Patent application number | Description | Published |
20080203491 | RADIATION HARDENED FINFET - The embodiments of the invention provide a structure and method for a rad-hard FinFET or mesa. More specifically, a semiconductor structure is provided having at least one fin or mesa comprising a channel region on an isolation region. A doped substrate region is also provided below the fin, wherein the doped substrate region has a first polarity opposite a second polarity of the channel region. The isolation region contacts the doped substrate region. The structure further includes a gate electrode covering the channel region and at least a portion of the isolation region. The gate electrode comprises a lower portion below the channel region of the fin, wherein the lower portion of the gate electrode comprises a height that is at least one-half of a thickness of the fin. | 08-28-2008 |
20080203523 | LOCALIZED TEMPERATURE CONTROL DURING RAPID THERMAL ANNEAL - Disclosed herein are embodiments of a semiconductor structure and an associated method of forming the semiconductor structure with shallow trench isolation structures having selectively adjusted reflectance and absorption characteristics in order to ensure uniform temperature changes across a wafer during a rapid thermal anneal and, thereby, limit variations in device performance. Also disclosed are embodiments of another semiconductor structure and an associated method of forming the semiconductor structure with devices having selectively adjusted reflectance and absorption characteristics in order to either selectively vary the performance of individual devices (e.g., to form devices with different threshold voltages (Vt) on the same wafer) and/or to selectively optimize the anneal temperature of individual devices (e.g., to ensure optimal activation temperatures for n-type and p-type dopants during anneals). | 08-28-2008 |
20080203524 | LOCALIZED TEMPERATURE CONTROL DURING RAPID THERMAL ANNEAL - Disclosed are embodiments of a semiconductor structure and method of forming the structure with selectively adjusted reflectance and absorption characteristics in order to selectively control temperature changes during a rapid thermal anneal and, thereby, to selectively control variations in device performance and/or to selectively optimize the anneal temperature of such devices. Selectively controlling the temperature changes in different devices during a rapid thermal anneal is accomplished by selectively varying the isolation material thickness in different sections of a shallow trench isolation structures. Alternatively, it is accomplished by selectively varying the pattern of fill structures in different sections of a semiconductor wafer so that predetermined amounts of shallow trench isolation regions in the different sections are exposed. | 08-28-2008 |
20080203540 | STRUCTURE AND METHOD FOR DEVICE-SPECIFIC FILL FOR IMPROVED ANNEAL UNIFORMITY - Disclosed are embodiments of a wafer that incorporates fill structures with varying configurations to provide uniform reflectance. Uniform reflectance is achieved by distributing across the wafer fill structures having different semiconductor materials such that approximately the same ratio and density between the different semiconductor materials is achieved within each region and, optimally, each sub-region. Alternatively, it is achieved by distributing across the wafer fill structures, including one or more hybrid fill structure containing varying proportions of different semiconductor materials, such that approximately the same ratio between the different semiconductor materials is achieved within each region and, optimally, each sub-region. Alternatively, it is achieved by distributing across the wafer fill structures having semiconductor materials with different thicknesses such that approximately the same overall ratio between the semiconductor material with the different thicknesses is achieved within each region and, optimally, each sub-region. | 08-28-2008 |
20080203544 | SEMICONDUCTOR WAFER STRUCTURE WITH BALANCED REFLECTANCE AND ABSORPTION CHARACTERISTICS FOR RAPID THERMAL ANNEAL UNIFORMITY - Disclosed are embodiments of semiconductor wafer structures and associated methods of forming the structures with balanced reflectance and absorption characteristics. The reflectance and absorption characteristics are balanced by manipulating thin film interferences. Specifically, thin film interferences are manipulated by selectively varying the thicknesses of the different films. Alternatively, reflectance and absorption characteristics can be balanced by incorporating an additional reflectance layer into the wafer structure above the substrate. | 08-28-2008 |
20080217692 | ASYMMETRICALLY STRESSED CMOS FINFET - A CMOS device comprising a FinFET comprises at least one fin structure comprising a source region; a drain region; and a channel region comprising silicon separating the source region from the drain region. The FinFET further comprises a gate region comprising a N+ polysilicon layer on one side of the channel region and a P+ polysilicon layer on an opposite side of the channel region, thereby, partitioning the fin structure into a first side and a second side, respectively. The channel region is in mechanical tension on the first side and in mechanical compression on the second side. The FinFET may comprise any of a nFET and a pFET, wherein the nFET comprises a N-channel inversion region in the first side, and wherein the pFET comprises a P-channel inversion region in the second side. The CMOS device may further comprise a tensile film and a relaxed film on opposite sides of the fin structure adjacent to the source and drain regions, and an oxide cap layer over the fin structure. | 09-11-2008 |
20080217707 | TRANSISTOR HAVING GATE AND BODY IN DIRECT SELF-ALIGNED CONTACT AND RELATED METHODS - A transistor having a directly contacting gate and body and related methods are disclosed. In one embodiment, the transistor includes a gate; a body; and a dielectric layer extending over the body to insulate the gate from the body along an entire surface of the body except along a portion of at least a sidewall of the body, wherein the gate is in direct contact with the body at the portion. One method may include providing the body; forming a sacrificial layer that contacts at least a portion of a sidewall of the body; forming a dielectric layer about the body except at the at least a portion; removing the sacrificial layer; and forming the gate about the body such that the gate contacts the at least a portion of the sidewall of the body. | 09-11-2008 |
20080268588 | RECESSED GATE CHANNEL WITH LOW Vt CORNER - A recessed gate FET device includes a substrate having an upper and lower portions, the lower portion having a reduced concentration of dopant material than the upper portion; a trench-type gate electrode defining a surrounding channel region and having a gate dielectric material layer lining and including a conductive material having a top surface recessed to reduce overlap capacitance with respect to the source and drain diffusion regions formed at an upper substrate surface at either side of the gate electrode. There is optionally formed halo implants at either side of and abutting the gate electrode, each halo implants extending below the source and drain diffusions into the channel region. Additionally, highly doped source and drain extension regions are formed that provide a low resistance path from the source and drain diffusion regions to the channel region. The recessed gate FET device suppresses short channel effects and exhibits improved threshold voltage (Vt) characteristics at corners of the trench bottom. | 10-30-2008 |
20080286913 | FIELD EFFECT TRANSISTOR WITH RAISED SOURCE/DRAIN FIN STRAPS - Therefore, disclosed above are embodiments of a multi-fin field effect transistor structure (e.g., a multi-fin dual-gate FET or tri-gate FET) that provides low resistance strapping of the source/drain regions of the fins, while also maintaining low capacitance to the gate by raising the level of the straps above the level of the gate. Embodiments of the structure of the invention incorporate either conductive vias or taller source/drain regions in order to electrically connect the source/drain straps to the source/drain regions of each fin. Also, disclosed are embodiments of associated methods of forming these structures. | 11-20-2008 |
20080290525 | SILICON-ON-INSULATOR STRUCTURES FOR THROUGH VIA IN SILICON CARRIERS - A silicon-on-insulator (SOI) structure is provided for forming through vias in a silicon wafer carrier structure without backside lithography. The SOI structure includes the silicon wafer carrier structure bonded to a silicon substrate structure with a layer of buried oxide and a layer of nitride lo separating these silicon structures. Vias are formed in the silicon carrier structure and through the oxide layer to the nitride layer and the walls of the via are passivated. The vias are filled with a filler material of either polysilicon or a conductive material. The substrate structure is then etched back to the nitride layer and the nitride layer is etched back to the filler material. Where the filler material is polysilicon, the polysilicon is etched away forming an open via to the top surface of the carrier wafer structure. The via is then backfilled with conductive material. | 11-27-2008 |
20080299711 | DUAL WORK-FUNCTION SINGLE GATE STACK - Disclosed is a complementary CMOS device having a first FET with sidewall channels and a second FET with a planar channel. The first FET can be a p-FET and the second FET can be an n-FET or vice versa. The conductor used to form the gate electrodes of the different type FETs is different and is pre-selected to optimize performance. For example, a p-FET gate electrode material can have a work function near the valence band and an n-FET gate electrode material can have a work function near the conduction band. The first gate electrodes of the first FET are located adjacent to the sidewall channels and the second gate electrode of the second FET is located above the planar channel. However, the device structure is unique in that the second gate electrode extends laterally above the first FET and is electrically coupled to the first gate electrodes. | 12-04-2008 |
20090001470 | METHOD FOR FORMING ACUTE-ANGLE SPACER FOR NON-ORTHOGONAL FINFET AND THE RESULTING STRUCTURE - In a method of fabricating a semiconductor finFET transistor for an integrated circuit chip comprising 1) the formation of at least one fin body on the surface of a substrate and 2) the formation of a gate on said fin body in a non-orthogonal orientation relative to the body thereby creating acute angle regions at the crossover of the gate on the body, and 3) the formation of a protective material in the acute angle regions so as to prevent damage to the gate during subsequent fabrication steps. The structure of the finFET transistor comprises such a transistor with protective material in the acute angle regions at the crossover of the gate on the body. | 01-01-2009 |
20090020764 | GRAPHENE-BASED TRANSISTOR - A graphene layer is formed on a surface of a silicon carbide substrate. A dummy gate structure is formed over the fin, in the trench, or on a portion of the planar graphene layer to implant dopants into source and drain regions. The dummy gate structure is thereafter removed to provide an opening over the channel of the transistor. Threshold voltage adjustment implantation may be performed to form a threshold voltage implant region directly beneath the channel, which comprises the graphene layer. A gate dielectric is deposited over a channel portion of the graphene layer. After an optional spacer formation, a gate conductor is formed by deposition and planarization. The resulting graphene-based field effect transistor has a high carrier mobility due to the graphene layer in the channel, low contact resistance to the source and drain region, and optimized threshold voltage and leakage due to the threshold voltage implant region. | 01-22-2009 |
20090020806 | ASYMMETRIC FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD - Disclosed are embodiments of an asymmetric field effect transistor structure and a method of forming the structure in which both series resistance in the source region (R | 01-22-2009 |
20090020819 | FIN-TYPE FIELD EFFECT TRANSISTOR STRUCTURE WITH MERGED SOURCE/DRAIN SILICIDE AND METHOD OF FORMING THE STRUCTURE - Disclosed herein are embodiments of a multiple fin fin-type field effect transistor (i.e., a multiple fin dual-gate or tri-gate field effect transistor) in which the multiple fins are partially or completely merged by a highly conductive material (e.g., a metal silicide). Merging the fins in this manner allow series resistance to be minimized with little, if any, increase in the parasitic capacitance between the gate and source/drain regions. Merging the semiconductor fins in this manner also allows each of the source/drain regions to be contacted by a single contact via as well as more flexible placement of that contact via. | 01-22-2009 |
20090020830 | ASYMMETRIC FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD - Disclosed are embodiments for a design structure of an asymmetric field effect transistor structure and a method of forming the structure in which both series resistance in the source region (R | 01-22-2009 |
20090065818 | STRUCTURE FOR IMAGERS HAVING ELECTRICALLY ACTIVE OPTICAL ELEMENTS - A design structure embodied in a machine readable medium for use in a design process, the design structure representing a CMOS image sensor device comprising an array of active pixel cells. Each active pixel cell includes a substrate; a photosensing device formed at or below a substrate surface for collecting charge carriers in response to incident light; and, one or more light transmissive conductive wire structures formed above the photosensing device, the one or more conductive wire structures being located in an optical path above the photosensing device. The formed light transmissive conductive wire structures provide both an electrical and optical functions. An optical function is provided by tailoring the thickness of the conductive wire layer to filter light according to a pixel color scheme. Alternately, the light transmissive conductive wire structures may be formed as a microlens structure providing a light focusing function. Electrical functions for the conductive wire layer include use as a capacitor plate, as a resistor or as an interconnect. | 03-12-2009 |
20090065834 | IMAGERS HAVING ELECTRICALLY ACTIVE OPTICAL ELEMENTS - A CMOS image sensor comprising an array of active pixel cells. Each active pixel cell includes a substrate; a photosensing device formed at or below a substrate surface for collecting charge carriers in response to incident light; and, one or more light transmissive conductive wire structures formed above the photosensing device, the one or more conductive wire structures being located in an optical path above the photosensing device. The formed light transmissive conductive wire structures provide both an electrical and optical functions. An optical function is provided by tailoring the thickness of the conductive wire layer to filter light according to a pixel color scheme. Alternately, the light transmissive conductive wire structures may be formed as a microlens structure providing a light focusing function. Electrical functions for the conductive wire layer include use as a capacitor plate, as a resistor or as an interconnect. | 03-12-2009 |
20090078999 | SEMICONDUCTOR DEVICE STRUCTURES WITH FLOATING BODY CHARGE STORAGE AND METHODS FOR FORMING SUCH SEMICONDUCTOR DEVICE STRUCTURES. - Semiconductor device structures including a semiconductor body that is partially depleted to define a floating charge-neutral region supplying a floating body for charge storage and methods for forming such semiconductor device structures. The width of the semiconductor body is modulated so that different sections of the body have different widths. When electrically biased, the floating charge-neutral region at least partially resides in the wider section of the semiconductor body. | 03-26-2009 |
20090096066 | Structure and Method for Device-Specific Fill for Improved Anneal Uniformity - Disclosed is a design structure embodiment of a wafer that incorporates fill structures with varying configurations to provide uniform reflectance. Uniform reflectance is achieved by distributing across the wafer fill structures having different semiconductor materials such that approximately the same ratio and density between the different semiconductor materials is achieved within each region and, optimally, each sub-region. Alternatively, it is achieved by distributing across the wafer fill structures, including one or more hybrid fill structure containing varying proportions of different semiconductor materials, such that approximately the same ratio between the different semiconductor materials is achieved within each region and, optimally, each sub-region. Alternatively, it is achieved by distributing across the wafer fill structures having semiconductor materials with different thicknesses such that approximately the same overall ratio between the semiconductor material with the different thicknesses is achieved within each region and, optimally, each sub-region. | 04-16-2009 |
20090101978 | FIN-TYPE FIELD EFFECT TRANSISTOR STRUCTURE WITH MERGED SOURCE/DRAIN SILICIDE AND METHOD OF FORMING THE STRUCTURE - Disclosed herein are embodiments of a design structure of a multiple fin fin-type field effect transistor (i.e., a multiple fin dual-gate or tri-gate field effect transistor) in which the multiple fins are partially or completely merged by a highly conductive material (e.g., a metal silicide). Merging the fins in this manner allow series resistance to be minimized with little, if any, increase in the parasitic capacitance between the gate and source/drain regions. Merging the semiconductor fins in this manner also allows each of the source/drain regions to be contacted by a single contact via as well as more flexible placement of that contact via. | 04-23-2009 |
20090102505 | REMOTELY CONFIGURABLE CHIP AND ASSOCIATED METHOD - A chip is provided that includes a plurality of on-chip configurable features having a disabled and an enabled state. The on-chip configurable features are each operable to change from the disabled state to the enabled state upon receipt of a valid enablement configuration from an enabling entity. A method for the chip is provided to disable the plurality of on-chip configurable features before delivery of the chip to a new location. The chip is delivered to a new location where a unique hardware identifier and data for at least one of the on-chip configurable features is retrieved. The unique hardware identifier and the data are transmitted to an enabling entity. The enabling entity sends the enablement configuration to the chip. The chip is programmed with the enablement configuration, which enables the at least one on-chip configurable feature at the new location. | 04-23-2009 |
20090111225 | CMOS STRUCTURE AND METHOD INCLUDING MULTIPLE CRYSTALLOGRAPHIC PLANES - A complementary metal oxide semiconductor (CMOS) structure includes a semiconductor substrate having first mesa having a first ratio of channel effective horizontal surface area to channel effective vertical surface area. The CMOS structure also includes a second mesa having a second ratio of the same surface areas that is greater than the first ratio. A first device having a first polarity uses the first mesa as a channel and benefits from the enhanced vertical crystallographic orientation. A second device having a second polarity different from the first polarity uses the second mesa as a channel and benefits from the enhanced horizontal crystallographic orientation. | 04-30-2009 |
20090119626 | DESIGN STRUCTURE INCLUDING TRANSISTOR HAVING GATE AND BODY IN DIRECT SELF-ALIGNED CONTACT - A design structure including a transistor having a directly contacting gate and body is disclosed. In one embodiment, the transistor includes a gate; a body; and a dielectric layer extending over the body to insulate the gate from the body along an entire surface of the body except along a portion of at least a sidewall of the body, wherein the gate is in direct contact with the body at the portion. | 05-07-2009 |
20090121291 | DENSE CHEVRON NON-PLANAR FIELD EFFECT TRANSISTORS AND METHOD - Disclosed are embodiments of semiconductor structure and a method of forming the semiconductor structure that simultaneously maximizes device density and avoids contacted-gate pitch and fin pitch mismatch, when multiple parallel angled fins are formed within a limited area on a substrate and then traversed by multiple parallel gates (e.g., in the case of stacked, chevron-configured, CMOS devices). This is accomplished by using, not a minimum lithographic fin pitch, but rather by using a fin pitch that is calculated as a function of a pre-selected contacted-gate pitch, a pre-selected fin angle and a pre-selected periodic pattern for positioning the fins relative to the gates within the limited area. Thus, the disclosed structure and method allow for the conversion of a semiconductor product design layout with multiple, stacked, planar FETs in a given area into a semiconductor product design layout with multiple, stacked, chevron-configured, non-planar FETs in the same area. | 05-14-2009 |
20090158231 | Design Structure for a Redundant Micro-Loop Structure for use in an Integrated Circuit Physical Design Process and Method of Forming the Same - A design structure for an integrated circuit including a first wire of a first level of wiring tracks, a second wire of a second level of wiring tracks, a third wire of a third level of wiring tracks, and a fourth wire located a first distance from the second wire in the second level of wiring tracks. A first via connects the first and second wires at a first location of the second wire. A second via connects the second and third wires at the first location, the second via is substantially axially aligned with the first via. A third via connecting the third and fourth wires at a second location of the fourth wire. A fourth via connecting the first and fourth wires at the second location, the fourth via is substantially axially aligned with the third via. The second, third, and fourth vias, and the third and fourth wires form a path between the first and second wires redundant to the first via. | 06-18-2009 |
20090189223 | Complementary Metal Gate Dense Interconnect and Method of Manufacturing - Complementary metal gate dense interconnects and methods of manufacturing the interconnects is provided. The method comprises forming a first metal gate on a wafer and second metal gate on the wafer. A conductive interconnect material is deposited in a space formed between the first metal gate and the second metal gate to provide an electrical connection between the first metal gate and the second metal gate. | 07-30-2009 |
20090197382 | MULTI-GATED, HIGH-MOBILITY, DENSITY IMPROVED DEVICES - Disclosed herein are embodiments of an improved method of forming p-type and n-type MUGFETs with high mobility crystalline planes in high-density, chevron-patterned, CMOS devices. Specifically, semiconductor fins are formed in a chevron layout oriented along the centerline of a wafer. Gates are formed adjacent to the semiconductor fins such that they are approximately perpendicular to the centerline. Then, masked implant sequences are performed, during which halo and/or source/drain dopants are implanted into the sidewalls of the semiconductor fins on one side of the chevron layout and then into the sidewalls of the semiconductor fins on the opposite side of the chevron layout. The implant direction used during these implant sequences is substantially orthogonal to the gates in order to avoid mask shadowing, which can obstruct dopant implantation when separation between the semiconductor fins in the chevron layout is scaled (i.e., when device density is increased). | 08-06-2009 |
20090206407 | SEMICONDUCTOR DEVICES HAVING TENSILE AND/OR COMPRESSIVE STRESS AND METHODS OF MANUFACTURING - A semiconductor device and method of manufacturing is disclosed which has a tensile and/or compressive strain applied thereto. The method includes forming at least one trench in a material; and filling the at least one trench by an oxidation process thereby forming a strain concentration in a channel of a device. The structure includes a gate structure having a channel and a first oxidized trench on a first of the channel, respectively. The first oxidized trench creates a strain component in the channel to increase device performance. | 08-20-2009 |
20090236632 | FET HAVING HIGH-K, VT MODIFYING CHANNEL AND GATE EXTENSION DEVOID OF HIGH-K AND/OR VT MODIFYING MATERIAL, AND DESIGN STRUCTURE - A field effect transistor (FET) including a high dielectric constant (high-k), threshold voltage (Vt) modifying channel and a gate extension devoid of the high-k and/or Vt modifying material, and a related design structure, are disclosed. In one embodiment, a FET may include a gate having a channel region thereunder including a gate insulator portion of a high dielectric constant (high-k) material and a threshold voltage (Vt) modifying portion (e.g., of SiGe); and a gate extension having a region thereunder devoid of at least one of the high-k material or the Vt modifying portion. | 09-24-2009 |
20090242985 | METHOD, STRUCTURE AND DESIGN STRUCTURE FOR CUSTOMIZING HISTORY EFFECTS OF SOI CIRCUITS - A design structure is embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes a high-leakage dielectric formed between a gate electrode and an outer portion of an active region of a FET. Also provided is a structure having a high-leakage dielectric formed between the gate electrode and the active region of the FET and a method of manufacturing such structure. | 10-01-2009 |
20090243000 | METHOD, STRUCTURE AND DESIGN STRUCTURE FOR CUSTOMIZING HISTORY EFFECTS OF SOI CIRCUITS - A design structure is embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes a high-leakage dielectric formed over an active region of a FET and a low-leakage dielectric formed on the active region and adjacent the high-leakage dielectric. The low-leakage dielectric has a lower leakage than the high-leakage dielectric. Also provided is a structure and method of fabricating the structure. | 10-01-2009 |
20090243029 | METHOD, STRUCTURE AND DESIGN STRUCTURE FOR CUSTOMIZING HISTORY EFFECTS OF SOI CIRCUITS - A design structure is embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes a structure which comprises a high-leakage dielectric formed in a divot on each side of a segmented FET comprised of active silicon islands and gate electrodes thereon, and a low-leakage dielectric on the surface of the active silicon islands, adjacent the high-leakage dielectric, wherein the low-leakage dielectric has a lower leakage than the high-leakage dielectric. Also provided is a structure and method of fabricating the structure. | 10-01-2009 |
20090244501 | APPARATUS FOR REAL-TIME CONTAMINATION, ENVIRONMENTAL, OR PHYSICAL MONITORING OF A PHOTOMASK - An apparatus for real-time contamination, environmental, or physical monitoring of a photomask. The apparatus includes a photomask having a patterned region configured to correspond to features of an integrated circuit and a sensor physically coupled with the photomask. The sensor is configured to monitor an attribute related to the photomask. Attributes monitored by the sensor may include chemical contamination, temperature changes, humidity changes, acceleration, shock, vibration, optical flux through the photomask, electrostatic discharge environment of the photomask, particulates, and pressure. | 10-01-2009 |
20090260669 | METAL-GATE THERMOCOUPLE - A metal gate thermocouple is provided. The thermocouple is configured to measure local temperatures of a device. The thermocouple is a passive device which senses temperature using the thermoelectric principle that when two dissimilar electrically conductive materials are joined, an electrical potential (voltage) is developed between the two materials. The voltage between the materials varies with the temperature of the junction (joint) between the materials. The thermocouple device includes a first conductor comprising a first material formed over a thin oxide layer or a shallow trench isolation (STI) structure and a second conductor comprising a second material formed over the thin oxide layer or the STI structure. The second conductor overlaps with the first conductor to form a thermocouple junction or dimension at least more than an alignment tolerance. The first and second materials are chosen such that the thermocouple junction formed between them exhibits a non-zero Seebeck coefficient. A conductive film formed over the first conductor and the second conductor and a non-conductive void or film is formed over the thermocouple junction. | 10-22-2009 |
20090261415 | FULLY-DEPLETED LOW-BODY DOPING FIELD EFFECT TRANSISTOR (FET) WITH REVERSE SHORT CHANNEL EFFECTS (SCE) INDUCED BY SELF-ALIGNED EDGE BACK-GATE(S) - Disclosed are embodiments of a field effect transistor (FET) and, more particularly, a fully-depleted, thin-body (FDTB) FET that allows for scaling with minimal short channel effects, such as drain induced barrier lowering (DIBL) and saturation threshold voltage (Vtsat) roll-off, at shorter channel lengths. The FDTB FET embodiments are configured with either an edge back-gate or split back-gate that can be biased in order to selectively adjust the potential barrier between the source/drain regions and the channel region for minimizing off-state leakage current between the drain region and the source region and/or for varying threshold voltage. These unique back-gate structures avoid the need for halo doping to ensure linear threshold voltage (Vtlin) roll-up at smaller channel lengths and, thus, avoid across-chip threshold voltage variations due to random doping fluctuations. Also disclosed are method embodiments for forming such FETs. | 10-22-2009 |
20090261425 | FINFETs SINGLE-SIDED IMPLANT FORMATION - A method patterns pairs of semiconducting fins on an insulator layer and then patterns a linear gate conductor structure over and perpendicular to the fins. Next, the method patterns a mask on the insulator layer adjacent the fins such that sidewalls of the mask are parallel to the fins and are spaced from the fins a predetermined distance. The method performs an angled impurity implant into regions of the fins not protected by the gate conductor structure and the mask. This process forms impurity concentrations within the fins that are asymmetric and that mirror one another in adjacent pairs of fins. | 10-22-2009 |
20090267156 | DEVICE STRUCTURES INCLUDING DUAL-DEPTH TRENCH ISOLATION REGIONS AND DESIGN STRUCTURES FOR A STATIC RANDOM ACCESS MEMORY - Device structures and design structures for a static random access memory. The device structure includes a well of a first conductivity type in a semiconductor layer, first and second deep trench isolation regions in the semiconductor layer that laterally bound a device region in the well, and first and second pluralities of doped regions of a second conductivity type in the first device region. A shallow trench isolation region extends laterally across in the device region to connect the first and second deep trench isolation regions, and is disposed in the device region between the first and second pluralities of doped regions. The shallow trench isolation region extends from the top surface into the semiconductor layer to a first depth such that the well is continuous beneath the shallow trench isolation region. A gate stack controls carrier flow between a pair of the first plurality of doped regions. | 10-29-2009 |
20090269897 | METHODS OF FABRICATING DUAL-DEPTH TRENCH ISOLATION REGIONS FOR A MEMORY CELL - Methods for fabricating dual-depth trench isolation regions for a memory cell. First and second deep trench isolation regions are formed in the semiconductor layer that laterally bound a device region in a well of a first conductivity type in the semiconductor layer. First and second pluralities of doped regions of a second conductivity type are formed in the device region. A shallow trench isolation region is formed that extends laterally across the device region from the first deep trench isolation region to the second deep trench isolation region. The shallow trench isolation region is disposed in the device region between the first and second pluralities of doped regions. The shallow trench isolation region extends into the semiconductor layer to a depth such that the well is continuous beneath the shallow trench isolation region. A gate stack controls carrier flow between a pair of the first plurality of doped regions. | 10-29-2009 |
20090298220 | IMAGERS HAVING ELECTRICALLY ACTIVE OPTICAL ELEMENTS - A method of fabricating a CMOS image sensor comprising an array of active pixel cells. Each active pixel cell includes a substrate; a photosensing device formed at or below a substrate surface for collecting charge carriers in response to incident light; and, one or more light transmissive conductive wire structures formed above the photosensing device, the one or more conductive wire structures being located in an optical path above the photosensing device. The formed light transmissive conductive wire structures provide both an electrical and optical function. An optical function is provided by tailoring the thickness of the conductive wire layer to filter light according to a pixel color scheme. Alternately, the light transmissive conductive wire structures may be formed as a microlens structure providing a light focusing function. Electrical functions for the conductive wire layer include use as a capacitor plate, as a resistor or as an interconnect. | 12-03-2009 |
20090302366 | STRUCTURE AND DESIGN STRUCTURE HAVING ISOLATED BACK GATES FOR FULLY DEPLETED SOI DEVICES - Methods, structure and design structure having isolated back gates for fully depleted semiconductor-on-insulator (FDSOI) devices are presented. In one embodiment, a method may include providing a FDSOI substrate having a SOI layer over a buried insulator over a first polarity-type substrate, the first polarity-type substrate including a second polarity-type well therein of opposite polarity than the first polarity; forming a trench structure in the FDSOI substrate; forming an active region to each side of the trench structure in the SOI layer; and forming a PFET on the active region on one side of the trench structure and an NFET on the active region on the other side of the trench structure. | 12-10-2009 |
20090302374 | Differential Nitride Pullback to Create Differential NFET to PFET Divots for Improved Performance Versus Leakage - Disclosed are embodiments of an integrated circuit structure with field effect transistors having differing divot features at the isolation region-semiconductor body interfaces so as to provide optimal performance versus stability (i.e., optimal drive current versus leakage current) for logic circuits, analog devices and/or memory devices. Also disclosed are embodiments of a method of forming the integrated circuit structure embodiments. These method embodiments incorporate the use of a cap layer pullback technique on select semiconductor bodies and subsequent wet etch process so as to avoid (or at least minimize) divot formation adjacent to some but not all semiconductor bodies. | 12-10-2009 |
20090302402 | MUGFET WITH STUB SOURCE AND DRAIN REGIONS - The present invention provides a semiconductor device that includes at least one semiconductor Fin structure atop the surface of a substrate; the semiconducting fin structure including a channel of a first conductivity type and source/drain regions of a second conductivity type, the source/drain regions present at each end of the semiconductor fin structure; a gate structure immediately adjacent to the semiconductor fin structure, a dielectric spacer abutting each sidewall of the gate structure wherein the each end of the fin structure extends a dimension that is less than about ¼ a length of the Si-containing fin structure from a sidewall of the dielectric spacer; and a semiconductor region to the each end of the semiconductor fin structure, wherein the semiconductor region to the each end of the semiconductor fin structure is separated from the gate structure by the dielectric spacer. | 12-10-2009 |
20090305470 | ISOLATING BACK GATES OF FULLY DEPLETED SOI DEVICES - Methods, structure and design structure having isolated back gates for fully depleted semiconductor-on-insulator (FDSOI) devices are presented. In one embodiment, a method may include providing a FDSOI substrate having a SOI layer over a buried insulator over a first polarity-type substrate, the first polarity-type substrate including a second polarity-type well therein of opposite polarity than the first polarity; forming a trench structure in the FDSOI substrate; forming an active region to each side of the trench structure in the SOI layer; and forming a PFET on the active region on one side of the trench structure and an NFET on the active region on the other side of the trench structure. | 12-10-2009 |
20090319973 | SPACER FILL STRUCTURE, METHOD AND DESIGN STRUCTURE FOR REDUCING DEVICE VARIATION - A design structure is provided for spacer fill structures and, more particularly, spacer fill structures, a method of manufacturing and a design structure for reducing device variation is provided. The structure includes a plurality of dummy fill shapes in different areas of a device which are configured such that gate perimeter to gate area ratio will result in a total perimeter density being uniform across a chip. | 12-24-2009 |
20100006823 | Semiconducting Device Having Graphene Channel - The present invention, in one embodiment, provides a semiconductor device including a substrate having an dielectric layer; at least one graphene layer overlying the dielectric layer; a back gate structure underlying the at least one graphene layer; and a semiconductor-containing layer present on the at least one graphene layer, the semiconductor-containing layer including a source region and a drain region separated by an upper gate structure, wherein the upper gate structure is positioned overlying the back gate structure. | 01-14-2010 |
20100029021 | METHODS FOR REAL-TIME CONTAMINATION, ENVIRONMENTAL, OR PHYSICAL MONITORING OF A PHOTOMASK - Methods for real-time contamination, environmental, or physical monitoring of a photomask. An attribute of a photomask is monitored using a sensor of an electronics package attached to the photomask. The methods further include generating one or more sensor signals relating to the monitored attribute with the sensor and transmitting the one or more sensor signals from the electronics package to a control system. | 02-04-2010 |
20100031223 | SYSTEMS FOR REAL-TIME CONTAMINATION, ENVIRONMENTAL, OR PHYSICAL MONITORING OF A PHOTOMASK - Systems for real-time contamination, environmental, or physical monitoring of a photomask. The system includes an electronics package physically mounted to the photomask and a processing device in communication with the electronics package. The electronics package includes a sensor configured to monitor the attribute and generate sensor data. The processing device is configured to analyze the sensor data communicated from the electronics package to the processing device. | 02-04-2010 |
20100038694 | SPLIT-GATE DRAM WITH MUGFET, DESIGN STRUCTURE, AND METHOD OF MANUFACTURE - A semiconductor structure for a dynamic random access memory cell, the structure including: a fin of a fin-type field effect transistor (FinFET) device formed over and spaced apart from a conductive region of a substrate; a storage capacitor connected to a first end of the fin; and a back-gate at a first lateral side of the fin and in electrical contact with the conductive region. | 02-18-2010 |
20100038720 | STRUCTURE, DESIGN STRUCTURE AND METHOD OF MANUFACTURING DUAL METAL GATE VT ROLL-UP STRUCTURE - A structure, design structure and method of manufacturing is provided for a dual metal gate Vt roll-up structure, e.g., multi-work function metal gate. The multi-work function metal gate structure comprises a first type of metal with a first work function in a central region and a second type of metal with a second work function in at least one edge region adjacent the central region. The first work-function is different from the second work function. | 02-18-2010 |
20100038724 | Metal-Gate High-K Reference Structure - Disclosed are embodiments of an integrated circuit structure that incorporates at least two field effect transistors (FETs) that have the same conductivity type and essentially identical semiconductor bodies (i.e., the same semiconductor material and, thereby the same conduction and valence band energies, the same source, drain, and channel dopant profiles, the same channel widths and lengths, etc.). However, due to different gate structures with different effective work functions, at least one of which is between the conduction and valence band energies of the semiconductor bodies, these FETs have selectively different threshold voltages, which are independent of process variables. Furthermore, through the use of different high-k dielectric materials and/or metal gate conductor materials, the embodiments allow threshold voltage differences of less than 700 mV to be achieved so that the integrated circuit structure can function at power supply voltages below 1.0V. Also disclosed are method embodiments for forming the integrated circuit structure. | 02-18-2010 |
20100038728 | FIELD EFFECT TRANSISTOR WITH SUPPRESSED CORNER LEAKAGE THROUGH CHANNEL MATERIAL BAND-EDGE MODULATION, DESIGN STRUCTURE AND METHOD - Disclosed are embodiments of field effect transistors (FETs) having suppressed sub-threshold corner leakage, as a function of channel material band-edge modulation. Specifically, the FET channel region is formed with different materials at the edges as compared to the center. Different materials with different band structures and specific locations of those materials are selected in order to effectively raise the threshold voltage (Vt) at the edges of the channel region relative to the Vt at the center of the channel region and, thereby to suppress of sub-threshold corner leakage. Also disclosed are design structures for such FETs and method embodiments for forming such FETs. | 02-18-2010 |
20100039853 | Design Structure, Structure and Method of Using Asymmetric Junction Engineered SRAM Pass Gates - A design structure, structure and method of using and/or manufacturing structures having asymmetric junction engineered SRAM pass gates is provided. The method includes applying a voltage through asymmetric pull-down nFETs with high junction leakage from their body to their source and low junction leakage from the body to their drain; applying a voltage through asymmetric pull-up pFETs with high junction leakage from their body to their source and low junction leakage from the body to their drain; and applying a voltage through asymmetrical pass gates which provide low leakage SOI logic. | 02-18-2010 |
20100039854 | Structure, Structure and Method of Using Asymmetric Junction Engineered SRAM Pass Gates - A design structure, structure and method of using and/or manufacturing structures having asymmetric junction engineered SRAM pass gates is provided. The structure includes an SRAM cell having asymmetric junction-engineered SRAM pass gates with a high leakage junction and a low leakage junction. The asymmetric junction-engineered SRAM pass gates are connected between an internal node and a bit-line node. The high leakage junction is from a body to the internal node and the low leakage junction is from the body to the bit-line node. | 02-18-2010 |
20100041191 | SPLIT-GATE DRAM WITH MUGFET, DESIGN STRUCTURE, AND METHOD OF MANUFACTURE - A method of manufacturing a dynamic random access memory cell includes: forming a substrate having an insulating region over a conductive region; forming a fin of a fin-type field effect transistor (FinFET) device over the insulating region; forming a storage capacitor at a first end of the fin; and forming a back-gate at a lateral side of the fin. The back-gate is in electrical contact with the conductive region and is structured and arranged to influence a threshold voltage of the fin. | 02-18-2010 |
20100041199 | FIELD EFFECT TRANSISTOR WITH SUPPRESSED CORNER LEAKAGE THROUGH CHANNEL MATERIAL BAND-EDGE MODULATION, DESIGN STRUCTURE AND METHOD - Disclosed are embodiments of field effect transistors (FETs) having suppressed sub-threshold corner leakage, as a function of channel material band-edge modulation. Specifically, the FET channel region is formed with different materials at the edges as compared to the center. Different materials with different band structures and specific locations of those materials are selected in order to effectively raise the threshold voltage (Vt) at the edges of the channel region relative to the Vt at the center of the channel region and, thereby to suppress of sub-threshold corner leakage. Also disclosed are design structures for such FETs and method embodiments for forming such FETs. | 02-18-2010 |
20100041225 | STRUCTURE, DESIGN STRUCTURE AND METHOD OF MANUFACTURING DUAL METAL GATE VT ROLL-UP STRUCTURE - A structure, design structure and method of manufacturing is provided for a dual metal gate Vt roll-up structure, e.g., multi-work function metal gate. The method of manufacturing the multi-work function metal gate structure comprises forming a first type of metal with a first work function in a central region and forming a second type of metal with a second work function in at least one edge region adjacent the central region. The first work-function is different from the second work function. | 02-18-2010 |
20100044801 | DUAL METAL GATE CORNER - In view of the foregoing, disclosed herein are embodiments of an improved field effect transistor (FET) structure and a method of forming the structure. The FET structure embodiments each incorporate a unique gate structure. Specifically, this gate structure has a first section above a center portion of the FET channel region and second sections above the channel width edges (i.e., above the interfaces between the channel region and adjacent isolation regions). The first and second sections differ (i.e., they have different gate dielectric layers and/or different gate conductor layers) such that they have different effective work functions (i.e., a first and second effective work-function, respectively). The different effective work functions are selected to ensure that the threshold voltage at the channel width edges is elevated. | 02-25-2010 |
20100087037 | SEMICONDUCTOR DEVICE STRUCTURES WITH FLOATING BODY CHARGE STORAGE AND METHODS FOR FORMING SUCH SEMICONDUCTOR DEVICE STRUCTURES - Semiconductor device structures including a semiconductor body that is partially depleted to define a floating charge-neutral region supplying a floating body for charge storage and methods for forming such semiconductor device structures. The width of the semiconductor body is modulated so that different sections of the body have different widths. When electrically biased, the floating charge-neutral region at least partially resides in the wider section of the semiconductor body. | 04-08-2010 |
20100090320 | STRUCTURE AND METHOD FOR DEVICE-SPECIFIC FILL FOR IMPROVED ANNEAL UNIFORMITY - Disclosed are embodiments of a wafer that incorporates fill structures with varying configurations to provide uniform reflectance. Uniform reflectance is achieved by distributing across the wafer fill structures having different semiconductor materials such that approximately the same ratio and density between the different semiconductor materials is achieved within each region and, optimally, each sub-region. Alternatively, it is achieved by distributing across the wafer fill structures, including one or more hybrid fill structure containing varying proportions of different semiconductor materials, such that approximately the same ratio between the different semiconductor materials is achieved within each region and, optimally, each sub-region. Alternatively, it is achieved by distributing across the wafer fill structures having semiconductor materials with different thicknesses such that approximately the same overall ratio between the semiconductor material with the different thicknesses is achieved within each region and, optimally, each sub-region. | 04-15-2010 |
20100117125 | SEMICONDUCTOR STRUCTURES INCORPORATING MULTIPLE CRYSTALLOGRAPHIC PLANES AND METHODS FOR FABRICATION THEREOF - A semiconductor structure includes a semiconductor mesa located upon an isolating substrate. The semiconductor mesa includes a first end that includes a first doped region separated from a second end that includes a second doped region by an isolating region interposed therebetween. The first doped region and the second doped region are of different polarity. The semiconductor structure also includes a channel stop dielectric layer located upon a horizontal surface of the semiconductor mesa over the second doped region. The semiconductor structure also includes a first device located using a sidewall and a top surface of the first end as a channel region, and a second device located using the sidewall and not the top surface of the second end as a channel. A related method derives from the foregoing semiconductor structure. Also included is a semiconductor circuit that includes the semiconductor structure. | 05-13-2010 |
20100155842 | BODY CONTACTED HYBRID SURFACE SEMICONDUCTOR-ON-INSULATOR DEVICES - A portion of a top semiconductor layer of a semiconductor-on-insulator (SOI) substrate is patterned into a semiconductor fin having substantially vertical sidewalls. A portion of a body region of the semiconductor fin is exposed on a top surface of the semiconductor fin between two source regions having a doping of a conductivity type opposite to the body region of the semiconductor fin. A metal semiconductor alloy portion is formed directly on the two source regions and the top surface of the exposed body region between the two source regions. The doping concentration of the exposed top portion of the body region may be increased by ion implantation to provide a low-resistance contact to the body region, or a recombination region having a high-density of crystalline defects may be formed. A hybrid surface semiconductor-on-insulator (HSSOI) metal-oxide-semiconductor-field-effect-transistor (MOSFET) thus formed has a body region that is electrically tied to the source region. | 06-24-2010 |
20100155855 | Band Edge Engineered Vt Offset Device - Band edge engineered Vt offset devices, design structures for band edge engineered Vt offset devices and methods of fabricating such structures is provided herein. The structure includes a first FET having a channel of a first compound semiconductor of first atomic proportions resulting in a first band structure and a first type. The structure further includes a second FET having a channel of a second compound semiconductor of second atomic proportions resulting in a second band structure and a first type. The first compound semiconductor is different from the second compound semiconductor such that the first FET has a first band structure different from second band structure, giving rise to a threshold voltage different from that of the second FET. | 06-24-2010 |
20100167477 | LOCALIZED TEMPERATURE CONTROL DURING RAPID THERMAL ANNEAL - Disclosed are embodiments of a semiconductor structure and method of forming the structure with selectively adjusted reflectance and absorption characteristics in order to selectively control temperature changes during a rapid thermal anneal and, thereby, to selectively control variations in device performance and/or to selectively optimize the anneal temperature of such devices. Selectively controlling the temperature changes in different devices during a rapid thermal anneal is accomplished by selectively varying the isolation material thickness in different sections of a shallow trench isolation structures. Alternatively, it is accomplished by selectively varying the pattern of fill structures in different sections of a semiconductor wafer so that predetermined amounts of shallow trench isolation regions in the different sections are exposed. | 07-01-2010 |
20100167504 | Methods of Fabricating Nanostructures - A method is shown for fabricating nanostructures, and more particularly, to methods of fabricating silicon nanowires. The method of manufacturing a nanowire includes forming a sandwich structure of SiX material and material Si over a substrate and etching the sandwich structure to expose sidewalls of the Si material and the SiX material. The method further includes etching the SiX material to expose portions of the Si material and etching the exposed portions of the Si material. The method also includes breaking away the Si material to form silicon nanowires. | 07-01-2010 |
20100173500 | SEMICONDUCTOR WAFER STRUCTURE WITH BALANCED REFLECTANCE AND ABSORPTION CHARACTERISTICS FOR RAPID THERMAL ANNEAL UNIFORMITY - Disclosed are embodiments of semiconductor wafer structures and associated methods of forming the structures with balanced reflectance and absorption characteristics. The reflectance and absorption characteristics are balanced by manipulating thin film interferences. Specifically, thin film interferences are manipulated by selectively varying the thicknesses of the different films. Alternatively, reflectance and absorption characteristics can be balanced by incorporating an additional reflectance layer into the wafer structure above the substrate. | 07-08-2010 |
20100200840 | GRAPHENE-BASED TRANSISTOR - A graphene layer is formed on a surface of a silicon carbide substrate. A dummy gate structure is formed over the fin, in the trench, or on a portion of the planar graphene layer to implant dopants into source and drain regions. The dummy gate structure is thereafter removed to provide an opening over the channel of the transistor. Threshold voltage adjustment implantation may be performed to form a threshold voltage implant region directly beneath the channel, which comprises the graphene layer. A gate dielectric is deposited over a channel portion of the graphene layer. After an optional spacer formation, a gate conductor is formed by deposition and planarization. The resulting graphene-based field effect transistor has a high carrier mobility due to the graphene layer in the channel, low contact resistance to the source and drain region, and optimized threshold voltage and leakage due to the threshold voltage implant region. | 08-12-2010 |
20100211923 | Design Structure for a Redundant Micro-Loop Structure for use in an Integrated Circuit Physical Design Process and Method of Forming the Same - A design structure for an integrated circuit including a first wire of a first level of wiring tracks, a second wire of a second level of wiring tracks, a third wire of a third level of wiring tracks, and a fourth wire located a first distance from the second wire in the second level of wiring tracks. A first via connects the first and second wires at a first location of the second wire. A second via connects the second and third wires at the first location, the second via is substantially axially aligned with the first via. A third via connecting the third and fourth wires at a second location of the fourth wire. A fourth via connecting the first and fourth wires at the second location, the fourth via is substantially axially aligned with the third via. The second, third, and fourth vias, and the third and fourth wires form a path between the first and second wires redundant to the first via. | 08-19-2010 |
20100230779 | TRENCH GENERATED DEVICE STRUCTURES AND DESIGN STRUCTURES FOR RADIOFREQUENCY AND BICMOS INTEGRATED CIRCUITS - Trench-generated device structures fabricated using a semiconductor-on-insulator (SOI) wafer, design structures embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit, as well as methods for fabricating trench-generated device structures. The device structure includes a trench extending through the semiconductor and insulator layers of the SOI wafer and into the underlying semiconductor substrate, and a first doped region in the semiconductor substrate. The doped region, which extends about the trench, has a second conductivity type opposite to the first conductivity type. The device structure further includes a first contact extending from the top surface through the semiconductor and insulator layers to a portion of the semiconductor substrate outside of the doped region, and a second contact extending from the top surface through the semiconductor and insulator layers to the doped region in the semiconductor substrate. | 09-16-2010 |
20100232212 | SPLIT-GATE DRAM WITH LATERAL CONTROL-GATE MUGFET - A semiconductor structure of an array of dynamic random access memory cells. The structure includes: a first fin of a first split-gate fin-type field effect transistor (FinFET) device on a substrate; a second fin of a second split-gate fin-type field effect transistor (FinFET) device on the substrate; and a back-gate associated with the first fin and the second fin. The back-gate influences a threshold voltage of the first fin and a threshold voltage of the second fin. | 09-16-2010 |
20100233873 | METHOD OF FORMING A SEMICONDUCTOR DEVICE USING A SACRIFICIAL UNIFORM VERTICAL THICKNESS SPACER STRUCTURE - Disclosed is a method of forming planar and non-planar semiconductor devices using a sacrificial gate sidewall spacer with a uniform vertical thickness. The method forms such spacers by selectively growing an epitaxial film on the vertical sidewalls of a gate structure. The use of an epitaxial growth process, as opposed to a deposition and etch process, ensures that the resulting spacers will have a uniform vertical thickness. Then, any process steps (e.g., implant and/or etch process steps) requiring the use of the gate sidewall spacers (e.g., as a mask or shield) are performed. Precise implant and/or etch profiles can be achieved, during these process steps, as a function of the uniformity of the gate sidewall spacers. Once such process steps are completed, the sidewall spacers are selectively removed. Optionally, before removing the sidewall spacers, they can be oxidized in order to enhance the selective removal process. | 09-16-2010 |
20100301419 | INTEGRATED CIRCUIT DEVICE WITH DEEP TRENCH ISOLATION REGIONS FOR ALL INTER-WELL AND INTRA-WELL ISOLATION AND WITH A SHARED CONTACT TO A JUNCTION BETWEEN ADJACENT DEVICE DIFFUSION REGIONS ANDAN UNDERLYING FLOATING WELL SECTION - Disclosed are embodiments of an improved integrated circuit device structure (e.g., a static random access memory array structure or other integrated circuit device structure incorporating both P-type and N-type devices) and a method of forming the structure that uses DTI regions for all inter-well and intra-well isolation and, thereby provides a low-cost isolation scheme that avoids FET width variations due to STI-DTI misalignment. Furthermore, because the DTI regions used for intra-well isolation effectively create some floating well sections, which must each be connected to a supply voltage (e.g., Vdd) to prevent threshold voltage (Vt) variations, the disclosed integrated circuit device also includes a shared contact to a junction between the diffusion regions of adjacent devices and an underlying floating well section. This shared contact eliminates the cost and area penalties that would be incurred if a discrete supply voltage contact was required for each floating well section. | 12-02-2010 |
20100314688 | DIFFERENTIAL NITRIDE PULLBACK TO CREATE DIFFERENTIAL NFET TO PFET DIVOTS FOR IMPROVED PERFORMANCE VERSUS LEAKAGE - Disclosed are embodiments of an integrated circuit structure with field effect transistors having differing divot features at the isolation region-semiconductor body interfaces so as to provide optimal performance versus stability (i.e., optimal drive current versus leakage current) for logic circuits, analog devices and/or memory devices. Also disclosed are embodiments of a method of forming the integrated circuit structure embodiments. These method embodiments incorporate the use of a cap layer pullback technique on select semiconductor bodies and subsequent wet etch process so as to avoid (or at least minimize) divot formation adjacent to some but not all semiconductor bodies. | 12-16-2010 |
20100323462 | PROCESS ENVIRONMENT VARIATION EVALUATION - Structures and methods are disclosed for evaluating the effect of a process environment variation. A structure and related method are disclosed including a plurality of electrical structures arranged in a non-collinear fashion for determining a magnitude and direction of a process environment variation in the vicinity of the plurality of electrical structures. The plurality of structures may include a first polarity FET coupled to a second polarity FET, each of the first polarity FET and the second polarity FET are coupled to a first pad and a second pad such that the structure allows independent measurement of the first polarity FET and the second polarity FET using only the first and second pads. Alternatively, the electrical structures may include resistors, diodes or ring oscillators. Appropriate measurements of each electrical structure allow a gradient field including a magnitude and direction of the effect of a process environment variation to be determined. | 12-23-2010 |
20100327360 | FET With Replacement Gate Structure and Method of Fabricating the Same - A MUGFET and method of manufacturing a MUGFET is shown. The method of manufacturing the MUGFET includes forming temporary spacer gates about a plurality of active regions and depositing a dielectric material over the temporary spacer gates, including between the plurality of active regions. The method further includes etching portions of the dielectric material to expose the temporary spacer gates and removing the temporary spacer gates, leaving a space between the active regions and a remaining portion of the dielectric material. The method additionally includes filling the space between the active regions and above the remaining portion of the dielectric material with a gate material. | 12-30-2010 |
20110006359 | SEMICONDUCTOR STRUCTURES AND METHODS OF MANUFACTURE - Semiconductor structures and methods of manufacture semiconductors are provided which relate to transistors. The method of forming a transistor includes thermally annealing a selectively patterned dopant material formed on a high-k dielectric material to form a high charge density dielectric layer from the high-k dielectric material. The high charge density dielectric layer is formed with thermal annealing-induced electric dipoles at locations corresponding to the selectively patterned dopant material. | 01-13-2011 |
20110042748 | MULTI-GATE NON-PLANAR FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD OF FORMING THE STRUCTURE USING A DOPANT IMPLANT PROCESS TO TUNE DEVICE DRIVE CURRENT - Disclosed are embodiments of a semiconductor structure that includes one or more multi-gate field effect transistors (MUGFETs), each MUGFET having one or more semiconductor fins. In the embodiments, a dopant implant region is incorporated into the upper portion of the channel region of a semiconductor fin in order to selectively modify (i.e., decrease or increase) the threshold voltage within that upper portion relative to the threshold voltage in the lower portion and, thereby to selectively modify (i.e., decrease or increase) device drive current. In the case of a multiple semiconductor fins, the use of implant regions, the dopant conductivity type in the implant regions and/or the sizes of the implant regions can be varied from fin to fin within a multi-fin MUGFET or between different single and/or multi-fin MUGFETs so that individual device drive current can be optimized. Also disclosed herein are embodiments of a method of forming the semiconductor structure. | 02-24-2011 |
20110057258 | DUAL STRESS DEVICE AND METHOD - A semiconductor device including semiconductor material having a bend and a trench feature formed at the bend, and a gate structure at least partially disposed in the trench feature. A method of fabricating a semiconductor structure including forming a semiconductor material with a trench feature over a layer, forming a gate structure at least partially in the trench feature, and bending the semiconductor material such that stress is induced in the semiconductor material in an inversion channel region of the gate structure. | 03-10-2011 |
20110062240 | DEVICE AND METHOD FOR PROVIDING AN INTEGRATED CIRCUIT WITH A UNIQUE INDENTIFICATION - A device and method for providing an integrated circuit with a unique identification. The device is usable on an integrated circuit (IC) for generating an identification (ID) identifying the IC and includes a plurality of identification cells each utilizing one of a four wire resistor, thin film resistors, and an inverter pair. A measurement circuit measures a parameter of each cell and is utilized in generating the ID in response thereto. | 03-17-2011 |
20110068414 | INTEGRATED CIRCUIT DEVICE WITH SERIES-CONNECTED FIN-TYPE FIELD EFFECT TRANSISTORS AND INTEGRATED VOLTAGE EQUALIZATION AND METHOD OF FORMING THE DEVICE - Disclosed is an integrated circuit device having stacked fin-type field effect transistors (FINFETs) with integrated voltage equalization and a method. A multi-layer fin includes a semiconductor layer, an insulator layer above the semiconductor layer and a high resistance conductor layer above the insulator layer. For each FINFET, a gate is positioned on the sidewalls and top surface of the fin and source/drain regions are within the semiconductor layer on both sides of the gate. Thus, the portion of the semiconductor layer between any two gates contains a source/drain region of one FINFET abutting a source/drain region of another. Conductive straps are positioned on opposing ends of the fin and also between adjacent gates in order to electrically connect the semiconductor layer to the conductor layer. Contacts electrically connect the conductive straps at the opposing ends of the fin to positive and negative supply voltages, respectively. | 03-24-2011 |
20110079828 | METAL GATE FET HAVING REDUCED THRESHOLD VOLTAGE ROLL-OFF - A structure and method to create a metal gate having reduced threshold voltage roll-off. A method includes: forming a gate dielectric material on a substrate; forming a gate electrode material on the gate dielectric material; and altering a first portion of the gate electrode material. The altering causes the first portion of the gate electrode material to have a first work function that is different than a second work function associated with a second portion of the gate electrode material. | 04-07-2011 |
20110101449 | ASYMMETRIC FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD - Disclosed are embodiments of an asymmetric field effect transistor structure and a method of forming the structure in which both series resistance in the source region (R | 05-05-2011 |
20110108927 | DAMASCENE GATE HAVING PROTECTED SHORTING REGIONS - The present invention relates generally to semiconductor devices and, more specifically, to damascene gates having protected shorting regions and related methods for their manufacture. A first aspect of the invention provides a method of forming a damascene gate with protected shorting regions, the method comprising: forming a damascene gate having: a gate dielectric atop a substrate; a gate conductor atop the gate dielectric; a conductive liner laterally adjacent the gate conductor; a spacer between the conductive liner and the substrate; and a first dielectric atop the gate conductor; removing a portion of the conductive liner; and depositing a second dielectric atop a remaining portion of the conductive liner, such that the second dielectric is laterally adjacent both the first dielectric and the gate. | 05-12-2011 |
20110121369 | INTEGRATED CIRCUIT INCLUDING FINFET RF SWITCH ANGLED RELATIVE TO PLANAR MOSFET AND RELATED DESIGN STRUCTURE - An integrated circuit (IC) includes a fin field effect transistor (FinFET) radio frequency (RF) switch; and a planar complementary metal-oxide semiconductor field effect transistor (MOSFET). The planar MOSFET has a channel on a <100> wafer plane and the FinFET RF switch has a channel on a <100> fin plane. The FinFET RF switch and the planar MOSFET can be oriented at approximately 45° with respect to one another. | 05-26-2011 |
20110121862 | CIRCUIT WITH STACKED STRUCTURE AND USE THEREOF - An NAND circuit has a stacked structure having at least one symmetric NFET at a bottom of the stack. More particularly, the circuit has a stacked structure which includes an asymmetric FET and a symmetric FET. The symmetric FET is placed at the bottom of the stacked structure closer to ground than the asymmetric FET. | 05-26-2011 |
20110133310 | INTEGRATED CIRCUIT AND A METHOD USING INTEGRATED PROCESS STEPS TO FORM DEEP TRENCH ISOLATION STRUCTURES AND DEEP TRENCH CAPACITOR STRUCTURES FOR THE INTEGRATED CIRCUIT - Disclosed is an integrated circuit having at least one deep trench isolation structure and a deep trench capacitor. A method of forming the integrated circuit incorporates a single etch process to simultaneously form first trench(s) and a second trenches for the deep trench isolation structure(s) and a deep trench capacitor, respectively. Following formation of a buried capacitor plate adjacent to the lower portion of the second trench, the trenches are lined with a conformal insulator layer and filled with a conductive material. Thus, for the deep trench capacitor, the conformal insulator layer functions as the capacitor dielectric and the conductive material as a capacitor plate in addition to the buried capacitor plate. A shallow trench isolation (STI) structure formed in the substrate extending across the top of the first trench(es) encapsulates the conductive material therein, thereby creating the deep trench isolation structure(s). | 06-09-2011 |
20110140279 | SEMICONDUCTOR STRUCTURE INCORPORATING MULTIPLE NITRIDE LAYERS TO IMPROVE THERMAL DISSIPATION AWAY FROM A DEVICE AND A METHOD OF FORMING THE STRUCTURE - Disclosed are embodiments of a semiconductor structure that incorporates multiple nitride layers stacked between the center region of a device and a blanket oxide layer. These nitride layers are more thermally conductive than the blanket oxide layer and, thus provide improved heat dissipation away from the device. Also disclosed are embodiments of a method of forming such a semiconductor structure in conjunction with the formation of any of the following nitride layers during standard processing of other devices: a nitride hardmask layer (OP layer), a “sacrificial” nitride layer (SMT layer), a tensile nitride layer (WN layer) and/or a compressive nitride layer (WP layer). Optionally, the embodiments also incorporate incomplete contacts that extend through the blanket oxide layer into one or more of the nitride layers without contacting the device in order to further improve heat dissipation | 06-16-2011 |
20110180862 | EMBEDDED DYNAMIC RANDOM ACCESS MEMORY DEVICE AND METHOD - Embodiments of the invention provide an integrated circuit for an embedded dynamic random access memory (eDRAM), a semiconductor-on-insulator (SOI) wafer in which such an integrated circuit may be formed, and a method of forming an eDRAM in such an SOI wafer. One embodiment of the invention provides an integrated circuit for an embedded dynamic random access memory (eDRAM) comprising: a semiconductor-on-insulator (SOI) wafer including: an n-type substrate; an insulator layer atop the n-type substrate; and an active semiconductor layer atop the insulator layer; a plurality of deep trenches, each extending from a surface of the active semiconductor layer into the n-type substrate; a dielectric liner along a surface of each of the plurality of deep trenches; and an n-type conductor within each of the plurality of deep trenches, the dielectric liner separating the n-type conductor from the n-type substrate; wherein the n-type substrate, the dielectric liner, and the n-type conductor form a buried plate, a node dielectric, and a node plate, respectively, of a cell capacitor. | 07-28-2011 |
20110195349 | CHROMELESS PHASE-SHIFTING PHOTOMASK WITH UNDERCUT RIM-SHIFTING ELEMENT - A phase-shifting photomask with a self aligned undercut rim-shifting element and methods for its manufacture are provided. One embodiment of the invention provides a method of manufacturing a phase-shifting photomask having a self aligned rim-shifting element, the method comprising: applying a patterning film to a first portion of a transparent substrate; etching the substrate to a depth to remove a second portion of the substrate not beneath the patterning film; etching the first portion of the substrate to undercut an area beneath the patterning film; and removing the patterning film, wherein the etched substrate forms a self-aligned undercut rim-shifting element. | 08-11-2011 |
20110207298 | DENSE PITCH BULK FINFET PROCESS BY SELECTIVE EPI AND ETCH - Disclosed is a method of forming a pair of transistors by epitaxially growing a pair of silicon fins on a silicon germanium fin on a bulk wafer. In one embodiment a gate conductor between the fins is isolated from a conductor layer on the bulk wafer so a front gate may be formed. In another embodiment a gate conductor between the fins contacts a conductor layer on the bulk wafer so a back gate may be formed. In yet another embodiment both of the previous structures are simultaneously formed on the same bulk wafer. The method allow the pairs of transistors to be formed with a variety of features. | 08-25-2011 |
20110210402 | METAL-GATE HIGH-K REFERENCE STRUCTURE - Disclosed are embodiments of an integrated circuit structure that incorporates at least two field effect transistors (FETs) that have the same conductivity type and essentially identical semiconductor bodies (i.e., the same semiconductor material and, thereby the same conduction and valence band energies, the same source, drain, and channel dopant profiles, the same channel widths and lengths, etc.). However, due to different gate structures with different effective work functions, at least one of which is between the conduction and valence band energies of the semiconductor bodies, these FETs have selectively different threshold voltages, which are independent of process variables. Furthermore, through the use of different high-k dielectric materials and/or metal gate conductor materials, the embodiments allow threshold voltage differences of less than 700 mV to be achieved so that the integrated circuit structure can function at power supply voltages below 1.0V. Also disclosed are method embodiments for forming the integrated circuit structure. | 09-01-2011 |
20110241220 | AIR GAPS IN A MULTILAYER INTEGRATED CIRCUIT AND METHOD OF MAKING SAME - A multilayer integrated circuit (IC) including a cross pattern of air gaps in a wiring layer and methods of making the multilayer IC are provided. The patterning of the air gaps is independent of the wiring layout. Patterns of air gaps including: parallel alternating stripes of air gaps and dielectric that are orthogonal to a uni-directional metal wiring layout; parallel alternating stripes of air gaps and dielectric that are diagonal to either a uni- or bi-directional metal wiring layout; and a checkerboard pattern of air gaps and dielectric that crosses either a uni- or bi-directional metal wiring layout are easily formed by conventional photolithography and provide a comparatively uniform reduction in parasitic capacitance between the wires and the surrounding materials, when about one-half of a total length of the metal wiring layout is disposed within the air gaps. | 10-06-2011 |
20110278649 | NON-UNIFORM GATE DIELECTRIC CHARGE FOR PIXEL SENSOR CELLS AND METHODS OF MANUFACTURING - A non-uniform gate dielectric charge for pixel sensor cells, e.g., CMOS optical imagers, and methods of manufacturing are provided. The method includes forming a gate dielectric on a substrate. The substrate includes a source/drain region and a photo cell collector region. The method further includes forming a non-uniform fixed charge distribution in the gate dielectric. The method further includes forming a gate structure on the gate dielectric. | 11-17-2011 |
20110279399 | INTERFACE DEVICE WITH INTEGRATED SOLAR CELL(S) FOR POWER COLLECTION - Disclosed herein are embodiments of an interface device (e.g., a display, touchpad, touchscreen display, etc.) with integrated power collection functions. In one embodiment, a solar cell or solar cell array can be located within a substrate at a first surface and an array of interface elements can also be located within the substrate at the first surface such that portions of the solar cell(s) laterally surround the individual interface elements or groups thereof. In another embodiment, a solar cell or solar cell array can be located within the substrate at a first surface and an array of interface elements can be located within the substrate at a second surface opposite the first surface (i.e., opposite the solar cell or solar cell array). In yet another embodiment, an array of diodes, which can function as either solar cells or sensing elements, can be within a substrate at a first surface and can be wired to allow for selective operation in either a power collection mode or sensing mode. | 11-17-2011 |
20110316084 | FET WITH REPLACEMENT GATE STRUCTURE AND METHOD OF FABRICATING THE SAME - A MUGFET and method of manufacturing a MUGFET is shown. The method of manufacturing the MUGFET includes forming temporary spacer gates about a plurality of active regions and depositing a dielectric material over the temporary spacer gates, including between the plurality of active regions. The method further includes etching portions of the dielectric material to expose the temporary spacer gates and removing the temporary spacer gates, leaving a space between the active regions and a remaining portion of the dielectric material. The method additionally includes filling the space between the active regions and above the remaining portion of the dielectric material with a gate material. | 12-29-2011 |
20120018812 | METHOD AND STRUCTURE FOR BALANCING POWER AND PERFORMANCE USING FLUORINE AND NITROGEN DOPED SUBSTRATES - Methods and systems evaluate an integrated circuit design for power consumption balance and performance balance, using a computerized device. Based on this process of evaluating the integrated circuit, the methods and systems can identify first sets of integrated circuit transistor structures within the integrated circuit design that need reduced power leakage and second sets of integrated circuit transistor structures that need higher performance to achieve the desired power consumption balance and performance balance. With this, the methods and systems alter the integrated circuit design to include implantation of a first dopant into a substrate before a gate insulator formation for the first sets of integrated circuit transistor structures; and alter the integrated circuit design to include implantation of a second dopant into the substrate before a gate insulator formation for the second sets of integrated circuit transistor structures. The method and system then output the altered integrated circuit design from the computerized device and/or manufactures the device according to the altered integrated circuit design. | 01-26-2012 |
20120056264 | METHOD FOR FORMING AND STRUCTURE OF A RECESSED SOURCE/DRAIN STRAP FOR A MUGFET - A method and semiconductor structure includes an insulator layer on a substrate, a plurality of parallel fins above the insulator layer, relative to a bottom of the structure. Each of the fins comprises a central semiconductor portion and conductive end portions. At least one conductive strap may be positioned within the insulator layer below the fins, relative to the bottom of the structure. The conductive strap can be perpendicular to the fins and contact the fins. The conductive strap further includes recessed portions disposed within the insulator layer, below the plurality of fins, relative to the bottom of the structure, and between each of the plurality of fins, and projected portions disposed above the insulator layer, collinear with each of the plurality of fins, relative to the bottom of the structure. The conductive strap is disposed in at least one of a source and a drain region of the semiconductor structure. A gate insulator contacts and covers the central semiconductor portion of the fins, and a gate conductor covers and contacts the gate insulator. | 03-08-2012 |
20120068233 | TRANSISTORS HAVING STRESSED CHANNEL REGIONS AND METHODS OF FORMING TRANSISTORS HAVING STRESSED CHANNEL REGIONS - A method of forming a field effect transistor and a field effect transistor. The method includes (a) forming gate stack on a silicon layer of a substrate; (b) forming two or more SiGe filled trenches in the silicon layer on at least one side of the gate stack, adjacent pairs of the two or more SiGe filled trenches separated by respective silicon regions of the silicon layer; and (c) forming source/drains in the silicon layer on opposite sides of the gate stack, the source/drains abutting a channel region of the silicon layer under the gate stack. | 03-22-2012 |
20120080732 | ISOLATION STRUCTURES FOR GLOBAL SHUTTER IMAGER PIXEL, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - Pixel sensor cells, e.g., CMOS optical imagers, methods of manufacturing and design structures are provided with isolation structures that prevent carrier drift to diffusion regions. The pixel sensor cell includes a photosensitive region and a gate adjacent to the photosensitive region. The pixel sensor cell further includes a diffusion region adjacent to the gate. The pixel sensor cell further includes an isolation region located below a channel region of the gate and about the photosensitive region, which prevents electrons collected in the photosensitive region to drift to the diffusion region. | 04-05-2012 |
20120086055 | DEVICES WITH GATE-TO-GATE ISOLATION STRUCTURES AND METHODS OF MANUFACTURE - Devices having gate-to-gate isolation structures and methods of manufacture are provided. The method includes forming a plurality of trenches in a pad film to form raised portions. The method further includes depositing a hard mask in the trenches and over the upper pad film. The method further includes forming a plurality of fins including the raised portions and a second plurality of fins including the hard mask deposited in the trenches, each of which are separated by a deep trench. The method further includes removing the hard mask on the plurality of fins including the raised portions and the second plurality of fins resulting in a dual height fin array. The method further includes forming gate electrodes within each deep trench between each fin of the dual height fin array, burying the second plurality of fins and abutting sides of the plurality of fins including the raised portions. The plurality of fins including the raised portions electrically and physically isolate adjacent gate electrode of the gate electrodes. | 04-12-2012 |
20120086078 | DEVICES WITH GATE-TO-GATE ISOLATION STRUCTURES AND METHODS OF MANUFACTURE - Devices having gate-to-gate isolation structures and methods of manufacture are provided. The method includes forming a plurality of isolation structures in pad films and an underlying substrate. The method further includes forming a plurality of fins including the isolation structures and a second plurality of fins including the two pad films and a portion of the underlying substrate, each of which are separated by a trench. The method further includes removing portions of the second plurality of fins resulting in a height lower than a height of the plurality of fins including the isolation structures. The method further includes forming gate electrodes within each trench, burying the second plurality of fins and abutting sides of the plurality of fins including the isolation structures. The plurality of fins including the isolation structures electrically and physically isolate adjacent gate electrode of the gate electrodes. | 04-12-2012 |
20120086083 | DEVICES WITH GATE-TO-GATE ISOLATION STRUCTURES AND METHODS OF MANUFACTURE - Devices having gate-to-gate isolation structures and methods of manufacture are provided. The method includes forming a plurality of isolation structures in a pad film and an underlying substrate. The method further includes protecting at least one of the plurality of isolation structures in order to preserve its height. The method further includes removing portions of unprotected isolation structures such that the unprotected isolation structures are of a different height than the at least one of the plurality isolation structures. The method further includes removing the pad film and protection over the at least one of the plurality isolation structures, wherein the at least one of the plurality of isolation structures extends above the underlying substrate. The method further includes forming at least one gate electrode on the substrate, over the remaining isolation structures and abutting sides of the at least one of the plurality of isolation structures. | 04-12-2012 |
20120094465 | INTEGRATED PLANAR AND MULTIPLE GATE FETS - A multiple gate field effect transistor and a planar field effect transistor formed in the same substrate each have a top planar surface underneath each corresponding gate that are co-planar with one another and also co-planar with a top surface of a shallow trench isolation region located therebetween. The relatively older planar FET fabrication technology has added to it the relatively newer MUGFET fabrication technology without disruption to the planar fabrication technology and with relatively little added cost. | 04-19-2012 |
20120098066 | SIMULTANEOUS FORMATION OF FINFET AND MUGFET - A method and structure comprise a field effect transistor structure that includes a first rectangular fin structure position on a substrate. The first rectangular fin structure has a bottom contacting the substrate, a top opposite the bottom, and sides between the top and the bottom. The structure additionally includes a second rectangular fin structure position on the substrate. Similarly, the second rectangular fin structure also has a bottom contacting the substrate, a top opposite the bottom, and sides between the top and the bottom. The sides of the second rectangular fin structure are parallel to the sides of the first rectangular fin structure. Further, a trench insulator is positioned on the substrate and is positioned between a side of the first rectangular fin structure and a side of the second rectangular fin structure. Additionally, a gate conductor is positioned on the trench insulator, positioned over the sides and the top of the first rectangular fin structure, and positioned over the sides and the top of the second rectangular fin structure. The gate conductor runs perpendicular to the sides of the first rectangular fin structure and the sides of the second rectangular fin structure. Also, a gate insulator is positioned between the gate conductor and the first rectangular fin structure and between the gate conductor and the second rectangular fin structure. The structure further includes a first cap on the top of the first rectangular fin structure. The first cap separates the gate conductor from the first rectangular fin structure. | 04-26-2012 |
20120098068 | FORMATION OF MULTI-HEIGHT MUGFET - A method and structure comprise a field effect transistor structure that includes a first rectangular fin structure and a second rectangular fin structure, both positioned on a substrate. The sides of the second rectangular fin structure are parallel to the sides of the first rectangular fin structure. Further, a trench insulator is positioned on the substrate and positioned between a side of the first rectangular fin structure and a side of the second rectangular fin structure. A gate conductor is positioned on the trench insulator, positioned over the sides and the top of the first rectangular fin structure, and positioned over the sides and the top of the second rectangular fin structure. The gate conductor runs perpendicular to the sides of the first rectangular fin structure and the sides of the second rectangular fin structure. Also, a gate insulator is positioned between the gate conductor and the first rectangular fin structure and between the gate conductor and the second rectangular fin structure. The gate conductor is positioned adjacent to a relatively larger portion of the sides of the second rectangular fin structure and is positioned adjacent to a relatively smaller portion of the sides of the first rectangular fin structure. | 04-26-2012 |
20120100674 | SEMICONDUCTOR STRUCTURE AND METHODS OF MANUFACTURE - FinFET end-implanted-semiconductor structures and methods of manufacture are disclosed herein. The method includes forming at least one mandrel on a silicon layer of a substrate comprising an underlying insulator layer. The method further includes etching the silicon layer to form at least one silicon island under the at least one mandrel. The method further includes ion-implanting sidewalls of the at least one silicon island to form doped regions on the sidewalls. The method further includes forming a dielectric layer on the substrate, a top surface of which is planarized to be coplanar with a top surface of the at least one mandrel. The method further includes removing the at least one mandrel to form an opening in the dielectric layer. The method further includes etching the at least one silicon island to form at least one fin island having doped source and drain regions. | 04-26-2012 |
20120100685 | LOCALIZED IMPLANT INTO ACTIVE REGION FOR ENHANCED STRESS - Methods for enhancing strain in an integrated circuit are provided. Embodiments of the invention include using a localized implant into an active region prior to a gate etch. In another embodiment, source/drain regions adjacent to the gates are recessed to allow the strain to expand to full potential. New source/drain regions are allowed to grow back to maximize stress in the active region. | 04-26-2012 |
20120104538 | DAMASCENE METHOD OF FORMING A SEMICONDUCTOR STRUCTURE AND A SEMICONDUCTOR STRUCTURE WITH MULTIPLE FIN-SHAPED CHANNEL REGIONS HAVING DIFFERENT WIDTHS - Disclosed is a damascene method for forming a semiconductor structure and the resulting semiconductor structure having multiple fin-shaped channel regions with different widths. In the method, fin-shaped channel regions are etched using differently configured isolating caps as masks to define the different widths. For example, a wide width isolating cap can comprise a dielectric body positioned laterally between dielectric spacers and can be used as a mask to define a relatively wide width channel region; a medium width isolating cap can comprise a dielectric body alone and can be used as a mask to define a medium width channel region and/or a narrow width isolating cap can comprise a dielectric spacer alone and can be used as a mask to define a relatively narrow width channel region. These multiple fin-shaped channel regions with different widths can be incorporated into either multiple multi-gate field effect transistors (MUGFETs) or a single MUGFET. | 05-03-2012 |
20120112206 | ASYMMETRIC HETERO-STRUCTURE FET AND METHOD OF MANUFACTURE - An asymmetric hetero-structure FET and method of manufacture is provided. The structure includes a semiconductor substrate and an epitaxially grown semiconductor layer on the semiconductor substrate. The epitaxially grown semiconductor layer includes an alloy having a band structure and thickness that confines inversion carriers in a channel region, and a thicker portion extending deeper into the semiconductor structure at a doped edge to avoid confinement of the inversion carriers at the doped edge. | 05-10-2012 |
20120112284 | STRAINED SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING STRAINED SEMICONDUCTOR DEVICES - A structure and method of fabricating the structure. The structure includes a first region of a semiconductor substrate separated from a second region of the semiconductor substrate by trench isolation formed in the substrate; a first stressed layer over the first region; a second stressed layer over second region; the first stressed layer and second stressed layer separated by a gap; and a passivation layer on the first and second stressed layers, the passivation layer extending over and sealing the gap. | 05-10-2012 |
20120112287 | GATE-TO-GATE RECESSED STRAP AND METHODS OF MANUFACTURE OF SAME - A structure and methods of making the structure. The structure includes: first and a second semiconductor regions in a semiconductor substrate and separated by a region of trench isolation in the substrate; a first gate electrode extending over the first semiconductor region and the region of the trench isolation; a second gate electrode extending over the second silicon region and the region of the trench isolation; a trench in the trench isolation; and a strap in the trench connecting the first and second gate electrodes. | 05-10-2012 |
20120119284 | SEMICONDUCTOR STRUCTURES AND METHODS OF MANUFACTURE - Semiconductor structures and methods of manufacture semiconductors are provided which relate to transistors. The method of forming a transistor includes thermally annealing a selectively patterned dopant material formed on a high-k dielectric material to form a high charge density dielectric layer from the high-k dielectric material. The high charge density dielectric layer is formed with thermal annealing-induced electric dipoles at locations corresponding to the selectively patterned dopant material. | 05-17-2012 |
20120119296 | TRENCH-GENERATED TRANSISTOR STRUCTURES, DEVICE STRUCTURES, AND DESIGN STRUCTURES - Trench-generated transistor structures, design structures for a trench-generated transistor, and other trench-generated device structures. The source and drain of the transistor are defined by doped regions in the semiconductor material of the handle substrate of a semiconductor-on-insulator (SOI) wafer. The gate electrode may be defined from the semiconductor layer of the SOI wafer, which is separated from the handle wafer by an insulating layer. Alternatively, the gate electrode may be defined as a conventional gate stack on a shallow trench isolation region in the semiconductor layer or as a conventional gate stack in one of the BEOL interconnect levels. | 05-17-2012 |
20120125421 | LOW COST SOLAR CELL MANUFACTURE METHOD EMPLOYING A REUSABLE SUBSTRATE - A reusable substrate and method for forming single crystal silicon solar cells are described. A method of forming a photovoltaic cell includes forming an intermediate layer on a monocrystalline silicon substrate, forming a monocrystalline silicon layer on the intermediate layer, and forming electrical features in the monocrystalline silicon layer. The method further includes forming openings in the monocrystalline silicon layer, and detaching the monocrystalline silicon layer from the substrate by selectively etching the intermediate layer through the openings. | 05-24-2012 |
20120126336 | Isolation FET for Integrated Circuit - An integrated circuit (IC) includes an active region; a pair of active field effect transistors (FETs) in the active region; and an isolation FET located between the pair of active FETs in the active region, the isolation FET configured to provide electrical isolation between the pair of active FETs, wherein the isolation FET has at least one different physical parameter or electrical parameter from the pair of active FETs. | 05-24-2012 |
20120126337 | SOURCE/DRAIN-TO-SOURCE/DRAIN RECESSED STRAP AND METHODS OF MANUFACTURE OF SAME - A structure and a method of making the structure. The structure includes first and second semiconductor regions in a semiconductor substrate and separated by a region of trench isolation in the semiconductor substrate; a first gate electrode extending over the first semiconductor region; a second gate electrode extending over the second semiconductor region; a trench contained in the region of trench isolation and between and abutting the first and second semiconductor regions; and an electrically conductive strap in the trench, the strap electrically connecting the first and second semiconductor regions. | 05-24-2012 |
20120133000 | FIELD EFFECT TRANSISTOR WITH CHANNEL REGION EDGE AND CENTER PORTIONS HAVING DIFFERENT BAND STRUCTURES FOR SUPPRESSED CORNER LEAKAGE - Disclosed are embodiments of field effect transistors (FETs) having suppressed sub-threshold corner leakage, as a function of channel material band-edge modulation. Specifically, the FET channel region is formed with different materials at the edges as compared to the center. Different materials with different band structures and specific locations of those materials are selected in order to effectively raise the threshold voltage (Vt) at the edges of the channel region relative to the Vt at the center of the channel region and, thereby to suppress of sub-threshold corner leakage. Also disclosed are design structures for such FETs and method embodiments for forming such FETs. | 05-31-2012 |
20120145650 | NANO-FILTER AND METHOD OF FORMING SAME, AND METHOD OF FILTRATION - The disclosure relates generally to nano-filters and methods of forming same, and methods of filtration. The nano-filter includes a substrate and at least one nanowire structure located between an inlet and an outlet. The nanowire structure may include a plurality of vertically stacked horizontal nanowires. | 06-14-2012 |
20120146145 | SEMICONDUCTOR STRUCTURE AND METHODS OF MANUFACTURE - FinFET end-implanted-semiconductor structures and methods of manufacture are disclosed herein. The method includes forming at least one mandrel on a silicon layer of a substrate comprising an underlying insulator layer. The method further includes etching the silicon layer to form at least one silicon island under the at least one mandrel. The method further includes ion-implanting sidewalls of the at least one silicon island to form doped regions on the sidewalls. The method further includes forming a dielectric layer on the substrate, a top surface of which is planarized to be coplanar with a top surface of the at least one mandrel. The method further includes removing the at least one mandrel to form an opening in the dielectric layer. The method further includes etching the at least one silicon island to form at least one fin island having doped source and drain regions. | 06-14-2012 |
20120146146 | PARTIALLY DEPELETED (DP) SEMICONDUCTOR-ON-INSULATOR (SOI) FIELD EFFECT TRANSISTOR (FET) STRUCTURE WITH A GATE-TO-BODY TUNNEL CURRENT REGION FOR THRESHOLD VOLTAGE (Vt) LOWERING AND METHOD OF FORMING THE STRUCTURE - Disclosed are embodiments of a field effect transistor with a gate-to-body tunnel current region (GTBTCR) and a method. In one embodiment, a gate, having adjacent sections with different conductivity types, traverses the center portion of a semiconductor layer to create, within the center portion, a channel region and a GTBTCR below the adjacent sections having the different conductivity types, respectively. In another embodiment, a semiconductor layer has a center portion with a channel region and a GTBTCR. The GTBTCR comprises: a first implant region adjacent to and doped with a higher concentration of the same first conductivity type dopant as the channel region; a second implant region, having a second conductivity type, adjacent to the first implant region; and an enhanced generation and recombination region between the implant regions. A gate with the second conductivity type traverses the center portion. | 06-14-2012 |
20120146187 | METHODS AND STRUCTURES FOR INCREASED THERMAL DISSIPATION OF THIN FILM RESISTORS - A method of forming a semiconductor structure includes forming at least one trench in an insulator layer formed on a substrate. A distance between a bottom edge of the at least one trench and a top surface of a substrate is shorter than a distance between an uppermost surface of the insulator layer and the top surface of the substrate. The method also includes: forming a resistor on the insulator layer and extending into the at least one trench; forming a first contact in contact with the resistor; and forming a second contact in contact with the resistor such that current is configured to flow from the first contact to the second contact through a central portion of the resistor. | 06-14-2012 |
20120153353 | BURIED OXIDATION FOR ENHANCED MOBILITY - A method patterns at least one pair of openings through a protective layer and into a substrate. The openings are positioned on opposite sides of a channel region of the substrate. The method forms sidewall spacers along the sidewalls of the openings and removes additional substrate material from the bottom of the openings. The material removal process creates an extended bottom within the openings. The method forms a first strain producing material within the extended bottom of the openings. The method removes the sidewall spacers and forms a second material within the remainder of the openings between the first strain producing material and the top of the openings. The method removes the protective layer and forms a gate dielectric and a gate conductor on the horizontal surface on the substrate adjacent the channel region. The second material comprises source and drain regions. | 06-21-2012 |
20120153431 | INTEGRATED CIRCUIT AND A METHOD USING INTEGRATED PROCESS STEPS TO FORM DEEP TRENCH ISOLATION STRUCTURES AND DEEP TRENCH CAPACITOR STRUCTURES FOR THE INTEGRATED CIRCUIT - Disclosed is an integrated circuit having at least one deep trench isolation structure and a deep trench capacitor. A method of forming the integrated circuit incorporates a single etch process to simultaneously form first trench(s) and a second trenches for the deep trench isolation structure(s) and a deep trench capacitor, respectively. Following formation of a buried capacitor plate adjacent to the lower portion of the second trench, the trenches are lined with a conformal insulator layer and filled with a conductive material. Thus, for the deep trench capacitor, the conformal insulator layer functions as the capacitor dielectric and the conductive material as a capacitor plate in addition to the buried capacitor plate. A shallow trench isolation (STI) structure formed in the substrate extending across the top of the first trench(es) encapsulates the conductive material therein, thereby creating the deep trench isolation structure(s). | 06-21-2012 |
20120156838 | MULTI-GATE NON-PLANAR FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD OF FORMING THE STRUCTURE USING A DOPANT IMPLANT PROCESS TO TUNE DEVICE DRIVE CURRENT - Disclosed are embodiments of a semiconductor structure that includes one or more multi-gate field effect transistors (MUGFETs), each MUGFET having one or more semiconductor fins. In the embodiments, dopant implant region is incorporated into the upper portion of the channel region of a semiconductor fin in order to selectively modify (i.e., decrease or increase) the threshold voltage within that upper portion relative to the threshold voltage in the lower portion and, thereby to selectively modify (i.e., decrease or increase) device drive current. In the case of a multiple semiconductor fins, the use of implant regions, the dopant conductivity type in the implant regions and/or the sizes of the implant regions can be varied from fin to fin within a multi-fin MUGFET or between different single and/or multi-fin MUGFETs so that individual device drive current can be optimized. Also disclosed herein are embodiments of a method of forming the semiconductor structure. | 06-21-2012 |
20120168832 | ASYMMETRIC FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD - Disclosed are embodiments of an asymmetric field effect transistor structure and a method of forming the structure in which both series resistance in the source region (R | 07-05-2012 |
20120168866 | STRUCTURE, METHOD AND SYSTEM FOR COMPLEMENTARY STRAIN FILL FOR INTEGRATED CIRCUIT CHIPS - A structure, method and system for complementary strain fill for integrated circuit chips. The structure includes a first region of an integrated circuit having multiplicity of n-channel and p-channel field effect transistors (FETs); a first stressed layer over n-channel field effect transistors (NFETs) of the first region, the first stressed layer of a first stress type; a second stressed layer over p-channel field effect transistors (PFETs) of the first region, the second stressed layer of a second stress type, the second stress type opposite from the first stress type; and a second region of the integrated circuit, the second region not containing FETs, the second region containing first sub-regions of the first stressed layer and second sub-regions of the second stressed layer. | 07-05-2012 |
20120168873 | TRANSMISSION GATES WITH ASYMMETRIC FIELD EFFECT TRANSISTORS - Transmission gates, methods of fabricating transmission gates, and design structures for a transmission gate. The transmission gate includes an n-channel field effect transistor characterized by terminals that are asymmetrically doped and a p-channel field effect transistor characterized by terminals that are asymmetrically doped. | 07-05-2012 |
20120181588 | PIXEL SENSOR CELLS WITH A SPLIT-DIELECTRIC TRANSFER GATE - Pixel sensor cells, methods of fabricating pixel sensor cells, and design structures for a pixel sensor cell. A transistor in the pixel sensor cell has a gate structure that includes a gate dielectric with a thick region and a thin region. A gate electrode of the gate structure is formed on the thick region of the gate dielectric and the thin region of the gate dielectric. The thick region of the gate dielectric and the thin region of the gate dielectric provide the transistor with an asymmetric threshold voltage. | 07-19-2012 |
20120183889 | MULTIPLE LITHOGRAPHIC SYSTEM MASK SHAPE SLEEVING - A mask fabrication method can include receiving a mask design, sending first exposure parameters to a first exposure machine, sending second exposure parameters to a second exposure machine, sending a first exposure generation command to the first machine based on the first exposure parameters and sending a second exposure generation command to the second machine based on the second exposure parameters. | 07-19-2012 |
20120188008 | CIRCUIT WITH STACKED STRUCTURE AND USE THEREOF - A circuit has a stacked structure having at least one symmetric FET at a bottom of the stack. More particularly, the circuit has a stacked structure which includes an asymmetric FET and a symmetric FET. The symmetric FET is placed at the bottom of the stacked structure closer to ground than the asymmetric FET. | 07-26-2012 |
20120190156 | RECESSED GATE CHANNEL WITH LOW Vt CORNER - A recessed gate FET device includes a substrate having an upper and lower portions, the lower portion having a reduced concentration of dopant material than the upper portion; a trench-type gate electrode defining a surrounding channel region and having a gate dielectric material layer lining and including a conductive material having a top surface recessed to reduce overlap capacitance with respect to the source and drain diffusion regions formed at an upper substrate surface at either side of the gate electrode. There is optionally formed halo implants at either side of and abutting the gate electrode, each halo implants extending below the source and drain diffusions into the channel region. Additionally, highly doped source and drain extension regions are formed that provide a low resistance path from the source and drain diffusion regions to the channel region. | 07-26-2012 |
20120208328 | BODY CONTACTED HYBRID SURFACE SEMICONDUCTOR-ON-INSULATOR DEVICES - A portion of a top semiconductor layer of a semiconductor-on-insulator (SOI) substrate is patterned into a semiconductor fin having substantially vertical sidewalls. A portion of a body region of the semiconductor fin is exposed on a top surface of the semiconductor fin between two source regions having a doping of a conductivity type opposite to the body region of the semiconductor fin. A metal semiconductor alloy portion is formed directly on the two source regions and the top surface of the exposed body region between the two source regions. The doping concentration of the exposed top portion of the body region may be increased by ion implantation to provide a low-resistance contact to the body region, or a recombination region having a high-density of crystalline defects may be formed. A hybrid surface semiconductor-on-insulator (HSSOI) metal-oxide-semiconductor-field-effect-transistor (MOSFET) thus formed has a body region that is electrically tied to the source region. | 08-16-2012 |
20120211854 | PIXEL SENSOR CELL WITH A DUAL WORK FUNCTION GATE ELECTODE - Pixel sensor cells, methods of fabricating pixel sensor cells, and design structures for a pixel sensor cell. The pixel sensor cell has a gate structure that includes a gate dielectric and a gate electrode on the gate dielectric. The gate electrode includes a layer with first and second sections that have a juxtaposed relationship on the gate dielectric. The second section of the gate electrode is comprised of a conductor, such as doped polysilicon or a metal. The first section of the gate electrode is comprised of a metal having a higher work function than the conductor comprising the second section so that the gate structure has an asymmetric threshold voltage. | 08-23-2012 |
20120228709 | INTEGRATED CIRCUIT STRUCTURE INCORPORATING ONE OR MORE ASYMMETRIC FIELD EFFECT TRANSISTORS AS POWER GATES FOR AN ELECTRONIC CIRCUIT WITH STACKED SYMMETRIC FIELD EFFECT TRANSISTORS - Disclosed is an integrated circuit having an asymmetric FET as a power gate for an electronic circuit, which has at least two stacked symmetric field effect transistors. The asymmetric FET has an asymmetric halo configuration (i.e., a single source-side halo or a source-side halo with a higher dopant concentration than a drain-side halo) and an asymmetric source/drain extension configuration (i.e., the source extension can be overlapped to a greater extent by the gate structure than the drain extension and/or the source extension can have a higher dopant concentration than the drain extension). As a result, the asymmetric FET has a low off current. In operation, the asymmetric FET is turned off when the electronic circuit is placed in a standby state and, due to the low off current (Ioff), effectively reduces standby leakage current from the electronic circuit. Additionally, avoiding the use of stacked asymmetric field effect transistors within the electronic circuit itself prevents performance degradation due to reduced linear drain current (Idlin). | 09-13-2012 |
20120235216 | DAMASCENE METAL GATE AND SHIELD STRUCTURE, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - Semiconductor structures with damascene metal gates and pixel sensor cell shields, methods of manufacture and design structures are provided. The method includes forming a dielectric layer over a dummy gate structure. The method further includes forming one or more recesses in the dielectric layer. The method further includes removing the dummy gate structure in the dielectric layer to form a trench. The method further includes forming metal in the trench and the one more recesses in the dielectric layer to form a damascene metal gate structure in the trench and one or more metal components in the one or more recesses. | 09-20-2012 |
20120241857 | DUAL STRESS DEVICE AND METHOD - A semiconductor device including semiconductor material having a bend and a trench feature formed at the bend, and a gate structure at least partially disposed in the trench feature. A method of fabricating a semiconductor structure including forming a semiconductor material with a trench feature over a layer, forming a gate structure at least partially in the trench feature, and bending the semiconductor material such that stress is induced in the semiconductor material in an inversion channel region of the gate structure. | 09-27-2012 |
20120267726 | DUAL METAL GATE CORNER - In view of the foregoing, disclosed herein are embodiments of an improved field effect transistor (FET) structure and a method of forming the structure. The FET structure embodiments each incorporate a unique gate structure. Specifically, this gate structure has a first section above a center portion of the FET channel region and second sections above the channel width edges (i.e., above the interfaces between the channel region and adjacent isolation regions). The first and second sections differ (i.e., they have different gate dielectric layers and/or different gate conductor layers) such that they have different effective work functions (i.e., a first and second effective work-function, respectively). The different effective work functions are selected to ensure that the threshold voltage at the channel width edges is elevated. | 10-25-2012 |
20120273895 | DAMASCENE METHOD OF FORMING A SEMICONDUCTOR STRUCTURE AND A SEMICONDUCTOR STRUCTURE WITH MULTIPLE FIN-SHAPED CHANNEL REGIONS HAVING DIFFERENT WIDTHS - Disclosed is a damascene method for forming a semiconductor structure and the resulting semiconductor structure having multiple fin-shaped channel regions with different widths. In the method, fin-shaped channel regions are etched using differently configured isolating caps as masks to define the different widths. For example, a wide width isolating cap can comprise a dielectric body positioned laterally between dielectric spacers and can be used as a mask to define a relatively wide width channel region; a medium width isolating cap can comprise a dielectric body alone and can be used as a mask to define a medium width channel region and/or a narrow width isolating cap can comprise a dielectric spacer alone and can be used as a mask to define a relatively narrow width channel region. These multiple fin-shaped channel regions with different widths can be incorporated into either multiple multi-gate field effect transistors (MUGFETs) or a single MUGFET. | 11-01-2012 |
20120292704 | BARRIER TRENCH STRUCTURE AND METHODS OF MANUFACTURE - A method includes forming at least one shallow trench isolation structure in a substrate to isolate adjacent different type devices. The method further includes forming a barrier trench structure in the substrate to isolate diffusions of adjacent same type devices. The method further includes spanning the barrier trench structure with material to connect the diffusions of the adjacent same type device, on a same level as the adjacent same type devices. | 11-22-2012 |
20120301990 | PIXEL SENSOR CELL WITH A DUAL WORK FUNCTION GATE ELECTODE - Pixel sensor cells, methods of fabricating pixel sensor cells, and design structures for a pixel sensor cell. The pixel sensor cell has a gate structure that includes a gate dielectric and a gate electrode on the gate dielectric. The gate electrode includes a layer with first and second sections that have a juxtaposed relationship on the gate dielectric. The second section of the gate electrode is comprised of a conductor, such as doped polysilicon or a metal. The first section of the gate electrode is comprised of a metal having a higher work function than the conductor comprising the second section so that the gate structure has an asymmetric threshold voltage. | 11-29-2012 |
20120306016 | DEVICES WITH GATE-TO-GATE ISOLATION STRUCTURES AND METHODS OF MANUFACTURE - A method includes forming a plurality of trenches in a pad film to form raised portions, and depositing a hard mask in the trenches and over the upper pad film. The method includes forming a plurality of fins including the raised portions and a second plurality of fins including the hard mask deposited in the trenches, each of which are separated by a deep trench. The method includes removing the hard mask on the plurality of fins including the raised portions and the second plurality of fins resulting in a dual height fin array. The method includes forming gate electrodes within each deep trench between each fin of the dual height fin array, burying the second plurality of fins and abutting sides of the plurality of fins including the raised portions. The plurality of fins including the raised portions electrically and physically isolate adjacent gate electrode of the gate electrodes. | 12-06-2012 |
20130001693 | BAND EDGE ENGINEERED Vt OFFSET DEVICE - Band edge engineered Vt offset devices, design structures for band edge engineered Vt offset devices and methods of fabricating such structures is provided herein. The structure includes a first FET having a channel of a first compound semiconductor of first atomic proportions resulting in a first band structure and a first type. The structure further includes a second FET having a channel of a second compound semiconductor of second atomic proportions resulting in a second band structure and a first type. The first compound semiconductor is different from the second compound semiconductor such that the first FET has a first band structure different from second band structure, giving rise to a threshold voltage different from that of the second FET. | 01-03-2013 |
20130009255 | FIELD EFFECT TRANSISTOR WITH SUPPRESSED CORNER LEAKAGE THROUGH CHANNEL MATERIAL BAND-EDGE MODULATION, DESIGN STRUCTURE AND METHOD - Disclosed are embodiments of field effect transistors (FETs) having suppressed sub-threshold corner leakage, as a function of channel material band-edge modulation. Specifically, the FET channel region is formed with different materials at the edges as compared to the center. Different materials with different band structures and specific locations of those materials are selected in order to effectively raise the threshold voltage (Vt) at the edges of the channel region relative to the Vt at the center of the channel region and, thereby to suppress of sub-threshold corner leakage. Also disclosed are design structures for such FETs and method embodiments for forming such FETs. | 01-10-2013 |
20130015515 | FET eDRAM TRENCH SELF-ALIGNED TO BURIED STRAPAANM Anderson; Brent A.AACI JerichoAAST VTAACO USAAGP Anderson; Brent A. Jericho VT USAANM Barth, JR.; John E.AACI WillistonAAST VTAACO USAAGP Barth, JR.; John E. Williston VT USAANM Nowak; Edward J.AACI Essex JunctionAAST VTAACO USAAGP Nowak; Edward J. Essex Junction VT USAANM Rankin; Jed H.AACI RichmondAAST VTAACO USAAGP Rankin; Jed H. Richmond VT US - A structure and method of making a field effect transistor (FET) embedded dynamic random access memory (eDRAM) cell array, which includes: a buried silicon strap extending into a buried oxide (BOX) layer of a silicon-on-insulator (SOI) substrate; a recessed trench capacitor extending down into the substrate layer of the SOI substrate; a lateral surface of a conductive top plate formed on the recessed trench capacitor that contacts a first lateral surface of the buried silicon strap; a dielectric cap disposed above the conductive top plate; a first FET formed from the silicon layer of the SOI substrate, in which a source/drain region of the first FET contacts a second lateral surface of the buried silicon strap; and a passing wordline disposed on a portion of the dielectric cap opposite to and separate from the buried silicon strap and connected to a gate of a second FET in an adjacent row of the FET eDRAM cell array. | 01-17-2013 |
20130043412 | SERIAL IRRADIATION OF A SUBSTRATE BY MULTIPLE RADIATION SOURCES - A system for configuring and utilizing J electromagnetic radiation sources (J≧2) to serially irradiate a substrate. Each source has a different function of wavelength and angular distribution of emitted radiation. The substrate includes a base layer and I stacks (I≧2; J≦I) thereon. P | 02-21-2013 |
20130043535 | ISOLATION REGION FABRICATION FOR REPLACEMENT GATE PROCESSING - A method for isolation region fabrication for replacement gate integrated circuit (IC) processing includes forming a plurality of dummy gates on a substrate; forming a block mask over the plurality of dummy gates, such that the block mask selectively exposes a dummy gate of the plurality of dummy gates; removing the exposed dummy gate to form an isolation region recess corresponding to the removed dummy gate; filling the isolation region recess with an insulating material to form an isolation region; removing the block mask to expose a remaining plurality of dummy gates; and performing replacement gate processing on the remaining plurality of dummy gates to form a plurality of active devices, wherein at least two of the plurality of active devices are electrically isolated from each other by the isolation region. | 02-21-2013 |
20130056805 | TRANSISTORS HAVING STRESSED CHANNEL REGIONS AND METHODS OF FORMING TRANSISTORS HAVING STRESSED CHANNEL REGIONS - A method of forming a field effect transistor and a field effect transistor. The method includes (a) forming gate stack on a silicon layer of a substrate; (b) forming two or more SiGe filled trenches in the silicon layer on at least one side of the gate stack, adjacent pairs of the two or more SiGe filled trenches separated by respective silicon regions of the silicon layer; and (c) forming source/drains in the silicon layer on opposite sides of the gate stack, the source/drains abutting a channel region of the silicon layer under the gate stack. | 03-07-2013 |
20130062687 | SRAM CELL HAVING RECESSED STORAGE NODE CONNECTIONS AND METHOD OF FABRICATING SAME - An SRAM cell and a method of forming an SRAM cell. The SRAM cell includes a first pass gate field effect transistor (FET) and a first pull-down FET sharing a first common source/drain (S/D) and a first pull-up FET having first and second S/Ds; a second pass gate FET and a second pull-down FET sharing a second common S/D and a second pull-up FET having first and second S/Ds; a first gate electrode common to the first pull-down FET and the first pull-up FET and physically and electrically contacting the first S/D of the first pull-up FET; a second gate electrode of the first pull-up FET; a third gate electrode common to the second pull-down FET and the second pull-up FET and physically and electrically contacting the first S/D of the second pull-up FET; and a fourth gate electrode of the first pull-up FET. | 03-14-2013 |
20130065370 | Method for Fabricating Field Effect Transistor Devices with High-Aspect Ratio Mask - A method for forming feature on a substrate includes forming at least one layer of a feature material on a substrate, patterning a photolithographic resist material on the at least one layer of the feature material, removing portions of the feature material to define a feature, depositing a masking material layer over the resist material and exposed regions of the substrate, modifying a portion of the substrate, and removing the masking material layer and the resist material. | 03-14-2013 |
20130089815 | CHROMELESS PHASE-SHIFTING PHOTOMASK WITH UNDERCUT RIM-SHIFTING ELEMENT - A phase-shifting photomask with a self aligned undercut rim-shifting element and methods for its manufacture are provided. One embodiment of the invention provides a method of manufacturing a phase-shifting photomask having a self aligned rim-shifting element, the method comprising: applying a patterning film to a first portion of a transparent substrate; etching the substrate to a depth to remove a second portion of the substrate not beneath the patterning film; etching the first portion of the substrate to undercut an area beneath the patterning film; and removing the patterning film, wherein the etched substrate forms a self-aligned undercut rim-shifting element. | 04-11-2013 |
20130113050 | BLANKET SHORT CHANNEL ROLL-UP IMPLANT WITH NON-ANGLED LONG CHANNEL COMPENSATING IMPLANT THROUGH PATTERNED OPENING - A method that forms a structure implants a well implant into a substrate, patterns a mask on the substrate (to have at least one opening that exposes a channel region of the substrate) and forms a conformal dielectric layer on the mask and to line the opening. The conformal dielectric layer covers the channel region of the substrate. The method also forms a conformal gate metal layer on the conformal dielectric layer, implants a compensating implant through the conformal gate metal layer and the conformal dielectric layer into the channel region of the substrate, and forms a gate conductor on the conformal gate metal layer. Additionally, the method removes the mask to leave a gate stack on the substrate, forms sidewall spacers on the gate stack, and then forms source/drain regions in the substrate partially below the sidewall spacers. | 05-09-2013 |
20130119447 | NON-UNIFORM GATE DIELECTRIC CHARGE FOR PIXEL SENSOR CELLS AND METHODS OF MANUFACTURING - A non-uniform gate dielectric charge for pixel sensor cells, e.g., CMOS optical imagers, and methods of manufacturing are provided. The method includes forming a gate dielectric on a substrate. The substrate includes a source/drain region and a photo cell collector region. The method further includes forming a non-uniform fixed charge distribution in the gate dielectric. The method further includes forming a gate structure on the gate dielectric. | 05-16-2013 |
20130122668 | METHOD FOR FORMING AND STRUCTURE OF A RECESSED SOURCE/DRAIN STRAP FOR A MUGFET - A method and semiconductor structure includes an insulator layer on a substrate, a plurality of parallel fins above the insulator layer. Each of the fins has a central semiconductor portion and conductive end portions. At least one conductive strap is positioned within the insulator layer below the fins. The conductive strap can be perpendicular to the fins and contact the fins. The conductive strap includes recessed portions disposed within the insulator layer, below the plurality of fins, and between each of the plurality of fins, and projected portions disposed above the insulator layer, collinear with each of the plurality of fins. The conductive strap is disposed in at least one of a source region and a drain region of the semiconductor structure. A gate insulator contacts and covers the central semiconductor portion of the fins, and a gate conductor covers and contacts the gate insulator. | 05-16-2013 |
20130132924 | METHOD, STRUCTURE AND DESIGN STRUCTURE FOR CUSTOMIZING HISTORY EFFECTS OF SOI CIRCUITS - A design structure is embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes a structure which comprises a high-leakage dielectric formed in a divot on each side of a segmented FET comprised of active silicon islands and gate electrodes thereon, and a low-leakage dielectric on the surface of the active silicon islands, adjacent the high-leakage dielectric, wherein the low-leakage dielectric has a lower leakage than the high-leakage dielectric. Also provided is a structure and method of fabricating the structure. | 05-23-2013 |
20130146139 | LOW COST SOLAR CELL MANUFACTURE METHOD EMPLOYING A REUSABLE SUBSTRATE - A reusable substrate and method for forming single crystal silicon solar cells are described. A method of forming a photovoltaic cell includes forming an intermediate layer on a monocrystalline silicon substrate, forming a monocrystalline silicon layer on the intermediate layer, and forming electrical features in the monocrystalline silicon layer. The method further includes forming openings in the monocrystalline silicon layer, and detaching the monocrystalline silicon layer from the substrate by selectively etching the intermediate layer through the openings. | 06-13-2013 |
20130154003 | ASYMMETRIC ANTI-HALO FIELD EFFECT TRANSISTOR - A method of forming an integrated circuit structure implants a first compensating implant into a substrate. The method patterns a mask on the first compensating implant in the substrate. The mask includes an opening exposing a channel location of the substrate. The method implants a second compensating implant into the channel location of the substrate. The second compensating implant is made through the opening in the mask and at an angle that is offset from perpendicular to the top surface of the substrate. The second compensating implant is positioned closer to a first side of the channel location relative to an opposite second side of the channel location and the second compensating implant comprises a material having the same doping polarity as the semiconductor channel implant. Then, the method forms a gate conductor above the channel location of the substrate in the opening of the mask. | 06-20-2013 |
20130161747 | ISOLATION REGION FABRICATION FOR REPLACEMENT GATE PROCESSING - A semiconductor structure includes a silicon-on-insulator (SOI) substrate, the SOI substrate comprising a bottom silicon layer, a buried oxide (BOX) layer, and a top silicon layer; a plurality of active devices formed on the top silicon layer; and an isolation region located between two of the active devices, wherein at least two of the plurality of active devices are electrically isolated from each other by the isolation region, and wherein the isolation region extends through the top silicon layer to the BOX layer. | 06-27-2013 |
20130161748 | STRUCTURE, METHOD AND SYSTEM FOR COMPLEMENTARY STRAIN FILL FOR INTEGRATED CIRCUIT CHIPS - A structure, method and system for complementary strain fill for integrated circuit chips. The structure includes a first region of an integrated circuit having multiplicity of n-channel and p-channel field effect transistors (FETs); a first stressed layer over n-channel field effect transistors (NFETs) of the first region, the first stressed layer of a first stress type; a second stressed layer over p-channel field effect transistors (PFETs) of the first region, the second stressed layer of a second stress type, the second stress type opposite from the first stress type; and a second region of the integrated circuit, the second region not containing FETs, the second region containing first sub-regions of the first stressed layer and second sub-regions of the second stressed layer. | 06-27-2013 |
20130164877 | ISOLATION STRUCTURES FOR GLOBAL SHUTTER IMAGER PIXEL, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - Pixel sensor cells, e.g., CMOS optical imagers, methods of manufacturing and design structures are provided with isolation structures that prevent carrier drift to diffusion regions. The pixel sensor cell includes a photosensitive region and a gate adjacent to the photosensitive region. The pixel sensor cell further includes a diffusion region adjacent to the gate. The pixel sensor cell further includes an isolation region located below a channel region of the gate and about the photosensitive region, which prevents electrons collected in the photosensitive region to drift to the diffusion region. | 06-27-2013 |
20130164910 | DEVICES WITH GATE-TO-GATE ISOLATION STRUCTURES AND METHODS OF MANUFACTURE - Devices having gate-to-gate isolation structures and methods of manufacture are provided. The method includes forming a plurality of isolation structures in pad films and an underlying substrate. The method further includes forming a plurality of fins including the isolation structures and a second plurality of fins including the two pad films and a portion of the underlying substrate, each of which are separated by a trench. The method further includes removing portions of the second plurality of fins resulting in a height lower than a height of the plurality of fins including the isolation structures. The method further includes forming gate electrodes within each trench, burying the second plurality of fins and abutting sides of the plurality of fins including the isolation structures. The plurality of fins including the isolation structures electrically and physically isolate adjacent gate electrode of the gate electrodes. | 06-27-2013 |
20130171780 | BODY CONTACTED HYBRID SURFACE SEMICONDUCTOR-ON-INSULATOR DEVICES - A portion of a top semiconductor layer of a semiconductor-on-insulator (SOI) substrate is patterned into a semiconductor fin having substantially vertical sidewalls. A portion of a body region of the semiconductor fin is exposed on a top surface of the semiconductor fin between two source regions having a doping of a conductivity type opposite to the body region of the semiconductor fin. A metal semiconductor alloy portion is formed directly on the two source regions and the top surface of the exposed body region between the two source regions. The doping concentration of the exposed top portion of the body region may be increased by ion implantation to provide a low-resistance contact to the body region, or a recombination region having a high-density of crystalline defects may be formed. A hybrid surface semiconductor-on-insulator (HSSOI) metal-oxide-semiconductor-field-effect-transistor (MOSFET) thus formed has a body region that is electrically tied to the source region. | 07-04-2013 |
20130171796 | METHODS OF FABRICATING TRENCH GENERATED DEVICE STRUCTURES - Methods for fabricating device structures, such as bipolar transistors and diodes. The method includes forming a trench extending through stacked semiconductor and insulator layers and into an underlying semiconductor substrate. The trench may be at least partially filled with a sacrificial plug containing a dopant with a conductivity type opposite to the conductivity type of the semiconductor substrate. Dopant is transported outwardly from the sacrificial plug into the semiconductor substrate surrounding the trench to define a doped region of the second conductivity type in the semiconductor substrate. A first contact is formed that extends through the semiconductor and insulator layers to a portion of the semiconductor substrate outside of the doped region. A second contact is formed that extends through the semiconductor and insulator layers to the doped region. | 07-04-2013 |
20130175651 | DAMASCENE METAL GATE AND SHIELD STRUCTURE, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - Semiconductor structures with damascene metal gates and pixel sensor cell shields, methods of manufacture and design structures are provided. The method includes forming a dielectric layer over a dummy gate structure. The method further includes forming one or more recesses in the dielectric layer. The method further includes removing the dummy gate structure in the dielectric layer to form a trench. The method further includes forming metal in the trench and the one more recesses in the dielectric layer to form a damascene metal gate structure in the trench and one or more metal components in the one or more recesses. | 07-11-2013 |
20130187243 | METHOD, STRUCTURE AND DESIGN STRUCTURE FOR CUSTOMIZING HISTORY EFFECTS OF SOI CIRCUITS - A design structure is embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes a high-leakage dielectric formed over an active region of a FET and a low-leakage dielectric formed on the active region and adjacent the high-leakage dielectric. The low-leakage dielectric has a lower leakage than the high-leakage dielectric. Also provided is a structure and method of fabricating the structure. | 07-25-2013 |
20130200454 | REPLACEMENT-GATE FINFET STRUCTURE AND PROCESS - A fin field effect transistor (FinFET) structure and method of making the FinFET including a silicon fin that includes a channel region and source/drain (S/D) regions, formed on each end of the channel region, where an entire bottom surface of the channel region contacts a top surface of a lower insulator and bottom surfaces of the S/D regions contact first portions of top surfaces of a lower silicon germanium (SiGe) layer. The FinFET structure also includes extrinsic S/D regions that contact a top surface and both side surfaces of each of the S/D regions and second portions of top surfaces of the lower SiGe layer. The FinFET structure further includes a replacement gate or gate stack that contacts a conformal dielectric, formed over a top surface and both side surfaces of the channel region. | 08-08-2013 |
20130200458 | DEVICES WITH GATE-TO-GATE ISOLATION STRUCTURES AND METHODS OF MANUFACTURE - Devices having gate-to-gate isolation structures and methods of manufacture are provided. The method includes forming a plurality of isolation structures in pad films and an underlying substrate. The method further includes forming a plurality of fins including the isolation structures and a second plurality of fins including the two pad films and a portion of the underlying substrate, each of which are separated by a trench. The method further includes removing portions of the second plurality of fins resulting in a height lower than a height of the plurality of fins including the isolation structures. The method further includes forming gate electrodes within each trench, burying the second plurality of fins and abutting sides of the plurality of fins including the isolation structures. The plurality of fins including the isolation structures electrically and physically isolate adjacent gate electrode of the gate electrodes. | 08-08-2013 |
20130217198 | LOCALIZED IMPLANT INTO ACTIVE REGION FOR ENHANCED STRESS - Methods for enhancing strain in an integrated circuit are provided. Embodiments of the invention include using a localized implant into an active region prior to a gate etch. In another embodiment, source/drain regions adjacent to the gates are recessed to allow the strain to expand to full potential. New source/drain regions are allowed to grow back to maximize stress in the active region. | 08-22-2013 |
20130230960 | STRUCTURE FABRICATION METHOD - A structure fabrication method. A provided structure includes a gate dielectric region on the substrate and a gate electrode region on the gate dielectric region. Atoms are implanted in a top portion of the gate electrode region, which expands the top portion of the gate electrode in a direction parallel to a top surface of the gate dielectric region. After the atom implantation, a conformal dielectric layer is formed on top and side walls of the gate electrode region. A dielectric spacer layer, formed on the conformal dielectric layer, is etched such that only spacer portions of the dielectric spacer layer which are under the conformal dielectric layer remain, wherein for any point of the remaining spacer portions, a straight line through that point and parallel to a reference direction intersects the conformal dielectric layer. The reference direction is perpendicular to the top surface of the gate dielectric region. | 09-05-2013 |
20130240997 | CONTACT BARS FOR MODIFYING STRESS IN SEMICONDUCTOR DEVICE AND RELATED METHOD - Solutions for forming stress optimizing contact bars and contacts are disclosed. In one aspect, a semiconductor device is disclosed including an n-type field effect transistor (NFET) having source/drain regions; a p-type field effect transistor (PFET) having source/drain regions; a stress inducing layer over both the NFET and the PFET, the stress inducing layer inducing only one of a compressive stress and a tensile stress; a contact bar extending through the stress inducing layer and coupled to at least one of the source/drain regions of a selected device of the PFET and the NFET to modify a stress induced in the selected device compared to a stress induced in the other device; and a round contact extending through the stress inducing layer and coupled to at least one of the source/drain regions of the other device of the PFET and the NFET. | 09-19-2013 |
20130270644 | REPLACEMENT GATE STRUCTURES AND METHODS OF MANUFACTURING - Gate structures and methods of manufacturing is disclosed. The method includes forming a continuous replacement gate structure within a trench formed in dielectric material. The method further includes segmenting the continuous replacement gate structure into separate replacement gate structures. The method further includes forming insulator material between the separate replacement gate structures. | 10-17-2013 |
20130285145 | FORMATION OF MULTI-HEIGHT MUGFET - A method and structure comprise a field effect transistor structure that includes a first rectangular fin structure and a second rectangular fin structure, both positioned on a substrate. The sides of the second rectangular fin structure are parallel to the sides of the first rectangular fin structure. Further, a trench insulator is positioned on the substrate and positioned between a side of the first rectangular fin structure and a side of the second rectangular fin structure. A gate conductor is positioned on the trench insulator, positioned over the sides and the top of the first rectangular fin structure, and positioned over the sides and the top of the second rectangular fin structure. The gate conductor runs perpendicular to the sides of the first rectangular fin structure and the sides of the second rectangular fin structure. Also, a gate insulator is positioned between the gate conductor and the first rectangular fin structure and between the gate conductor and the second rectangular fin structure. The gate conductor is positioned adjacent to a relatively larger portion of the sides of the second rectangular fin structure and is positioned adjacent to a relatively smaller portion of the sides of the first rectangular fin structure. | 10-31-2013 |
20130299908 | SIMULTANEOUS FORMATION OF FINFET AND MUGFET - A method and structure comprise a field effect transistor structure that includes a first rectangular fin structure positioned on a substrate. The first rectangular fin structure has a bottom contacting the substrate, a top opposite the bottom, and sides between the top and the bottom. The structure additionally includes a second rectangular fin structure positioned on the substrate. Similarly, the second rectangular fin structure also has a bottom contacting the substrate, a top opposite the bottom, and sides between the top and the bottom. The sides of the second rectangular fin structure are parallel to the sides of the first rectangular fin structure. Further, a trench insulator is positioned on the substrate and is positioned between a side of the first rectangular fin structure and a side of the second rectangular fin structure. | 11-14-2013 |
20140021554 | SOURCE/DRAIN-TO-SOURCE/DRAIN RECESSED STRAP AND METHODS OF MANUFACTURE OF SAME - A structure and a method of making the structure. The structure includes first and second semiconductor regions in a semiconductor substrate and separated by a region of trench isolation in the semiconductor substrate; a first gate electrode extending over the first semiconductor region; a second gate electrode extending over the second semiconductor region; a trench contained in the region of trench isolation and between and abutting the first and second semiconductor regions; and an electrically conductive strap in the trench, the strap electrically connecting the first and second semiconductor regions. | 01-23-2014 |
20140061139 | NANO-FILTER AND METHOD OF FORMING SAME, AND METHOD OF FILTRATION - The disclosure relates generally to nano-filters and methods of forming same, and methods of filtration. The nano-filter includes a substrate and at least one nanowire structure located between an inlet and an outlet. The nanowire structure may include a plurality of vertically stacked horizontal nanowires. | 03-06-2014 |
20140070330 | METHOD OF FORMING A FIELD EFFECT TRANSISTOR HAVING A GATE STRUCTURE WITH A FIRST SECTION HAVING A FIRST EFFECTIVE WORK FUNCTION ABOVE A CENTER PORTION OF THE CHANNEL REGION AND WITH SECOND SECTIONS HAVING A SECOND EFFECTIVE WORK FUNCTION ABOVE OPPOSING SIDEWALLS OF THE CHANNEL REGION - In view of the foregoing, disclosed herein are embodiments of an improved field effect transistor (FET) structure and a method of forming the structure. The FET structure embodiments each incorporate a unique gate structure. Specifically, this gate structure has a first section above a center portion of the FET channel region and second sections above the channel width edges (i.e., above the interfaces between the channel region and adjacent isolation regions). The first and second sections differ (i.e., they have different gate dielectric layers and/or different gate conductor layers) such that they have different effective work functions (i.e., a first and second effective work-function, respectively). The different effective work functions are selected to ensure that the threshold voltage at the channel width edges is elevated. | 03-13-2014 |
20140077276 | MIDDLE-OF-LINE BORDERLESS CONTACT STRUCTURE AND METHOD OF FORMING - Various embodiments disclosed include semiconductor structures and methods of forming such structures. In one embodiment, a method includes: providing a semiconductor structure including: a substrate; at least one gate structure overlying the substrate; and an interlayer dielectric overlying the substrate and the at least one gate structure; removing the ILD overlying the substrate to expose the substrate; forming a silicide layer over the substrate; forming a conductor over the silicide layer and the at least one gate structure; forming an opening in the conductor to expose a portion of a gate region of the at least one gate structure; and forming a dielectric in the opening in the conductor. | 03-20-2014 |
20140110767 | BULK FINFET WELL CONTACTS WITH FIN PATTERN UNIFORMITY - Bulk finFET well contacts with fin pattern uniformity and methods of manufacture. The method includes providing a substrate with a first region and a second region, the first region comprising a well with a first conductivity. The method further includes forming contiguous fins over the first region and the second region. The method further includes forming an epitaxial layer on at least one portion of the fins in the first region and at least one portion of the fins in the second region. The method further includes doping the epitaxial layer in the first region with a first type dopant to provide the first conductivity. The method further includes doping the epitaxial layer in the second region with a second type dopant to provide a second conductivity. | 04-24-2014 |
20140117450 | PARTIALLY DEPLETED (PD) SEMICONDUCTOR-ON-INSULATOR (SOI) FIELD EFFECT TRANSISTOR (FET) STRUCTURE WITH A GATE-TO-BODY TUNNEL CURRENT REGION FOR THRESHOLD VOLTAGE (Vt) LOWERING AND METHOD OF FORMING THE STRUCTURE - Disclosed are embodiments of a field effect transistor with a gate-to-body tunnel current region (GTBTCR) and a method. In one embodiment, a gate, having adjacent sections with different conductivity types, traverses the center portion of a semiconductor layer to create, within the center portion, a channel region and a GTBTCR below the adjacent sections having the different conductivity types, respectively. In another embodiment, a semiconductor layer has a center portion with a channel region and a GTBTCR. The GTBTCR comprises: a first implant region adjacent to and doped with a higher concentration of the same first conductivity type dopant as the channel region; a second implant region, having a second conductivity type, adjacent to the first implant region; and an enhanced generation and recombination region between the implant regions. A gate with the second conductivity type traverses the center portion. | 05-01-2014 |
20140332888 | SEMICONDUCTOR DEVICE INCLUDING FINFET STRUCTURES WITH VARIED EPITAXIAL REGIONS, RELATED METHOD AND DESIGN STRUCTURE - A semiconductor device including a substrate; a FINFET disposed on the substrate, the FINFET including: a set of epitaxial regions disposed in a source/drain region on a set of fins, the set of epitaxial regions including: a first epitaxial region on a first inner surface of a first outer fin, the first epitaxial region having a first thickness defined as one of: a distance from the first inner surface to an edge of the epitaxial region in the case of a non-merged state of adjacent inner epitaxial regions of adjacent fins, and half of a distance from the first inner surface to an opposing inner surface of an adjacent fin in a merged state of adjacent inner epitaxial regions of adjacent fins, and a second epitaxial region with a second thickness disposed on a first outer surface of the first outer fin. The second thickness is thinner than the first thickness. | 11-13-2014 |
20150014774 | MERGED TAPERED FINFET - According to a structure herein, parallel fins comprise channel regions and source and drain regions. Parallel gate conductors are over and intersecting the channel regions of the fins. Electrical insulator material surrounds sides of the gate conductors. Each of the fins has a main fin body and wider regions extending from the main fin body between the electrical insulator material surrounding the sides of the gate conductors. The wider regions comprise a first wider region extending a first width from the main fin body and a second wider region extending a second width from the main fin body. The material of the second wider region is continuous between adjacent fins. | 01-15-2015 |
20150035026 | MIDDLE-OF-LINE BORDERLESS CONTACT STRUCTURE AND METHOD OF FORMING - Various embodiments disclosed include semiconductor structures and methods of forming such structures. In one embodiment, a method includes: providing a semiconductor structure including: a substrate; at least one gate structure overlying the substrate; and an interlayer dielectric overlying the substrate and the at least one gate structure; removing the ILD overlying the substrate to expose the substrate; forming a silicide layer over the substrate; forming a conductor over the silicide layer and the at least one gate structure; forming an opening in the conductor to expose a portion of a gate region of the at least one gate structure; and forming a dielectric in the opening in the conductor. | 02-05-2015 |
20150035059 | METHOD, STRUCTURE AND DESIGN STRUCTURE FOR CUSTOMIZING HISTORY EFFECTS OF SOI CIRCUITS - A design structure is embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes a high-leakage dielectric formed over an active region of a FET and a low-leakage dielectric formed on the active region and adjacent the high-leakage dielectric. The low-leakage dielectric has a lower leakage than the high-leakage dielectric. Also provided is a structure and method of fabricating the structure. | 02-05-2015 |
20150040084 | STRUCTURE, METHOD AND SYSTEM FOR COMPLEMENTARY STRAIN FILL FOR INTEGRATED CIRCUIT CHIPS - A structure, method and system for complementary strain fill for integrated circuit chips. The structure includes a first region of an integrated circuit having multiplicity of n-channel and p-channel field effect transistors (FETs); a first stressed layer over n-channel field effect transistors (NFETs) of the first region, the first stressed layer of a first stress type; a second stressed layer over p-channel field effect transistors (PFETs) of the first region, the second stressed layer of a second stress type, the second stress type opposite from the first stress type; and a second region of the integrated circuit, the second region not containing FETs, the second region containing first sub-regions of the first stressed layer and second sub-regions of the second stressed layer. | 02-05-2015 |
20150041904 | BLANKET SHORT CHANNEL ROLL-UP IMPLANT WITH NON-ANGLED LONG CHANNEL COMPENSATING IMPLANT THROUGH PATTERNED OPENING - A method that forms a structure implants a well implant into a substrate, patterns a mask on the substrate (to have at least one opening that exposes a channel region of the substrate) and forms a conformal dielectric layer on the mask and to line the opening. The conformal dielectric layer covers the channel region of the substrate. The method also forms a conformal gate metal layer on the conformal dielectric layer, implants a compensating implant through the conformal gate metal layer and the conformal dielectric layer into the channel region of the substrate, and forms a gate conductor on the conformal gate metal layer. Additionally, the method removes the mask to leave a gate stack on the substrate, forms sidewall spacers on the gate stack, and then forms source/drain regions in the substrate partially below the sidewall spacers. | 02-12-2015 |