Patent application number | Description | Published |
20100110126 | METHOD FOR DRIVING DROPLET EJECTING HEAD AND DROPLET EJECTING DEVICE - A method for driving a droplet ejecting head that includes a liquid pressure chamber communicating with a nozzle hole, and a pressure application unit applying pressure on liquid stored in the liquid pressure chamber for ejecting a droplet from the nozzle hole, includes applying on the liquid stored in the liquid pressure chamber pressure having a waveform whose phase is delayed by 90 degrees from a waveform of a residual vibration of the liquid by the pressure application unit after an ejection of the droplet from the nozzle hole. | 05-06-2010 |
20110128549 | INTERFERENCE FILTER, OPTICAL SENSOR, AND OPTICAL MODULE - An interference filter includes: a first substrate; a second substrate that faces one side of the first substrate and is bonded to the first substrate; a first reflection film formed on the side of the first substrate that faces the second substrate; and a second reflection film provided on the second substrate and faces the first reflection film, the first substrate including a first gap formation region in which the first reflection film is disposed and which is not contact with the second substrate, and wherein the first substrate and the second substrate are adhesively bonded to each other with the adhesive applied into the adhesive grooves with the first bonding region and the second bonding region bonded to each other. | 06-02-2011 |
20110222157 | OPTICAL FILTER, OPTICAL FILTER MODULE, ANALYTICAL INSTRUMENT, AND OPTICAL APPARATUS - An optical filter includes: a first substrate; a second substrate opposed to the first substrate; a first reflecting film provided to the first substrate; a second reflecting film provided to the second substrate and opposed to the first reflecting film; a first electrode provided to the first substrate in a peripheral area of the first reflecting film; a second electrode provided to the first substrate in a peripheral area of the first electrode; a third electrode provided to the second substrate and opposed to the first electrode; and a fourth electrode provided to the second substrate and opposed to the second electrode. | 09-15-2011 |
20110222158 | OPTICAL FILTER, AND ANALYTICAL INSTRUMENT AND OPTICAL APPARATUS USING THE OPTICAL FILTER - An optical filter includes a first substrate, a second substrate, a first reflecting film disposed on a first opposed surface of the first substrate, a second reflecting film disposed on a second opposed surface of the second substrate, a first electrode provided to the first substrate at a peripheral position of the first reflecting film in a plan view, and a second electrode provided to the second substrate and opposed to the first electrode. At least one of the first opposed surface and the second opposed surface is provided with a step section, and an initial gap between the first reflecting film and the second reflecting film is smaller than an initial gap between the first electrode and the second electrode, to thereby allow control of the gap between the reflecting films with good accuracy. | 09-15-2011 |
20110252636 | METHOD OF MANUFACTURING VARIABLE WAVELENGTH INTERFERENCE FILTER AND VARIABLE WAVELENGTH INTERFERENCE FILTER - A method of manufacturing a variable wavelength interference filter includes forming an electrostatic gap forming groove, a wiring forming groove extending from the electrostatic gap forming groove to an outer peripheral edge of the chip region, and an air communication groove through which the wiring groove forming groove communicates with the outside of the first substrate, in a chip region of a first substrate. | 10-20-2011 |
20110255166 | OPTICAL FILTER DEVICE, OPTICAL FILTER MODULE AND ANALYSIS APPARATUS - An optical filter device includes a first electrode that is provided on a first substrate, a second electrode that is provided on a second substrate to face the first electrode, a pair of first lead-out electrodes that connects to the first electrode, and a pair of second lead-out electrodes that is provided on the second substrate to connect to the second electrode. | 10-20-2011 |
20110261460 | OPTICAL FILTER, OPTICAL FILTER MODULE, AND ANALYZER - An etalon includes a first substrate and a second substrate. The first substrate has a first protrusion that does not face the second substrate, and a first electrode pad is formed on the first protrusion, whereby connection reliability can be improved. | 10-27-2011 |
20120043851 | ELECTROSTATIC INDUCTION GENERATION DEVICE AND ELECTROSTATIC INDUCTION GENERATION APPARATUS - An electrostatic induction generation device comprising a first fixed electrode substrate having a first electret electrode, a second fixed electrode substrate having a second electret electrode, a movable electrode substrate having a movable electrode, a holding frame formed separately from the movable electrode, a first pair of electrode support beams and a second pair of electrode support beams connected with the movable electrode and the holding frame, and wherein the movable electrode substrate is formed between the first fixed electrode substrate and the second fixed electrode substrate, and the movable electrode is opposed to the first electret electrode and the second electret electrode. | 02-23-2012 |
20120086945 | TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, PHOTOMETRIC ANALYZER, AND MANUFACTURING METHOD OF TUNABLE INTERFERENCE FILTER - A tunable interference filter comprising a first substrate, a second substrate facing the first substrate, a first reflection film formed on the first substrate, a second reflection film formed on the second substrate, the second reflection film facing the first reflection film by interposing a gap, and a gap adjustable-part that adjusts the gap, wherein the second substrate has a first surface and a second surface opposed to the first surface, wherein the second substrate includes a first groove on the first surface, and wherein the second substrate includes a second groove on the second surface, the second groove facing the first groove. | 04-12-2012 |
20120188646 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE - An etalon includes a first substrate, a second substrate facing the first substrate, a fixed mirror provided on a surface of the first substrate that faces the second substrate, a movable mirror provided on the second substrate and facing the fixed mirror via an inter-mirror gap, and a first electrode provided on the surface of the first substrate that faces the second substrate. A first multilayer stopper portion is provided by a portion of the first electrode being stacked with at least a portion of an outer circumferential edge of the fixed mirror. | 07-26-2012 |
20120206731 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE - An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other. | 08-16-2012 |
20120257280 | TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A tunable interference filter includes: first and second opposed substrates; a first reflection film provided on a first reflection film fixing surface of the first substrate; a second reflection film provided on a second reflection film fixing surface of the second substrate and separated from the first reflection film by a gap; and a first electrode provided on a first electrode surface of the first substrate facing the second substrate, wherein the first electrode surface is spaced apart from the second substrate by a different distance than the first reflection film fixing surface, and a layered part in which the first reflection film and the first electrode are stacked is provided on the first electrode surface, the layered part being spaced apart from the second substrate by a larger distance than the first reflection film fixing surface. | 10-11-2012 |
20120300208 | OPTICAL FILTER, OPTICAL FILTER MODULE, AND PHOTOMETRIC ANALYZER - An optical filter includes fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode formed to cover the first reflection film and to extend beyond an outer circumference of the first reflection film, and a second electrode provided on a surface of the movable substrate facing the fixed substrate and opposed to a part of the first electrode, and the first electrode is formed of a light-transmissive material, and the first electrode and the second reflection film are electrically connected at the same potential. | 11-29-2012 |
20130044377 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYZER - A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion. | 02-21-2013 |
20130075596 | OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - An optical filter device includes a variable wavelength interference filter having a stationary substrate, a movable substrate, a stationary reflecting film, and a movable reflecting film, and a housing adapted to house the variable wavelength interference filter therein. The housing has a base substrate, a lid bonded to the base substrate, and forming an internal space between the base substrate and the lid, and a lid-side glass substrate adapted to block a light passage hole provided to the lid. Further, the lid-side glass substrate has a substrate edge located outside the outer peripheral edge of the light passage hole, and is bonded to the lid in an area extending from the outer peripheral edge of the light passage hole to the substrate edge. | 03-28-2013 |
20130083398 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A variable wavelength interference filter includes a stationary substrate, a movable substrate bonded to the stationary substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate, and opposed to the stationary reflecting film across an inter-reflecting film gap, and an electrostatic actuator adapted to vary the gap amount of the inter-reflecting film gap by deflecting the movable substrate toward the stationary substrate, a releasing space to which air between the stationary reflecting film and the movable reflecting film moves when the gap amount of the inter-reflecting film gap is reduced is provided between the stationary substrate and the movable substrate, and assuming that a spring constant of the movable substrate is k | 04-04-2013 |
20130083399 | WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A wavelength variable interference filter includes a fixed substrate, a movable substrate, a fixed reflective film provided on the fixed substrate, a movable reflection film provided on the movable substrate and opposed to the fixed reflective film via an inter-reflective film gap, a fixed electrode provided on the fixed substrate, a movable electrode provided on the movable substrate and opposed to the fixed electrode via an inter-electrode gap, a fixed charging preventing electrode provided along the outer circumferential edge of the fixed electrode and in non-contact with the fixed electrode and grounded, and a movable charging preventing electrode provided along the outer circumferential edge of the movable electrode and in non-contact with the movable electrode and grounded. | 04-04-2013 |
20130114083 | SPECTROSCOPIC MEASUREMENT APPARATUS - A spectroscopic measurement apparatus includes: a wavelength tunable interference filter including a fixed substrate having a fixed reflection film, a movable substrate having a movable reflection film, and an electrostatic actuator that changes a gap value of an inter-reflection-film gap by applying a voltage to bend the movable substrate; a detector that detects a light level; and a controller that measures a spectral characteristic of light under measurement. The controller includes a filter driver that applies a drive voltage to the electrostatic actuator to change the inter-reflection-film gap, a detected light level acquisition unit that acquires light levels detected by the detector, and a target light level acquisition unit that acquires a light level corresponding to an oscillation center of the movable substrate as a target light level based on how the detected light level transitions and a natural oscillation cycle that the movable substrate has. | 05-09-2013 |
20130208359 | OPTICAL FILTER DEVICE AND MANUFACTURING METHOD FOR THE OPTICAL FILTER DEVICE - An optical filter device includes an interference filter and a housing. The interference filter includes a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflective film provided on the fixed substrate, and a movable reflective film provided on the movable substrate and opposed to the fixed reflective film across an inter-reflective film gap. The housing includes a base substrate on which the interference filter is arranged. A fixing member is arranged between the movable substrate and the base substrate. The movable substrate is fixed to the base substrate by the fixing member in one place excluding a region where the movable reflective film is provided. | 08-15-2013 |
20130271839 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A variable wavelength interference filter includes a stationary substrate including a stationary reflecting film and a stationary electrode, and a movable substrate including a movable reflecting film and a movable electrode, the stationary electrode and the movable electrode are disposed outside an optical interference region where the stationary reflecting film and the movable reflecting film overlap each other in a filter plan view, an inner peripheral edge of the stationary electrode is located nearer to the optical interference region than an outer peripheral edge of the movable electrode, and an outer peripheral edge of the stationary electrode is located further from the optical interference region than an outer peripheral edge of the movable electrode. | 10-17-2013 |
20130279005 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A variable wavelength interference filter includes a stationary substrate provided with a stationary reflecting film, a movable substrate provided with a movable reflecting film, a first electrostatic actuator, and a second electrostatic actuator which can be driven independently of the first electrostatic actuator, two first partial actuators constituting the first electrostatic actuator have the same shape as each other in the plan view, and are arranged at regular angular intervals and with the same distance with respect to the filter center point, and two second partial actuators constituting the second electrostatic actuator have the same shape as each other in the plan view, and are arranged at regular angular intervals and with the same distance with respect to the filter center point. | 10-24-2013 |
20140015374 | ELECTROSTATIC INDUCTION GENERATION DEVICE AND ELECTROSTATIC INDUCTION GENERATION APPARATUS HAVING A MOVABLE ELECTRODE FORMED BETWEEN A FIRST FIXED ELECTRODE SUBSTRATE AND A SECOND FIXED ELECTRODE SUBSTRATE - An electrostatic induction generation device comprising a first fixed electrode substrate having a first electret electrode, a second fixed electrode substrate having a second electret electrode, a movable electrode substrate having a movable electrode, a holding frame formed separately from the movable electrode, a first pair of electrode support beams and a second pair of electrode support beams connected with the movable electrode and the holding frame, and wherein the movable electrode substrate is formed between the first fixed electrode substrate and the second fixed electrode substrate, and the movable electrode is opposed to the first electret electrode and the second electret electrode. | 01-16-2014 |
20140191116 | WAVELENGTH TUNABLE INTERFERENCE FILTER, METHOD FOR MANUFACTURING WAVELENGTH TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A wavelength tunable interference filter includes an electrostatic actuator that changes the dimension of a gap between a fixed reflection film and a movable reflection film, a fixed drawn electrode and a movable drawn electrode that are connected to the electrostatic actuator, and a third substrate having a top surface portion and a sidewall portion. An end surface of the sidewall portion is bonded to a first substrate so that a space surrounded by the top surface portion, the sidewall portion, and the first substrate is hermetically sealed. A second substrate and the electrostatic actuator are disposed in the space, and the fixed drawn electrode and the movable drawn electrode are disposed on the first substrate and extend both inside and outside the space. | 07-10-2014 |
20140192357 | SPECTROSCOPIC MEASUREMENT DEVICE, COLOR MANAGEMENT SYSTEM, AND METHOD OF GENERATING PROFILE - A spectroscopic measurement device includes a variable wavelength interference filter, an imaging section (an imaging element and a light intensity acquisition section) adapted to image the light dispersed by the variable wavelength interference filter to obtain a spectral image, and a data output section (a storage section and a communication section) adapted to output profile-generating data used to generate a profile of an image display device, and the data output section outputs measurement data which includes a light intensity in each pixel of each of the spectral images and a coordinate value of the pixel associated with each other, as profile-generating data in a case in which the imaging section obtains the spectral images with respect to a color pattern including a plurality of differently colored color patches output from the image display device. | 07-10-2014 |
20140218586 | OPTICAL MODULE, ELECTRONIC APPARATUS, AND SPECTROSCOPIC CAMERA - An optical module includes a fixed reflection film, a movable reflection film, a first driver having a plurality of sub-drivers that can be driven independently of each other via voltage application in a plan view, a second driver that changes the dimension of a gap between the fixed reflection film and the movable reflection film, and a voltage controller that applies first drive voltages to the sub-drivers and applies a second drive voltage to the second driver, and the voltage controller applies a first drive voltage set for each of the sub-drivers in accordance with parallelism between the fixed reflection film and the movable reflection film at the time when the dimension of the gap is changed. | 08-07-2014 |
20140253924 | SPECTROMETER - A spectrometer includes: a wavelength-variable interference filter that can change a wavelength of selected light and disperses light from a measurement target; an imaging unit that receives light components with a plurality of wavelengths which are dispersed by the wavelength-variable interference filter and acquires a plurality of spectral images; a positional deviation amount detection unit that selects a standard image from the plurality of spectral images acquired by the imaging unit and detects a positional deviation amount of a pixel position which receives light from a predetermined position of the measurement target between the standard image and at least one of the spectral images other than the standard image; and a position correction unit that positions the spectral images other than the standard image on the basis of the detected positional deviation amount. | 09-11-2014 |
20140268345 | INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A wavelength tunable interference filter includes a fixed substrate, a fixed reflection film that is provided on the fixed substrate, reflects part of incident light, and transmits at least part of the incident light, a movable reflection film that faces the fixed reflection film, reflects part of incident light, and transmits at least part of the incident light, and a fixed electrode that surrounds the fixed reflection film and has a light absorbing layer and a metal layer, and the light absorbing layer is disposed closer to the fixed substrate than the metal layer. | 09-18-2014 |
20140340686 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE - An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other. | 11-20-2014 |
20140367035 | OPTICAL FILTER, OPTICAL FILTER MODULE, AND ANALYZER - An etalon includes a first substrate and a second substrate. The first substrate has a first protrusion that does not face the second substrate, and a first electrode pad is formed on the first protrusion, whereby connection reliability can be improved. | 12-18-2014 |
20150070767 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYZER - A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion. | 03-12-2015 |
20150070768 | OPTICAL FILTER INCLUDING A STEP SECTION, AND ANALYTICAL INSTRUMENT AND OPTICAL APPARATUS USING THE OPTICAL FILTER - An optical filter includes a first substrate, a second substrate that is opposed to the first substrate, a first reflecting section that is disposed between the first substrate and the second substrate, a second reflecting section that is disposed between the first reflection section and the second substrate, a first gap existing between the first reflecting section and the second reflecting section, a first electrode that is disposed between the first substrate and the second substrate, a second electrode that is disposed between the first electrode and the second substrate, a second gap existing between the first electrode and the second electrode, and a third electrode that is disposed between the first substrate and the second electrode. The second gap is larger than the first gap. | 03-12-2015 |