Patent application number | Description | Published |
20110063588 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND INSPECTION/PERIPHERY EXPOSURE APPARATUS - An edge exposure unit includes a projector, a projector holding unit, a substrate rotating unit, an outer edge detecting unit and a surface inspection processing unit. Each component of the projector holding unit operates to move the projector in an X direction and a Y direction. The projector irradiates a peripheral portion of a substrate with light transmitted from a light source for exposure through a light guide. Edge sampling processing is performed based on distribution of an amount of light received in a CCD line sensor of the outer edge detecting unit. Surface inspection processing is performed based on distribution of an amount of light received in a CCD line sensor of the surface inspection processing unit. | 03-17-2011 |
20130084393 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - A processing liquid is supplied onto a substrate rotated by a spin chuck in a coating processing unit so that a film of the processing liquid is formed, and a rinse liquid is supplied to a peripheral edge of the substrate so that a processing liquid on the peripheral edge of the substrate is removed. An edge cut width between a position of an outer peripheral portion of the substrate rotated by the spin chuck in an edge exposure unit and a position of an outer peripheral portion of a film on the substrate is detected. Based on the detected edge cut width, a positional deviation of the center of the substrate held in the spin chuck from a rotation center of the spin chuck in the coating processing unit is determined while a supply state of the rinse liquid by an edge rinse nozzle is determined. | 04-04-2013 |
20130312658 | SUBSTRATE PROCESSING APPARATUS - A platform section has an upper platform chamber and a lower platform chamber. Platform units are provided in the upper platform chamber and the lower platform chamber, respectively. A plurality of local arms corresponding to coating processing chambers are provided in the upper platform chamber and the lower platform chamber, respectively. Further, in the upper platform chamber and the lower platform chamber, a plurality of local arms respectively corresponding to a plurality of thermal processing units, a plurality of local arms respectively corresponding to a plurality of adhesion reinforcement processing units and a plurality of local arms respectively corresponding to a plurality of cooling units are provided. | 11-28-2013 |
20140023776 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - A substrate is transported based on coordinates information indicating a receiving position of the substrate and a placement position of the substrate by a hand. If the substrate is shifted from a first position, the substrate is received by the hand while a center of the substrate is shifted from a normal position of the hand. The hand that holds the substrate is moved toward a second position. A plurality of portions at an outer periphery of the substrate are detected before the substrate is placed. A shift of the substrate with respect to the normal position of the hand is detected based on the detection result, and the coordinates information is corrected such that a shift between a position of the center of the substrate to be placed at the second position by the hand and the center of the second position is canceled. | 01-23-2014 |
20140065309 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - Transport mechanisms are respectively provided in first and second processing blocks. Each transport mechanism has a hand. The hand holds the other surface of a substrate without coming into contact with an edge of the substrate. The hand is moved such that the substrate is transported between an adhesion reinforcement processing unit or a cooling unit and a coating processing unit or a development processing unit. In the adhesion reinforcement processing unit and the cooling unit, temperature processing is performed on the substrate while the back surface of the substrate is held by suction. In the coating processing unit and the development processing unit, a processing liquid is supplied to the main surface of the substrate while the back surface of the substrate is held by suction by a spin chuck. | 03-06-2014 |
20140196663 | ALIGNMENT DEVICE AND SUBSTRATE PROCESSING APPARATUS - An aligner includes a plurality of substrate rotators and a shaft member. Each substrate rotator includes a holder, a notch detector, an electromagnetic clutch and a driving belt. Each holder sucks the back surface of the substrate under vacuum and horizontally holds the substrate. Each notch detector detects a notch formed at the substrate, and supplies a detection result to the corresponding electromagnetic clutch as a detection signal. One end of the shaft member is connected to a motor. The shaft member is continuously rotated by the motor. Each electromagnetic clutch switches to a connection state in which rotational force of an inner periphery is transmitted to an outer periphery and a disconnection state in which rotational force of the inner periphery is transmitted to the outer periphery according to a detection signal supplied from the notch detector. | 07-17-2014 |
20140261571 | SUBSTRATE CLEANING AND DRYING METHOD AND SUBSTRATE DEVELOPING METHOD - Provided is a substrate cleaning and drying method, including a cleaning step of cleaning a developed substrate by supplying a cleaning liquid to the substrate; a puddle-forming step of forming a puddle of the cleaning liquid on the substrate; a film-thinning step of thinning a film thickness of the cleaning liquid on the substrate; and a drying step of drying the substrate by spinning the substrate and generating outward airflow and inward airflow between the outward airflow and the substrate, the outward airflow covering a portion above the substrate and the inward airflow causing removal of the cleaning liquid on the substrate. | 09-18-2014 |
Patent application number | Description | Published |
20090209282 | WIRELESS COMMUNICATION CONTROL APPARATUS AND METHOD FOR MOBILE OBJECTS - According to one aspect of wireless communication control apparatus and method for a mobile object according to the present invention, the wireless communication apparatus and method include the steps of: collecting communication-state information corresponding to positional information of the mobile object for each of a plurality of communication methods that are used to make a connection to a wireless communication device of the mobile object, and that can be selectively set in the wireless communication device; referring to the communication-state information corresponding to the positional information indicating a current position of the mobile object, and selecting one communication method from among the plurality of communication methods that can be selectively set in the wireless communication device; and setting, in the wireless communication device, control information used for communications based on the selected communication method. | 08-20-2009 |
20100077446 | CENTER APPARATUS, TERMINAL APPARATUS, AND AUTHENTICATION SYSTEM - The present invention provides a system and a method, in which after authenticating a device, the user authentication methods are switched and used. Specifically, in performing user authentication via a terminal apparatus, the terminal apparatus is authenticated first and then based on this authentication result, a practical use of the terminal apparatus is determined, and the user authentication methods are switched so as to suit this practical use and the resultant method is implemented. | 03-25-2010 |
Patent application number | Description | Published |
20120136574 | VEHICLE OPERATION SUPPORT SYSTEM AND VEHICLE OPERATION SUPPORT METHOD - A vehicle drive support system, and its method, includes a storage apparatus for storing charging station information to manage attribute information containing position information of charging stations, a communication apparatus for receiving a route search request containing an origin, a destination, and a residual quantity in a battery from a mobile and transmitting a response to the route search request, and a route search processing unit for searching a route passing through the charging stations while maintaining a state in which the residual quantity in the battery is greater than 0 between the origin and the destination by using position information of the charging stations contained in the charging station information in response to the route search request received by the communication apparatus, and giving the searched route as the response to the route search request. | 05-31-2012 |
20120161692 | CHARGING CONTROL SYSTEM - In a charging control system, electrically-driven vehicles whose charging levels are lower than such a charging level required to drive these electrically-driven vehicles over a necessary minimum drivable distance are charged with a priority, and such an electrically-driven vehicle whose charging level quickly reaches the above-explained charging level among these electrically-driven vehicles is charged with a top priority. Also, in the charging control system, an order for dynamically charging vehicle-purpose batteries is rearranged by monitoring a change in charging environments, for instance, an electrically-driven vehicle is newly coupled to a charger in a half way; a commonly available electric power amount is increased by solar power generation etc.; and a supplyable electric power amount (W) is lowered due to utilization of electricity by a subject other than electrically-driven vehicles. | 06-28-2012 |
20130238162 | DRIVING RANGE CALCULATION APPARATUS, METHOD AND PROGRAM - A storage part stores beforehand, as an energy consumption graph, amounts of energy consumed by a vehicle traveling in both directions along road links on a map. A processing part traces a road link from a specified start point location peripherally, calculates, for each road node, a first and second integration values obtained by integrating amounts of energy in a direction moving away from the start point location on the energy consumption graph and in a direction moving toward the start point location on the energy consumption graph, and based on a relationship between the sum of the first integration value and the second integration value, and a given specified amount of energy for each road node, decides a round-trip driving range which is a range within which the vehicle is able to return to the start point location by using the specified amount of energy. | 09-12-2013 |
20130261953 | ROUTE SEARCH SYSTEM AND METHOD FOR ELECTRIC AUTOMOBILE - An object of the present information is to search for a route taking into account the charging times in the charging stations. When an electric automobile provided with a battery cannot reach a second point from a first point without the battery being charged in a charging station halfway, a route-search processing section specifies one or two or more charging stations, which the electric automobile is to pass through in order to reach the second point from the first point in a shorter time including a charging time in each of the charging stations and moving times among the charging stations, and derives a route for reaching the second point from the first point passing through the specified charging stations. | 10-03-2013 |
Patent application number | Description | Published |
20080198458 | IMAGE CAPTURING APPARATUS - An image capturing apparatus comprises: an image sensor adapted to opto-electronically convert the image of a subject; an optical member placed in front of the image sensor; first and second piezoelectric elements placed at respective ones of both ends of the optical member; first and second driving units adapted to independently vibrate the first and second piezoelectric elements, respectively; a detection unit having first and second detecting piezoelectric elements placed adjacent to the first and second piezoelectric elements, respectively, for detecting vibration of the optical member; and a first control unit adapted to control the first and second driving units and the detection unit so as to vibrate the optical member by vibrating the first piezoelectric element and detect vibration of the optical member using the second detecting piezoelectric element, or vibrate the optical member by vibrating the second piezoelectric element and detect vibration of the optical member using the first detecting piezoelectric element. | 08-21-2008 |
20100254004 | PIEZOELECTRIC ELEMENT DRIVE CIRCUIT AND FOREIGN SUBSTANCE REMOVING APPARATUS - A piezoelectric element drive circuit for outputting a signal that drives a piezoelectric element, the piezoelectric element drive circuit including: a frequency signal generation unit that outputs a frequency signal whose frequency is altered discretely; a voltage-controlled oscillator that alters the frequency of an output signal based on an inputted voltage; a phase comparator that compares the phase of the output signal from the frequency signal generation unit and the phase of the output signal of the voltage-controlled oscillator; and a loop filter that inputs, into the voltage-controlled oscillator, an output voltage that is altered based on alterations in an output signal from the phase comparator. The output signal of the voltage-controlled oscillator is the signal that drives the piezoelectric element. | 10-07-2010 |
20100315711 | FOREIGN SUBSTANCE REMOVING APPARATUS - A foreign substance removing apparatus that removes a foreign substance adhering on an optical member, comprising a piezoelectric element arranged at one end of the optical member, a transformer which generates a voltage to drive the piezoelectric element, the transformer including a primary-side wound wire and a secondary-side wound wire, the secondary-side wound wire being connected to the piezoelectric element, a first driving signal generation circuit which is connected to one end of the primary-side wound wire in the transformer, and generates a signal with a first frequency, and a second driving signal generation circuit which is connected to the other end of the primary-side wound wire in the transformer, and generates a signal with a second frequency. | 12-16-2010 |
20120182457 | IMAGE CAPTURING APPARATUS - An image capturing apparatus with an image sensor converting the image of a subject and an optical member in front of the image sensor. First and second piezoelectric elements at respective ends of the optical member are independently driven by respective first and second driving units. A detection unit has first and second detecting piezoelectric elements adjacent to the respective first and second piezoelectric elements for detecting vibration of the optical member. A first control unit controls the first and second driving units and the detection unit to vibrate the optical member by vibrating the first piezoelectric element and detect vibration of the optical member using the second detecting piezoelectric element, or vibrate the optical member by vibrating the second piezoelectric element and detect vibration of the optical member using the first detecting piezoelectric element. | 07-19-2012 |
Patent application number | Description | Published |
20160125173 | INFORMATION PROCESSING SYSTEM, ELECTRONIC DEVICE AND SERVICE AUTHORIZATION METHOD - An information processing system includes an information processing device, and an electronic device to utilize a service provided from the information processing device. A service delivery unit provides the service for the electronic device. An information management unit manages license information of the service, generates use permission information and sends the generated use permission information to the electronic device. An execution management unit manages an execution request of the service specifying the use permission information of the service. An execution unit determines whether to have a use authority of a function of the electronic device utilized by the service based on contents of the license included in the use permission information of the service and executes the service by utilizing the function of the electronic device upon determining that the use authority of the function of the electronic device utilized by the service is present. | 05-05-2016 |
20160125177 | INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING APPARATUS, ACCESS CONTROL METHOD, AND PROGRAM - An information processing system including at least one information processing apparatus includes an access control unit configured to receive a request from a service use apparatus to a service providing apparatus, to give, in a case where the request includes information of a completed authentication, based on setup information in which a type of giving information to be given to the request is set, the giving information of the type set in the setup information, and to send the request to the service providing apparatus; and an information providing unit configured to administer the giving information corresponding to the information of the completed authentication, and to provide the giving information corresponding to the information of the completed authentication received from the access control unit to the access control unit. | 05-05-2016 |
20160127349 | DATA PROCESSING SYSTEM, DATA PROCESSING APPARATUS AND LOG IN METHOD - A data processing system including a data processing apparatus, includes a user data storing unit that stores user data of a user who uses a first service, the user data including first authentication data used for logging in the first service and user specifying data; a determining unit that determines, when the user who uses the first service sets second authentication data used for logging in a second service different from the first service, user specifying data usable as the second authentication data from the user specifying data included in the user data; and a management unit that sets the user specifying data determined to be usable as the second authentication data in the user data of the user who uses the first service as the second authentication data, and manages the user data as user data of the user who uses the first service and the second service. | 05-05-2016 |
20160127356 | INFORMATION PROCESSING SYSTEM AND AUTHENTICATION METHOD - An information processing system includes a service utilizing device and at least one information processing device to provide a service for the service utilizing device. A temporary code issuing unit to issue a temporary code is provided in the information processing device. A device authentication token generation unit is provided in the service utilizing device and generates a device authentication token by using the temporary code obtained from the information processing device. A device authentication ticket issuing unit is provided in the information processing device and verifies whether the device authentication token obtained from the service utilizing device is valid by using the temporary code and issues a device authentication ticket depending on a verification result. An access unit is provided in the service utilizing device and accesses a resource in the information processing device by using the device authentication ticket obtained from the information processing device. | 05-05-2016 |