Patent application number | Description | Published |
20090126374 | CRYOPUMP APPARATUS AND OPERATION METHOD THEREFOR - A cryopump apparatus includes a sensor which detects at least one of the temperature and pressure in a cryopump, a controller which detects a change in at least one of the temperature and pressure in the cryopump on the basis of the detection result obtained by the sensor, thereby determining the connection state between the controller and the cryopump, and a display device which displays an abnormal point for the cryopump estimated from the determination result obtained by the controller. | 05-21-2009 |
20090165470 | CRYOPUMP, CRYOPUMP UNIT, VACUUM PROCESSING APPARATUS INCLUDING CRYOPUMP UNIT, AND CRYOPUMP REGENERATION METHOD - A cryopump regeneration method includes a temperature raising step of raising the temperature of a cryopanel so as to vaporize gas molecules condensed on the exhaust surface of the cryopanel, an evacuation step of evacuating a pump vessel, a determination step of determining whether the internal pressure of the pump vessel has reached a set pressure higher than the water vapor pressure at 0° C., a pressure rise test step of stopping the evacuation and performing a pressure rise test, and an observation step of observing residual water based on the internal pressure of the pump vessel. | 07-02-2009 |
20100011783 | CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP - A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with it, and a mechanism which thermally connects/disconnects the cooling storage body | 01-21-2010 |
20100186427 | Exhaust system - An exhaust system includes an entrapment vacuum pump equipped with a refrigerator, a master compressor which is driven in a driving frequency band to make constant a pressure difference between gas recovered from the refrigerator via a low-pressure gas recovery pipe and compressed gas supplied to the refrigerator via a high-pressure gas supply pipe, and a first sub-compressor which is driven at a predetermined driving frequency to supply compressed gas at a first gas volume to the refrigerator via a high-pressure gas supply pipe from gas recovered from the refrigerator via a low-pressure gas recovery pipe. In addition, a second sub-compressor is driven at a predetermined driving frequency to supply compressed gas at a second gas volume larger than the first gas volume to the refrigerator via a high-pressure gas supply pipe from gas recovered from the refrigerator via a low-pressure gas recovery pipe, and a controller monitors a driving frequency of the master compressor and controls driving or a stop of the first sub-compressor and driving or a stop of the second sub-compressor, based on the driving frequency. | 07-29-2010 |
20110147198 | VACUUM PUMPING SYSTEM, OPERATING METHOD OF VACUUM PUMPING SYSTEM, REFRIGERATOR, VACUUM PUMP, OPERATING METHOD OF REFRIGERATOR, OPERATION CONTROL METHOD OF TWO-STAGE TYPE REFRIGERATOR, OPERATION CONTROL METHOD OF CRYOPUMP, TWO-STAGE TYPE REFRIGERATOR, CRYOPUMP, SUBSTRATE PROCESSING APPARATUS, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE - A plurality of vacuum pumps each having a refrigerator are connected to a common compressor. At least one of the plurality of vacuum pumps performs an operation for repeating an operation including a process in which a gas in a low-pressure state is adiabatically compressed when the interior of a cylinder shifts from the low-pressure state to a high-pressure state as a result of a valve operation of the refrigerator, and a process in which a displacer passes through the adiabatically compressed gas. At least another one of the plurality of vacuum pumps performs an operation for repeating an operation including a process in which a gas in the high-pressure state is adiabatically expanded when the interior of the cylinder shifts from the high-pressure state to the low-pressure state as a result of the valve operation of the refrigerator, and a process in which the displacer passes through the adiabatically expanded gas. | 06-23-2011 |
20110162959 | VACUUM PUMPING SYSTEM, SUBSTRATE PROCESSING APPARATUS, MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND OPERATING METHOD OF VACUUM PUMPING SYSTEM - A plurality of vacuum pumps each having a refrigerator are connected to a common compressor. At least one of the plurality of vacuum pumps performs repeating an operation including a process in which a gas in a low-pressure state is adiabatically compressed when the interior of a cylinder shifts from the low-pressure state to a high-pressure state as a result of a valve operation of the refrigerator, and a process in which a displacer passes through the adiabatically compressed gas. At least another one of the plurality of vacuum pumps performs repeating an operation including a process in which a gas in the high-pressure state is adiabatically expanded when the interior of the cylinder shifts from the high-pressure state to the low-pressure state as a result of the valve operation of the refrigerator, and a process in which the displacer passes through the adiabatically expanded gas. | 07-07-2011 |
Patent application number | Description | Published |
20080308533 | SPOT WELDING SYSTEM AND METHOD FOR ADJUSTING WELDING-GUN CLOSING SPEED - A spot welding system including a welding gun with an electrode pair actuated by a servo-motor, a robot carrying the welding gun or objective workpieces and operating to change the relative positions and orientations of the welding gun and the workpieces, and a gun motion controller controlling the servo-motor to actuate the electrode pair to open or close. The gun motion controller includes a motion commanding section outputting a motion command to the servo-motor in accordance with a speed set-value designating a closing speed of the electrode pair, and a set-value adjusting section automatically adjusting the speed set-value to an appropriate value. The set-value adjusting section includes a force-data obtaining section obtaining force data representing, in a time-series manner, the pressurizing force generated in the electrode pair when the servo-motor actuates the electrode pair to close in accordance with the motion command, and an appropriate-value computing section determining the appropriate value of the speed set-value based on pre-convergence transient data in the force data. | 12-18-2008 |
20090001056 | POSITIONING METHOD OF SPOT WELDING ROBOT - A positioning method of spot welding robot having: (A) moving a welding gun with a separation between an opposition electrode tip and a movable electrode tip kept open and larger than a preset plate thickness of a work piece so as to position the opposition electrode tip and the movable electrode tip on both sides of the work piece in a plate-thickness direction of the work piece, respectively, and temporarily positioning the opposition electrode tip at a stand-by position; (B) moving the movable electrode tip in a direction approaching toward the opposition electrode tip, monitoring the current value of the servo motor driving the movable electrode tip, and when the current value exceeds a prescribed value, determining that a distal end of the movable electrode tip has been brought into contact with the work piece, stopping a movement of the movable electrode tip and measuring an open separation of two opposing tips between the movable electrode tip and the opposition electrode tip that has been temporarily positioned at the stand-by position; and (C) determining the difference value by subtracting the preset value for the work piece from the open separation of two opposing tips, and moving the opposition electrode tip in the direction approaching toward the movable electrode tip from the stand-by position to the position of a spot welding point to finally position the opposition electrode tip, by using the difference value as the amount of movement of the opposition electrode tip. | 01-01-2009 |
20090007693 | METHOD OF DETERMINING DETERIORATION OF PRESSURIZING PERFORMANCE OF SPOT WELDING GUN - A method of determining deterioration of pressurizing performance of a spot welding, the method having: obtaining reference data that reflect a dynamic state of a servo motor in a case where a movable side electrode tip is operated normally and a wok piece is pressurized by a specified pressurizing force; performing data processing on the reference data to extract a reference characteristic value; obtaining diagnostic data that reflect a dynamic state of the servo motor in a case where a operational state of the movable side electrode tip changes and the work piece is no longer pressurized by a specified pressurizing force; performing data processing on the diagnostic data to extract a diagnostic characteristic value; and determining deterioration of pressurizing performance of the spot welding gun based on the reference characteristic value and the diagnostic characteristic value. | 01-08-2009 |
20110089146 | METHOD OF DETECTION OF WELDING WORKPIECE POSITION USING MOVABLE ELECTRODE - A spot welding system including spot welding gun having a movable electrode driven by a servo motor, a counter electrode arranged facing it and with a multiarticulated robot, holding one of the welding workpiece and spot welding gun which moves welding workpiece and spot welding gun relative to each other and thereby make the movable electrode and the welding workpiece approach each other from a separated state or vice-versa, monitoring the current or torque of the servo motor, and detecting the surface position of the welding workpiece from the position of the movable electrode and the position of the multiarticulated robot when the trend of the current or torque changes. The precision of detection of the surface position of the welding workpiece by a movable electrode in a spot welding system can now be improved without lengthening the time required for detection of the surface position of the welding workpiece. | 04-21-2011 |
20110120978 | SPOT WELDING SYSTEM - A spot welding system including a spot welding gun having a pair of electrodes disposed opposite to each other, and a servo motor for allowing the pair of electrodes to approach each other and separate from each other; a robot for movably holding either a spot welding gun or a workpiece so that a workpiece is disposed between the pair of electrodes of the spot welding gun; a physical quantity detection section for detecting a physical quantity correlative to torque or velocity of the servo motor; a position detection section for detecting positions of the pair of electrodes; a mode switching section for switching, by a switching command, an operation mode of the spot welding system between a spot welding mode for spot-welding the workpiece and a position correction mode for correcting a spot welding position of the workpiece; and a processing section for performing a spot welding process in the spot welding mode and a position correction process in the position correction mode. | 05-26-2011 |
20110180516 | POSITION DETECTION DEVICE AND A POSITION DETECTION METHOD FOR A WORKPIECE TO BE WELDED - A position detection device for a workpiece to be welded including a spot welding gun having a pair of electrodes adapted to be disposed opposite each other across the workpiece; a robot for holding either one of the spot welding gun and the workpiece in a manner movable relate to each other; a servo motor for allowing the pair of electrodes to approach the workpiece and separate from the workpiece; a physical quantity detection section for detecting a physical quantity correlative to a torque of the servo motor when the servo motor allows one of the pair of electrodes to approach a surface of the workpiece so that the one of the pair of electrodes abuts against the surface of the workpiece; a position detection section for detecting positions of the pair of electrodes; a storage section for storing the physical quantity detected by the physical quantity detection section and a value detected by the position detection section; and a computation section for calculating a contact start time at which the one of the pair of electrodes comes into contact with the surface of the workpiece based on time-series data of the physical quantity stored in the storage section, and computing a position of the workpiece at the contact start time based on the value detected by the position detection section stored in the storage section. | 07-28-2011 |