Nunomura
Ichiro Nunomura, Toyama-Shi JP
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20110082581 | SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD OF THE SUBSTRATE PROCESSING APPARATUS, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND APPARATUS STATE SHIFTING METHOD - To perform a maintenance work safely by a maintenance engineer, even if the maintenance work is performed with power of a substrate processing apparatus turned-on. A substrate processing apparatus, comprising: a controller that inhibits a shift from an idling state to a standby state, when a generation of a prescribed event is detected; the controller further comprising: a shift indicating part that controls an apparatus state so as to be shifted from the idling state possible to receive an indication of execution of the recipe, being an apparatus state possible to step into the substrate processing apparatus, to the standby state possible to execute a recipe, being an apparatus state impossible to step into the substrate processing apparatus; and an event detection part that detects a generation of the prescribed event for inhibiting a shift from the idling state to the standby state and notifies the shift indicating part of the prescribed event. | 04-07-2011 |
20130247937 | SUBSTRATE PROCESSING APPARATUS AND ITS MAINTENANCE METHOD, SUBSTRATE TRANSFER METHOD AND PROGRAM - There is provided a substrate processing apparatus, including at least: a substrate holder that holds a substrate; a processing furnace including a reaction tube in which the substrate holder is loaded, and is configured to apply a specific processing to the substrate held by the substrate holder in a state that the substrate holder is loaded in the reaction tube; an operation part configured to select a maintenance recipe for the reaction tube used for substrate processing, and a maintenance recipe for both of the reaction tube and the substrate holder loaded in the reaction tube; and a control part configured to execute the maintenance recipe selected by the operation part, when a maintenance timing of the reaction tube and/or the substrate holder arrives. | 09-26-2013 |
Mahito Nunomura, Yawata-Shi JP
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20090266378 | ULTRASONIC WAVE HAIR SET APPARATUS - An ultrasonic wave hair set apparatus is configured by a main frame, an ultrasonic vibration block provided on the main frame, a pinching lever rotatably provided on the main frame, a presser plate provided on the pinching lever and having a pressing face. The ultrasonic vibration block is further comprised of an ultrasonic oscillator and an ultrasonic horn having a vibration face, and a comb shaped protection member is provided to enclose the vibration face. Even if a user penetrates a finger between the pinching lever and the main frame, the finger touches the protection member, so that it rarely touches the vibration face directly. Consequently, the ultrasonic vibrations are not transmitted to the finger, and burn injury can be prevented. | 10-29-2009 |
20090288675 | ULTRASONIC VIBRATION DEVICE FOR HAIRSTYLING AND HAIR STYLING APPARATUS HAVING THE SAME - In an ultrasonic vibration device ( | 11-26-2009 |
Mahito Nunomura, Kyoyo JP
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20120126041 | DISCHARGE DEVICE AND ELECTROSTATIC ATOMIZATION DEVICE COMPRISING SAME - Disclosed is a discharge device ( | 05-24-2012 |
Masataka Nunomura, Ibaraki JP
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20110076458 | PHOTOSENSITIVE POLYMER COMPOSITION, METHOD OF FORMING RELIEF PATTERNS, AND ELECTRONIC EQUIPMENT - A photosensitive polymer composition, having (a) a polymer selected from polyimide precursors and polyimides having an acid group protected by a protecting group and having no amino group (—NH | 03-31-2011 |
Nobuhide Nunomura, Hikari JP
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20100212834 | Plasma processing apparatus - A plasma processing apparatus for processing a subject placed on a subject stage disposed in a processing chamber in a vacuum vessel, by using plasma formed in said processing chamber, includes: an exhaust space communicating with the processing chamber, extending in a horizontal direction, and exhausting gas in the processing chamber; an exhaust port communicating with the exhaust space, the gas being exhausted via the exhaust port; a pump disposed communicating with the exhaust port and exhausting the gas; and a plate member disposed in the exhaust space between a connection portion to the processing chamber and the exhaust port, extending along a direction connecting the connection portion and the exhaust port, and disposed outside a view angle from an upper surface of the subject stage. | 08-26-2010 |
Nobutake Nunomura, Chiba JP
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20090162479 | PROCESS FOR PRODUCING SOY SAUCE HAVING REDUCED BUSHO-SHU - The present invention relates to a process for producing a soy sauce koji having a reduced Busho-shu which is one of the unpleasant smells of soy sauce, and a soy sauce koji having a reduced Busho-shu obtained by this production process. Specifically, the process for producing a soy sauce koji is characterized by using a combination of a koji mold having a high isobutyric acid productivity and another koji mold having a low isobutyric acid productivity. The present invention also relates to a process for producing a soy sauce having a reduced Busho-shu and a soy sauce obtained by this production process. | 06-25-2009 |
Shunsuke Nunomura, Kashihara-Shi JP
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20150314802 | STEERING-COLUMN DEVICE - A steering device includes a fixed bracket which includes a first plate, a movable jacket which rotatably supports a steering shaft, a movable bracket which includes a second plate, a suspension mechanism and a resin pin. The suspension mechanism includes a suspension shaft connecting the first plate and the second plate, and is configured to move in a column movement direction along with the second plate at the time of the secondary collision. The resin pin is inserted into a first hole provided in the first plate and a second hole provided in the second plate, and is configured to be broken at the time of the secondary collision. The resin pin has a predetermined amount of play in a direction orthogonal to the column movement direction with respect to at least one of the first hole and the second hole. | 11-05-2015 |