Patent application number | Description | Published |
20110272098 | PLASMA PROCESSING APPARATUS - A plasma processing apparatus includes: a discharge state detecting unit; a history information storing portion; a date-and-time data creating portion; an object specifying data output portion; a data recording portion; and a production history file creating portion. The data recording portion reads out date-and-time data, object specifying data, machine output data representing an operation state of a plasma processing execution portion, and judgment data representing a judgment result of the discharge state, and stores the data in the history information storing portion in time series, each time the plasma processing for the object to be processed is ended. The production history file creating portion that reads out the date-and-time data, the object specifying data, the machine output data, and the judgment result of the discharge state from the history information storing portion based on a designated period or date and time, and creates a production history file. | 11-10-2011 |
20110273094 | PLASMA PROCESSING APPARATUS - A plasma processing apparatus includes a vacuum chamber, a plasma processing execution portion, a discharge state detecting unit, a window portion, a camera, a first storing portion, a second storing portion and an image data extracting unit. When an abnormal discharge is detected, the image data extracting unit extracts at least moving image data showing a generation state of the abnormal discharge from the first storing portion and stores the extracted moving image data in the second storing portion. When plasma processing is ended without the detection of the abnormal discharge, the image data extracting unit extracts, from the first storing portion, moving image data of a predetermined specific period or still image data of a specific period derived from the moving image data of the first storing portion and stores the extracted moving image data or the extracted still image data in the second storing portion. | 11-10-2011 |
20110277933 | PLASMA PROCESSING APPARATUS - A plasma processing apparatus includes: a vacuum chamber; a plasma processing execution portion; a discharge state detecting unit; a window portion; a camera; a first storing portion; a second storing portion; and an image data extracting unit. The image data extracting unit extracts at least moving image data, which show the generation state of the abnormal discharge, from the first storing portion and stores the extracted moving image data in the second storing portion when the discharge state detecting unit detects the abnormal discharge. | 11-17-2011 |
20120204793 | LED PACKAGE MANUFACTURING SYSTEM - There are preliminarily prepared element characteristic information | 08-16-2012 |
20120316665 | LED PACKAGE MANUFACTURING SYSTEM - There are prepared element characteristic information | 12-13-2012 |
20130000554 | RESIN COATING DEVICE IN LED PACKAGE MANUFACTURING SYSTEM - There are preliminarily prepared element characteristic information | 01-03-2013 |
20130008377 | RESIN COATING DEVICE IN LED PACKAGE MANUFACTURING SYSTEM - There are preliminarily prepared element characteristic information | 01-10-2013 |
20130052761 | METHOD AND DEVICE FOR RESIN COATING - A device for resin coating is used for producing an LED package including an LED element covered with resin containing phosphor. In a state in which a trial coating material | 02-28-2013 |
20130192061 | LED PACKAGE MANUFACTURING SYSTEM AND RESIN COATING METHOD IN LED PACKAGE MANUFACTURING SYSTEM - In resin coating used for manufacturing the LED package in which the LED elements is covered with a resin containing a phosphor, a translucent member | 08-01-2013 |
20130210174 | RESIN COATING DEVICE AND RESIN COATING METHOD - In a resin coating used for manufacturing an LED package including an LED element coated with resin containing phosphor, a light-transmitting member test-coated with resin for an emission characteristic measurement on a light-transmitting member placing section including a light source unit, a deviation between a measurement result of an emission characteristic of light emitted from the resin coated on the light-transmitting member measured by an emission characteristic measurement unit by irradiating the resin with excitation light emitted from the light source unit and a prescribed emission characteristic is obtained, and an appropriate resin coating amount of the resin to be coated on the LED element for an actual production is derived based on the deviation. | 08-15-2013 |
20130236991 | RESIN COATING DEVICE AND A RESIN COATING METHOD - In a resin coating which is used in the manufacture of an LED package which is made by covering an LED element with resin that includes fluorescent substance, a light-passing member ( | 09-12-2013 |
20130288404 | LIGHT EMITTING ELEMENT MANUFACTURING SYSTEM AND MANUFACTURING METHOD AND LIGHT EMITTING ELEMENT PACKAGE MANUFACTURING SYSTEM AND MANUFACTURING METHOD - In manufacturing light emitting element packages by coating the top surfaces of LED elements with the resin containing the fluorescent substance, in a resin supplying operation of discharging to supply the resin onto the LED elements in a wafer state, the light emission characteristics of the light that the resin emits when excitation light from a light source part is irradiated onto a light-passing member on which the resin is test supplied for light emission characteristic measurement are measured, and the appropriate resin supply quantity is revised based on the result of the measurement and light emission characteristics prescribed beforehand, to derive an appropriate resin supply quantity of the resin which should be supplied to the LED elements for practical production. | 10-31-2013 |
20130323862 | LED PACKAGE MANUFACTURING SYSTEM AND RESIN COATING METHOD FOR USE IN LED PACKAGE MANUFACTURING SYSTEM - In resin coating, carrying a light-passing member test-coated with a resin on a light-passing member carrying unit; making a light source placed above the light-passing member carrying unit emit excitation light exciting the fluorescent substance; measuring light emission characteristics of the light by irradiating the excitation light emitted from the light source unit from above to the resin coated onto the light-passing member and receiving the light that the resin emits from below the light-passing member by a light emission characteristic measurement unit; obtaining a deviation between a measurement result of the light emission characteristic measurement unit and a prescribed light emission characteristic; and deriving the appropriate resin coating quantity of the resin to be coated onto the LED element as what is used for practical production based on the deviation. | 12-05-2013 |
20130330479 | LIQUID-APPLICATION DEVICE AND LIQUID-APPLICATION METHOD - A liquid-application device | 12-12-2013 |
20130330480 | LIQUID-APPLICATION DEVICE AND LIQUID-APPLICATION METHOD - In the liquid application device | 12-12-2013 |
20140141540 | RESIN COATING DEVICE, AND RESIN COATING METHOD - A translucent member | 05-22-2014 |
20140199790 | RESIN COATING DEVICE, AND RESIN COATING METHOD - A translucent member | 07-17-2014 |