Patent application number | Description | Published |
20100045985 | Focused-beam ellipsometer - The present invention relates to an ellipsometer, and more particularly, to an ellipsometer to find out the optical properties of the sample by analyzing the variation of the polarization of a light which has specific polarisation then reflected on a surface of the sample. | 02-25-2010 |
20100296092 | SINGLE-POLARIZER FOCUSED-BEAM ELLIPSOMETER - The present invention relates to a single-polarizer focused-beam ellipsometer. An ellipsometer according to the present invention includes a light source ( | 11-25-2010 |
20100321693 | MINUTE MEASURING INSTRUMENT FOR HIGH SPEED AND LARGE AREA AND THE METHOD OF THEREOF - The present invention relates to a minute measuring instrument for high speed and large area and a method thereof, and more particularly, to a minute measuring instrument for high speed and large area which measures properties of a specimen in high speed by a focused-beam ellipsometric part and then minutely remeasures the position showing a singular point by a minute measuring part and a method thereof. | 12-23-2010 |
20110077883 | Measurement of Fourier Coefficients Using Integrating Photometric Detector - Provided is a measurement method of Fourier coefficients using an integrating photometric detector, wherein, when measuring an exposure (S | 03-31-2011 |
20110216320 | MULTI-CHANNEL SURFACE PLASMON RESONANCE SENSOR USING BEAM PROFILE ELLIPSOMETRY - Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer; and a multi-channel flow unit which supplies a buffer solution containing a bio material binding to or dissociation from a metal thin film generating surface plasmon. | 09-08-2011 |
20120057146 | SURFACE PLASMON RESONANCE SENSOR USING BEAM PROFILE ELLIPSOMETRY - Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film. The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer, in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer so as to generate SPR according to an angle change of the polarized light; and a flow unit which supplies a buffer solution containing a bio material binding to or dissociation from the metal thin film generating surface plasmon, wherein the SPR and the ellipsometric phase change by change in an angle and a wavelength are simultaneously detected. | 03-08-2012 |
20120295357 | APPARATUS AND METHOD FOR QUANTIFYING BINDING AND DISSOCIATION KINETICS OF MOLECULAR INTERACTIONS - The present invention relates to an apparatus for quantifying the binding and dissociation kinetics of molecular interactions of small molecular bio materials with high sensitivity almost without the influence of a change in the reflective index resulting from a buffer solution by making polarized incident light incident on the binding layer of a bio material, formed in a thin dielectric film, so that the polarized incident light satisfies a p-wave non-reflecting condition and a quantifying method using the same. | 11-22-2012 |
20130044318 | ROTATING-ELEMENT ELLIPSOMETER AND METHOD FOR MEASURING PROPERTIES OF THE SAMPLE USING THE SAME - Provided is a real-time spectroscopic ellipsometer capable of obtaining information on properties of a sample, a nano pattern shape, in real time by measuring and analyzing, for a plurality of wavelengths, a change in a polarization state of incident light generated while being reflected or transmitted due to the sample when light having a specific polarization component is incident to the sample. | 02-21-2013 |
20140313511 | ROTATING-ELEMENT ELLIPSOMETER AND METHOD FOR MEASURING PROPERTIES OF THE SAMPLE USING THE SAME - Provided is a real-time spectroscopic ellipsometer capable of obtaining information on properties of a sample, a nano pattern shape, and the like, in real time by measuring and analyzing, for a plurality of wavelengths, a change in a polarization state of incident light generated while being reflected or transmitted due to the sample when light having a specific polarization component is incident to the sample. The real-time spectroscopic ellipsometer according to the exemplary embodiment of the present invention have the improved structure and function to solve problems such as polarization dependency of a light source and a photometric detector, wavelength dependency of a compensator, a limitation of a change in integration time due to a fixing of a measuring frequency of exposure, in a rotating-element multichannel spectroscopic ellipsometers of the related art, thereby measuring more accurately, precisely, and rapidly measuring the characteristics of the sample than the related art. | 10-23-2014 |