Patent application number | Description | Published |
20100175482 | PRESSURE TRANSDUCER EMPLOYING A MICRO-FILTER AND EMULATING AN INFINITE TUBE PRESSURE TRANSDUCER - It is an objective of the present invention to provide a pressure transducer assembly for measuring pressures in high temperature environments that employs an elongated tube which is terminated at one end by an acoustic micro-filter. The micro-filter has a plurality of apertures extending from one end to the other end, each aperture is of a small diameter as compared to the diameter of the transducer and the damper operates to absorb acoustic waves impinging on it with limited or no reflection. To improve the absorption of acoustic waves, the elongated tube may be tapered and/or mounted to a support block and further convoluted to reduce the overall size and mass of the device. A pressure transducer with a diaphragm flush may be mounted to the elongated tube and extend through to the inner wall of the tube. Hot gases propagate through the elongated tube and their corresponding pressures are measured by the transducer. The acoustic filter operates to absorb acoustic waves resultant from the hot gases, therefore enabling the pressure transducer to be mainly responsive to high frequency waves associated with the gas turbine operation. | 07-15-2010 |
20100310207 | OPTICAL MICROMACHINED PRESSURE SENSOR - It is an objective of the present invention to provide a highly sensitive optical pressure sensor that uses a Mach-Zehnder Interferometer to measure pressure. The pressure sensor comprises a deflectable diaphragm including a substantially central boss and channel and an optical waveguide having a first arm and a second arm, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel, and further wherein the first and second arms contain a periodic array of etched holes to improve the overall sensitivity of the pressure sensor. The pressure sensor further comprises a light source coupled to the optical waveguide for introducing light to the waveguide and a light detector coupled to the waveguide for detecting changes in the intensity of light. The change in light intensity is then correlated to an applied pressure. | 12-09-2010 |
20100326199 | LOW DIFFERENTIAL PRESSURE TRANSDUCER - It is an object of the present invention to provide a pressure transducer having a header wherein the header is comprised of a first section and a second section that are offset from each other. Each first and second section has a flexible diaphragm adapted to receive a first and second pressure, respectively. A central channel connects the diaphragms and a pressure sensor, located within the central channel, communicates with the channel and produces an output equal to the difference between the first and second pressures. The resultant device is a low differential pressure transducer which enables one to bring leads from the sensor out while having diaphragms of substantially the same size and diameter, therefore enabling the diaphragms to exhibit the same back pressure and be equally compliant. | 12-30-2010 |
20110185818 | APPARATUS AND METHOD FOR ELIMINATING VARYING PRESSURE FLUCTUATIONS IN A PRESSURE TRANSDUCER - A single pressure sensing capsule has a reference pressure ported to the rear side of a silicon sensing die. The front side of the silicon sensing die receives a main pressure at another port. The difference between the main and reference pressure results in the sensor providing an differential pressure output. The reference pressure or main pressure may be derived from a pump pressure which is being monitored. The pump pressure output is subjected to a pump ripple or a sinusoidally varying pressure. In order to compensate for pump ripple, a coiled tube or an adjustable dampening chamber comprising a spiral inlet tube and a volume cavity can be used. The tube length is selected to suppress the pump ripple as applied to the sensor die. In this manner, the pump ripple cannot cause resonance which would result in pressure amplification and which pressure amplification would destroy the sensor. | 08-04-2011 |
20110203381 | CORROSION-RESISTANT HIGH TEMPERATURE PRESSURE TRANSDUCER EMPLOYING A METAL DIAPHRAGM - A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate. | 08-25-2011 |
20110235678 | LEADLESS MEDIA PROTECTED FAST RESPONSE RTD SENSOR AND METHOD FOR MAKING THE SAME - The RTD device of the present invention is comprised of a semiconductor substrate and a substantially thin conductive metal layer disposed upon the semiconductor substrate, wherein the conductive metal has a substantially linear temperature-resistance relationship. The conductive layer is etched into a convoluted RTD pattern, which consequently increases the overall resistance and minimizes the overall mass of the RTD assembly. A contact glass cover and a conductive metal-glass frit are placed over the RTD assembly to hermetically seal the RTD. The resultant structure can be “upside-down” mounted onto a header or a flat shim so that the bottom surface of the semiconductor substrate is exposed to the external environment, thus shielding the RTD from external forces. The resultant structure is a low mass, highly conductive, leadless, and hermetically sealed RTD that accurately measures the temperature of liquids and gases and maintains fast response time in high temperatures and harsh environments. | 09-29-2011 |
20110239772 | DIFFERENTIAL TEMPERATURE AND ACCELERATION COMPENSATED PRESSURE TRANSDUCER - A dual diaphragm pressure transducer, or sensor, with compensation for non-pressure effects is disclosed. The pressure sensor can include two pressure transducers located on separate portions of a chip. The first pressure transducer can be a differential pressure transducer, which produces a signal proportional to one or more applied pressures and includes other non-pressure effects. The second pressure transducer can be sealed in a hermetic chamber and thus can produce a signal proportional only to non-pressure effects. The signals can be combined to produce a signal proportional to the applied pressures with no non-pressure effects. The first and second pressure transducers can be physically and/or electrically isolated to improve sealing between the two pressure transducers and prevent pressure leaks therebetween. | 10-06-2011 |
20110239783 | TWO OR THREE-AXIS SHEAR LOAD CELL - A two or three axis load cell capable of measuring axial and one or more shear forces is disclosed. The load cell can comprise a force collector connected by one or more connecting rods to one or more cross pieces. The load cell can comprise a single cross piece and can measure an axial force applied to the load cell and at least one component of shear force applied to the load cell. In other embodiments, the load cell can comprise two cross pieces, disposed at disparate angles, to enable the measurement of an axial force and both components of shear force applied to the force collector. The cross pieces are equipped with a means, such as piezoresistive elements to measure their deflection due to the applied forces on the force collector. The connecting rods can be fitted with additional piezoresistors to measure the axial forces on the force collector. | 10-06-2011 |
20110296924 | PRESSURE TRANSDUCER EMPLOYING A MICRO-FILTER AND EMULATING AN INFINITE TUBE PRESSURE TRANSDUCER - A pressure transducer assembly for measuring pressures in high temperature environments employing an elongated tube which is terminated at one end by an acoustic micro-filter. The micro-filter is operative to absorb acoustic waves impinging on it with limited or no reflection. To improve the absorption of acoustic waves, the elongated tube may be tapered and/or mounted to a support block and further convoluted to reduce the overall size and mass of the device. A pressure transducer with a diaphragm flush may be mounted to the elongated tube and extend through to the inner wall of the tube. Hot gases propagate through the elongated tube and their corresponding pressures are measured by the transducer. The acoustic filter operates to absorb acoustic waves resultant from the hot gases, therefore enabling the pressure transducer to be mainly responsive to high frequency waves associated with the gas turbine operation. | 12-08-2011 |
20120073377 | ENHANCED STATIC-DYNAMIC PRESSURE TRANSDUCER SUITABLE FOR USE IN GAS TURBINES AND OTHER COMPRESSOR APPLICATIONS - A transducer comprising a filter assembly that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while removing dynamic pressure. | 03-29-2012 |
20120152026 | GAGE PRESSURE TRANSDUCER AND METHOD FOR MAKING THE SAME - A gage pressure transducer comprising a first pressure sensing assembly exposed to a main pressure and a second pressure sensing assembly exposed to a reference pressure. The pressure sensing assemblies comprise half-bridge sensors and means for using an alignment glass plate with each sensor which reduces the amount of oil required for operation, which consequently reduces the back pressures caused by large volumes of oil. The pressure sensor assemblies are hermetically sealed using glass frits, therefore enabling the gage pressure transducer to robustly and accurately measure pressure in harsh environments. | 06-21-2012 |
20120234098 | GAGE PRESSURE TRANSDUCER AND METHOD FOR MAKING THE SAME - A gage pressure transducer comprising a first pressure sensing assembly exposed to a main pressure and a second pressure sensing assembly exposed to a reference pressure. The pressure sensing assemblies comprise half-bridge sensors and means for using an alignment glass plate with each sensor which reduces the amount of oil required for operation, which consequently reduces the back pressures caused by large volumes of oil. The pressure sensor assemblies are hermetically sealed using glass frits, therefore enabling the gage pressure transducer to robustly and accurately measure pressure in harsh environments. | 09-20-2012 |
20120291560 | CORROSION-RESISTANT HIGH TEMPERATURE PRESSURE TRANSDUCER EMPLOYING A METAL DIAPHRAGM - A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate. | 11-22-2012 |
20130098159 | LOW PASS FILTER SEMICONDUCTOR STRUCTURES FOR USE IN TRANSDUCERS FOR MEASURING LOW DYNAMIC PRESSURES IN THE PRESENCE OF HIGH STATIC PRESSURES - A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. In one embodiment, a method comprises receiving, at a filter, a pressure, wherein the pressure includes a static pressure component and a dynamic pressure component; filtering, by the filter, at least the dynamic pressure component of the pressure; outputting, from the filter, a filtered pressure; receiving, at a first surface of a diaphragm, the pressure; receiving, at a second surface of the diaphragm, the filtered pressure, wherein the second surface of the diaphragm is operatively coupled to the filter; and measuring, at a sensor operatively coupled to the diaphragm, a difference between the pressure and the filtered pressure. | 04-25-2013 |
20130298700 | Pressure Transducer Utilizing Non-Lead Containing Frit - A piezoresistive sensor device and a method for making a piezoresistive device are disclosed. The sensor device comprises a silicon wafer having piezoresistive elements and contacts in electrical communication with the elements. The sensor device further comprises a contact glass coupled to the silicon wafer and having apertures aligned with the contacts. The sensor device also comprises a non-conductive frit for mounting the contact glass to a header glass, and a conductive non-lead glass frit disposed in the apertures and in electrical communication with the contacts. The method for making a piezoresistive sensor device, comprises bonding a contact glass to a silicon wafer such that apertures in the glass line up with contacts on the wafer, and filling the apertures with a non-lead glass frit such that the frit is in electrical communication with the contacts. The use of a lead free glass frit prevents catastrophic failure of the piezoresistive sensor and associated transducer in ultra high temperature applications. | 11-14-2013 |
20130312532 | CORROSION-RESISTANT HIGH TEMPERATURE PRESSURE TRANSDUCER EMPLOYING A METAL DIAPHRAGM - A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate. | 11-28-2013 |
20130327150 | METHOD OF JOINING A PRESSURE SENSOR HEADER WITH AN ASSOCIATED TRANSDUCER ELEMENT - A pressure transducer assembly including: a pressure sensor header; a transducer assembly member; and a joining arrangement disposed at an interface of the header and the transducer assembly member, for joining the header with the transducer assembly member, the joining arrangement including: a recessed female joining element formed in one of the header and the transducer assembly member; and a protruding male joining element formed on the other of the header and the transducer assembly member, the male joining element received in the female joining element. | 12-12-2013 |
20140041457 | Apparatus and Method for Eliminating Varying Pressure Fluctuations in a Pressure Transducer - A differential pressure transducer employing a coiled tube to eliminate varying pressure fluctuations is provided. In one embodiment, a method comprises receiving, at an inlet tube of a dampening chamber, a main pressure, wherein the main pressure includes a static pressure component and a dynamic pressure component; filtering, by the inlet tube, at least a portion of the dynamic pressure component of the main pressure; outputting, from the inlet tube, a first filtered main pressure; receiving, at a volume cavity of the dampening chamber, the first filtered main pressure, wherein the volume cavity is operatively coupled to the inlet tube; filtering, by the volume cavity, at least a portion of the dynamic pressure component of the first filtered main pressure; outputting, from the volume cavity, a second filtered main pressure; and wherein the dampening chamber is tuned to a predetermined resonance frequency. | 02-13-2014 |
20140053652 | Gage Pressure Transducer and Method for Making the Same - A method, device and system for a gage pressure transducer including the making thereof are provided. In one embodiment, a method comprises receiving, at a first diaphragm, a first pressure, wherein the first diaphragm is composed of metal; transferring, from the first diaphragm, to a first sensor, the first pressure using a first oil region, wherein the first oil region is disposed between the first diaphragm and the first sensor; receiving, at the first sensor, the first pressure; measuring, by the first sensor, the first pressure to generate a first pressure signal; and outputting, from the first sensor, to a first header pin, the first pressure signal, wherein the first header pin is electrically coupled to the first sensor using a first conductive glass frit. | 02-27-2014 |
20140067288 | High Temperature, High Bandwidth Pressure Acquisition System - A method, device and system are provided for measuring multiple pressures under severe conditions. In one embodiment, a method comprises receiving, by a processor, from a first sensor, a first pressure signal; receiving, by the processor, from a second sensor, a second pressure signal; receiving, by the processor, from a first memory, a first correction coefficient for the first sensor; receiving, by the processor, from a second memory, a second correction coefficient for the second sensor; modifying, by the processor, the first pressure signal using the first correction coefficient to generate a first corrected pressure signal; modifying, by the processor, the second pressure signal using the second correction coefficient to generate a second corrected pressure signal; and outputting, by the processor, the first corrected pressure signal and the second corrected pressure signal. | 03-06-2014 |
20140090477 | INTERNALLY SWITCHED MULTIPLE RANGE TRANSDUCERS - Systems and methods for an internally switched multiple range transducer are provided. In one embodiment, a method comprises receiving, at a first sensor, a pressure, wherein the first sensor is associated with a first pressure range; measuring, at the first sensor, the pressure to generate a first pressure signal; in response to determining that the first pressure signal is not associated with the first pressure range, activating a second sensor, wherein the second sensor is associated with a second pressure range that is different from the first pressure range; and measuring, at the second sensor, the pressure to generate a second pressure signal. | 04-03-2014 |
20140102207 | TORQUE INSENSITIVE HEADER ASSEMBLY - This disclosure provides example methods, devices and systems associated with a torque-insensitive header assembly. In one embodiment, a method comprises receiving, by a sensor, from an aperture defined by a shell, an environmental condition, wherein the sensor is coupled to a header and the header is coupled to the shell such that the sensor is isolated from a torque stress applied to the shell; measuring, by the sensor, the environmental condition to determine an environmental condition signal; and outputting, from the sensor, the environmental condition signal. | 04-17-2014 |
20140102209 | ENHANCED STATIC-DYNAMIC PRESSURE TRANSDUCER SUITABLE FOR USE IN GAS TURBINES AND OTHER COMPRESSOR APPLICATIONS - This disclosure provides example methods, devices and systems associated with filter structures employed with sensors. In one embodiment, a method comprises receiving, at a first filter having a plurality of pores, a pressure, wherein the pressure includes a static pressure component and a dynamic pressure component; filtering, by the first filter, at least a portion of the dynamic pressure component of the pressure; outputting, from the first filter, a filtered pressure; and wherein the filtered pressure is used to determine the dynamic pressure component. | 04-17-2014 |
20140123771 | PRESSURE TRANSDUCER UTILIZING NON-LEAD CONTAINING FRIT - A piezoresistive sensor device and a method for making a piezoresistive device are disclosed. In one example, a method may comprise receiving, by a sensor device having a contact, a pressure; measuring, by the sensor device, the pressure to generate a pressure signal; outputting, by the sensor device, to the contact, the pressure signal; and receiving, by a header pin, from the contact, the pressure signal, wherein the header pin and the contact are electrically coupled using a conductive, non-lead containing frit and are aligned using a contact cover that is coupled to the sensor device using a non-conductive, non-lead containing frit. | 05-08-2014 |
20140331775 | LOW PASS FILTER SEMICONDUCTOR STRUCTURES FOR USE IN TRANSDUCERS FOR MEASURING LOW DYNAMIC PRESSURES IN THE PRESENCE OF HIGH STATIC PRESSURES - A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. In one embodiment, a method comprises receiving, at a filter having a plurality of apertures, a pressure, wherein the pressure includes a static pressure component and a dynamic pressure component; filtering, by the plurality of apertures, at least a portion of the dynamic pressure component of the pressure, wherein a diameter of each of the plurality of apertures is such that the plurality of apertures filters at least the portion of the dynamic pressure component of the pressure; outputting, from the filter, a filtered pressure; and wherein the filtered pressure is used to determine the dynamic pressure component of the pressure. | 11-13-2014 |
20150300901 | HIGH TEMPERATURE TRANSDUCER USING SOI, SILICON CARBIDE OR GALLIUM NITRIDE ELECTRONICS - There is disclosed a high temperature pressure sensing system which includes a SOI, silicon carbide, or gallium nitride Wheatstone bridge including piezoresistors. The bridge provides an output which is applied to an analog to digital converter also fabricated using SOI, silicon carbide, or gallium nitride materials. The output of the analog to digital converter is applied to microprocessor, which microprocessor processes the data or output of the bridge to produce a digital output indicative of bridge value. The microprocessor also receives an output from another analog to digital converter indicative of the temperature of the bridge as monitored by a span resistor coupled to the bridge. The microprocessor has a separate memory coupled thereto which is also fabricated from SOI, silicon carbide, or gallium nitride materials and which memory stores various data indicative of the microprocessor also enabling the microprocessor test and system test to be performed. | 10-22-2015 |