Patent application number | Description | Published |
20080199282 | CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE - Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool). In one embodiment, the cluster tool is adapted to perform a track lithography process in which a photosensitive material is applied to a substrate, patterned in a stepper/scanner, and then removed in a developing process completed in the cluster tool. In one embodiment of the cluster tool, substrates are grouped together in groups of two or more for transfer or processing to improve system throughput, reduce the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, and thus increase system reliability. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time. | 08-21-2008 |
20080223293 | CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE - A cluster tool for processing a substrate includes a cassette and a processing module including a first process chamber that is configured to perform a chill process on a substrate, a second processing chamber that is configured to perform a bake process on the substrate, and an input chamber. The first processing chamber, the second processing chamber, and the input chamber are substantially adjacent to each other. The processing modules also includes a robot that is configured to receive the substrate in the input chamber and transfer and position the substrate in the first processing chamber and second processing chamber. The robot includes a robot blade, an actuator, and a heat exchanging device. The heat exchanging device includes a chilled transfer assembly. The cluster tool also includes a 6-axis articulated robot configured to transfer the substrate between the cassette and the input chamber. | 09-18-2008 |
20090064928 | CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE - Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also the cluster tool has a smaller system footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, which is then removed in a developing process completed in the cluster tool. In track lithography type cluster tools, since the chamber processing times tend to be rather short, and the number of processing steps required to complete a typical track system process is large, a significant portion of the time it takes to process a substrate is taken up by the processes of transferring the substrates in a cluster tool between the various processing chambers. In one embodiment of the cluster tool, the cost of ownership, is reduced by grouping substrates together and transferring and processing the substrates in groups of two or more to improve system throughput, and reduces the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, thus reducing wear on the robot and increasing system reliability. In one aspect of the invention, the substrate processing sequence and cluster tool are designed so that the substrate transferring steps performed during the processing sequence are only made to chambers that will perform the next processing step in the processing sequence. Embodiments also provide for a method and apparatus that are used to improve the coater chamber, the developer chamber, the post exposure bake chamber, the chill chamber, and the bake chamber process results. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time. | 03-12-2009 |
20090067956 | CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE - Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also the cluster tool has a smaller system footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, which is then removed in a developing process completed in the cluster tool. In track lithography type cluster tools, since the chamber processing times tend to be rather short, and the number of processing steps required to complete a typical track system process is large, a significant portion of the time it takes to process a substrate is taken up by the processes of transferring the substrates in a cluster tool between the various processing chambers. In one embodiment of the cluster tool, the cost of ownership, is reduced by grouping substrates together and transferring and processing the substrates in groups of two or more to improve system throughput, and reduces the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, thus reducing wear on the robot and increasing system reliability. In one aspect of the invention, the substrate processing sequence and cluster tool are designed so that the substrate transferring steps performed during the processing sequence are only made to chambers that will perform the next processing step in the processing sequence. Embodiments also provide for a method and apparatus that are used to improve the coater chamber, the developer chamber, the post exposure bake chamber, the chill chamber, and the bake chamber process results. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time. | 03-12-2009 |
20120180983 | CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE - The present invention generally provides a cluster tool for processing a substrate. In one embodiment, the cluster tool comprises at least one processing rack, which comprises a first plurality of substrate processing chambers that are positioned adjacent to each other and aligned in a first direction, a second plurality of substrate processing chambers that are positioned adjacent to each other and adjacent to at least one of the first plurality of substrate processing chambers, the second plurality of substrate processing chambers being positioned in a second direction relative to the first direction, a first shuttle robot movable in the first direction for moving substrates between each of the first plurality of substrate processing chambers, and a second shuttle robot movable in the second direction for moving substrates between each of the second plurality of substrate processing chambers. | 07-19-2012 |
20120320361 | CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE - Embodiments of the invention generally include a robot assembly comprising a robot operable to position a substrate at one or more points within a plane, and a motion assembly having a motor operable to position the robot in a direction generally parallel to a first direction. The motion assembly comprises a robot support interface having the robot coupled thereto, and one or more walls that form an interior region in which the motor is enclosed. The walls define an elongated opening through which the robot support interface travels, and the motor is operable to move the robot support interface laterally in the elongated opening. The motion assembly further comprises one or more fan assemblies that are in fluid communication with the interior region. The fan assemblies are operable to create a subatmospheric pressure in the interior region thereby causing gas to flow through the elongated opening into the interior region. | 12-20-2012 |
20140114978 | METHOD AND SYSTEM FOR SOCIAL MEDIA BURST CLASSIFICATIONS - The present invention is directed to a method, system, and article of manufacture for systematically and automatically identifying abnormal or collective behavior patterns in microblogging messages that produce burst phenomena, such as Twitter storms. A microblogging storm engine in a storm detection server is configured to detect and classify the volume, shape, and type of a Twitter storm when keying on topics such as, but not limited to, a brand, an event, a person, an entity, a country, or a controversial issue. The microblogging storm engine comprises a storm detection module, a storm classification module, a database interface module, and a sentiment process module. The storm detection module is configured to detect different patterns of microblogging storms by capturing the volume of a particular storm to assist in output statistical analysis. The storm classification module is configured to classify the storms into different types of a particular storm category. | 04-24-2014 |
20140337257 | HYBRID HUMAN MACHINE LEARNING SYSTEM AND METHOD - Embodiments of the present invention provide a system, method, and article of hybrid human machine learning system with tagging and scoring techniques for sentiment magnitude scoring of textual passages. The combination of machine learning systems with data from human pooled language extraction techniques enable the present system to achieve high accuracy of human sentiment measurement and textual categorization of raw text, blog posts, and social media streams. This information can then be aggregated to provide brand and product strength analysis. A data processing module is configured to get streaming data and then tag the streaming data automatically using the machine learning output. A crowdsourcing module is configured to select a subset of social media posts that have been previously stored in the database, and present the social media posts on the web, which then tags each social media with a selected set of attributes. A score aggregator module configured to provide a score based on a user's feedback for each social media post. | 11-13-2014 |
Patent application number | Description | Published |
20080224817 | INTERLACED RTD SENSOR FOR ZONE/AVERAGE TEMPERATURE SENSING - A device for heating a semiconductor wafer comprises a heating element arranged to conduct heat toward the wafer. The heating element can extend along a heating element path. An RTD sensor loop can extend along an RTD sensor path. The RTD sensor path can be positioned along the heating element path to measure a temperature that corresponds to the heating element. The RTD sensor loop can measure an average temperature along the heating element. Portions of the RTD sensor can be interlaced between portions of the heating element. The heating element path can be arranged with interstices between portions of the heating element path, and portions of the RTD sensor path can be positioned within the interstices to interlace the RTD sensor loop with the heating element. The RTD sensor loop can comprise a soft metal that is resistant to oxidation and extends along the RTD sensor path. | 09-18-2008 |
20090109595 | METHOD AND SYSTEM FOR PERFORMING ELECTROSTATIC CHUCK CLAMPING IN TRACK LITHOGRAPHY TOOLS - A method of clamping/declamping a semiconductor wafer on an electrostatic chuck in ambient air includes disposing the semiconductor wafer at a predetermined distance above a dielectric surface of the electrostatic chuck having one or more electrodes and applying a first voltage greater than a predetermined threshold to the one or more electrodes of the electrostatic chuck for a first time period. The method includes reducing the first voltage to a second voltage substantially equal to a self bias potential of the semiconductor wafer after the first time period. The method includes maintaining the second voltage for a second time period and adjusting the second voltage to a third voltage characterized by a polarity opposite to that of the first voltage and a magnitude smaller than the predetermined threshold. The method includes reducing the third voltage to a fourth voltage substantially equal to the second voltage after a third time period. | 04-30-2009 |
20110024047 | SUBSTRATE SUPPORT HAVING FLUID CHANNEL - A support for a substrate processing chamber comprises a chuck having a substrate receiving surface, and a base comprising an upper wall comprising a recessed trench having (i) an attachment face at a first depth, and (ii) a fluid channel at a second depth. A lower wall is seated in the recessed trench and attached to the attachment face of the upper wall, to close the fluid channel. A fluid inlet is provided to supply a heat transfer fluid to the fluid channel and a fluid outlet provided to discharge the heat transfer fluid from the fluid channel. | 02-03-2011 |
20110081320 | Treatment/Cure of Autoimmune Disease - An embodiment entails administering an effective amount of a product such as a protease or a source of a protease that destroys or deactivates an immunogen, mimic or antigen specific to a particular autoimmune disease before it encounters the immune system of a patient. | 04-07-2011 |
20120108787 | Immobilization Particles for Removal of Microorganisms and/or Chemicals - An immobilization particle for immobilizing a target microorganism or target chemical found in or on a mammal that includes: immobilization molecules capable of attaching to a target microorganism or a target chemical, which immobilization molecules are attached to one or more portions of a substrate structure; wherein the substrate structure is capable of inhibiting contact between tissues of the mammal and target microorganisms or target chemicals attached to immobilization molecules attached to the one or more portions. | 05-03-2012 |
20130302296 | Treatment and Prophylaxis for Obsessive Compulsive Disorder - An embodiment is a method of preventing, mitigating or treating Pediatric Autoimmune Neuropsychiatric Disorders Associated with Streptococcal Infections (PANDAS) that includes administering an effective amount of a medicament comprised of | 11-14-2013 |
Patent application number | Description | Published |
20090146583 | PORTABLE HANDHELD ILLUMINATION SYSTEM - Illumination systems are described that can include one or more light sources, which can include LEDs, one or more lenses, and one or more optical fibers. A handheld, portable, and surgical intraocular illumination system is disclosed that is disposable, low-cost, and efficient. A surgeon can have direct control of turning the illuminator on and off and adjusting the intensity via a simple control ergonomically placed on the handpiece and/or voice activated control. A coupling is provided, such as through an endo-probe, which is coupled to the one or more light sources. A user input device can be included that is operable to transmit to a feedback controller a first signal based on a user-selected light intensity. The feedback controller can, in response to the first signal, transmit a second signal to the power source for altering the power provided by the power source to the illumination system. | 06-11-2009 |
20110282160 | SELF CONTAINED ILLUMINATED INFUSION CANNULA SYSTEMS AND METHODS AND DEVICES - A cannula is described having a housing, a first lumen, a second lumen, and a port capable of fluid communication with the first lumen. The second lumen configured to receive fluid from the first lumen and to direct the fluid to a surgical site. A light emitting diode light source is positionable within the housing and configured to direct light through the second lumen to the surgical site. | 11-17-2011 |
20140357957 | SELF CONTAINED ILLUMINATED INFUSION CANNULA SYSTEMS AND METHODS AND DEVICES - A cannula is described having a housing, a first lumen, a second lumen, and a port capable of fluid communication with the first lumen. The second lumen configured to receive fluid from the first lumen and to direct the fluid to a surgical site. A light emitting diode light source is positionable within the housing and configured to direct light through the second lumen to the surgical site. | 12-04-2014 |
Patent application number | Description | Published |
20090304654 | METHODS FOR ISOLATING ADIPOSE-DERIVED STEM CELLS AND THERAPEUTIC USE THEREOF - The application discloses adipose tissue-derived stem cells (ADSC) and related compositions and methods. ADSCs are useful for (i) production of insulin producing cells, (ii) treatment of diabetes, (iii) endothelial cell reconstitution, (iv) treatment of overactive bladder and urge incontinence, (v) prevention and treatment of bladder voiding dysfunction; (vi) treatment of neurogenic impotence such as that resulting from diabetes or after prostate cancer therapy; (vii) treatment of vasculogenic impotence, such as that resulting from hypertension, dyslipidemia, atherosclerosis and diabetes; (viii) the promotion of wound healing; (ix) reduction of skin wrinkling; and (x) hair growth. | 12-10-2009 |
20110268708 | ADIPOSE TISSUE-DERIVED STEM CELLS FOR VETERINARY USE - The invention provides for compositions and methods for making and using adipose-derived stem cells for treating non-human mammals for various medical conditions. | 11-03-2011 |
20120118740 | METHODS AND DEVICES FOR SORTING CELLS AND OTHER BIOLOGICAL PARTICULATES - An optical pattern-driven light induced dielectrophoresis (DEP) apparatus and separation methods are described which provide for the manipulation of particles or cells and selection based on traits correlated with the DEP response. Embodiments of the apparatus use DEP electric field patterns in combination with microfluidic laminar flows to measure response, separate, segregate and extract particles from heterogeneous mixtures according to the relative response of the particles to one or more DEP fields without damaging living cells. The methods are particularly suited for selecting and extracting the best sperm and embryo candidates based on fitness for use with existing artificial reproduction procedures and excluding defective or non-viable gametes. | 05-17-2012 |
20130149285 | ADIPOSE TISSUE-DERIVED STEM CELLS FOR VETERINARY USE - The invention provides for compositions and methods for making and using adipose-derived stem cells for treating non-human mammals for various medical conditions. In particular, the invention provides methods and compositions useful for repair of bone fractures, and for treatment of “dry eye” conditions, acute renal failure, and chronic renal failure in non-human mammals. | 06-13-2013 |
20130164267 | ADIPOSE TISSUE-DERIVED STEM CELLS FOR VETERINARY USE - The invention provides for compositions and methods for making and using adipose-derived stem cells for treating non-human mammals for various medical conditions. In particular, the invention provides methods and compositions useful for repair of bone fractures, and for treatment of “dry eye” conditions, acute renal failure, and chronic renal failure in non-human mammals. | 06-27-2013 |