Patent application number | Description | Published |
20120210422 | METHOD AND APPARATUS FOR DETECTING MALICIOUS SOFTWARE USING GENERIC SIGNATURES - Novel methods, components, and systems for automatically detecting malicious software are presented. More specifically, we describe methods, components, and systems for the automated deployment of generic signatures to detect malicious software. (Typically, generic signature creation and deployment require more extensive manual processes.) The disclosed invention provides a significant improvement with regard to automation compared to previous approaches. | 08-16-2012 |
20120210423 | METHOD AND APPARATUS FOR DETECTING MALICIOUS SOFTWARE THROUGH CONTEXTUAL CONVICTIONS, GENERIC SIGNATURES AND MACHINE LEARNING TECHNIQUES - Novel methods, components, and systems that enhance traditional techniques for detecting malicious software are presented. More specifically, methods, components, and systems that use important contextual information from a client system (such as recent history of events on that system), machine learning techniques, the automated deployment of generic signatures, and combinations thereof, to detect malicious software. The disclosed invention provides a significant improvement with regard to automation compared to previous approaches. | 08-16-2012 |
20120227105 | METHOD AND APPARATUS FOR DETECTING MALICIOUS SOFTWARE USING MACHINE LEARNING TECHNIQUES - Novel methods, components, and systems for detecting malicious software in a proactive manner are presented. More specifically, we describe methods, components, and systems that leverage machine learning techniques to detect malicious software. The disclosed invention provides a significant improvement with regard to detection capabilities compared to previous approaches. | 09-06-2012 |
20130139261 | METHOD AND APPARATUS FOR DETECTING MALICIOUS SOFTWARE THROUGH CONTEXTUAL CONVICTIONS - Novel methods, components, and systems that enhance traditional techniques for detecting malicious software are presented. More specifically, we describe methods, components, and systems that leverage important contextual information from a client system (such as recent history of events on that system) to detect malicious software that might have otherwise gone ignored. The disclosed invention provides a significant improvement with regard to detection capabilities compared to previous approaches. | 05-30-2013 |
20130276114 | METHOD AND APPARATUS FOR RETROACTIVELY DETECTING MALICIOUS OR OTHERWISE UNDESIRABLE SOFTWARE - A system for retroactively detecting malicious software on an end user system without performing expensive cross-referencing directly on the endpoint device. A client provides a server with information about files that are on it together with what it knows about these files. The server tracks this information and cross-references it against new intelligence it gathers on clean or malicious files. If a discrepancy is found (i.e., a file that had been called malicious, but that is actually benign or vice versa), the server informs the client, which in turn takes an appropriate action based on this information. | 10-17-2013 |
20150026810 | Method and Apparatus for Detecting Malicious Software Using Machine Learning Techniques - Novel methods, components, and systems for detecting malicious software in a proactive manner are presented. More specifically, we describe methods, components, and systems that leverage machine learning techniques to detect malicious software. The disclosed invention provides a significant improvement with regard to detection capabilities compared to previous approaches. | 01-22-2015 |
20150205959 | METHOD AND APPARATUS FOR RETROACTIVELY DETECTING MALICIOUS OR OTHERWISE UNDESIRABLE SOFTWARE - A system retroactively detects malicious software on an end user system without performing expensive cross-referencing directly on the endpoint device. A client provides a server with information about files that are on it together with what it knows about these files. The server tracks this information and cross-references it against new intelligence it gathers on clean or malicious files. If a discrepancy in found (i.e., a file that had been called malicious, but that is actually benign or vice versa), the server informs the client, which in turn takes an appropriate action based on this information. | 07-23-2015 |
Patent application number | Description | Published |
20110296855 | Thermal Management System with Dual Mode Coolant Loops - A dual mode, thermal management system for use in a vehicle is provided. At a minimum, the system includes a first coolant loop in thermal communication with a battery system, a second coolant loop in thermal communication with at least one drive train component (e.g., electric motor, power electronics, inverter), and a dual mode valve system that provides means for selecting between a first mode where the two coolant loops operate in parallel, and a second mode where the two coolant loops operate in series. | 12-08-2011 |
20120180997 | Coolant De-Aeration Reservoir - A coolant de-aeration system is provided that includes a coolant reservoir, a plurality of de-aeration chambers within the reservoir, a plurality of de-aeration chamber apertures that direct coolant flow through the de-aeration chambers, a reservoir inlet and a reservoir outlet that share a common coolant flow pathway that allows the majority of coolant to flow directly between the reservoir inlet and the reservoir outlet, and a reservoir inlet aperture that directs a portion of coolant passing along the common coolant flow pathway through the reservoir's de-aeration chambers for de-aeration prior to being returned to the common coolant flow pathway. | 07-19-2012 |
20120183815 | Thermal Management System with Dual Mode Coolant Loops - A dual mode, thermal management system for use in a vehicle is provided. At a minimum, the system includes a first coolant loop in thermal communication with a battery system, a second coolant loop in thermal communication with at least one drive train component (e.g., electric motor, power electronics, inverter), a dual mode valve system that provides means for selecting between a first mode where the two coolant loops operate in parallel and a second mode where the two coolant loops operate in series, and a coolant reservoir that is coupled to both coolant loops when the two coolant loops are operating in series and only coupled to the drive train coolant loop when the two coolant loops are operating in parallel. | 07-19-2012 |
20130074525 | Thermal Management System with Heat Exchanger Blending Valve - A thermal management system and method of use are provided, the system including a heat exchanger, a refrigeration system, a coolant loop thermally coupled to the heat exchanger, and a by-pass valve that regulates the amount of coolant within the coolant loop that either passes through the heat exchanger or is diverted away from the heat exchanger. The coolant loop is thermally coupled to the battery pack of an electric vehicle. | 03-28-2013 |
20130298583 | Battery Centric Thermal Management System Utilizing a Heat Exchanger Blending Valve - A method of regulating thermal dissipation from a vehicle battery pack is provided in which a by-pass valve is used to control the amount of battery pack coolant either passing through, or by-passing, a heat exchanger, where the coolant passing through the heat exchanger is cooled by a refrigeration system. The vehicle's HVAC system is controlled to insure that HVAC operation does not compromise maintaining the battery pack within an acceptable range of temperatures. | 11-14-2013 |
Patent application number | Description | Published |
20130092153 | Direct Solar Steam Generation - Solar energy generates steam in a “once-through” configuration without recirculation, with closely managed steam quality, to produce wet steam from high-contaminant feed water without scaling or fouling. Feed water is pressurized, preheated, and evaporated in a series of pipes exposed to concentrated solar energy to produce a water-steam mixture for direct distribution to an industrial process such as enhanced oil recovery or desalination. Water flow rates are managed based on measurements of solar energy and steam production to manage variations in the solar energy. Steam generator piping system uses continuous receiver pipe that is illuminated by segmented parabolic mirrors enabled to track the sun. Provisions for steam generator piping recurring maintenance are provided. Thermal energy from hot condensate and/or from low quality steam is recaptured and warms inlet water. | 04-18-2013 |
20130112394 | Oilfield Application of Solar Energy Collection - Solar energy is collected and used for various industrial processes, such as oilfield applications, e.g. generating steam that is injected downhole, enabling enhanced oil recovery. Solar energy is indirectly collected using a heat transfer fluid in a solar collector, delivering heat to a heat exchanger that in turn delivers heat into oilfield feedwater, producing hotter water or steam. Solar energy is directly collected by directly generating steam with solar collectors, and then injecting the steam downhole. Solar energy is collected to preheat water that is then fed into fuel-fired steam generators that in turn produce steam for downhole injection. Solar energy is collected to produce electricity via a Rankine cycle turbine generator, and rejected heat warms feedwater for fuel-fired steam generators. Solar energy is collected (directly or indirectly) to deliver heat to a heater-treater, with optional fuel-fired additional heat generation. | 05-09-2013 |
20130206134 | SUBSURFACE THERMAL ENERGY STORAGE OF HEAT GENERATED BY CONCENTRATING SOLAR POWER - Techniques for subsurface thermal energy storage of heat generated by concentrating solar power enable smoothing of available energy with respect to daily and/or seasonal variation. Solar thermal collectors produce saturated steam that is injected into a producing or wholly/partially depleted oil reservoir that operates as a heat storage reservoir. Some of the saturated steam generated by the collectors is optionally used to generate electricity. Heat is withdrawn from the reservoir as saturated steam and is used to operate an active thermal recovery project (such as a producing thermally enhanced oil reservoir) and/or to generate electricity. Withdrawn heat is optionally augmented by heat produced by firing natural gas. The reservoir is optionally one that has been used for thermally enhanced oil recovery and thus is already warm, minimizing heat losses. | 08-15-2013 |
20130247900 | DIRECT SOLAR STEAM GENERATION - In a “once-through” configuration, feedwater is pressurized, preheated, and evaporated in a series of pipes exposed to concentrated solar energy to produce a water-steam mixture for direct distribution to an industrial process such as enhanced oil recovery or desalination. Active steam quality management, in a preheat mode, vents warm/hot water and low-quality steam to a return vessel where steam is recondensed via contact with water and fed back in as feedwater. In an operating mode, the venting is disabled, and high-quality steam is directed as an outlet stream. Inlet water flowrate and outlet valves are managed to reduce effects of variation in the solar energy. A steam generator continuous piping system uses a single continuous receiver pipe that is illuminated by segmented parabolic mirrors enabled to track the sun to reduce high-temperature fouling. Provisions for steam generator piping recurring maintenance are provided. Low-temperature “overnight” solar field management reduces low-temperature fouling. | 09-26-2013 |
20140190469 | SYSTEMS AND METHODS FOR SELECTIVELY PRODUCING STEAM FROM SOLAR COLLECTORS AND HEATERS - Systems and methods for selectively producing steam from solar collectors and heaters are disclosed. A method in accordance with a particular embodiment includes directing a flow of water to a solar collector, directing the flow of water to a gas-fired heater, and, as a result of heating the flow of water at the solar collector and the gas-fired heater, forming steam from the flow of water. The method further includes changing a sequence by which at least a portion of the flow passes through the solar collector and the gas-fired heater. | 07-10-2014 |
20140216717 | SYSTEMS AND METHODS FOR SELECTIVELY PRODUCING STEAM FROM SOLAR COLLECTORS AND HEATERS FOR PROCESSES INCLUDING ENHANCED OIL RECOVERY - Systems and methods for selectively producing steam from solar collectors and heaters, for processes including enhanced oil recovery, are disclosed herein. A system in accordance with a particular embodiment includes a water source, a solar collector that includes a collector inlet, a collector outlet, and a plurality of solar concentrators positioned to heat water passing from the collector inlet to the collector outlet, a fuel-fired heater, a steam outlet connected to an oil field injection well, and a water flow network coupled among the water source, the solar collector, the heater, and the steam outlet. The system can further include a controller operatively coupled to the water flow network and programmed with instructions that, when executed, direct at least one portion of the flow through the solar collector and the fuel-fired heater in a first sequence, and direct the at least one portion or a different portion of the flow through the solar collector and the fuel-fired heater in a second sequence different than the first sequence. | 08-07-2014 |
20140326234 | DIRECT SOLAR STEAM GENERATION - Solar energy generates steam in a “once-through” configuration without recirculation, with closely managed steam quality, to produce wet steam from high-contaminant feed water without scaling or fouling. Feed water is pressurized, preheated, and evaporated in a series of pipes exposed to concentrated solar energy to produce a water-steam mixture for direct distribution to an industrial process such as enhanced oil recovery or desalination. Water flow rates are managed based on measurements of solar energy and steam production to manage variations in the solar energy. Steam generator piping system uses continuous receiver pipe that is illuminated by segmented parabolic mirrors enabled to track the sun. Provisions for steam generator piping recurring maintenance are provided. Thermal energy from hot condensate and/or from low quality steam is recaptured and warms inlet water. | 11-06-2014 |
20140345599 | OILFIELD APPLICATION OF SOLAR ENERGY COLLECTION - Solar energy is collected and used for various industrial processes, such as oilfield applications, e.g. generating steam that is injected downhole, enabling enhanced oil recovery. Solar energy is indirectly collected using a heat transfer fluid in a solar collector, delivering heat to a heat exchanger that in turn delivers heat into oilfield feedwater, producing hotter water or steam. Solar energy is directly collected by directly generating steam with solar collectors, and then injecting the steam downhole. Solar energy is collected to preheat water that is then fed into fuel-fired steam generators that in turn produce steam for downhole injection. Solar energy is collected to produce electricity via a Rankine cycle turbine generator, and rejected heat warms feedwater for fuel-fired steam generators. Solar energy is collected (directly or indirectly) to deliver heat to a heater-treater, with optional fuel-fired additional heat generation. | 11-27-2014 |
20150285048 | SYSTEMS AND METHODS FOR SELECTIVELY PRODUCING STEAM FROM SOLAR COLLECTORS AND HEATERS FOR PROCESSES INCLUDING ENHANCED OIL RECOVERY - Systems and methods for selectively producing steam from solar collectors and heaters, for processes including enhanced oil recovery, are disclosed herein. A system in accordance with a particular embodiment includes a water source, a solar collector that includes a collector inlet, a collector outlet, and a plurality of solar concentrators positioned to heat water passing from the collector inlet to the collector outlet, a fuel-fired heater, a steam outlet connected to an oil field injection well, and a water flow network coupled among the water source, the solar collector, the heater, and the steam outlet. The system can further include a controller operatively coupled to the water flow network and programmed with instructions that, when executed, direct at least one portion of the flow through the solar collector and the fuel-fired heater in a first sequence, and direct the at least one portion or a different portion of the flow through the solar collector and the fuel-fired heater in a second sequence different than the first sequence. | 10-08-2015 |
20150285490 | SYSTEMS AND METHODS FOR SELECTIVELY PRODUCING STEAM FROM SOLAR COLLECTORS AND HEATERS FOR PROCESSES INCLUDING ENHANCED OIL RECOVERY - Systems and methods for selectively producing steam from solar collectors and heaters, for processes including enhanced oil recovery, are disclosed herein. A system in accordance with a particular embodiment includes a water source, a solar collector that includes a collector inlet, a collector outlet, and a plurality of solar concentrators positioned to heat water passing from the collector inlet to the collector outlet, a fuel-fired heater, a steam outlet connected to an oil field injection well, and a water flow network coupled among the water source, the solar collector, the heater, and the steam outlet. The system can further include a controller operatively coupled to the water flow network and programmed with instructions that, when executed, direct at least one portion of the flow through the solar collector and the fuel-fired heater in a first sequence, and direct the at least one portion or a different portion of the flow through the solar collector and the fuel-fired heater in a second sequence different than the first sequence. | 10-08-2015 |
20150295158 | SYSTEMS AND METHODS FOR SELECTIVELY PRODUCING STEAM FROM SOLAR COLLECTORS AND HEATERS FOR PROCESSES INCLUDING ENHANCED OIL RECOVERY - Systems and methods for selectively producing steam from solar collectors and heaters, for processes including enhanced oil recovery, are disclosed herein. A system in accordance with a particular embodiment includes a water source, a solar collector that includes a collector inlet, a collector outlet, and a plurality of solar concentrators positioned to heat water passing from the collector inlet to the collector outlet, a fuel-fired heater, a steam outlet connected to an oil field injection well, and a water flow network coupled among the water source, the solar collector, the heater, and the steam outlet. The system can further include a controller operatively coupled to the water flow network and programmed with instructions that, when executed, direct at least one portion of the flow through the solar collector and the fuel-fired heater in a first sequence, and direct the at least one portion or a different portion of the flow through the solar collector and the fuel-fired heater in a second sequence different than the first sequence. | 10-15-2015 |
Patent application number | Description | Published |
20120238937 | METHOD OF TREATING KELOIDS OR HYPERTROPHIC SCARS USING ANTISENSE COMPOUNDS TARGETING CONNECTIVE TISSUE GROWTH FACTOR (CTGF) - This invention provides methods of preventing formation of, or treating, fibrotic lesions, including skin scars such as keloids and hypertrophic scars which comprise administering to the subject by one or more injection a compound which comprises a modified oligonucleotide, such as a modified antisense oligonucleotide, siRNA, or oligodeoxyribonucleotide, which inhibits expression of protein involved in fibrosis. Dosing of the antisense using an intradermal threading technique is also described. | 09-20-2012 |
20130108573 | Bile Acid Recycling Inhibitors for Treatment of Hypercholemia and Cholestatic Liver Disease | 05-02-2013 |
20130109671 | Bile Acid Recycling Inhibitors for Treatment of Pediatric Cholestatic Liver Diseases | 05-02-2013 |
20130338093 | Bile Acid Recycling Inhibitors for Treatment of Pediatric Cholestatic Liver Diseases - Provided herein are methods of treating or ameliorating a pediatric cholestatic liver disease by non-systemically administering to an individual in need thereof a therapeutically effective amount of a pediatric formulation comprising an Apical Sodium-dependent Bile Acid Transporter Inhibitor (ASBTI) or a pharmaceutically acceptable salt thereof. Also provided are methods for treating or ameliorating a pediatric liver disease, decreasing the levels of serum bile acids or hepatic bile acids, treating or ameliorating pruritis, reducing liver enzymes, or reducing bilirubin comprising non-systemically administering to an individual in need thereof a therapeutically effective amount of a pediatric formulation comprising an ASBTI or a pharmaceutically acceptable salt thereof. | 12-19-2013 |
20140243281 | BILE ACID RECYCLING INHIBITORS FOR TREATMENT OF PEDIATRIC CHOLESTATIC LIVER DISEASES - Provided herein are pediatric dosage forms for use in the treatment of a pediatric cholestatic liver disease by non-systemically administering to an individual in need thereof a therapeutically effective amount of the pediatric dosage form comprising an Apical Sodium-dependent Bile Acid Transporter Inhibitor (ASBTI) or a pharmaceutically acceptable salt thereof. Also provided are said pediatric dosage form for use in the treatment of a pediatric liver disease, for use in decreasing the levels of serum bile acids or hepatic bile acids, for use in the treatment of pruritis, for use in reducing liver enzymes or bilirubin comprising non-systemically administering to an individual in need thereof a therapeutically effective amount of a pediatric formulation comprising an ASBTI or a pharmaceutically acceptable salt thereof. | 08-28-2014 |
20140271734 | BILE ACID RECYCLING INHIBITORS FOR TREATMENT OF BARRETT'S ESOPHAGUS AND GASTROESOPHAGEAL REFLUX DISEASE - Provided herein are methods of treating or ameliorating Barrett's esophagus by administering to an individual in need thereof a therapeutically effective amount of an Apical Sodium-dependent Bile Acid Transporter Inhibitor (ASBTI) or a pharmaceutically acceptable salt thereof. Provided herein are methods of treating or ameliorating gastroesophageal reflux disease (GERD) by administering to an individual in need thereof a therapeutically effective amount of an ASBTI or a pharmaceutically acceptable salt thereof. Also provided are methods for treating or ameliorating symptoms or complications associated with Barrett's esophagus or GERD comprising administering to an individual in need thereof a therapeutically effective amount of ASBTI or a pharmaceutically acceptable salt thereof. | 09-18-2014 |
20140275090 | BILE ACID RECYCLING INHIBITORS FOR TREATMENT OF PRIMARY SCLEROSING CHOLANGITIS AND INFLAMMATORY BOWEL DISEASE - Provided herein are methods of treating or ameliorating primary sclerosing cholangitis and inflammatory bowel disease by administering to an individual in need thereof a therapeutically effective amount of an Apical Sodium-dependent Bile Acid Transporter Inhibitor (ASBTI) or a pharmaceutically acceptable salt thereof. Also provided are methods for treating or ameliorating primary sclerosing cholangitis comprising administering to an individual in need thereof a therapeutically effective amount of ASBTI or a pharmaceutically acceptable salt thereof. | 09-18-2014 |
20140323412 | BILE ACID RECYCLING INHIBITORS FOR TREATMENT OF HYPERCHOLEMIA AND CHOLESTATIC LIVER DISEASE - Provided herein are methods of treating or ameliorating hypercholemia or a cholestatic liver disease by administering to an individual in need thereof a therapeutically effective amount of an Apical Sodium-dependent Bile Acid Transporter Inhibitor (ASBTI) or a pharmaceutically acceptable salt thereof. Also provided are methods for treating or ameliorating a liver disease, decreasing the levels of serum bile acids or hepatic bile acids, treating or ameliorating pruritis, reducing liver enzymes, or reducing bilirubin comprising administering to an individual in need thereof a therapeutically effective amount of ASBTI or a pharmaceutically acceptable salt thereof. | 10-30-2014 |
Patent application number | Description | Published |
20080314422 | System, method and apparatus for maintaining separation of liquids in a controlled meniscus - A system and method of forming and using a proximity head. The proximity head includes a head surface, the head surface including a first zone, a second zone and an inner return zone. The first zone including a first flat surface region and a plurality of first discrete holes. Each one of the plurality of first discrete holes being connected to a corresponding one of a plurality of first conduits. The plurality of first discrete holes residing in the head surface and extending through the first flat surface region. At least a portion of the plurality of first discrete holes are arranged in a first row. The second zone including a second flat region and a plurality of second discrete holes. Each one of the plurality of second discrete holes being connected to a corresponding one of a plurality of second conduits. The plurality of second discrete holes residing in the head surface and extending through the second flat surface region. The inner return zone including a plurality of inner return discrete holes. The inner return zone being disposed between and adjacent to the first zone and the second zone. Each one of the plurality of the inner return discrete holes being connected to a corresponding one of a plurality of inner return conduits. The plurality of inner return discrete holes residing in the head surface and extending through the head surface. At least a portion of the plurality of inner return discrete, holes are arranged in an inner return row. The first row and the inner return row being substantially parallel. A first portion of an edge of each one of the plurality of inner return discrete holes is recessed into the head surface. | 12-25-2008 |
20100170539 | Reduction of Entrance and Exit Marks Left by a Substrate-Processing Meniscus - A proximity head for generating and maintaining a meniscus for processing a substrate is described. The proximity head includes a plurality of meniscus nozzles formed on a face of the proximity head, the nozzles being configured to supply liquid to the meniscus, a plurality of vacuum ports formed on the face of the proximity head, the vacuum ports being arranged to completely surround the plurality of meniscus nozzles, and a plurality of gas nozzles formed on the face of the proximity head, the gas nozzles at least partially surrounding the vacuum ports. The proximity head further includes means for reducing a size and frequency of entrance and/or exit marks at a leading edge and a trailing edge on the substrate by aiding and encouraging liquid from the meniscus to evacuate a gap between the substrate and the carrier. | 07-08-2010 |
20110197928 | Carrier for Reducing Entrance and/or Exit Marks Left by a Substrate-Processing Meniscus - A carrier for supporting a substrate during processing by a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening. Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided. | 08-18-2011 |
20120079698 | Carrier for Reducing Entrance and/or Exit Marks Left by a Substrate-Processing Meniscus - A carrier for supporting a substrate during processing by a meniscus fowled by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided. | 04-05-2012 |
20120138098 | SYSTEM, METHOD AND APPARATUS FOR MAINTAINING SEPARATION OF LIQUIDS IN A CONTROLLED MENISCUS - A system and method of forming and using a proximity head. The proximity head includes a head surface including a first zone, a second zone and an inner return zone. The first zone including a first flat surface region and multiple first discrete holes connected to a corresponding first conduit and arranged in a first row. The second zone including a second flat region and multiple second discrete holes connected to a corresponding second conduit. The inner return zone being disposed between and adjacent to the first zone and the second zone and including multiple inner return discrete holes connected to a corresponding inner return conduit and arranged in an inner return row. The first row and the inner return row are parallel. A portion of an edge of each of the inner return discrete holes is recessed into the head surface. | 06-07-2012 |
20130025633 | In-Situ Reclaim of Volatile Components - Apparatus and methods are provided for efficiently reclaiming solvents used to clean surfaces of semiconductor wafers, etc. More particularly, embodiments of the present invention provide an in-situ reclaim approach that utilizes condensing mechanisms to reclaim evaporated solvent components. In these embodiments, the condensing can occur within a proximity head itself and/or along a vacuum line running from the proximity head to a vacuum tank. Other embodiments of the present invention provide an in-situ reclaim approach that prevents the evaporation of solvents at the onset by maintaining appropriate equilibrium gas phase concentrations between the liquid chemistries and gases used to process wafer surfaces. | 01-31-2013 |
20130061879 | REDUCTION OF ENTRANCE AND EXIT MARKS LEFT BY A SUBSTRATE-PROCESSING MENISCUS - A substrate is placed on a plurality of support pins within an opening of a carrier, such that a gap exists between the radial perimeter of the substrate and the carrier. The substrate and carrier are passed in a linear direction through a meniscus generated between respective faces of upper and lower proximity heads. Each of the upper and lower proximity heads includes a plurality of meniscus nozzles configured to supply liquid to the meniscus. A plurality of vacuum ports are formed on the respective face of each of the upper and lower proximity heads and are arranged to completely surround the plurality of meniscus nozzles. Liquid of the meniscus is evacuated from the gap between the radial perimeter of the substrate and the carrier so as to reduce a size and a frequency of at least one of entrance or exit marks on the substrate. | 03-14-2013 |
Patent application number | Description | Published |
20090068845 | Low contamination components for semiconductor processing apparatus and methods for making components - Components of semiconductor processing apparatus are formed at least partially of erosion, corrosion and/or corrosion-erosion resistant ceramic materials. Exemplary ceramic materials can include at least one oxide, nitride, boride, carbide and/or fluoride of hafnium, strontium, lanthanum oxide and/or dysprosium. The ceramic materials can be applied as coatings over substrates to form composite components, or formed into monolithic bodies. The coatings can protect substrates from physical and/or chemical attack. The ceramic materials can be used to form plasma exposed components of semiconductor processing apparatus to provide extended service lives. | 03-12-2009 |
20090120790 | LOW CONTAMINATION COMPONENTS FOR SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MAKING COMPONENTS - Components of semiconductor processing apparatus axe formed at least: partially of erosion, corrosion and/or corrosion-erosion resistant ceramic materials. Exemplary ceramic materials can include at least one oxide, nitride, boride, carbide and/or fluoride of hafnium, strontium, lanthanum oxide and/or dysprosium. The ceramic materials can be applied as coatings over substrates to form composite components, or formed into monolithic bodies. The coatings can protect substrates from physical and/or chemical attack. The ceramic materials can be used to form plasma exposed components of semiconductor processing apparatus to provide extended service lives. | 05-14-2009 |
20090123735 | LOW CONTAMINATION COMPONENTS FOR SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MAKING COMPONENTS - Components of semiconductor processing apparatus are formed at least partially of erosion, corrosion and/or corrosion-erosion resistant ceramic materials. Exemplary ceramic materials can include at least one oxide, nitride, boride, carbide and/or fluoride of hafnium, strontium, lanthanum oxide and/or dysprosium. The ceramic materials can be applied as coatings over substrates to form composite components, or formed into monolithic bodies. The coatings ca protect substrates from physical and/or chemical attack. The ceramic materials can be used to form plasma exposed components of semiconductor processing apparatus to provide extended service lives. | 05-14-2009 |
20100294742 | Modifications to Surface Topography of Proximity Head - In an example embodiment, a wet system includes a proximity head and a holder for substrate (e.g., a semiconductor wafer). The proximity head is configured to cause a flow of an aqueous fluid in a meniscus across a surface of the proximity head. The surface of the proximity head interfaces with a surface of a substrate through the flow. The surface of the head is composed of a non-reactive material (e.g., thermoplastic) with modifications as to surface topography that confine, maintain, and/or facilitate the flow. The modifications as to surface topography might be inscribed on the surface with a conical scribe (e.g., with a diamond or SiC tip) or melt printed on the surface using a template. These modifications might produce hemi-wicking or superhydrophobicity. The holder exposes the surface of the substrate to the flow. | 11-25-2010 |
20130059071 | LOW CONTAMINATION COMPONENTS FOR SEMICONDUCTOR PROCESSSING APPARATUS AND METHODS FOR MAKING COMPONENTS - Components of semiconductor processing apparatus are formed at least partially of erosion, corrosion and/or corrosion-erosion resistant ceramic materials. Exemplary ceramic materials can include at least one oxide, nitride, boride, carbide and/or fluoride of hafnium, strontium, lanthanum oxide and/or dysprosium. The ceramic materials can be applied as coatings over substrates to form composite components, or formed into monolithic bodies. The coatings can protect substrates from physical and/or chemical attack. The ceramic materials can be used to form plasma exposed components of semiconductor processing apparatus to provide extended service lives. | 03-07-2013 |