Patent application number | Description | Published |
20090122647 | Side scan sonar imaging system with boat position on display - A system for use with a boat to provide underwater sonar images includes a left side scan sonar transducer for transmitting left side scan sonar pulses and for receiving left side scan sonar return signals and a right side scan sonar transducer for transmitting right side scan sonar pulses and for receiving right side scan sonar return signals. The system further includes signal processing circuitry for processing the left and right side scan sonar return signals to produce side scan image data and a digital processor for providing signals to a display based upon the side scan image data to produce a display image on the display showing boat location, a water column between the boat and bottom, and an underwater image comprising at least one of a left side underwater image and a right side underwater image. | 05-14-2009 |
20090147622 | Side scan sonar imaging system with enhancement - A system for use with a boat to provide underwater sonar images, includes a left side scan sonar transducer for transmitting left side scan sonar pulses and for receiving left side scan sonar return signals, a right side scan sonar transducer for transmitting right side scan sonar pulses and for receiving right side scan sonar return signals, and signal processing circuitry for processing the left and right side scan sonar return signals to produce side scan image data. The system further includes a user interface including user inputs and a display and a digital processor for providing signals to the display to show an underwater image based upon the side scan image data, wherein the digital processor, in response to a user command, performs an image enhancement algorithm to enhance the underwater image. | 06-11-2009 |
20090147623 | Side scan sonar imaging system with associated GPS data - A system for use with a boat to provide underwater sonar images includes a GPS receiver for providing GPS position data, a left side scan sonar transducer for transmitting left side scan sonar pulses and for receiving left side scan sonar return signals, and a right side scan sonar transducer for transmitting right side scan sonar pulses and for receiving right side scan sonar return signals. The system further includes signal processing circuitry for processing the left and right side scan sonar return signals to produce side scan image data and a digital processor for causing a display to display an underwater image based upon the side scan image data, wherein the digital processor associates GPS position and side scan image data. | 06-11-2009 |
20100080082 | SIDE SCAN SONAR IMAGING SYSTEM - A system for use with a boat to provide underwater sonar images includes a GPS receiver for providing GPS position data, a left side scan sonar transducer for transmitting left side scan sonar pulses and for receiving left side scan sonar return signals, and a right side scan sonar transducer for transmitting right side scan sonar pulses and for receiving right side scan sonar return signals. The system further includes signal processing circuitry for processing the left and right side scan sonar return signals to produce side scan image data and a digital processor for causing a display to display an underwater image based upon the side scan image data, wherein the digital processor associates GPS position and side scan image data. | 04-01-2010 |
20100103775 | SONAR IMAGING SYSTEM FOR MOUNTING TO WATERCRAFT - A system for use with a boat to provide underwater sonar images includes a GPS receiver for providing GPS position data, a left side scan sonar transducer for transmitting left side scan sonar pulses and for receiving left side scan sonar return signals, and a right side scan sonar transducer for transmitting right side scan sonar pulses and for receiving right side scan sonar return signals. The system further includes signal processing circuitry for processing the left and right side scan sonar return signals to produce side scan image data and a digital processor for causing a display to display an underwater image based upon the side scan image data, wherein the digital processor associates GPS position and side scan image data. | 04-29-2010 |
Patent application number | Description | Published |
20090032511 | Apparatus and method of improving beam shaping and beam homogenization - The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. Typically, the anneal regions may be square or rectangular in shape. Generally, the optical system and methods of the present invention are used to preferentially anneal one or more regions found within the anneal regions by delivering enough energy to cause the one or more regions to re-melt and solidify. | 02-05-2009 |
20090034071 | METHOD FOR PARTITIONING AND INCOHERENTLY SUMMING A COHERENT BEAM - A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. For some embodiments employing a pulsed light source, the output pulse may be stretched relative to the input pulse width. The methods and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating. | 02-05-2009 |
20090034072 | METHOD AND APPARATUS FOR DECORRELATION OF SPATIALLY AND TEMPORALLY COHERENT LIGHT - A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating. | 02-05-2009 |
20090037868 | AREA BASED OPTICAL PROXIMITY CORRECTION IN RASTER SCAN PRINTING - Methods and apparatus for correcting defects, such as rounded corners and line end shortening, in patterns formed via lithography are provided. Such defects are compensated for “post-rasterization” by manipulating the grayscale values of pixel maps. | 02-05-2009 |
20100266268 | Multi-stage Optical Homogenization - Substrate processing equipment and methods are used to improve the uniformity of illumination across an illuminated portion of a substrate by processing light with multiple optical homogenizers. The multiple optical homogenizers each include micro-lens arrays and Fourier lens. The multiple optical homogenizers are arranged so that the output numerical aperture of one of the optical homogenizers is within 5% of the input numerical aperture of another optical homogenizer. | 10-21-2010 |
20110199683 | METHOD AND APPARATUS FOR DECORRELATION OF SPATIALLY AND TEMPORALLY COHERENT LIGHT - A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating. | 08-18-2011 |
20120148701 | APPARATUS AND METHOD OF IMPROVING BEAM SHAPING AND BEAM HOMOGENIZATION - The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. Typically, the anneal regions may be square or rectangular in shape. Generally, the optical system and methods of the present invention are used to preferentially anneal one or more regions found within the anneal regions by delivering enough energy to cause the one or more regions to re-melt and solidify. | 06-14-2012 |
20120325784 | NOVEL THERMAL PROCESSING APPARATUS - The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. An energy source for the optical system is typically a plurality of lasers, which are combined to form the energy field. | 12-27-2012 |
20120329178 | NOVEL THERMAL PROCESSING APPARATUS - The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. An energy source for the optical system is typically a plurality of lasers, which are combined to form the energy field. | 12-27-2012 |
20130112667 | OPTICAL DESIGN FOR LINE GENERATION USING MICROLENS ARRAY - Embodiments of the invention provide an apparatus including a substrate support, a source of laser radiation emitting laser radiation along an optical path, and an illumination optics disposed along the optical path. The illumination optics includes a set of slow-axis and fast-axis lenses. The apparatus further includes a homogenizer disposed between of the illumination optics and the substrate support along the optical path. The homogenizer includes a first and a second micro-optic lenslet arrays of cylindrical lenses, wherein the second micro-optic lenslet array of cylindrical lenses has a relatively larger lenslet pitch than that of the first micro-optic lenslet array of cylindrical lenses, and lenslet axes of the first micro-optic lenslet array and lenslet axes of the second micro-optic lenslet array are oriented along an axis that is parallel to a fast axis of the source of laser radiation. | 05-09-2013 |
20130141788 | METHOD AND APPARATUS FOR DECORRELATION OF SPATIALLY AND TEMPORALLY COHERENT LIGHT - A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating. | 06-06-2013 |
20130163091 | MULTIPLE BEAM COMBINER FOR LASER PROCESSING APPARATUS - Apparatus and methods for combining beams of amplified radiation are disclosed. A beam combiner has a collimating optic positioned to receive a plurality of coherent radiation beams at a constant angle of incidence with respect to an optical axis of the collimating optic. The respective angles of incidence may also be different in some embodiments. The collimating optic has an optical property that collimates the beams. The optical property may be refractive or reflective, or a combination thereof. A collecting optic may also be provided to direct the plurality of beams to the collimating optic. The beam combiner may be used in a thermal processing apparatus to combine more than two beams of coherent amplified radiation, such as lasers, into a single beam. | 06-27-2013 |
20140009829 | METHOD FOR PARTITIONING AND INCOHERENTLY SUMMING A COHERENT BEAM - A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. For some embodiments employing a pulsed light source, the output pulse may be stretched relative to the input pulse width. The methods and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating. | 01-09-2014 |
20140138362 | NOVEL THERMAL PROCESSING APPARATUS - The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. An energy source for the optical system is typically a plurality of lasers, which are combined to form the energy field. | 05-22-2014 |
20140254022 | APPARATUS FOR SPECKLE REDUCTION, PULSE STRETCHING, AND BEAM HOMOGENIZATION - Embodiments described herein relate to thermal processing of semiconductor substrates. More specifically, embodiments described herein relate to laser thermal processing of semiconductor substrates. In certain embodiments, a uniformizer is provided to spatially and temporally decorrelate a coherent light image. | 09-11-2014 |
20140256161 | PROCESS SHEET RESISTANCE UNIFORMITY IMPROVEMENT USING MULTIPLE MELT LASER EXPOSURES - Embodiments described herein relate to apparatus and methods of thermal processing. More specifically, apparatus and methods described herein relate to laser thermal treatment of semiconductor substrates by increasing the uniformity of energy distribution in an image at a surface of a substrate. | 09-11-2014 |
20150053658 | APPARATUS AND METHOD OF IMPROVING BEAM SHAPING AND BEAM HOMOGENIZATION - The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. Typically, the anneal regions may be square or rectangular in shape. Generally, the optical system and methods of the present invention are used to preferentially anneal one or more regions found within the anneal regions by delivering enough energy to cause the one or more regions to re-melt and solidify. | 02-26-2015 |
20150124329 | MULTIPLE BEAM COMBINER FOR LASER PROCESSING APPARATUS - Apparatus and methods for combining beams of amplified radiation are disclosed. A beam combiner has a collimating optic positioned to receive a plurality of coherent radiation beams at a constant angle of incidence with respect to an optical axis of the collimating optic. The respective angles of incidence may also be different in some embodiments. The collimating optic has an optical property that collimates the beams. The optical property may be refractive or reflective, or a combination thereof. A collecting optic may also be provided to direct the plurality of beams to the collimating optic. The beam combiner may be used in a thermal processing apparatus to combine more than two beams of coherent amplified radiation, such as lasers, into a single beam. | 05-07-2015 |
20150136755 | OPTICAL DESIGN FOR LINE GENERATION USING MICROLENS ARRAY - Embodiments of the present disclosure relate to an apparatus for thermally processing a semiconductor substrate. In one embodiment, the apparatus includes a substrate support, a beam source having a fast axis for emitting a beam along an optical path intersecting the substrate support, and a homogenizer disposed along the optical path between the beam source and the substrate support. The homogenizer comprises a first lens array, and a second lens array, wherein lenses of the second lens array have a larger lenslet array spacing than lenses of the first lens array. | 05-21-2015 |
20160139417 | MULTIPLE BEAM COMBINER FOR LASER PROCESSING APPARATUS - Apparatus and methods for combining beams of amplified radiation are disclosed. A beam combiner has a collimating optic positioned to receive a plurality of coherent radiation beams at a constant angle of incidence with respect to an optical axis of the collimating optic. The respective angles of incidence may also be different in some embodiments. The collimating optic has an optical property that collimates the beams. The optical property may be refractive or reflective, or a combination thereof. A collecting optic may also be provided to direct the plurality of beams to the collimating optic. The beam combiner may be used in a thermal processing apparatus to combine more than two beams of coherent amplified radiation, such as lasers, into a single beam. | 05-19-2016 |