Patent application number | Description | Published |
20080213496 | Method of coating semiconductor processing apparatus with protective yttrium-containing coatings - Methods of applying specialty ceramic materials to semiconductor processing apparatus, where the specialty ceramic materials are resistant to halogen-comprising plasmas. The specialty ceramic materials contain at least one yttrium oxide-comprising solid solution. Some embodiments of the specialty ceramic materials have been modified to provide a resistivity which reduces the possibility of arcing within a semiconductor processing chamber. | 09-04-2008 |
20080309918 | INTEGRATED CHEMICAL SEPARATION LIGHT SCATTERING DEVICE - An integrated chemical separation device includes a single device body, a chemical separation unit configured to separate a chemical from a fluid, a Raman sensor substrate comprising one or more surfaces configured to be adsorbed by molecules of the chemical from the fluid, and a Raman scattering spectrometer unit that can emit a laser beam to illuminate the Raman sensor substrate and to detect the chemical from the light scattered from the Raman sensor substrate. The chemical separation unit, the Raman sensor substrate, and the Raman scattering spectrometer unit are held in or mounted to the single device body. | 12-18-2008 |
20090061545 | Edge Removal Of Silicon-On-Insulator Transfer Wafer - A silicon-on-insulator transfer wafer having a front surface with a circumferential lip around a circular recess is polished. In one version, the circular recess on the front surface of the wafer is masked by filling the recess with spin-on-glass. The front surface of the wafer is exposed to an etchant to preferentially etch away the circumferential lip, while the circular recess is masked by the spin-on-glass. The spin-on glass is removed, and the front surface of the transfer wafer is polished. Other methods of removing the circumferential lip include applying a higher pressure to the circumferential lip in a polishing process, and directing a pressurized fluid jet at the base of the circumferential lip. | 03-05-2009 |
20090066946 | ARRAYS OF NANO STRUCTURES FOR SURFACE-ENHANCED RAMAN SCATTERING - Disclosed herein is a SERS sensing surface device comprising a substrate supporting a plurality of nano structures, an exposed sensing surface upon the nano structures, wherein said surface includes at least one active SERS nano surface and at least one inactive SERS nano surface established in proximity to the active SERS nano. Also disclosed are methods for forming the array device, systems based on the array device, as well as methods for performing SERS with the array device. | 03-12-2009 |
20090086202 | NON-INVASIVE DISEASE DIAGNOSIS USING LIGHT SCATTERING PROBE - A method for non-invasive detection of a disease, a status of illicit-drug use, or smoking status includes transferring a body fluid obtained from a patient to a sensor comprising a nano-scale surface structure to allow the body fluid to come in contact with the nano-scale surface structure, illuminating the body fluid and the nano-scale surface structure by a laser beam, scattering the laser beam by the body fluid and the nano-scale surface structure to produce a scattered light, and analyzing the scattered light using a spectral analyzer to diagnose a disease, the status of illicit-drug use, or smoking status in the patient. | 04-02-2009 |
20100059366 | TEXTURED CHAMBER SURFACE - A method of fabricating a process chamber component having a textured surface with raised features. The method comprises providing a process chamber component having a surface, and forming a patterned resist layer on the process chamber component, the patterned resist layer having apertures that expose portions of the surface of the process chamber component therethrough. A textured surface having raised features is formed on the process chamber component by propelling grit particles with a gas that is pressurized to a pressure sufficiently high to cause the grit particles to erode and remove material from the surface. | 03-11-2010 |
20100070197 | SPECTRALLY SENSING CHEMICAL AND BIOLOGICAL SUBSTANCES - A sensor-network system for spectrally sensing a chemical or biological substance includes a plurality of probe assemblies that each includes a sensor comprising a nano structured surface, wherein the nano structured surface can adsorb molecules of a sample material captured adjacent to the sensor; a laser configured to emit a laser beam to illuminate the molecules adsorbed to the nano structured surface, and a spectrometer that can obtain spectral data from light scattered by the molecules adsorbed to the nano structured surface. A control center includes a computer storage configured to store spectral signatures each associated with a chemical or biological substance and a spectral analyzer that can determine a spectral signature matching at least one of the spectral signatures stored in the computer storage thereby to identify, in the sample material, the chemical or biological substance associated with the one of the spectral signatures. | 03-18-2010 |
20100085564 | SYSTEMS AND METHODS FOR DETECTING CHEMICAL AND BIOLOGICAL SUBSTANCES - A method for detecting an ingredient in a food product or detecting a disease includes allowing a food sample solution obtained from a food product or a body fluid from an individual to come to contact with a nano-scale surface structure in a sensor, wherein the nano-scale surface structure comprises a plurality of columns over a substrate or a plurality of holes in a substrate. The method includes illuminating the food sample solution or the body fluid on the nano-scale surface structure on the sensor by a laser beam; obtaining a Raman spectrum from the scattered light using a spectral analyzer; and identifying the spectral signature in the Raman spectrum to determine the existence of the chemical substance in the food product or identifying a disease in the individual. | 04-08-2010 |
20100110424 | NANO STRUCTURED SENSING DEVICE FOR SURFACE-ENHANCED RAMAN SCATTERING - A sensing device for surface-enhanced Raman spectroscopy (SERS) includes a substrate, a plurality of nano structures over the substrate, wherein at least one of the nano structures comprises an active SERS nano surface and an adsorption layer on the active SERS nano surface. | 05-06-2010 |
20100114514 | DETECTING CHEMICAL AND BIOLOGICAL IMPURITIES BY NANO-STRUCTURE BASED SPECTRAL SENSING - A method is disclosed for providing quality assurance in an industrial process. The method includes obtaining a manufacturing material from the industrial process, allowing the manufacturing material to contact with a nano-scale surface, which allows the harmful substance to adsorb to the nano-scale surface. The method also includes obtaining a Raman spectrum from the manufacturing material and the nano-scale surface using a spectrometer, searching for, using a spectral analyzer, a spectral signature of a harmful substance in a predetermined spectral region in the Raman spectrum to determine the existence of the harmful substance in the manufacturing material, determining the concentration of the manufacturing material if the spectral signature is found in the Raman spectrum, and rejecting the manufacturing material from the industrial process if the concentration of the manufacturing material is determined to be above a predetermined tolerance level. | 05-06-2010 |
20100296086 | INTEGRATED DEVICE CAPABLE OF PERFORMING CHEMICAL SEPARATION AND LIGHT SCATTERING - An integrated chemical separation device includes a single device body, a chemical separation unit configured to separate a chemical from a fluid, a Raman sensor substrate comprising one or more surfaces configured to be adsorbed by molecules of the chemical from the fluid, and a Raman scattering spectrometer unit that can emit a laser beam to illuminate the Raman sensor substrate and to detect the chemical from the light scattered from the Raman sensor substrate. The chemical separation unit, the Raman sensor substrate, and the Raman scattering spectrometer unit are held in or mounted to the single device body. | 11-25-2010 |
20110140209 | MULTI-LAYER MICRO STRUCTUREFOR SENSING SUBSTANCE - A micro structure for sensing a substance using light scattering includes a substrate, a first layer on the substrate, wherein the first layer comprises a metallic material, a second layer over the first layer, and a mask layer over the second layer. A plurality of nano holes are formed through the mask layer and the second layer, wherein the plurality of holes are defined in part by internal surfaces on the second layer and the mask layer. Two or more structure layers are formed on the mask layer and the internal surfaces in the plurality of holes. The two or more structure layers comprise different material compositions. | 06-16-2011 |
20110212512 | MONITORING NETWORK BASED ON NANO-STRUCTURED SENSING DEVICES - A monitoring network system for inspecting and controlling harmful substances includes probe assemblies that each includes a sensor comprising nano structured surfaces or nano particles in a solution, configured to adsorb molecules of a sample material captured adjacent to the sensor, a laser that can emit a laser beam to illuminate the molecules adsorbed to the nano structured surfaces, a spectrometer that can produce spectral data from light scattered by the molecules adsorbed to the nano structured surfaces, and a ID reader that can retrieve identification information about the sample material. A central office can determine a spectral signature matching spectral signatures stored in a database and to identify a harmful substance in the sample material. An alert and response system can send out an alert signal about the sample material when the harmful substance is identified in the sample material. | 09-01-2011 |
20120000793 | ELECTROCHEMICAL REMOVAL OF TANTALUM-CONTAINING MATERIALS - A method of cleaning metal-containing deposits from a metal surface of a process chamber component includes immersing the metal surface in an electrochemical cleaning bath solution. A negative electrical bias is applied to the metal surface to electrochemically clean the metal-containing deposits from the metal surface. The cleaning method is capable of removing metal-containing deposits such as tantalum-containing deposits from the metal surface substantially without eroding the surface, and may be especially advantageous in the cleaning of components having textured surfaces. | 01-05-2012 |
20120086021 | MULTI-LAYER VARIABLE MICRO STRUCTURE FOR SENSING SUBSTANCE - An optical sensor includes a substrate having an upper surface, a plurality of protrusions on the substrate, wherein each of the plurality of protrusions is defined by a base at the upper surface of the substrate and by one or more sloped surfaces oriented at oblique angles relative to the upper surface, and two or more structural layers in the sloped surfaces. The surfaces of the two or more structural layers can adsorb molecules of a chemical or biological substance. | 04-12-2012 |
20120327408 | INTEGRATED DEVICE CAPABLE OF PERFORMING CHEMICAL SEPARATION AND LIGHT SCATTERING - An integrated chemical separation device includes a chemical separation unit configured to separate a plurality of substances in a sample solution, a mixing chamber configured to receive the plurality of substances in the sample solution at different times, a chemical separation and detection controller, and a multi-channel valve configured to direct the plurality of substances in the sample solution to the mixing chamber under the control of the chemical separation and detection controller. The chemical separation and detection controller can introduce nano particles in the mixing chambers to allow each of the plurality of substances to be adsorbed on the nano particles. A Raman scattering spectrometer unit emits a laser beam to illuminate molecules adsorbed on the surfaces of the nano particles and obtains Raman spectra from the plurality of substances. | 12-27-2012 |
20130017298 | ASSURING FOOD SAFETY USING NANO-STRUCTURE BASED SPECTRAL SENSING - A method for inspecting an edible oil includes obtaining a first Raman spectrum from an edible oil sample, discovering an unhealthy, unsanitary, unsafe, or adulterated content in the edible oil sample in part by the intensity level of the fluorescence background in the first Raman spectrum, introducing the edible oil sample to nano-scale surface structures to allow molecules of the edible oil sample to be adsorbed to the nano-scale surface structures, illuminating the edible oil sample and the nano-scale surface structures by a laser beam, obtaining a second Raman spectrum from light scattered by molecules of the edible oil sample adsorbed to the nano-scale surface structures, and identifying the unhealthy, unsanitary, or unsafe content in the edible oil sample using one or more first spectral signatures in the second Raman spectrum. | 01-17-2013 |
20130114228 | ELECTROMAGNETIC INTERFERENCE SHIELDING TECHNIQUES - Methods and apparatuses are disclosed for fabricating a printed circuit board (PCB) having electromagnetic interference (EMI) shielding and also having reduced volume over conventional frame-and-shield approaches. Some embodiments include fabricating the PCB by mounting an integrated circuit to the PCB, outlining an area corresponding to the integrated circuit with a number of grounded vias, selectively applying an insulating layer over the PCB such that at least one of the grounded vias are exposed, and selectively applying a conductive layer over the PCB such that the conductive layer covers at least a portion of the integrated circuit and such that the conductive layer is coupled to the at least one of the grounded vias that are exposed. | 05-09-2013 |
20130115717 | ANALYZING CHEMICAL AND BIOLOGICAL SUBSTANCES USING NANO-STRUCTURE BASED SPECTRAL SENSING - An integrated chromatography-immunoassay system for integrated chromatography-immunoassay system includes a chromatographic unit that receives labeled nano-structured probes comprising nano particles and antibodies attached to the nano particles, and a test membrane comprising coating antigens. The chromatographic unit allows the labeled nano-structured probes to diffuse there through and into the test membrane, wherein the antibodies on the nano particles are bound to the coating antigens. A laser device emits a laser light to illuminate the labeled nano-structured probes having the antibodies bound to the coating antigens on the test membrane. A spectral analyzer obtains a Raman spectrum from light scattered from the labeled nano-structured probes having the antibodies bound to the coating antigens on the test membrane, and to identify a spectral signature in the Raman spectrum associated with the antibody-antigen pair, which enables detection and identification of the antibody. | 05-09-2013 |
20140043607 | SYSTEM AND METHOD FOR DETECTING OIL OR GAS UNDERGROUND USING LIGHT SCATTERING SPECTRAL ANALYSES - A method for detecting crude oil or gas in a drilling sample includes introducing a drilling sample into a sample solution containing nano particles, illuminating the sample solution comprising the drilling sample and the nano particles by a laser beam, collecting light scattered by the drilling sample and the nano particles in the sample solution, obtaining a Raman spectrum from the light scattered by the drilling sample and the nano particles in the sample solution, identifying, in the Raman spectrum, a spectral signature associated with a substance around a predetermined Raman shift, and detecting targeted chemicals correlated with crude oil or gas existence underground from where the drilling sample, based on the spectral signature of the substance in the Raman spectrum. | 02-13-2014 |