Patent application number | Description | Published |
20080236280 | FORCE REBALANCING AND PARAMETRIC AMPLIFICATION OF MEMS INERTIAL SENSORS - MEMS devices and methods for measuring Coriolis forces using force rebalancing and parametric gain amplification techniques are disclosed. A MEMS inertial sensor can include one or more proof masses, at least one sense electrode positioned adjacent to each proof mass, a number of torquer electrodes for electrostatically nulling quadrature and Coriolis-related proof mass motion, and a number of pump electrodes for producing a pumping force on the proof masses. Force rebalancing voltages can be applied to some torquer electrodes to electrostatically null quadrature and/or Coriolis-related proof mass motion along a sense axis of the device. A pumping voltage at approximately twice the motor drive frequency of the proof masses can be used to pump the proof masses along the sense axis. | 10-02-2008 |
20100147073 | SYSTEMS AND METHODS FOR AN INERTIAL SENSOR SUSPENSION THAT MINIMIZES PROOF MASS ROTATION - The present invention generally relates to systems and methods for an inertial sensor suspension that minimizes proof mass rotation and translation. The system contains a microelectromechanical sensor (MEMS) device for measuring rotation along an input rotation axis. The MEMS device includes at least one substrate, at least one proof mass, and a suspension system. The suspension system includes at least one flexure connecting the at least one proof mass to a substrate and at least one anchored suspension element with a split support beam having a first split portion and a second split portion. The first split portion and the second split portion are of curved shape. | 06-17-2010 |
20100244819 | MEMS GYROSCOPE MAGNETIC SENSITIVITY REDUCTION - A tuning fork gyroscope that is insensitive to magnetic field gradients is provided. The tuning fork gyroscope includes a first electrically conducting proof mass and a second electrically conducting proof mass connected through electrically conducting suspensions to anchors attached to one or more insulating substrates, and an electrical-resistance mid-point electrically connected to opposing ends of the first electrically conducting proof mass and to opposing ends of the second electrically conducting proof mass. The tuning fork gyroscope provides an input to a sense charge amplifier. The sense charge amplifier generates an output signal indicative of a rotation of the tuning fork gyroscope. The output signal is independent of a magnetic field gradient. | 09-30-2010 |
20110290021 | HEMITOROIDAL RESONATOR GYROSCOPE - One exemplary embodiment is directed to a vibratory structure gyroscope having a substrate having a top surface. The vibratory structure gyroscope can also include a resonator having a hemitoroidal shape, the resonator including a stem and an outer lip that surrounds the stem, the stem attached to the top surface of the substrate and the outer lip located apart from the top surface to allow the resonator to vibrate. | 12-01-2011 |
20120272730 | SYSTEMS AND METHODS FOR AN ENCODER AND CONTROL SCHEME - Systems and methods for an encoder and control scheme are provided. In one embodiment, a micro-electromechanical system (MEMS) device comprises: a stator having a first marker and a second marker arranged on a surface of the stator to form a sensing pattern; a sweeping element that dithers in a plane parallel to the surface of the stator along a sweep path that crosses the first marker and a second marker; an overlap sense circuit operable to measure an area overlap between the sweeping element and the sensing pattern, wherein the overlap sense circuit generates a pulse train signal output that varies as a function of the area overlap. | 11-01-2012 |
20120272731 | TWO DEGREE OF FREEDOM DITHERING PLATFORM FOR MEMS SENSOR CALIBRATION - Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer. | 11-01-2012 |
20140068931 | HEMITOROIDAL RESONATOR GYROSCOPE - A method for fabricating a vibratory structure gyroscope is provided herein. An annular cavity is formed in a first surface of a substrate, the annular cavity defining an anchor post located in a central portion of the annular cavity. A bubble layer is formed over the first surface of the substrate and over the annular cavity. The substrate and the bubble layer are heated to form a hemitoroidal bubble in the bubble layer over the annular cavity. A sacrificial layer is deposited over the hemitoroidal bubble of the bubble layer and an aperture is formed in the sacrificial layer, the aperture disposed over the anchor post in the annular cavity. A resonator layer is deposited over the sacrificial layer and the sacrificial layer between the bubble layer and the resonator layer is removed. | 03-13-2014 |
20150024534 | TWO DEGREE OF FREEDOM DITHERING PLATFORM FOR MEMS SENSOR CALIBRATION - Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer. | 01-22-2015 |
20150115770 | ALL-SILICON ELECTRODE CAPACITIVE TRANSDUCER ON A GLASS SUBSTRATE - An all-silicon electrode capacitive transducer comprising: a movable silicon microstructure coupled to a glass substrate, the movable silicon microstructure having a movable silicon electrode, the glass substrate having a top surface and at least one recess, the movable silicon electrode having a first flat surface parallel to a plane of the top surface of the glass substrate, the movable silicon electrode having a first electronic work function; and a stationary silicon electrode coupled to a glass substrate, the stationary silicon electrode located adjacent to the movable silicon electrode, the stationary silicon electrode configured to sense or actuate displacement of the movable silicon microstructure, wherein the stationary silicon electrode has a second flat surface parallel to the first flat surface, the stationary silicon electrode having a second electronic work function equal to the first electronic work function. | 04-30-2015 |
20150330782 | MASS-LOADED CORIOLIS VIBRATORY GYROSCOPE - A mass-loaded resonator for use in a vibratory sensor is disclosed. In at least one embodiment, the mass-loaded resonator includes a common base having a top face, a bottom face and a plurality of sides. Furthermore, a plurality of flexures are attached to the common base and project substantially perpendicular from the normal of the top face of the common base when the mass-loaded resonator is at rest. Moreover, the plurality of flexures have a thickness that is substantially less than the thickness of the common base. | 11-19-2015 |