Patent application number | Description | Published |
20090166827 | MECHANICAL ISOLATION FOR MEMS DEVICES - A device according to the present invention includes a MEMS device supported on a first side of a die. A first side of an isolator is attached to the first side of the die. A package is attached to the first side of the isolator, with at least one electrically conductive attachment device attaching the die to the isolator and attaching the isolator to the package. The isolator may include isolation structures and a receptacle. | 07-02-2009 |
20090321008 | SYSTEMS AND METHODS FOR FABRICATING AN OUT-OF-PLANE MEMS STRUCTURE - System and methods offset mechanism elements during fabrication of Micro-Electro-Mechanical Systems (MEMS) devices. An exemplary embodiment applies a voltage across an offset mechanism element and a bonding layer of a MEMS device to generate an electrostatic charge between the offset mechanism element and the bonding layer, wherein the electrostatic charge draws the offset mechanism element to the bonding layer. The offset mechanism element and the bonding layer are then bonded. | 12-31-2009 |
20090321857 | SYSTEMS AND METHODS FOR REDUCED STRESS ANCHORS - Anchor systems and methods anchor components of a Micro-Electro-Mechanical Systems (MEMS) device to a substrate. An exemplary embodiment has a trace anchor bonded to a substrate, a device anchor bonded to the substrate, and an anchor flexure configured flexibly couple the trace anchor and the device anchor to substantially prevent transmission of a stress induced in the trace anchor from being transmitted to the device anchor. | 12-31-2009 |
20100203718 | MITIGATION OF HIGH STRESS AREAS IN VERTICALLY OFFSET STRUCTURES - Alternative methods of constructing a vertically offset structure are disclosed. An embodiment includes forming a flexible layer having first and second end portions, an intermediate portion coupling the first and second portions, and upper and lower surfaces. The distance between the upper and lower surfaces at the intermediate portion is less than the distance between the upper and lower surfaces at the first and second end portions. The first end portion is bonded to a base member. The second end portion of the flexible layer is deflected until the second end portion contacts the base member. The second end portion is bonded to the base member. | 08-12-2010 |
20100326191 | BIDIRECTIONAL, OUT-OF-PLANE, COMB DRIVE ACCELEROMETER - A bi-directional, out-of-plane electrostatic comb drive apparatus including two electrically independent sets of stator comb tines; and a method for fabricating an out-of-plane comb drive with stacked sets of stator comb tines. A first set of stator comb tines is offset from a second set of stator comb tines. A set of rotor comb tines interleaves with both sets of stator comb tines. A first voltage applied to the first set of stator comb tines operates to pull the rotor tines toward the first set of stator comb tines. A second voltage applied to the second set of stator comb tines operates to pull the rotor tines toward the second set of stator comb tines, enabling bi-directional operation. A fabrication method is disclosed that enables fabrication of the first and second sets of stator comb tines that are mechanically and electrically independent and interleaved by the rotor comb tines. | 12-30-2010 |
20110203372 | OUT-OF-PLANE COMB-DRIVE ACCELEROMETER - An out-of-plane comb-drive accelerometer. An example accelerometer linearizes a response. An example accelerometer includes one or more stators having a plurality of tines having a surface parallel to a surface of substrate. The tine surface is at a first distance from the surface of the substrate. A proof mass includes one or more rotors that include a plurality of rotor tines attached to an edge of the proof mass. The rotor tines are interleaved with corresponding ones of the stator tines. The rotor tines include a surface parallel to a surface of the substrate. The rotor tine surface is at a second distance from the surface of the substrate. The first distance and second distance are unequal by a threshold amount. Motion of the rotor relative to the stator in an out-of-plane direction provides a linear change in a capacitive value measured across the rotor and the stator. | 08-25-2011 |
20120070931 | METHODS FOR REDUCED STRESS ANCHORS - Methods of anchoring components of a Micro-Electro-Mechanical Systems (MEMS) device to a substrate. An exemplary embodiment has a trace anchor bonded to a substrate, a device anchor bonded to the substrate, and an anchor flexure configured to flexibly couple the trace anchor and the device anchor to substantially prevent transmission of a stress induced in the trace anchor from being transmitted to the device anchor. | 03-22-2012 |
20120193731 | EDGE-MOUNTED SENSOR - Sensor packages and methods for making a sensor device package for side mounting on a circuit board. A sensor device(s) in a mechanical layer of silicon is sandwiched between first and second layers of glass to create a wafer. A first via(s) is created in the first or second layers to expose a predefined area of the mechanical layer of silicon. A second via(s) is created in the first or second layers. The least one second via has a depth dimension that is less than a depth dimension of the first via. A metallic trace is applied between the exposed area on the mechanical layer and a portion of the second via. The wafer is sliced such that the second via is separated into two sections, thereby creating a sensor die. The sensor die is then electrically and mechanically bonded to a circuit board at the sliced second via. | 08-02-2012 |
Patent application number | Description | Published |
20080229887 | Dual pawl ratchet mechanism and reversing method - A dual-pawl ratchet wrench mechanism is disclosed having a stop mechanism for limiting over-travel of a reversing lever for selecting drive directions. The stop mechanism is formed on a disc is selectively engageable with first and second pawls to move the pawls into and out of engagement with a ratchet gear to determine a torque drive direction, the ratchet gear capable of providing torque to a working piece in the selected drive direction. The design simplifies manufacturing. Additionally, the reversing lever is assembled with the mechanism in a manner to improve sealing. | 09-25-2008 |
20080229889 | Dual pawl ratchet mechanism and reversing method - A dual-pawl ratchet wrench mechanism is disclosed having a stop mechanism for limiting over-travel of a reversing lever for selecting drive directions. In one form, the wrench mechanism includes a ball and spring assembly that cooperate with recesses to define proper positions for the reversing lever, and one or more ramps are provided between the recesses to promote tactile feel and to promote the reversing lever being rotated to a proper position. In some forms, the stop mechanism is formed on a stationary portion, such as a spacer or the wrench body, and a portion of the reversing lever. The design simplifies manufacturing, such as by simplifying assembly and minimizing the need for securements. Additionally, the reversing lever is assembled with the mechanism in a manner to improve sealing. | 09-25-2008 |
20130283982 | Dual Pawl Ratchet Mechanism and Reversing Method - A dual-pawl ratchet wrench mechanism is disclosed having a stop mechanism for limiting over-travel of a reversing lever for selecting drive directions. In one form, the wrench mechanism includes a ball and spring assembly that cooperate with recesses to define proper positions for the reversing lever, and one or more ramps are provided between the recesses to promote tactile feel and to promote the reversing lever being rotated to a proper position. In some forms, the stop mechanism is formed on a stationary portion, such as a spacer or the wrench body, and a portion of the reversing lever. The design simplifies manufacturing, such as by simplifying assembly and minimizing the need for securements. Additionally, the reversing lever is assembled with the mechanism in a manner to improve sealing. | 10-31-2013 |