Patent application number | Description | Published |
20110183525 | Homogeneous Porous Low Dielectric Constant Materials - In one exemplary embodiment, a method includes: providing a structure having a first layer overlying a substrate, where the first layer includes a dielectric material having a plurality of pores; applying a filling material to an exposed surface of the first layer; heating the structure to a first temperature to enable the filling material to homogeneously fill the plurality of pores; after filling the plurality of pores, performing at least one process on the structure; and after performing the at least one process, removing the filling material from the plurality of pores by heating the structure to a second temperature to decompose the filling material. | 07-28-2011 |
20120282784 | HOMOGENEOUS POROUS LOW DIELECTRIC CONSTANT MATERIALS - In one exemplary embodiment, a method includes: providing a structure having a first layer overlying a substrate, where the first layer includes a dielectric material having a plurality of pores; applying a filling material to an exposed surface of the first layer; heating the structure to a first temperature to enable the filling material to homogeneously fill the plurality of pores; after filling the plurality of pores, performing at least one process on the structure; and after performing the at least one process, removing the filling material from the plurality of pores by heating the structure to a second temperature to decompose the filling material. | 11-08-2012 |
20120329273 | HOMOGENEOUS POROUS LOW DIELECTRIC CONSTANT MATERIALS - In one exemplary embodiment, a method includes: providing a structure having a first layer overlying a substrate, where the first layer includes a dielectric material having a plurality of pores; applying a filling material to an exposed surface of the first layer; heating the structure to a first temperature to enable the filling material to homogeneously fill the plurality of pores; after filling the plurality of pores, performing at least one first process on the structure; after performing the at least one first process, removing the filling material from the plurality of pores by heating the structure to a second temperature to decompose the filling material; and after removing the filling material from the plurality of pores, performing at least one second process on the structure, where the at least one second process is performed at a third temperature that is greater than the second temperature. | 12-27-2012 |
20130017682 | Overburden Removal For Pore Fill Integration ApproachAANM Bruce; Robert L.AACI White PlainsAAST NYAACO USAAGP Bruce; Robert L. White Plains NY USAANM Dubois; Geraud Jean-MichelAACI San JoseAAST CAAACO USAAGP Dubois; Geraud Jean-Michel San Jose CA USAANM Frot; Theo J.AACI Los GatosAAST CAAACO USAAGP Frot; Theo J. Los Gatos CA USAANM Volksen; WilliAACI San JoseAAST CAAACO USAAGP Volksen; Willi San Jose CA US - In one exemplary embodiment of the invention, a method includes: providing a structure having a first layer overlying a substrate, where the first layer includes a dielectric material having a plurality of pores; applying a filling material to a surface of the first layer; after applying the filling material, heating the structure to enable the filling material to at least partially fill the plurality of pores, where heating the structure results in residual filling material being left on the surface of the first layer; and after heating the structure, removing the residual filling material by applying a solvent wash. | 01-17-2013 |
20130017688 | Reduction Of Pore Fill Material DewettingAANM Dubois; Geraud Jean-MichelAACI San JoseAAST CAAACO USAAGP Dubois; Geraud Jean-Michel San Jose CA USAANM Frot; Theo J.AACI Los GatosAAST CAAACO USAAGP Frot; Theo J. Los Gatos CA USAANM Magbitang; Teddie P.AACI San JoseAAST CAAACO USAAGP Magbitang; Teddie P. San Jose CA USAANM Volksen; WilliAACI San JoseAAST CAAACO USAAGP Volksen; Willi San Jose CA US - In one exemplary embodiment, a method includes: providing a structure having a first layer overlying a substrate, where the first layer includes a dielectric material having a plurality of pores; applying a filling material to a surface of the first layer, where the filling material includes a polymer and at least one additive, where the at least one additive includes at least one of a surfactant, a high molecular weight polymer and a solvent; and after applying the filling material, heating the structure to enable the filling material to at least partially fill the plurality of pores uniformly across an area of the first layer, where heating the structure results in residual filling material being uniformly left on the surface of the first layer. | 01-17-2013 |
20130045337 | HOMOGENEOUS MODIFICATION OF POROUS FILMS - Porous films are homogeneously and partially (but not completely) filled. A composition (that includes a polymer) is brought into contact with a planar film that has interconnected pores throughout the film. The polymer then partially fills the pores within the film, e.g., in response to being heated. An additional treatment such as heating the polymer and/or applying radiation to the polymer increases the Young's modulus of the film. | 02-21-2013 |
20130045608 | REDUCTION OF PORE FILL MATERIAL DEWETTING - In one embodiment, a program storage device readable by a machine, tangibly embodying a program of instructions executable by the machine for performing operations, includes operations comprising: providing a structure comprising a first layer overlying a substrate, where the first layer comprises a dielectric material having a plurality of pores; applying a filling material to a surface of the first layer, where the filling material comprises a polymer and at least one additive, where the at least one additive comprises at least one of a surfactant, a high molecular weight polymer and a solvent (e.g., a high boiling point solvent); and after applying the filling material, heating the structure to enable the filling material to at least partially fill the plurality of pores uniformly across an area of the first layer, where heating the structure results in residual filling material being uniformly left on the surface of the first layer. | 02-21-2013 |
20140367356 | IN-SITU HARDMASK GENERATION - In some examples, a process to generate an in-situ hardmask layer on porous dielectric materials using the densifying action of a plasma in conjunction with a sacrificial polymeric filler, the latter which enables control of the hardmask thickness as well as a well-defined interface with the underlying ILD. | 12-18-2014 |