Patent application number | Description | Published |
20090023274 | Hybrid Chemical Vapor Deposition Process Combining Hot-Wire CVD and Plasma-Enhanced CVD - Hybrid chemical vapor deposition systems for depositing a semiconductor-containing thin film over a substrate comprise a reaction space, a substrate support member configured to permit movement of a substrate in a longitudinal direction and a plasma-generating apparatus disposed in the reaction space and configured to form plasma-excited species of a vapor phase chemical. The systems further comprise a hot wire unit disposed in the reaction space and configured to heat and decompose a vapor phase chemical. The hot wire unit can be a filament. The systems can further comprise an additional reaction space proximate the reaction space. The additional reaction space can comprise a plasma-generating apparatus configured to form plasma-excited species of a vapor phase chemical and a hot wire unit configured to heat and decompose a vapor phase chemical. | 01-22-2009 |
20100024729 | METHODS AND APPARATUSES FOR UNIFORM PLASMA GENERATION AND UNIFORM THIN FILM DEPOSITION - System for depositing a thin film over a substrate comprise a reaction space, a substrate support member configured to permit movement of a substrate in a longitudinal direction, and a plasma-generating apparatus disposed in the reaction space and configured to form plasma-excited species of a vapor phase chemical. The plasma-generating apparatus can comprise a cathode unit having an electrode plate and one or more gas diffuser plates for forming a high-density, linearly-shaped and uniform plasma in a space between the substrate and the cathode unit. | 02-04-2010 |
20100029067 | ROLL-TO-ROLL CONTINUOUS THIN FILM PV MANUFACTURING PROCESS AND EQUIPMENT WITH REAL TIME ONLINE IV MEASUREMENT - Apparatuses and methods are provided for the continuous, roll-to-roll formation of photovoltaic (PV) cells. Apparatuses include reel-to-reel transport chambers, one or more deposition chambers, a differential process isolation unit and a chamber for obtaining real time quality data, including IV data, yield data and uniformity data. | 02-04-2010 |
20100144122 | Hybrid chemical vapor deposition process combining hot-wire cvd and plasma-enhanced cvd - Hybrid chemical vapor deposition systems for depositing a semiconductor-containing thin film over a substrate comprise a reaction space, a substrate support member configured to permit movement of a substrate in a longitudinal direction and a plasma-generating apparatus disposed in the reaction space and configured to form plasma-excited species of a vapor phase chemical. The systems further comprise a hot wire unit disposed in the reaction space and configured to heat and decompose a vapor phase chemical. The hot wire unit can be a filament. The systems can further comprise an additional reaction space proximate the reaction space. The additional reaction space can comprise a plasma-generating apparatus configured to form plasma-excited species of a vapor phase chemical and a hot wire unit configured to heat and decompose a vapor phase chemical. | 06-10-2010 |
20110005575 | Back reflector for photovoltaic devices - This invention relates generally to thin-film photovoltaic devices, and more specifically to an improved back reflector structure of multiple material layers for being used in thin-film photovoltaic devices. More particularly, the invention is to provide an enhanced back reflector having a texture, a high reflectivity, a high yield, and a long lifetime stability which can be applied into thin-film silicon based photovoltaic devices. The back reflector structure consists of (i) a first textured metal or alloy layer (hereinafter referred to as a first metal layer), such as aluminum (Al), formed on a metal (such as stainless steel) or polymer (such as Kapton) substrate, (ii) a thin oxide or nitride barrier layer (hereinafter referred to as a first barrier layer), such as zinc oxide (ZnO), formed on the first metal layer, (iii) a second reflective metal or alloy layer (hereinafter referred to as a second metal layer), such as silver (Ag), formed on the first barrier layer, (iv) a transparent oxide or nitride barrier layer (hereinafter referred to as a second barrier layer), such as zinc oxide, formed on the second metal layer. | 01-13-2011 |
20110019388 | Solar simulator for flexible solar modules - A solar cell simulator that is cylindrically symmetrical to test photovoltaic devices that are flexible. A particular embodiment would be made from plexiglass or similar acrylic material. The present invention produces a spectrum that simulates the spectral distribution of solar light that we observe on the Earth's surface. The simulator would be comprised of a tubular pulsed light source, a pulsed power supply, a tubular light spectrum filter, an IV electrical measurement station, a cylinder-shaped module holder to place the flexible large-area module during the measurement. All cylinders share the same central axis. This maintains radial uniformity of all light intensity and can be used for electrical measurements (IV curves under illumination) of flexible large-area PV modules. | 01-27-2011 |
20110180393 | PROCESS FOR FORMING A BACK REFLECTOR FOR PHOTOVOLTAIC DEVICES - A process for forming a textured back reflector for a photovoltaic device is provided. The process includes providing a moving substrate, positioning the substrate within a deposition chamber, and sputtering a metal or a metal alloy target positioned within the deposition chamber to produce sputtered material. The process further includes introducing a reacting gas mixed with argon into the deposition chamber. The reacting gas and the sputtered metal or metal alloy material form an alloy layer. The alloy layer is formed on the substrate and provides a textured surface on the substrate. | 07-28-2011 |
20110189806 | Isolation chamber and method of using the isolation chamber to make solar cell material - Apparatuses and methods are provided for the continuous formation of solar cell material including an isolation chamber that reduces cross contamination between adjacent formation zones that are at different pressures. | 08-04-2011 |