Patent application number | Description | Published |
20110200423 | VACUUM PUMP - A differentially pumped vacuum system including apparatus having at least first and second chambers; and a vacuum pump for differentially pumping fluid from the chambers to generate a first pressure above 0.1 mbar in the first chamber and a second pressure lower than the first pressure in the second chamber, the pump having at least first and second pump inlets each for receiving fluid from a respective pressure chamber and a plurality of pumping stages positioned relative to the inlets so that fluid received from the first chamber passes through fewer pumping stages than fluid from the second chamber, the inlets being attached to the apparatus such that at least 99% of the fluid mass pumped from the apparatus passes through at least one of the pumping stages of the pump. | 08-18-2011 |
20120132800 | VACUUM SYSTEM - The invention provides a vacuum system ( | 05-31-2012 |
20120134862 | SCROLL PUMP - The present invention relates to a scroll pump ( | 05-31-2012 |
20120141311 | SCROLL PUMP - The present application relates to a scroll compressor comprising a scroll pumping mechanism which comprises an orbiting scroll ( | 06-07-2012 |
20120168621 | MASS SPECTROMETER SYSTEM - The invention provides a mass spectrometer system ( | 07-05-2012 |
20120251368 | PUMP - The present invention provides a positive displacement dry pump comprising: a plurality of vacuum pumping stages comprising a respective plurality of pumping mechanisms driven by one or more drive shafts for pumping fluid in series through the pumping stages from a pump inlet at the high vacuum stage to a pump outlet at the low vacuum stage; a lubrication chamber housing a bearing assembly for supporting the drive shaft for rotational movement, the drive shaft extending from the high vacuum stage to the lubrication chamber through an opening of a head plate of the lubrication chamber; an inter-stage purge port through which gas can enter the pump at an inter-stage location downstream of the high vacuum stage and pass only through the or each vacuum pumping stage downstream of the inter-stage port; a lubrication chamber purge port located in the lubrication chamber through which purge gas can flow from a source of purge gas; wherein the inter-stage port is connected to the lubrication chamber for controlling the pressure of purge gas in the lubrication chamber thereby resisting the passage of pumped gases from the high vacuum chamber to the lubrication chamber through the opening of the head plate during use. | 10-04-2012 |
20130011288 | SCROLL COMPRESSOR - A scroll compressor ( | 01-10-2013 |
20130028757 | VACUUM PUMPING SYSTEM - The present invention relates to a vacuum pumping system ( | 01-31-2013 |
20130177453 | PUMPING ARRANGEMENT - A differentially pumped vacuum system includes first, second and third chambers, and a pumping arrangement for evacuating the chambers. The pumping arrangement includes a compound pump having a first inlet connected to an outlet from the first chamber, a second inlet connected to an outlet from the second chamber, a first pumping section and a second pumping section downstream from the first pumping section, the sections being arranged such that fluid entering the compound pump from the first inlet passes through the first and second pumping sections and fluid entering the compound pump from the second inlet passes through, of said sections, only the second section. The pumping arrangement further includes a booster pump connected to an outlet from the third chamber, and a backing pump connected to the exhaust from the booster pump. Fluid exhaust from the compound pump can be conveyed to either the booster pump or the backing pump as required. | 07-11-2013 |
20140093412 | VACUUM PUMP STATORS AND VACUUM PUMPS - Combined booster and primary pump arrangements can be bulky and require separate supplies of purge gas and cooling water. In order to overcome this problem invention provides a vacuum pump in which two or more pumping mechanisms, i.e. the booster pump and main pump, are housed in the same stator. The invention further provides a vacuum pump stator comprising at least two operatively interconnected cavities, wherein at least two of the cavities each comprise at least one rotor-receiving portion shaped to receive two or more at least partially intermeshing rotors, and wherein an axis of a rotor-receiving portion of a first one of the cavities is offset with respect to an axis of a rotor-receiving portion of a second one of the cavities. | 04-03-2014 |
20140154123 | Scroll Pump - The present invention relates to a scroll pump with two scrolls that are co-operable for pumping fluid from an inlet to an outlet on relative orbiting motion of the scrolls. Each scroll comprises a scroll base from which a scroll wall extends generally axially towards the base of the opposing scroll. A gas conduit having an inlet at a first location of the pumping channel and an outlet at a second location of the pumping channel allows over-compression at the first location of the pumping channel to be exhausted to the second location of the pumping channel. A one-way valve located in the gas conduit allows the passage of gas through the conduit from the conduit inlet to the conduit outlet when a predetermined pressure differential between the first and second locations of the pumping channel is generated during roughing when the scroll inlet is at or close to atmosphere. | 06-05-2014 |
20140369807 | Vacuum Pump - A vacuum pump comprises a molecular drag pumping mechanism and a regenerative pumping mechanism. A rotor element of the molecular drag pumping mechanism surrounds rotor elements of the regenerative pumping mechanism. | 12-18-2014 |