Patent application number | Description | Published |
20090284190 | Vibrating Element - This vibrating element includes a movable portion driven to vibrate at a prescribed resonance frequency, a driving portion vibrating the movable portion by cyclically supplying a pulse signal and a detecting portion detecting the vibrational state of the movable portion, while the driving portion is so formed as to supply the pulse signal at a first frequency substantially identical to the resonance frequency of the movable portion at least in starting and to cyclically supply the pulse signal at a second frequency smaller than the first frequency in detection of the vibrational state of the movable portion. | 11-19-2009 |
20100014143 | Vibrating Mirror Element - A vibrating mirror element includes a base member, a substrate made of metal, integrally formed with a mirror portion, a movable portion swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion supporting the movable portion and mounted on the base member, a piezoelectric film provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode provided on the piezoelectric film. | 01-21-2010 |
20100142023 | Vibrating Mirror Element - This vibrating mirror element includes a pair of first beam portions supporting a mirror portion in a vibratile manner, a pair of second beam portions connected with the pair of first beam portions respectively, and a pair of driving portions connected with the pair of second beam portions respectively. The mirror portion is arranged in a region surrounded by the pair of second beam portions and the pair of driving portions. The width of the pair of first beam portions and the width of the pair of second beam portions are rendered smaller than the width of the pair of driving portions. | 06-10-2010 |
20100149615 | Vibrating Mirror Element - This vibrating mirror element includes a mirror portion reflecting light, a torsionally deformable beam portion connected to the mirror portion for supporting the mirror portion in a vibratile manner, and a driving portion having a connecting portion connected with the beam portion for driving the mirror portion through the torsionally deformable beam portion. The width of the connecting portion of the driving portion is rendered smaller than the width of a portion of the driving portion other than the connecting portion in plan view. | 06-17-2010 |
20120026567 | Vibrating Mirror Element and Optical Scanner - This vibrating mirror element includes a mirror portion swingable on a first axis, a driving portion, including a free end and a fixed end, for swinging the mirror portion by deformation and a shaft portion provided between the mirror portion and the driving portion to extend along the first axis. The free end of the driving portion is connected to the shaft portion, while the fixed end of the driving portion is fixed on a side of the driving portion closer to the mirror portion and in the vicinity of the shaft portion. | 02-02-2012 |
20130163061 | Vibrating Mirror Element - A vibrating mirror element including a detection electrode to detect driving and capable of being easily manufactured is provided. This vibrating mirror element includes a mirror portion and a driving portion driving the mirror portion, and the driving portion has a drive electrode to deform the driving portion by application of a voltage to drive the driving portion and a detection electrode to detect the amount of deformation of the driving portion, both arranged therein. | 06-27-2013 |
20140340720 | OSCILLATION DEVICE, SCANNING-TYPE SCANNER DEVICE, INFORMATION TERMINAL, PHASE-SHIFT AMOUNT ADJUSTMENT DEVICE, AND PHASE-SHIFT AMOUNT ADJUSTMENT METHOD - An oscillation device includes an oscillator, an oscillation detection unit that detects oscillation of the oscillator and outputs an oscillation detection signal, and a drive unit that generates a drive signal in keeping with the oscillation detection signal and outputs the drive signal to the oscillator. The drive unit includes a phase shift unit that shifts the phase to provide the drive signal as positive feedback to the oscillator. The phase shift unit includes a disturbance generating unit that outputs the periodic signal, a fluctuation unit that causes the amount of phase shift to fluctuate based on the periodic signal, a drive amplitude detection unit that detects the amplitude of the drive signal and outputs a drive amplitude signal, a product detection unit that outputs a detection signal after performing product detection on the drive amplitude signal based on the periodic signal, and an adjustment unit that adjusts the phase-shift amount based on the detection signal. | 11-20-2014 |
20140355089 | MEMS Device and Electronic Device Having Projector Function - In a MEMS device ( | 12-04-2014 |
20150021483 | Vibrating Mirror Element, Distance Measuring Apparatus, and Projector - A vibrating mirror element includes a drive control portion configured to control the driving of a correction drive portion to keep the turning angle velocity of a mirror portion substantially constant by oscillating the mirror portion about an axis at a non-resonance frequency in a direction opposite to a direction in which a resonant drive portion oscillates the mirror portion. | 01-22-2015 |