Patent application number | Description | Published |
20120154774 | Lithographic Apparatus and Device Manufacturing Method - Lithography apparatus and device manufacturing methods are disclosed in which means are provided for reducing the extent to which vibrations propagate between a first element of a projection system and a second element of a projection system. Approaches disclosed include the use of plural resilient members in series as part of a vibration isolation system, plural isolation frames for separately supporting first and second projection system frames, and modified connection positions for the interaction between the first and second projection system frames and the isolation frame(s). | 06-21-2012 |
20120241268 | ARRANGEMENT FOR THE VIBRATION ISOLATION OF A PAY LOAD - The disclosure relates to arrangements and methods for vibration isolation of a payload from a body. An arrangement for vibration isolation of a payload from a body having vibrations includes a sensor for measuring vibrations, and an actuator for generating a compensation force on the payload, at least on the basis of the measurement of the sensor. At least one balancing mass is arranged in the reaction path of a reaction force associated with the compensation force, and the sensor is mounted on the body. | 09-27-2012 |
20140185029 | OPTICAL IMAGING ARRANGEMENT WITH VIBRATION DECOUPLED SUPPORT UNITS - An optical imaging arrangement includes an optical projection system and a support structure system. The optical projection system includes a group of optical elements configured to transfer, in an exposure process using exposure light along an exposure light path, an image of a pattern of a mask supported by a mask support structure onto a substrate supported by a substrate support structure. The mask support structure and the substrate support structure form a primary source of vibration. The support structure system includes a base support structure, an optical element support structure and at least one secondary vibration source support structure of a secondary vibration source other than the primary source of vibration. The optical element support structure supports the optical elements. | 07-03-2014 |
20140204354 | METHOD FOR CONTROLLING A MOTION OF OPTICAL ELEMENTS IN LITHOGRAPHY SYSTEMS - A method for controlling a vibrating optical element of a lithographic system the optical element having a predetermined number of degrees of freedom comprises: detecting a number of displacements of the optical element, each displacement corresponding to a degree of freedom, wherein the number of detected displacements is larger than the number of degrees of freedom; for each displacement according to a degree of freedom, generating a sensor signal corresponding to a movement in a degree of freedom; wherein the optical element moves as a function of a rigid body transformation matrix, the optical element movement including a first type of movement and a second type of movement; and modifying the sensor signals as a function of a modified transformation matrix, wherein the modified transformation matrix at least partially reduces at least one eigen mode or resonance of one of the first type of movements or the second type of movements. | 07-24-2014 |
20160004170 | Lithographic Apparatus and Device Manufacturing Method - Lithography apparatus and device manufacturing methods are disclosed in which means are provided for reducing the extent to which vibrations propagate between a first element of a projection system and a second element of a projection system. Approaches disclosed include the use of plural resilient members in series as part of a vibration isolation system, plural isolation frames for separately supporting first and second projection system frames, and modified connection positions for the interaction between the first and second projection system frames and the isolation frame(s). | 01-07-2016 |
Patent application number | Description | Published |
20110163695 | POWER SUPPLY UNIT AND METHOD FOR CONTROLLING A POWER SUPPLY UNIT - A power supply unit is provided which comprises an AC/DC conversion unit with an input to which an input voltage is coupled and an output to which a DC bus voltage is coupled. The power supply unit furthermore comprises a DC bus capacitor which is coupled to the output of the AC/DC conversion unit. The power supply unit furthermore comprises at least one sub-power supply unit receiving the DC bus voltage as input for providing at least one power supply. The power supply of the at least one sub-power supply unit or part of the load is at least reduced or switched off if the input voltage falls below a predetermined threshold value. | 07-07-2011 |
20110164339 | SURGE PROTECTION CIRCUIT - A surge protection circuit for a circuit having a rectification module. The surge protection circuit includes a first diode, a second diode, a capacitor and a discharge device. The anode of the first diode is connected to a first input of the rectification module, and the anode of the second diode is connected to a second input of the rectification module. The cathodes of the first and second diodes are both connected to the first plate of the capacitor. The second plate of the capacitor is connected to the negative output of the rectification module. The capacitor is configured such that it is consistently charged to substantially the peak value of a supply voltage during normal operation between surge events. The discharge device is connected to the first plate of the capacitor and is configured to discharge the capacitor when the voltage across the capacitor is in excess of the peak of the maximum value of the normal supply voltage and not discharge the capacitor when the voltage across the capacitor is not in excess of the peak of the maximum value of the normal supply voltage. | 07-07-2011 |
20110188270 | CIRCUIT - A circuit comprising a power factor correction stage having a DC input, a ground input, a DC output and a ground output; a capacitor; a diode; and discharge means. A first terminal of the diode is connected to an input of the power factor correction stage, a second terminal of the diode is connected to the first plate of the capacitor; and the second plate of the capacitor is connected to the other input of the PFC stage. The discharge means is connected to the capacitor and is configured to discharge the capacitor such that it contributes to the output of the PFC stage when the level of a signal at the input of the PFC stage falls below a threshold value. | 08-04-2011 |