Patent application number | Description | Published |
20090015844 | Interferometry Method for Ellipsometry, Reflectometry, and Scatterometry Measurements, Including Characterization of Thin Film Structures - A method including: imaging test light emerging from a test object over a range of angles to interfere with reference light on a detector, wherein the test and reference light are derived from a common source; for each of the angles, simultaneously varying an optical path length difference from the source to the detector between interfering portions of the test and reference light at a rate that depends on the angle at which the test light emerges from the test object; and determining an angle-dependence of an optical property of the test object based on the interference between the test and reference light as the optical path length difference is varied for each of the angles. | 01-15-2009 |
20090096980 | METHODS AND SYSTEMS FOR INTERFEROMETRIC ANALYSIS OF SURFACES AND RELATED APPLICATIONS - A method for determining a spatial property of an object includes obtaining a scanning low coherence interference signal from a measurement object that includes two or more interfaces. The scanning low coherence interference signal includes two or more overlapping low coherence interference signals, each of which results from a respective interface. Based on the low coherence interference signal, a spatial property of at least one of the interfaces is determined. In some cases, the determination is based on a subset of the low coherence interference signal rather than on the entirety of the signal. Alternatively, or in addition, the determination can be based on a template, which may be indicative of an instrument response of the interferometer used to obtain the low coherence interference signal. | 04-16-2009 |
20100060898 | METHODS AND SYSTEMS FOR INTERFEROMETRIC ANALYSIS OF SURFACES AND RELATED APPLICATIONS - A method for determining a spatial property of an object includes obtaining a scanning low coherence interference signal from a measurement object that includes two or more interfaces. The scanning low coherence interference signal includes two or more overlapping low coherence interference signals, each of which results from a respective interface. Based on the low coherence interference signal, a spatial property of at least one of the interfaces is determined. In some cases, the determination is based on a subset of the low coherence interference signal rather than on the entirety of the signal. Alternatively, or in addition, the determination can be based on a template, which may be indicative of an instrument response of the interferometer used to obtain the low coherence interference signal. | 03-11-2010 |
20100128283 | INTERFEROMETRIC SYSTEMS AND METHODS FEATURING SPECTRAL ANALYSIS OF UNEVENLY SAMPLED DATA - In certain aspects, interferometry methods are disclosed that include providing one or more interferometry signals for a test object, wherein the interferometry signals correspond to a sequence of optical path difference (OPD) values which are not all equally spaced from one another because of noise, providing information about the unequal spacing of the sequence of OPD values, decomposing each of the interferometry signals into a contribution from a plurality of basis functions each corresponding to a different frequency and sampled at the unequally spaced OPD values, and using information about the contribution from each of the multiple basis functions to each of the interferometry signals to determine information about the test object. | 05-27-2010 |
20110007323 | Equal-Path Interferometer - An optical assembly for use in an interferometer is provided. The optical assembly includes first and second partially reflective surfaces positioned along an optical axis and oriented at different non-normal angles to the optical axis. The second partially reflective surface is configured to receive light transmitted through the first partially reflective surface along the optical path, transmit a portion of the received light to a test object to define measurement light for the interferometer and reflect another portion of the received light back towards the first partially reflective surface to define reference light for the interferometer. The reference light makes at least one round trip path between the second and first partially reflective surfaces. | 01-13-2011 |
20110255096 | INTERFEROMETRIC ENCODER SYSTEMS - A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase. | 10-20-2011 |
20120069326 | INTERFEROMETRIC METHODS FOR METROLOGY OF SURFACES, FILMS AND UNDERRESOLVED STRUCTURES - A method for determining information about a test object includes combining two or more scanning interference signals to form a synthetic interference signal; analyzing the synthetic interference signal to determine information about the test object; and outputting the information about the test object. Each of the two or more scanning interference signals correspond to interference between test light and reference light as an optical path length difference between the test and reference light is scanned, wherein the test and reference light are derived from a common source. The test light scatters from the test object over a range of angles and each of the two or more scanning interferometry signals corresponds to a different scattering angle or polarization state of the test light. | 03-22-2012 |
20120170048 | INTERFEROMETRIC ENCODER SYSTEMS - A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase. | 07-05-2012 |
20130155413 | LOW COHERENCE INTERFEROMETRY WITH SCAN ERROR CORRECTION - A system includes an interference microscope having one or more optical elements arranged to image a test object to an image plane by combining test light from the test object with reference light from a reference object to form an interference pattern at the image plane, wherein the test and reference light are derived from a common broadband light source. The system includes a scanning stage configured to scan an optical path difference (OPD) between the test and reference light, a multi-element detector positioned at the image plane and configured to record the interference pattern for each of a series of OPD increments and to generate multiple interferometry signals each having a fringe carrier frequency indicative of changes in the OPD as the OPD is scanned, where there is phase diversity among the interferometry signals, and an electronic processor coupled to the multi-element detector and scanning stage and configured to process the interference signals based on the phase diversity to determine information about the OPD increments having sensitivity to perturbations to the OPD increments at frequencies greater than the fringe carrier frequency. | 06-20-2013 |
20140049782 | INTERFEROMETRIC ENCODER SYSTEMS - A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase. | 02-20-2014 |
20150043005 | INTERFEROMETRIC HETERODYNE OPTICAL ENCODER SYSTEM - An encoder interferometry system includes an interferometer positioned to receive first and second beams having different frequencies, in which the interferometer has at least one polarizing beam splitting element for directing the first beam along a measurement path to define a measurement beam and the second beam along a reference path to define a reference beam. The encoder interferometry system further includes a encoder scale positioned to diffract the measurement beam at least once, a detector positioned to receive the measurement and reference beams after the measurement beam diffracts from the encoder scale, and an output component positioned to receive the measurement and reference beams before they reach the detector and deflect spurious portions of the first and second beam away from the detector. | 02-12-2015 |
20150043006 | INTERFEROMETRY EMPLOYING REFRACTIVE INDEX DISPERSION - An interferometry system includes: a light source, defining a coherence length, an interferometer configured to combine measurement and reference beams to form an output beam, where the interferometer includes a dispersion imbalance between measurement and reference paths large enough to produce a coherence envelope for the system having a width more than twice the coherence length; a phase modulation device configured to introduce a variable phase between the measurement and reference beams; a detector; imaging optics to direct the output beam to the detector and produce an image of the measurement surface; and an electronic processor electronically coupled to the phase modulation device and the detector and configured to record multiple interference signals corresponding to different locations on the measurement surface, in which the interference signals are based on the intensity of the output beam as a function of the variable phase for the different locations of the measurement surface. | 02-12-2015 |
20150192769 | Measuring Topography of Aspheric and Other Non-Flat Surfaces - Generating a composite image of a non-flat surface includes: acquiring, using a microscope, multiple images of different areas of the non-flat surface, where each image includes a region of overlap with at least one adjacent image, the microscope having sufficient resolution to image in three dimensions a microstructure on the non-flat surface having a lateral dimension of 10 microns or less and a height of 10 nm or less; determining, for each of the images, a set of rigid body parameters relating a position and orientation of the test object in the image to a common coordinate system, where the set of rigid body parameters is determined by fitting the resolved microstructure in the overlap region in the image with the corresponding microstructure in the overlap region of the adjacent image; and combining the images based on the sets of rigid body parameters to generate a composite image. | 07-09-2015 |
20150292913 | DOUBLE PASS INTERFEROMETRIC ENCODER SYSTEM - An encoder head includes one or more components arranged to: i) direct a first incident beam to the diffractive encoder scale at a first incident angle with respect to the encoder scale; ii) receive a first return beam from the encoder scale at a first return angle, the first return angle being different from the first incident angle; iii) redirect the first return beam to the encoder scale as a second incident beam at a second incident angle; and iv) receive a second return beam back from the encoder scale at a second return angle, the second return angle being different from the second incident angle, in which a difference between the first incident angle and second incident angle is less than a difference between the first incident angle and the first return angle and less than a difference between the second incident angle and the second return angle. | 10-15-2015 |
Patent application number | Description | Published |
20100039696 | METHOD AND APPARATUS TO REDUCE OR ELIMINATE STICTION AND IMAGE RETENTION IN INTERFEROMETRIC MODULATOR DEVICES - Method and apparatus to reduce or eliminate stiction and image retention in interferometric display devices are disclosed. In some embodiments, a display element comprises a plurality of interferometric modulator devices configured in a matrix, each interferometric modulator device having a movable reflective layer and a plurality of supporting posts, the plurality of posts defining a post spacing distance in at least one direction that is greater for one or more interferometric modulator devices disposed adjacent to an edge of the display element than one or more interferometric modulator devices disposed nonadjacent to an edge of the display element. | 02-18-2010 |
20130124116 | SYSTEMS AND METHODS FOR PREDICTING THE LIFETIME OF AN ELECTROMECHANICAL DEVICE - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for estimating the lifetime or remaining lifetime of an electromechanical systems (EMS) device. In one aspect, a parameter of the device, such as a release or actuation voltage, is measured. The parameter measurement is used in conjunction with a model of the aging of the device according to the measured parameter to determine an estimated remaining lifetime of the device. | 05-16-2013 |
20130125969 | PHOTOVOLTAIC DEVICES AND METHODS OF FORMING THE SAME - This disclosure provides photovoltaic apparatus and methods of forming the same. In one implementation, a method of forming a photovoltaic device includes forming a plurality of substrate features on a surface of a glass substrate, the substrate features having a depth dimension in the range of about 10 μm to about 1000 μm and a width dimension in the range of about 10 μm to about 1000 μm. The method further includes forming a thin film solar cell over the surface of the glass substrate including over the plurality of substrate features. | 05-23-2013 |
20130135620 | SYSTEMS AND METHODS FOR NON-INVASIVE TESTING OF ELECTROMECHANICAL SYSTEMS DEVICES - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for testing an electromechanical systems (EMS) device. In one aspect, a laser is directed at a driven EMS device, and the reflected light pattern is analyzed to provide information regarding the characteristics of the driven EMS device. In some aspects, the reflected light pattern is analyzed to determine a resonant frequency of the EMS device or the damping forces acting on the EMS device. The resonant frequency can then be used to determine stresses within the EMS device, or pressure or temperature within a device package encapsulating the EMS device. | 05-30-2013 |
20130319504 | METHOD OF MANUFACTURING A PHOTOVOLTAIC POWER GENERATING WINDOW - This disclosure provides systems, methods and apparatus including a light collector having a plurality of micro-lens and a plurality of multi-cone light redirecting structure that is optically coupled to one or more photovoltaic cells. In one aspect, the plurality of micro-lens is provided in an organic glass panel that is attached to an inorganic glass substrate. The inorganic glass substrate includes a material that is substantially opaque to radiation in the ultraviolet spectral range. During use, the light collector is disposed such that the inorganic glass substrate is exposed to the exterior to prevent a portion of the ultraviolet radiation incident on the light collector from being transmitted to the organic glass panel. | 12-05-2013 |
20130319505 | PHOTOVOLTAIC POWER GENERATING WINDOW - This disclosure provides systems, methods and apparatus including a light collector having a plurality of micro-lens and a plurality of multi-cone light redirecting structure that is optically coupled to one or more photovoltaic cells. In one aspect, the light collector includes a micro-lens array having a plurality of micro-lens that focus incident light onto a light guide including a plurality of multi-cone light redirecting structure. Each of the plurality of multi-cone light redirecting structure is configured to divert the focused light towards one or more photovoltaic cells disposed along the edge of the light guide. Each multi-cone light redirecting structure includes a central cone shaped structure surrounded by several secondary cone-shaped structures. | 12-05-2013 |
20140084137 | SWITCHABLE SUBSTRATES FOR PHOTOGRAPHY AND VIDEO ENHANCEMENT APPLICATIONS - This disclosure provides systems, methods and apparatus relating to implementations of a switchable substrate that can be used in an imaging device. In one aspect, the switchable substrate includes a plurality of pixels, with each pixel having at least one switchable element. The switchable element can be switched between a first optical state and a second optical state. In the first optical state, a first spectral band of broadband light is reflected from the switchable element while a second spectral band is transmitted through the switchable element. In the second optical state, the first spectral band of the broadband light is transmitted through the switchable element while the second spectral band is reflected from the switchable element. | 03-27-2014 |
20140261622 | SUN-TRACKING PHOTOVOLTAIC SOLAR CONCENTRATOR PANEL - Systems, methods and apparatus are disclosed, including a light collector having a plurality of focusing elements and a plurality of light redirecting features that is optically coupled to one or more photovoltaic (PV) cells. In one aspect, the light collector includes half-cylinder shaped lenses that can focus light incident at various angles onto an elongate v-groove in the light guide such that a first portion of the incident light is diverted to one or more PV cells and a second portion of the incident light is transmitted through the light collector to provide illumination. | 09-18-2014 |
20150091911 | MOVABLE MEMS ELEMENT WITH STICTION MITIGATING SPRING - Systems, methods and methods of manufacture for, among other things, a MEMS device may be provided with a pair of electrodes that are separated by a gap. At least one of the electrodes is movable toward the other electrode. The MEMS device may include a beam that is positioned within the gap and arranged between the electrodes. As the movable electrode moves toward the other electrode, a portion of the MEMS device also moves towards, comes into contact with, and deflects the beam. As the beam deflects, it applies a force upon the MEMS device that opposes the movement of electrode toward the other electrode. | 04-02-2015 |
20150108479 | THIN-FILM TRANSISTORS INCORPORATED INTO THREE DIMENSIONAL MEMS STRUCTURES - This disclosure provides systems, methods and apparatus for forming electromechanical systems (EMS) displays where the area of a substrate occupied by a pixel circuit can be reduced if portions of the pixel circuit can be built in three dimensions. In some aspects, certain EMS displays can incorporate structures that are substantially normal to the surface of a substrate. Incorporating circuit components, such as transistors, into such structures, can reduce the area they occupy within the plane of the substrate. In some aspects, the components of a transistor can be fabricated directly into a MEMS anchor that supports a light modulator or a portion of an actuator over the substrate. In some other aspects, the transistor can be fabricated on one or more sidewalls of any MEMS structure. | 04-23-2015 |
Patent application number | Description | Published |
20130163062 | MECHANICAL SMART WINDOW WITH CONTINUOUSLY TUNABLE TRANSMISSION - This disclosure provides systems, methods and apparatus for providing continuous light-transmissivity tuning through a mechanical smart window. In one aspect, a mechanical smart window including multiple layers is provided, each layer featuring light-blocking and light-transmitting areas. The layers may be moved relative to each other, changing the amount by which each light-blocking area occludes light-transmitting areas on other layers. | 06-27-2013 |
20130188235 | SWITCHABLE WINDOWS WITH MEMS SHUTTERS - An array of MEMS shutters may incorporate opaque and/or interference-based film stacks, to control light in a window. The shutter structure may include one or more layers with a controlled stress gradient, which makes a shutter arm curl out of plane and away from a defined aperture for light, thus permitting light to be transmitted through a transparent substrate and past the MEMS structure. To close the shutter, a voltage may be applied between an electrode in the shutter arm and an electrode covering a region on the substrate, rolling the shutter arm flat against the substrate electrode and placing the shutter arm over the aperture. The shutter arm may be configured to transmit selected wavelengths of light. In some implementations, the shutter arm may be configured to filter out infrared light. | 07-25-2013 |
20150346987 | DISPLAY MODE SELECTION ACCORDING TO A USER PROFILE OR A HIERARCHY OF CRITERIA - Some implementations provide automatic display mode selection for a device, such as a mobile display device, according to a hierarchy of criteria. Each display mode may correspond with a set of display parameter settings, which may include a color depth setting, a brightness setting, etc. In some examples, one of the criteria may correspond with a software application being executed on the device. Some implementations involve creating a display device user profile and controlling a display of a mobile display device according to the user profile. The user profile may be built gradually over some number of days/weeks/months after the first use of the device. In some implementations, display parameter setting information or other device setting information corresponding to data in a user profile, including but not limited to demographic data, may be received by a mobile display device from another device, such as a server. | 12-03-2015 |