Patent application number | Description | Published |
20100178600 | PROCESS FOR ETCHING A METAL LAYER SUITABLE FOR USE IN PHOTOMASK FABRICATION - Method and apparatus for etching a metal layer disposed on a substrate, such as a photolithographic reticle, are provided. In one aspect, a method is provided for processing a substrate including positioning a substrate having a metal layer disposed on an optically transparent material in a processing chamber, introducing a processing gas processing gas comprising an oxygen containing gas, a chlorine containing gas, and a chlorine-free halogen containing gas, and optionally, an inert gas, into the processing chamber, generating a plasma of the processing gas in the processing chamber, and etching exposed portions of the metal layer disposed on the substrate. | 07-15-2010 |
20100276391 | INDUCTIVELY COUPLED PLASMA REACTOR HAVING RF PHASE CONTROL AND METHODS OF USE THEREOF - Methods of operating inductively coupled plasma (ICP) reactors having ICP sources and substrate bias with phase control are provided herein. In some embodiments, a method of operating a first plasma reactor having a source RF generator inductively coupled to the first plasma reactor on one side of a substrate support surface of a substrate support within the first plasma reactor and a bias RF generator coupled to the substrate support on an opposing side of the substrate support surface, wherein the source RF generator and the bias RF generator provide respective RF signals at a common frequency may include selecting a desired value of a process parameter for a substrate to be processed; and adjusting the phase between respective RF signals provided by the source RF generator and the bias RF generator to a desired phase based upon a predetermined relationship between the process parameter and the phase. | 11-04-2010 |
20110162797 | METHOD AND APPARATUS FOR PHOTOMASK PLASMA ETCHING - A method and apparatus for etching photomasks is provided herein. In one embodiment, the apparatus comprises a process chamber having a support pedestal adapted for receiving a photomask. An ion-neutral shield is disposed above the pedestal and a deflector plate assembly is provided above the ion-neutral shield. The deflector plate assembly defines a gas flow direction for process gases towards the ion-neutral shield, while the ion-neutral shield is used to establish a desired distribution of ion and neutral species in a plasma for etching the photomask. | 07-07-2011 |
Patent application number | Description | Published |
20110080886 | METHOD AND APPARATUS TO SUPPORT DEEP PACKET INSPECTION IN A MOBILE NETWORK - As part of mobility management messaging in current systems, only static quality of service (QoS) profiles and their statically configured classifiers are reported. These classifiers are known a priori and are typically used for hosted traffic. Once advanced application classifiers are matched and mobility messaging is done, the deep packet inspection (DPI) learned subscriber context is lost. An embodiment of the invention is configured to associate DPI-learned dynamic classifiers with the classifier's policy information as payload over mobility management messaging. The embodiment is useful for identifying protocols and applications, for authentication purposes, solving congestion—based issues between elements in a network, guaranteeing QoS without reserving resources statically, attaching traffic packets to a particular subscriber, and creating mobile signaling to provision end-to-end communication in a network. Thereby enabling the transfer of subscriber parameters and information to be associated with the subscriber throughout subscriber movement through multiple elements of a network. | 04-07-2011 |
20110085439 | METHOD AND APPARATUS FOR SWITCHING COMMUNICATIONS TRAFFIC IN A COMMUNICATIONS NETWORK - In current hardware forwarding architectures, in which subscriber profiles are distributed across multiple cards in the network, lack of subscriber knowledge leads to loss of bandwidth on fabric links connecting multiple cards in a chassis, loss of device processing cycles, and loss of quality of service knowledge because the traffic is not classified. An example embodiment of the present invention employs a subscriber-aware switch programmed with a subscriber table that maps subscriber traffic to an “anchor” line card with the subscriber's profile. The subscriber table allows for traffic to reach the anchor line card directly, avoiding unnecessary hops and loss of traffic information. As a result, line card, fabric, and other resources are used efficiently, thereby enabling a gateway or other network node to support high traffic rate (e.g., 100 Gbps) network models. | 04-14-2011 |
20110085571 | METHOD AND APPARATUS FOR ASSIGNING RESOURCES IN A NETWORK NODE - Achieving resource management within a network processing unit (NPU) can be challenging due to the NPU's fixed and limited instruction set. In the case of large mobile networks, contexts are dynamic, and each subscriber in the network consumes multiple hardware resources, where a central processing unit (CPU) is typically employed to program individual resources even though generally impractical in high-session rates. To avoid programming individual resources, an example embodiment of the present invention creates a group of resources depending on a category, the group being shared dynamically among subscribers when a subscriber is active in the network. The example embodiment may include a network service processor (NSP) located in a forwarding path, such that the NPU may operate in connection with the NSP to allocate NPU resources using a packetized interface. The example embodiment achieves resource management within the NPU without a host CPU's involvement and without statically delaying resources. | 04-14-2011 |
20110087786 | METHOD AND APPARATUS FOR EFFICIENT RESOURCE ALLOCATION OF QUALITY OF SERVICE PROFILES IN MOBILE NETWORKS - Current subscriber-aware networks provision individual subscriber parameters in a centrally located repository and return the parameters to entities for quality of service (QoS) enforcement on a per-subscriber basis. In other words, there is a one-to-one mapping of each QoS profile for each subscriber. Attaching QoS profiles to each subscriber can result in very high resource requirements, such as a larger memory footprint or multiple policing profiles, resulting in a non-scalable network resource. To resolve resource explosion problem without sacrificing functional requirements, an example embodiment of the present invention allows few service classes with QoS parameters to exist and derives various subscriber plans out of them. The example embodiment is useful to generate subscriber plans dynamically as subscribers join network and thereby helps to reduce QoS resource requirements dramatically, without sacrificing any functional capability. | 04-14-2011 |