is defined to support a substrate in exposure to a plasma. The substrate support apparatus also includes a number of optical fibers each having a first end and a second end. The first end of each optical fiber is defined to receive photons from a photon source. The second end of each optical fiber is oriented to project photons received from the photon source onto the bottom surface of the layer of dielectric material. | 09-18-2014 |
20140356985 | TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY - A temperature controlled substrate support assembly used for processing a substrate in a vacuum chamber of a semiconductor processing apparatus. The substrate support assembly comprises a top plate for supporting the substrate. A base plate is disposed below the top plate wherein the base plate comprises a cavity in an upper surface of the base plate. A cover plate is disposed between the top plate and the base plate. At least one thermoelectric module is in the cavity in the upper surface of the base plate wherein the at least one thermoelectric module is in thermal contact with the top plate and the base plate, and the at least one thermoelectric module is maintained at atmospheric pressure. | 12-04-2014 |
20150028744 | Etch Rate Modeling and Use Thereof for In-Chamber and Chamber-to-Chamber Matching - A method for performing chamber-to-chamber matching includes receiving a voltage and a current measured at an output of an RF generator of a first plasma system. The method further includes calculating a sum of terms. The first term is a first product of a coefficient and a function of the voltage. The second term is a second product of a coefficient and a function of the current. The third term is a third product of a coefficient, a function of the voltage, and a function of the current. The method further includes determining the sum to be the etch rate associated with the first plasma system and adjusting power output from an RF generator of a second plasma system to achieve the etch rate associated with the first plasma system. | 01-29-2015 |
20150032245 | Etch Rate Modeling and Use Thereof with Multiple Parameters for In-Chamber and Chamber-to-Chamber Matching - A method includes receiving a voltage and current measured at an output of an RF generator of a first plasma system and calculating a first model etch rate based on the voltage and current, and a power. The method further includes receiving a voltage and current measured at an output of the RF generator of a second plasma system, determining a second model etch rate based on the voltage and current at the output of the RF generator of the second plasma system, and comparing the second model etch rate with the first model etch rate. The method includes adjusting a power at the output of the RF generator of the second plasma system to achieve the first model etch rate associated with the first plasma system upon determining that the second model etch rate does not match the first model etch rate. The method is executed by a processor. | 01-29-2015 |
Patent application number | Description | Published |
20110260836 | Device and Method for Radio Programming Wireless Terminal Devices - A method and device for radio programming wireless terminal devices, which have a unique radio identification and an optical or acoustic signal device, with a transceiver for radio communication with the terminal devices and a control device connected to the transceiver. The control device is configured for radio programming the terminal devices with a predetermined radio identification via the radio transceiver. The control device is connected with at least one optical or acoustic signal detector and is configured for transmitting a request for emission of an optical or acoustic signal to a terminal device with a predetermined radio identification via the transceiver. The terminal device is radio programmed, only when the signal detector detects an optical or acoustic signal. | 10-27-2011 |
20110263207 | BEACON FOR A ROAD TOLL SYSTEM - A beacon with a transceiver for radio communication with vehicle OBUs of a road toll system, wherein the transceiver has a directional antenna and is configured to communicate wirelessly with OBUs on a selected channel directed via the directional antenna wherein the transceiver is additionally equipped with an omnidirectional antenna and is configured to transmit, before the beginning of a directional radio communication, by means of the omnidirectional antenna a channel reservation message and/or to check, before the beginning of a directional radio communication, by means of the omnidirectional antenna whether the selected channel is free. | 10-27-2011 |
20110267470 | RADIO BEACON FOR A WIRELESS ROAD TOLL SYSTEM - A radio beacon for a wireless road toll system including a transceiver, which is arranged for packet-type radio communication with onboard units of passing vehicles; at least one camera for recording an image of a passing object; and a control device connecting to the transceiver and the camera. The control device is configured to measure, in conjunction with the transceiver, the number of data packets received per unit time from a specific onboard unit and to actuate the camera to record an image of the object carrying this onboard unit, in the case of a number exceeding a threshold value. | 11-03-2011 |
20130141281 | CONTROL VEHICLE FOR A ROAD TOLL SYSTEM - A control vehicle for a road toll system on the basis of vehicle-mounted onboard units which can be polled via DSRC radio communications, with the control vehicle comprising at least one DRSC transceiver with at least two antenna systems, which are distributed with a mutual distance over the longitudinal direction of the control vehicle, for polling a passing on-board unit. | 06-06-2013 |
20130234892 | Method for Radio Communication Between a Radio Beacon and an Onboard Unit, and Radio Beacon and Onboard Unit Therefor - Selective radio communication between a radio beacon and an onboard unit of a vehicle passing the radio beacon comprising: in the onboard unit determining the current heading of the onboard unit and transmitting information thereon to the radio beacon; in the radio beacon checking whether the heading indicated in the heading information is within predetermined boundaries, and if so, carrying out a radio communication with the onboard unit. | 09-12-2013 |
20140081718 | METHOD, RADIO BEACON AND ONBOARD UNIT FOR GENERATING PARKING FEE TRANSACTIONS - A method for generating a parking fee transaction for a vehicle that comprises an onboard unit having an identifier, and a radio beacon and an onboard unit for carrying out the method, are provided. The method includes: wirelessly polling the identifier by a roadside radio beacon as a current identifier, generating a parking fee transaction for the identifier if the current identifier is identical to a stored old identifier, storing the current identifier as the old identifier, waiting a predetermined time period, and repeating these steps. | 03-20-2014 |
20140081848 | METHOD FOR ELECTRONICALLY PROCESSING A TRAFFIC OFFENSE AND ONBOARD-UNIT THEREFOR - A method for electronically processing a traffic violation of a vehicle that comprises an onboard unit having a transceiver, an input device and an output device, and an onboard unit for carrying out the method, are provided. The method includes: transmitting a traffic violation message from a beacon to the transceiver of the onboard unit and outputting the traffic violation message on the output device of the onboard unit; accepting a user selection concerning two options via the input device of the onboard unit; if the user selection indicates the first option, transmitting the traffic violation message from the onboard unit to a remote central facility; if the user selection indicates the second option, generating a debit transaction related to the traffic violation and charging the debit transaction against a user account. | 03-20-2014 |
20140316685 | ONBOARD-INSTALLATION FOR A VEHICLE - The present subject matter relates to an onboard unit for a traffic telematics system, comprising: a first communication module, designed for near-range radio communication with a first external communication device, a second communication module, designed for far-range radio communication with a second external communication device, and a non-volatile memory, which can be accessed both by the first and the second communication module, wherein each communication module has a power-supplied communication mode and a powerless or power-saving rest mode, and wherein the power supply of the memory during an access thereto is effected by the accessing communication module. The present subject matter further relates to an onboard system for a vehicle comprising such an onboard unit, and to a communication device for said system. | 10-23-2014 |
20140316992 | METHOD FOR CHARGING AN ONBOARD-UNIT WITH AN ELECTRONIC TICKET - Methods are disclosed for charging an onboard unit with an electronic ticket and redeeming the ticket at a radio beacon. The onboard unit has a DSRC interface for radio communication with the radio beacon and a second interface for radio communication with a mobile phone. The second interface is separate from the DSRC interface. The onboard unit is provided with a public and a private electronic key of the onboard unit. In the mobile telephone, an encrypted ticket is received and the encrypted ticket is sent to the onboard unit. In the onboard unit, the encrypted ticket is received, the received ticket is decrypted, and the ticket is transmitted to the radio beacon for redemption. | 10-23-2014 |
20150022314 | METHOD FOR AUTHENTICATING AN RFID TAG - A method for authenticating an RFID tag with the aid of an RFID reader via a radio interface, wherein a user-specific key is stored in the RFID reader and a tag-specific identifier and a password generated from the identifier and the key in accordance with a known derivative function are stored in the RFID tag, comprising the following steps performed in the RFID reader: receiving via the radio interface the identifier of an RFID tag to be authenticated, generating the correct password from the received identifier and the stored key according to the known derivative function, and generating at least one incorrect password differing from the correct password, sending a series of at least two passwords, at least one being correct and at least one being incorrect, via the radio interface to the RFID tag, and authenticating the RFID tag if no confirmation response is received to any incorrect password. | 01-22-2015 |
20150056922 | METHOD AND RADIO BEACON FOR LOCALISING AN ON-BOARD UNIT - A method for localising an on-board unit, which has a radio transceiver and an identifier, to a predefined area around a radio beacon, comprising the following steps: a) storing the identifier and an associated radio property in a database; b) sending a first request; c) receiving a first response from an on-board unit; d) determining, from the database, the radio property of the transceiver associated with the received identifier; and e) localising the on-board unit in the predefined area; wherein: the steps b) to e) are repeated, for each run-through of the steps b) to e), a localisation result is stored in a presence list, and the localising is verified when the number of the positive localisation results exceeds a threshold value. | 02-26-2015 |