Patent application number | Description | Published |
20100032407 | METHOD OF MANUFACTURING CERAMIC PROBE CARD - Provided is a method of manufacturing a ceramic probe card. A ceramic laminated body having a plurality of ceramic green sheets and an interlayer circuit including a conductive via and a conductive line formed in the plurality of ceramic green sheets is prepared. Then, at least one probe pin structure connected to the interlayer circuit is formed by selectively removing the plurality of photosensitive ceramic sheets having a ceramic powder and a photosensitive organic component on the ceramic laminated body necessarily, and by filling a metal material in a region from which the plurality of photosensitive ceramic sheets have been removed. Then, a ceramic substrate having the at least one probe pin structure is provided by simultaneously firing the ceramic laminated body and the photosensitive ceramic sheets, and by removing the photosensitive ceramic sheets. | 02-11-2010 |
20100039129 | PROBE CARD - Provided is a probe card. The probe card includes a ceramic substrate including a signal line, and a plurality of probe pins formed on the ceramic substrate, and including probe bodies having one end connected to the signal line and probe tips formed at other end of the probe body. The probe body is divided into a first section adjacent to the signal line and second section adjacent the probe tips. The first section is united by an insulating support, and the second sections are divergently arranged to position the probe tips at different measurement regions, respectively. | 02-18-2010 |
20100040984 | METHOD OF FABRICATING MICRO ELECTRO-MECHANICAL COMPONENT - A method of manufacturing a micro electro-mechanical component having a three-dimensional structure includes preparing a conductive substrate, selectively insulating or removing the conductive substrate to form a functional structure for performing a desired electro-mechanical function, forming a plated structure serving as an electrical connection portion on at least one surface of the functional structure, and mounting the functional structure on a circuit substrate so that the electrical connection portion is connected to a circuit pattern of the circuit substrate. | 02-18-2010 |
20100116676 | METHOD OF FABRICATING PROBE PIN FOR PROBE CARD - Provided is a method of fabricating a probe pin. In the method, a concave region for a probe pin is formed on a mold substrate. The surface roughness of the concave region is reduced to smooth the surface of the concave region. A release layer is formed on the surface of the concave region of the mold substrate. A plating process is performed to form a probe pin corresponding to the concave region. After the performing of the plating process, the mold substrate having the probe pin is disposed on a circuit substrate and the probe pin is connected to a desired portion of the circuit substrate. Thereafter, the mold substrate is separated from the probe pin in such a way that the mold substrate remains unchanged. Also, the separated mold substrate may be reused. | 05-13-2010 |
20120153054 | MICRO-EJECTING APPARATUS - There is provided a micro-ejecting apparatus. The micro-ejecting apparatus includes: an ejector including a channel therein and a driving part for ejecting a fluid to the outside; a body including a plurality of mounting parts on which the ejector is mounted; and guiding members fixed on the body and corresponding to the plurality of mounting parts so as to determine the positions of the plurality of mounting parts in the body. | 06-21-2012 |
20130047399 | BIOCHIP STAMPING DEVICE AND STAMPING METHOD THEREOF - There is provided a biochip stamping device. The biochip stamping device includes a stamping jig in which a first biochip is aligned; an inverting mechanism vertically inverting a second biochip; and a movement mechanism transferring the vertically inverted second biochip on the stamping jig to combine the first biochip and the second biochip. | 02-28-2013 |
20130081450 | DEVICE FOR TESTING DROPLETS AND OPERATING METHOD THEREOF - There are provided a device for testing droplets and an operation method thereof. The device includes a receiving layer on which a sample is received; a plurality of pressure sensors disposed below the receiving layer, and generating changes in capacitance by the sample received on the receiving layer; and a control unit measuring changes in capacitance generated by the plurality of pressure sensors and determining whether the sample received on the receiving layer is defective. According to the present invention, a location and an amount of a sample received on a receiving layer are measured based on changes in capacitance generated by a plurality of respective pressure sensors disposed below the receiving layer, thereby precisely testing whether the sample ejected in droplet form is defective. | 04-04-2013 |
20130099023 | FLUID EJECTION DEVICE - There is provided a fluid ejection device, including a piezo pipette head ejecting a first fluid; a solenoid valve head disposed to be adjacent to the piezo pipette head and ejecting a second fluid having a volume relatively larger than that of the first fluid; and a fluid collection unit allowing the second fluid ejected from the solenoid valve head to be formed thereon to thereby allow the volume of the second fluid to be measured by an optical image device. | 04-25-2013 |