Patent application number | Description | Published |
20090235952 | DEVICE AND METHOD FOR WET TREATING PLATE-LIKE SUBSTRATES - Disclosed is a device for wet treatment of plate-like articles including: | 09-24-2009 |
20100147336 | APPARATUS AND METHOD FOR ULTRASONIC WET TREATMENT OF PLATE-LIKE ARTICLES - Disclosed is a method and a respective apparatus for ultrasonic wet treatment of a plate-like article, which comprises: bringing a solid element, which is connected to a transducer in close proximity to a surface of a plate-like article so that a gap is formed between the solid element and the plate-like article, the gap having a distance d | 06-17-2010 |
20110155169 | ULTRASONIC CLEANING FLUID, METHOD AND APPARATUS - A cleaning fluid including dispersed gas avoids using ultrasonic energy to induce cavitation by subjecting a liquid containing dissolved gas to a pressure reduction in a bubble machine, to generate a gas/liquid dispersion. The cleaning fluid can be used to clean articles such as semiconductor wafers using a device that includes a holder and a vibrator for supplying ultrasonic or megasonic energy to the article. | 06-30-2011 |
20120073596 | ULTRASONIC CLEANING METHOD AND APPARATUS - A device and method for treating the surface of a semiconductor wafer provides a treatment fluid in the form of a dispersion of gas bubbles in a treatment liquid generated at acoustic pressures less than those required to induce cavitation in the treatment liquid. A resonator supplies ultrasonic or megasonic energy to the treatment fluid and is configured to create an interference pattern in the treatment fluid comprising regions of pressure amplitude minima and maxima at an interface of the treatment fluid and the semiconductor wafer. | 03-29-2012 |
20120273363 | ULTRASONIC TREATMENT METHOD AND APPARATUS - Improved methods and apparatus for cleaning substrates and enhancing diffusion limited reaction at substrate surfaces use piezoelectric transducers operating in the gigasonic domain. The resonator assemblies include plural transducer stacks each including a thin film piezoelectric element coupled to a resonator plate that faces the substrate. At the disclosed frequencies and powers used, Eckart or Rayleigh streaming can be induced in a liquid treatment medium without substantial generation of cavitation. | 11-01-2012 |
20130019893 | ULTRASONIC CLEANING METHOD AND APPARATUS - A device and method for treating the surface of a semiconductor wafer provides a treatment fluid in the form of a dispersion of gas bubbles in a treatment liquid generated at acoustic pressures less than those required to induce cavitation in the treatment liquid. A resonator supplies ultrasonic or megasonic energy to the treatment fluid and is configured to create an interference pattern in the treatment fluid comprising regions of pressure amplitude minima and maxima at an interface of the treatment fluid and the semiconductor wafer. | 01-24-2013 |
20130319472 | METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES - A device and method for treating the surface of a semiconductor wafer provides a treatment fluid in the form of a dispersion of gas bubbles in a treatment liquid generated at acoustic pressures less than those required to induce cavitation in the treatment liquid. A resonator supplies ultrasonic or megasonic energy to the treatment fluid and is configured to create an interference pattern in the treatment fluid comprising regions of pressure amplitude minima and maxima at an interface of the treatment fluid and the semiconductor wafer. The resonator is mounted in the space between the rotary chuck body and a wafer carried in rotation with the chuck body; however, the resonator itself is stationary in relation to rotation of the wafer and chuck body. | 12-05-2013 |
20140182636 | METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES - The wet treatment of wafer-shaped articles is improved by utilizing a droplet generator designed to produce a spray of monodisperse droplets. The droplet generator is mounted above a spin chuck, and is moved across a major surface of the wafer-shaped article in a linear or arcuate path. The droplet generator includes a transducer acoustically coupled to its body such that sonic energy reaches a region of the body surrounding the discharge orifices. Each orifice has a width w of at least 1 μm and at most 200 μm and a height h such that a ratio of h to w is not greater than 1. | 07-03-2014 |
Patent application number | Description | Published |
20100164163 | NOTE TRANSPORT UNIT - It is presented a note transport unit for feeding notes one after the other to and from a note handling unit. The note transport unit comprises at least one note storage drum to and from which input notes and output notes, respectively, are transported. A bidirectional roller is arranged to transport notes along a first guide surface towards and from the at least one note storage drum. Moreover, first and second films are provided, between which films notes are stored on the at least one note storage drum. Several converging areas are used for the capturing of both input notes and output notes when notes are transferred between the note handling unit and the at least one note storage drum. It is also presented a method for bidirectional transfer of notes to and from the note transport unit. | 07-01-2010 |
20100168903 | CASH TRANSPORT APPARATUS - A cash transport apparatus is configured to be externally connected to a note handling apparatus only during a procedure of distribution of notes between said note handling apparatus and said transport apparatus. The transport apparatus comprises a first opening configured to interface with a second opening in said note handling apparatus thereby enabling the distribution of notes between said note handling apparatus and said transport apparatus, a note storage component comprising at least one drum able to rotate in both directions and configured to store notes by at least one layer of film spooled onto said at least one drum, and a power input connector configured to receive electric power from said note handling apparatus and provide the electric power to said note storage component. | 07-01-2010 |
20110259706 | CASH HANDLING - Cash handling in a cash handling system is described in terms of methods and arrangements that interact by exchanging cash as well as information signals. A cash transport unit is configured to receive, store and provide cash, preferably in the form of notes. The transport units connect with ATM's, shops, vehicles as well as cash docking stations. Information flows among the entities of the system, between the transport units, the shops, the vehicles, the docking stations, a transport service control center, cash centers as well as banks. | 10-27-2011 |