Egley
Bert D. Egley US
Patent application number | Description | Published |
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20130256523 | GAS CHROMATOGRAPH-MASS SPECTROMETER TRANSFER LINE - A transfer line for conveying the column effluent from a gas chromatograph to an ion source of a mass spectrometer has a transfer line body and a mechanism for moving the transfer line body either towards or away from the mass spectrometer. A gas seal between the housing of the mass spectrometer and the transfer line body prevents vacuum leak when the transfer line body is moved. In one embodiment, the transfer line body outer periphery is threaded and a hand wheel engages the transfer line body threads via complementary threads in order to move the body. When the transfer line is moved towards the mass spectrometer, the body presses an ion source, which is not rigidly fixed to the housing of the mass spectrometer, into a recess seat of the housing, and aligns the ion source in an operating position. | 10-03-2013 |
Bert D. Egley, Walnut Creek, CA US
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20140261717 | DIALYSIS CONTROL VALVE HAVING SELF-CLEANING MODE - A valve system is provided that includes an electromechanical solenoid, a gas valve including a magnetic flapper, a power source in electrical communication with the electromechanical solenoid, and a controller. The controller is configured to control the power source to supply an intermediate voltage that causes the electromechanical solenoid to move to a neutral position between a default position and a fully-actuated position. In so doing, the magnetic flapper is maintained in a neutral position between two gas ports and a flow of gas between the ports can be used to clean foreign particles from the magnetic flapper. The controller can also provide a varying voltage to the electromechanical solenoid while in the neutral position to cause vibration of the magnetic flapper and further assist in removing foreign particles. A closed loop system including a feedback circuit can be used for adjusting the voltage applied to the solenoid based on pressure sensed. | 09-18-2014 |
Bert David Egley, Walnut Creek, CA US
Fred Egley, Sunnyvale, CA US
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20120032756 | RADIO FREQUENCY (RF) POWER FILTERS AND PLASMA PROCESSING SYSTEMS INCLUDING RF POWER FILTERS - A filter for filtering radio frequency (RF) power transmitted from an electrostatic chuck (ESC) in a plasma processing system. The plasma processing system may include a heating element disposed at the ESC. The plasma processing system may further include a power supply. The filter may include a core member and a cable wound around and wound along the core member to form a set of inductors. The cable may include a plurality of wires, including a first wire and a second wire, a portion of the first wire and a portion of the second wire being twisted together, a first end of the first wire and a first end of the second wire being connected to the heating element, each of a second end of the first wire and a second end of the second wire being connected to a capacitor and being connected to the power supply. | 02-09-2012 |
Fred D. Egley, Sunnyvale, CA US
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20100319813 | BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS - Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer. | 12-23-2010 |
20110054661 | DIRECT DRIVE ARRANGEMENT TO CONTROL CONFINEMENT RINGS POSITIONING AND METHODS THEREOF - A direct drive arrangement for controlling pressure volume within a confinement region of a processing chamber of a plasma processing system during substrate processing is provided. The confinement region is a chamber volume surrounded by confinement rings is provided. The arrangement includes plunger assemblies configured for changing the pressure of motor assemblies configured for vertically moving the plunger assemblies, and recording set point position values for the plunger assemblies. The arrangement further includes a set of circuits configured for driving the motor assemblies to move the plunger assemblies to change the pressure volume within the confinement region. The set of circuits is also configured for providing power to the motor assemblies. The set of circuits is further configured for receiving the set point position values from the motor assemblies. | 03-03-2011 |
20130056022 | BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS - Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer. | 03-07-2013 |
Fred Dennis Egley, Sunnyvale, CA US
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20110146705 | UV LAMP ASSEMBLY OF DEGAS CHAMBER HAVING ROTARY SHUTTERS - A UV lamp assembly having rotary shutters. Each rotary shutter has a concave wall with a reflective concave surface. The rotary shutters can be collectively rotated between an open position and an closed position. At the open position, the rotary shutters do not block UV light of UV lamps from leaving the UV lamp assembly while at the closed position the rotary shutters block UV light from leaving the UV lamp assembly. | 06-23-2011 |
20130100278 | AUTOMATED BUBBLE DETECTION APPARATUS AND METHOD - An automated hydrogen bubble detection apparatus includes a horizontal support surface on which a test coupon can be supported, a transparent tube having an open top and an open bottom and operable to contain a test solution when positioned on a test coupon, a camera arranged to view a test solution in the transparent tube, and a controller in communication with the camera and effective to operate the camera such that at least one video segment is recorded by the camera and analyzed to detect first bubble and continuous bubble generation. A method of evaluating corrosion resistance of coatings on aluminum and steel in acidic solution is also included. | 04-25-2013 |
20140269821 | MULTICHANNEL THERMOCOUPLE COMPENSATION FOR THREE DIMENSIONAL TEMPERATURE GRADIENT - A method of using a thermocouple is provided. The method includes, but is not limited to, disposing at least one temperature sensor at each of two or more respective portions of an electrical connector adapted to receive thermocouple signals, measuring temperatures at the two or more portions, and calculating the temperatures at each terminal of the electrical connector based on measured temperature values of the two or more respective portions having the disposed temperature sensors. The method also includes, but is not limited to, calculating a cold junction temperature of a terminal for at least one thermocouple channel carrying the thermocouple signals based on measured or calculated temperature values of the terminals, or a combination thereof. | 09-18-2014 |