Patent application number | Description | Published |
20120247217 | PRESSURE SENSOR, SENSOR ARRAY, METHOD FOR MANUFACTURING SENSOR ARRAY, AND GRASPING APPARATUS - A pressure sensor includes: a supporting body which has an opening; a pressure detecting portion which includes a supporting film provided on the supporting body and having a diaphragm portion closing the opening, and a piezoelectric body provided on the diaphragm portion and deflecting to output an electric signal; a frame body which has, on the pressure detecting portion, a cylindrical cavity along a film thickness direction of the supporting film, and is formed, in plan view when viewed from the film thickness direction of the supporting film, at a position where a cylindrical inner peripheral wall of the cavity overlaps with the opening, or outside of the opening; a sealing film which closes the frame body; and a silicone oil which is filled in an inner space formed of the cylindrical inner peripheral wall of the cavity, the sealing film, and the pressure detecting portion. | 10-04-2012 |
20120306316 | ULTRASONIC TRANSDUCER, BIOLOGICAL SENSOR, AND METHOD FOR MANUFACTURING AN ULTRASONIC TRANSDUCER - An ultrasonic transducer includes a resin substrate, a support film and a piezoelectric element. The resin substrate has an opening. The support film blocks off the opening in the resin substrate. The piezoelectric element is disposed on the support film in a region that blocks off the opening in plan view from a thickness direction of the support film. The piezoelectric element includes a lamination of a lower electrode, a piezoelectric body, and an upper electrode. | 12-06-2012 |
20130308425 | ULTRASONIC TRANSDUCER, ULTRASONIC PROBE, AND ULTRASONIC EXAMINATION DEVICE - An ultrasonic transducer includes a substrate, a supporting film, and a piezoelectric element. The substrate includes an opening. The supporting film is configured on the substrate to cover the opening. The piezoelectric element is configured at a part of the supporting film. The part overlaps with the opening in a planar view in a thickness direction of the substrate. A thickness of the part of at a center of gravity in the planar view is smaller than a thickness of an outer edge portion of the part. The outer edge portion is closer to the substrate than the center to the substrate. | 11-21-2013 |
20130331978 | PRESSURE SENSOR, SENSOR ARRAY, METHOD FOR MANUFACTURING SENSOR ARRAY, AND GRASPING APPARATUS - A pressure sensor includes: a supporting body which has an opening; a pressure detecting portion which includes a supporting film provided on the supporting body and having a diaphragm portion closing the opening, and a piezoelectric body provided on the diaphragm portion and deflecting to output an electric signal; a frame body which has, on the pressure detecting portion, a cylindrical cavity along a film thickness direction of the supporting film, and is formed, in plan view when viewed from the film thickness direction of the supporting film, at a position where a cylindrical inner peripheral wall of the cavity overlaps with the opening, or outside of the opening; a sealing film which closes the frame body; and a silicone oil which is filled in an inner space formed of the cylindrical inner peripheral wall of the cavity, the sealing film, and the pressure detecting portion. | 12-12-2013 |
20140296715 | ULTRASONIC TRANSDUCER DEVICE, PROBE, ELECTRONIC INSTRUMENT, AND ULTRASONIC DIAGNOSTIC DEVICE - An ultrasonic transducer device includes a base, a plurality of piezoelectric elements, a conductive body and an insulating film. The base has a plurality of vibrating film portions arranged in an array pattern. The piezoelectric elements are respectively disposed on the vibrating film portions. The conductive body is disposed on the base, and arranged inside and outside of an area corresponding to each of the vibrating film portions in a plan view as viewed along a thickness direction of the base. The insulating film is disposed on the conductive body only at outside of the area corresponding to each of the vibrating film portions in the plan view. | 10-02-2014 |
20140296716 | ULTRASONIC TRANSDUCER DEVICE, PROBE, ELECTRONIC INSTRUMENT, AND ULTRASONIC DIAGNOSTIC DEVICE - An ultrasonic transducer device includes a base, a first electrode film, a piezoelectric film, a second electrode film and a first conductive film. The base has a plurality of vibrating film portions arranged in an array pattern. The first electrode film is disposed on each of the vibrating film portions. The piezoelectric film is disposed on the first electrode film. The second electrode film is disposed on the piezoelectric film. The first conductive film is connected to the first electrode film. The first conductive film has a film thickness larger than a film thickness of the first electrode film. | 10-02-2014 |
20150024537 | ULTRASONIC TRANSDUCER, BIOLOGICAL SENSOR, AND METHOD FOR MANUFACTURING AN ULTRASONIC TRANSDUCER - A method for manufacturing an ultrasonic transducer includes: forming a piezoelectric element by laminating a lower electrode, a piezoelectric body, and an upper electrode on a first face of a support film; affixing a reinforcing substrate that covers the piezoelectric element to the first face of the support film; forming a photosensitive resin substrate to a second face of the support film that is on an opposite side from the first face; forming an opening in the resin substrate by irradiating the resin substrate with light; and removing the reinforcing substrate. | 01-22-2015 |
20150094590 | ULTRASONIC DEVICE, ULTRASONIC PROBE, ELECTRONIC EQUIPMENT, AND ULTRASONIC IMAGE DEVICE - An ultrasonic device includes a base, a plurality of ultrasonic transducer elements, and a reinforcing body. The base defines a plurality of openings arranged in an array form. The ultrasonic transducer elements are arranged respectively corresponding to the openings with a plurality of vibration films being respectively provided for the ultrasonic transducer elements. The reinforcing body is fixed to the base in an area between adjacent ones of the vibration films when viewed in a plan view along a thickness direction of the base. The reinforcing body has Young's modulus greater than Young's modulus of the base. | 04-02-2015 |
20150094596 | ULTRASONIC DEVICE, ULTRASONIC PROBE, ELECTRONIC EQUIPMENT, AND ULTRASONIC IMAGE DEVICE - An ultrasonic device includes a base, a plurality of ultrasonic transducer elements, an acoustic adjustment layer, and a wall part. The ultrasonic transducer elements are arranged in an array form on the base, each of the ultrasonic transducer elements having a vibration film. The acoustic adjustment layer is disposed on each of the ultrasonic transducer elements. The wall part is arranged between adjacent ones of the ultrasonic transducer elements when viewed in a plan view along a thickness direction of the base such that the acoustic adjustment layer on the adjacent ones of the ultrasonic transducer elements are separated by the wall part in a range of at least a portion of a height of the acoustic adjustment layer measured from the base. The wall part has an acoustic impedance that is higher than an acoustic impedance of the acoustic adjustment layer. | 04-02-2015 |