Patent application number | Description | Published |
20100068414 | Substrate processing apparatus and substrate processing method - A substrate processing apparatus includes a transport chamber and a processing chamber that processes substrates. The transport chamber has a first substrate transport member transporting the substrates from the transport chamber to the processing chamber. The processing chamber has a first processing unit which is adjacent to the transport chamber and has a first substrate placing base, a second processing unit which is adjacent to the other side of the transport chamber in the first processing unit and has a second substrate placing base, a second substrate transport member transporting the substrates between the first processing unit and the second processing unit, and a control unit controlling at least the second substrate transport member. | 03-18-2010 |
20100068895 | Substrate processing apparatus and substrate processing method - A substrate processing apparatus includes a processing chamber that processes a substrate, and a substrate placing base enclosed in the processing chamber, and a substrate transporting member that allows the substrate to wait temporarily on the substrate placing base, and exhaust holes provided so as to surround the substrate placing base, and a retracting space that allows the substrate transporting member to move in between lines each connecting the exhaust hole and an upper end of the substrate placing base and the substrate placing base. | 03-18-2010 |
20100150687 | SUBSTRATE PROCESSING APPARATUS - Provided is a substrate processing apparatus configured to attain conflicting purposes of high throughput and footprint reduction. The substrate processing apparatus comprises a carrying chamber, and a loadlock chamber and at least two process chambers that are arranged around the carrying chamber. The carrying chamber comprises a substrate carrying unit configured to carry a substrate between the loadlock chamber and the process chambers. The substrate carrying unit comprises a first arm provided with a first finger and a second finger, and leading ends of the first and second fingers extend horizontally in the same direction. Each of the process chambers comprises a first process unit and a second process unit, and the second process unit is disposed at a side of the process chamber distant from the carrying chamber with the first process unit being disposed therebetween. | 06-17-2010 |
20120222818 | SUBSTRATE SUPPORTING TABLE, SUBSTRATE PROCESSING APPARATUS, AND MANUFACTURE METHOD FOR SEMICONDUCTOR DEVICE - The substrate supporting table includes a supporting plate that supports a substrate, a peripheral wall that encompasses a flow path of a coolant under the supporting plate and has an upper end enclosed by the supporting plate, a lower cover that encloses a bottom portion of the flow path and encloses a lower end of the peripheral wall. The substrate supporting table further includes a coolant supplying component that supplies a coolant through an upstream input of the flow path, a discharging component that discharges the coolant through a downstream output of the flow path, and a partition disposed between a supplying hole of the coolant supplying component and a discharging hole of the discharging component. A gap is formed between the partition and the bottom portion of the flow path. | 09-06-2012 |
20140004710 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORTER AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | 01-02-2014 |
Patent application number | Description | Published |
20090288396 | EXHAUST EMISSION CONTROL DEVICE FOR INTERNAL COMBUSTION ENGINE - An exhaust emission control device is used for an engine and is applied to an exhaust gas purifying system. The system has an NOx catalyst disposed in an exhaust passage of the engine to promote selective purification of NOx in exhaust gas performed by ammonia, which is a reducing agent for reducing NOx, and a reducing agent adding device for adding the reducing agent to an upstream side of the catalyst in a flow direction of exhaust gas. The device includes a catalyst temperature detecting device for detecting temperature of the catalyst, a reaction ratio calculating device for calculating a reaction ratio, which is a ratio of a reaction amount of ammonia to a reaction amount of NOx in the catalyst, based on the temperature of the catalyst, and an ammonia consumed amount calculating device for calculating a consumed amount of ammonia in the catalyst based on the reaction ratio | 11-26-2009 |
20090288397 | EXHAUST GAS PURIFICATION DEVICE OF INTERNAL COMBUSTION ENGINE - An SCR catalyst is provided in an exhaust pipe of an engine and a urea solution addition valve is provided upstream of the SCR catalyst in the exhaust pipe. An ECU controls urea solution addition quantity of the urea solution addition valve based on ammonia adsorption quantity to the SCR catalyst. The ECU calculates the ammonia adsorption quantity in the SCR catalyst based on time-series data of an ammonia balance between ammonia supply to the SCR catalyst accompanying the urea solution addition of the urea solution addition valve and ammonia consumption in the SCR catalyst. The ECU calculates NOx quantity introduced into the SCR catalyst or a parameter correlated with the NOx quantity and performs initialization of the ammonia adsorption quantity at timing decided based on a result of the calculation. | 11-26-2009 |
20090293459 | EXHAUST GAS PURIFICATION DEVICE OF INTERNAL COMBUSTION ENGINE - An SCR catalyst is provided in an exhaust pipe of an engine and a urea solution addition valve is provided upstream of the SCR catalyst in the exhaust pipe. An ECU calculates ammonia adsorption quantity of the SCR catalyst and controls urea solution addition quantity, which is added by the urea solution addition valve, based on the ammonia adsorption quantity. The ECU obtains temperature of the SCR catalyst or temperature information correlated with the temperature through measurement or estimation. The ECU switches an execution mode of the urea solution addition control based on the catalyst temperature or the temperature information. Thus, reducing agent addition control can be performed suitably and eventually NOx purification in a NOx catalyst (i.e., SCR catalyst) can be performed suitably. | 12-03-2009 |
20120022767 | ERROR DETECTOR FOR INJECTION CHARACTERISTIC DATA - An error detector includes an injector-memory provided to a fuel injector injecting a fuel into an internal combustion engine, and an ECU-memory provided to an ECU. The injector-memory stores a characteristic data indicative of injection characteristics of the fuel injector. The ECU-memory stores a characteristic data which is identical to the data stored in the injector-memory. The injector-memory further stores another characteristic data which is identical to the characteristic data stored in the injector-memory. The ECU compares three characteristic data stored in the injector-memory and the ECU-memory to determine whether three characteristic data are identical to each other, whereby an error is detected. | 01-26-2012 |
20120042853 | CONTROLLER FOR PRESSURE REDUCING VALVE - A controller for a pressure reducing valve is applied to a fuel injection system which is provided with a pressure reducing valve in a common-rail and a fuel pressure sensor detecting a fuel pressure in a fuel supply passage from the accumulator to an injection port of the fuel injector. The controller includes a fuel-pressure-variation detector for detecting a fuel pressure variation timing at which a detection value of the fuel pressure sensor is varied due to an opening operation or a closing operation of the pressure reducing valve. The controller further includes a response-delay-time computing portion for computing a response delay time of the pressure reducing valve based on a command timing and a fuel pressure variation timing. | 02-23-2012 |