Patent application number | Description | Published |
20080210383 | BONDING DEVICE - A bonding device that is not affected by heat and that is capable of maintaining wafers to be bonded parallel to each other so as to increase and stabilize the accuracy with which the wafers are bonded. A first space is formed between a first block member and a first pressure shaft, and a second space is formed between a second block member and a second pressure shaft. In this way, little heat is transferred from the first block member and the second block member to the first pressure shaft and the second pressure shaft, respectively, and therefore, a substantially uniform temperature is maintained inside the first block member and the second block member. Stresses caused by a difference between thermal expansion of the first block member and the second block member and thermal expansion of the first pressure shaft and the second pressure shaft are relieved by deflection of the first support pillar members and the second support pillar members. In this way, the flatness of a surface of the first block member for grasping a first wafer and the flatness of a surface of the second block member for grasping a second wafer can be maintained. | 09-04-2008 |
20080228357 | OVERTURN PREVENTION CONTROL DEVICE - An overturn prevention control device includes a bicycle robot capable of freely laterally inclining, an angular velocity sensor mounted on the bicycle robot such that a detection axis thereof extends in a substantially longitudinal direction of the bicycle robot, a motor mounted on the body such that a rotating shaft thereof extends in a substantially longitudinal direction of the body, a rotation sensor that detects a rotational position or a rotational speed of the motor, and an inertial rotor coupled to the rotating shaft of the motor. The overturn prevention control device corrects inclination of the bicycle robot by rotating the inertial rotor using the motor and by utilizing a reaction torque occurring when the inertial rotor is rotated. The overturn prevention control device further includes an inclination angle estimating portion arranged to estimate an inclination angle relative to a balanced state from an angular velocity output ω | 09-18-2008 |
20080245472 | ALIGNING DEVICE, BONDING APPARATUS, AND ALIGNING METHOD - An aligning device that can reliably correct misalignment between electronic components for increasing the accuracy in aligning the electronic components, a bonding apparatus equipped with the aligning device, and an aligning method. The aligning device comprises a chamber; a flexible bellows configured to define an airtight chamber therein with the chamber; a driving unit configured to move one of a first block member and a second block member relative to the other, the first block member being for holding a first electronic component and being provided in the airtight chamber, and the second block member being for holding a second electronic component and being provided in the airtight chamber; and an image-taking port protruding inward from an outer surface of the chamber so as to define a space, the image-taking port having an observation window through which at least one of the first electronic component and the second electronic component is observed. In an embodiment, an image-taking port | 10-09-2008 |
20080249684 | OVERTURN PREVENTION CONTROL DEVICE FOR TWO-WHEEL VEHICLE - An overturn prevention control device for a two-wheel vehicle having a vehicle body, a front wheel, an actuator that steers the front wheel, a rear wheel, and a rear-wheel driving portion, includes an angular velocity sensor and a control unit arranged to output a steering angle command signal for controlling the actuator. The angular velocity sensor includes a detection axis, is mounted on the vehicle body such that the detection axis is downwardly inclined at a predetermined angle relative to a forward direction of the vehicle body, and detects an angular velocity about the detection axis. The angular velocity detected by the angular velocity sensor includes an angular velocity in a lateral direction of inclination and an angular velocity in an azimuthal direction. The zero-set error and offset noise are incorporated into the azimuth angle command. Thus, the two-wheel vehicle can be prevented from overturning. | 10-09-2008 |
20090010779 | Piezoelectric Micropump - A piezoelectric micropump in which a pump chamber is isolated by a diaphragm. A piezoelectric element is disposed on a back surface of the diaphragm, and the diaphragm is deformed by bending deformation of the piezoelectric element to change the volume of the pump chamber and transport fluid in the pump chamber. A support member for supporting a back surface of the piezoelectric element is provided so that the support member inhibits bending of a peripheral portion of the diaphragm in a reverse direction. The support member thus prevents the piezoelectric element from being floated. Accordingly, the displacement of the piezoelectric element can be reliably transmitted as the change in volume of the pump chamber, thereby enhancing the fluid transportation performance. | 01-08-2009 |
20090010780 | Micropump - A micropump having a diaphragm portion, a valve portion of an intake-side check valve, and a valve portion of a discharge-side check valve formed in a single elastic-member sheet. A piezoelectric actuator is attached onto a back surface of the diaphragm portion. The elastic-member sheet is sandwiched between a first case member and a second case member, the elastic-member sheet providing sealing between both case members. A vibration chamber is defined between the elastic-member sheet and the first case member, the vibration chamber housing the piezoelectric actuator. A pump chamber is defined between the elastic-member sheet and the second case member. | 01-08-2009 |
20090142209 | Piezoelectric Pump - A piezoelectric pump capable of generating a large displacement at a central portion of a piezoelectric element even when a driving voltage is relatively low and preventing short-circuits caused by migration. The piezoelectric pump includes a pump body with a pump chamber, and a piezoelectric element that closes the pump chamber. The central area and the peripheral area of the piezoelectric element are bent in opposite directions by applying voltages to the piezoelectric element so that the volume of the pump chamber is changed. The piezoelectric element is a laminate including a plurality of piezoelectric layers with electrodes interposed therebetween. The central area and the peripheral area of each piezoelectric layer are polarized opposite to each other in the thickness direction, and the electrodes are formed such that voltages in the same direction in the thickness direction are applied to the central area and the peripheral area of each piezoelectric layer. Since voltages at the same potential are applied to the electrodes formed in the same planes of the piezoelectric layers, short-circuits caused by migration can be prevented. | 06-04-2009 |
20090232682 | PIEZOELECTRIC MICRO-BLOWER - A piezoelectric micro-blower capable of efficiently conveying compressive fluid without use of a check valve and ensuring a sufficient flow rate. The micro-blower has a blower body with a first wall and a second wall. Openings are formed in the respective walls and face a center of a diaphragm. An inflow path allowing the openings to communicate with the outside is formed between the walls. By applying a voltage to a piezoelectric element to cause the diaphragm to vibrate, a part of the first wall close to the first opening vibrates. Thus, gas can be drawn from the inflow path and discharged from the opening in the second wall. | 09-17-2009 |
20090232683 | PIEZOELECTRIC MICRO-BLOWER - A piezoelectric micro-blower capable of efficiently conveying compressive fluid without use of a check valve and ensuring a sufficient flow rate. The micro-blower has a blower body with a first wall and a second wall. Openings are formed in the respective walls and face a center of a diaphragm. An inflow path allowing the openings to communicate with the outside is formed between the walls. By applying a voltage to a piezoelectric element to cause the diaphragm to vibrate, a part of the first wall close to the first opening vibrates. Thus, gas can be drawn from the inflow path and discharged from the opening in the second wall. | 09-17-2009 |
20090232684 | PIEZOELECTRIC MICRO-BLOWER - A blower body is provided with a first wall and a second wall, and openings are provided in the walls at positions facing the approximate center of a diaphragm. An inflow passage that allows the openings to communicate with the outside is arranged between the two walls. When the diaphragm is vibrated in response to a voltage applied to a piezoelectric element, the first wall vibrates near the opening and sucks in air from the inflow passage so that the air can be ejected from the opening. A plurality of branch passages which provide sound absorption are connected to an intermediate section of the inflow passage so as to prevent noise generated near the opening from leaking from an inlet. | 09-17-2009 |
20090232685 | FLUID CONVEYANCE DEVICE - A fluid conveyance device includes a substrate, and a disk-shaped piezoelectric element arranged in a bendable manner on the substrate. A plurality of substantially circular concentric segment electrodes are provided on the piezoelectric element, and are provided with voltages with phases that are shifted. A wavy ring deformation is thus produced on the piezoelectric element. A pocket produced between the piezoelectric element and the substrate is moved in a radial direction so as to convey a fluid from an outer substantially circular portion to a central portion and to discharge the fluid from the central portion. | 09-17-2009 |
20090242813 | Piezoelectric Valve - A piezoelectric valve includes a valve body having a valve chamber and a piezoelectric element that is bent and displaced by application of a voltage thereto and thereby opening and closing a channel opening. The piezoelectric element is a rectangular shape, and both ends thereof in the length direction are fixedly held by the valve body. The piezoelectric element has a first region in a central part and a second region adjacent to both ends thereof. The first region and the second region are bent and displaced oppositely by application of a voltage thereto such that the central part of the piezoelectric element opens and closes the channel opening. | 10-01-2009 |
20100196177 | VIBRATING DEVICE AND PIEZOELECTRIC PUMP - A piezoelectric pump includes a piezoelectric element, an intermediate plate, and a vibrating plate. The piezoelectric element has a substantially flat plate shape. The intermediate plate is bonded to a principal surface of the piezoelectric element and applies a residual stress in a compressive direction to the piezoelectric element. The vibrating plate is bonded to the intermediate plate such that the vibrating plate faces a principal surface of the piezoelectric element and receives a residual stress in a compressive direction from the intermediate plate. In addition, the vibrating plate defines a portion of a wall surface of a pump chamber having an open hole. A fluid passage is provided in the piezoelectric pump. The fluid passage communicates with the outside of the chamber at one end thereof, and communicates with the pump chamber through the open hole at the other end. | 08-05-2010 |
20110229356 | FLUID CONVEYANCE DEVICE - A fluid conveyance device includes a substrate, and a disk-shaped piezoelectric element arranged in a bendable manner on the substrate. A plurality of substantially circular concentric segment electrodes are provided on the piezoelectric element, and are provided with voltages with phases that are shifted. A wavy ring deformation is thus produced on the piezoelectric element. A pocket produced between the piezoelectric element and the substrate is moved in a radial direction so as to convey a fluid from an outer substantially circular portion to a central portion and to discharge the fluid from the central portion. | 09-22-2011 |