Patent application number | Description | Published |
20110057549 | FLEXURAL VIBRATION PIECE, FLEXURAL VIBRATOR, AND ELECTRONIC DEVICE - A flexural vibration piece includes a base, and a vibrating arms extending therefrom, each pair of vibrating arms has a first groove formed in the extension direction of the vibrating arm in one main surface following the direction in which the pair of vibrating arms are aligned, and a second groove formed side by side to the first groove in another main surface, the sum of the depths of the first and second groove portions is greater than the interval between the one main surface and the other main surface, and a mass portion is provided on each of the pair of vibrating arms, on the one main surface which is the opening side of the first grooves formed toward the outer sides opposite the inner sides on which the vibrating arms face each other. | 03-10-2011 |
20110156826 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND FREQUENCY ADJUSTMENT METHOD - A resonator element includes: a base portion provided on a plane including a first axis and a second axis orthogonal to the first axis; a vibrating arm extending from the base portion in the first axis direction; and a first mass portion for adjusting a resonance frequency of the vibrating arm, wherein the vibrating arm performs flexural vibration in a direction perpendicular to the plane and has a first surface which contracts or expands with the flexural vibration and a second surface which expands when the first surface contracts and contracts when the first surface expands, and wherein the first mass portion is provided on at least one of the first and second surfaces and approximately at the center of the length of the vibrating arm from a base-side end to a tip end thereof. | 06-30-2011 |
20110156827 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND FREQUENCY ADJSUTMENT METHOD - A resonator element includes: a base portion provided on a plane including a first axis and a second axis orthogonal to the first axis; a vibrating arm extending from the base portion in the first axis direction; an excitation electrode provided on the vibrating arm so as to excite the vibrating arm; and a first mass portion provided on the vibrating arm so as to adjust the frequency of the vibrating arm, wherein the vibrating arm performs flexural vibration in a direction perpendicular to the plane and wherein the first mass portion is provided in a region exceeding ½ of the entire length in the first axis direction of the vibrating arm from the end of the vibrating arm close to the base portion and is formed from a material whose density D (in units of 10 | 06-30-2011 |
20110298555 | VIBRATOR ELEMENT, VIBRATOR, VIBRATION DEVICE, ELECTRONIC APPARATUS, AND FREQUENCY ADJUSTMENT METHOD - A vibrator element includes: a base section formed on a plane including a first direction and a second direction perpendicular to the first direction; and a vibrating arm extending from the base section in the first direction, wherein the vibrating arm flexurally vibrates in a normal direction of the plane, and has a first surface one of compressed and extended due to the flexural vibration and a second surface one of extended when the first surface is compressed and compressed when the first surface is extended, the first surface is provided with a first mass section, and the second surface is provided with a second mass section, and at least one of the first mass section and the second mass section has a portion, which fails to be opposed to the other of the first mass section and the second mass section in a plan view in the normal direction. | 12-08-2011 |
20120056686 | VIBRATOR ELEMENT, VIBRATOR, VIBRATION DEVICE, AND ELECTRONIC DEVICE - A vibrator element includes: a base portion; a plurality of vibrating arms which extends in the Y-axis direction from the base portion so as to be arranged in a line in the X-axis direction, and piezoelectric elements which are formed on the vibrating arms so as to allow the vibrating arms to perform flexural vibration in the Z-axis direction. The respective vibrating arms include first surfaces which are compressed or expanded in response to flexural vibration and second surfaces which are expanded when the first surfaces are compressed and which are compressed when the first surfaces are expanded. The vibrating arms have the piezoelectric elements which are formed close to the first surfaces, and the other vibrating arm has the piezoelectric element which is formed close to the second surface. | 03-08-2012 |
20130112010 | SENSOR ELEMENT, FORCE DETECTING DEVICE, AND ROBOT - A sensor element is formed by, when an α axis, a β axis orthogonal to the α axis, and a γ axis orthogonal to the α axis and the β axis are set, laminating piezoelectric substrates and electrodes in the γ axis direction. The sensor element includes connecting sections arranged such that a part of external sections of the electrodes aligns with a part of external sections of the piezoelectric substrates. The connecting sections are arranged not to align with one another in a direction of the γ axis. Conductors that electrically connect the connecting sections and external connecting sections are formed along outer peripheral sections of the piezoelectric substrates. | 05-09-2013 |
20130112011 | SENSOR ELEMENT, FORCE DETECTING DEVICE, ROBOT AND SENSOR DEVICE - A sensor element includes a piezoelectric substrate made of a trigonal single crystal and an electrode arranged on the piezoelectric substrate. The substrate surface of the piezoelectric substrate includes an electrical axis of crystal axes. An angle θ formed by the substrate surface and a plane including the electrical axis and an optical axis of the crystal axes is 0°<θ<20°. | 05-09-2013 |
20130152701 | SENSOR DEVICE, SENSOR MODULE, FORCE SENSING APPARATUS, AND ROBOT - A sensor device includes a package, a sensor element that is disposed in the package, and a lid that seals the package. The lid includes a flexible portion that surrounds the vicinity of the sensor element in a plan view. | 06-20-2013 |