Patent application number | Description | Published |
20090290136 | MEASURING APPARATUS, EXPOSURE APPARATUS AND METHOD, AND DEVICE MANUFACTURING METHOD - A measuring apparatus includes a pinhole mask, located at an object plane of an optical system to be measured, and having a plurality of pinholes for generating a spherical wave from a measuring light beam, and a diffraction grating for splitting the measuring light beam that has passed the pinhole mask and the optical system, wherein Lg=m·Pg | 11-26-2009 |
20100149547 | MEASUREMENT METHOD AND MEASUREMENT APPARATUS - The present invention provides a measurement apparatus that illuminates a surface to be tested having an aspheric surface using light beams that form spherical waves to measure a figure of the surface to be tested, including a detection unit configured to detect interference patterns between light beams from the surface to be tested and light beams from a reference surface, and a controller configured to control processing for obtaining a figure of the surface to be tested based on the interference patterns detected by the detection unit. | 06-17-2010 |
20100177322 | MEASUREMENT METHOD AND MEASUREMENT APPARATUS - The present invention provides a measurement apparatus that illuminates a surface to be tested having an aspheric surface using light beams that form spherical waves to measure a figure of the surface to be tested, including a detection unit configured to detect interference patterns between light beams from the surface to be tested and light beams from a reference surface, and a controller configured to control processing for obtaining a figure of the surface to be tested based on the interference patterns detected by the detection unit. | 07-15-2010 |
20110093228 | CALCULATION METHOD AND CALCULATION APPARATUS - The present invention provides a method of calculating a surface shape of a target surface, including the steps of defining, as a measurement target region, each of a plurality of regions on the target surface in which adjacent regions overlap each other, and obtaining data that give the heights at the plurality of positions in each of the plurality of regions, and removing, for each of the plurality of regions, an average data from the data that are obtained in the step of obtaining the data and give the heights at the plurality of positions in each of the plurality of regions, thereby generating correction data for each of the plurality of regions. | 04-21-2011 |
20110112785 | MEASURING METHOD AND MEASURING APPARATUS - The present invention provides a method of measuring a shape of a surface of an object, the method including obtaining shape data for each of a plurality of regions on the surface by a surface measurement for each of the plurality of regions, each of the plurality of regions having a region overlapping another of the plurality of regions, obtaining an error of the surface measurements so as to minimize a difference in shape with respect to the overlapping regions based on the obtained shape data, and obtaining the shape of the surface based on the obtained shape data and the obtained error, wherein the shape data is obtained so as not to include a component having a spatial frequency higher than a threshold determined based on a required precision. | 05-12-2011 |
20120010850 | MEASUREMENT APPARATUS AND METHOD - A measurement apparatus comprises a measurement head including a detector which detects an interference light between test light and reference light and a processing unit. The processing unit calculates an optical path length difference between the reference light and the test light from the detected interference light, calculates a test wavefront and a reference wavefront based on a nominal value of a shape of the surface to be measured and optical information of an optical component in the measurement head, calculates a wavefront difference, calculates a phase error, corrects the calculated optical path length difference based on the calculated phase error, calculates a distance between the reference point and the surface to be measured, and calculates the shape of the surface to be measured, based on the calculated distance between the reference point and the surface to be measured, and coordinates of the reference point. | 01-12-2012 |
20140055794 | SHAPE MEASUREMENT APPARATUS, AND SHAPE MEASUREMENT METHOD - A shape measurement apparatus includes a distance measurement meter configured to emit and receive the beam in relation to the object; a beam deflection mechanism configured to deflect the beam from the distance measurement meter; and a control unit configured to determine at least one of a maximum beam deflection angle due to the beam deflection mechanism and the distance between a detected surface and the beam deflection mechanism when the beam is incident perpendicularly to the detected surface of the object, so that an error of a first measurement error that depends on a change in a spot diameter of the beam on the detected surface and a second measurement error that depends on an incidence angle on the detected surface of the beam is no more than a threshold value of a permitted error. | 02-27-2014 |
20140182150 | MEASUREMENT APPARATUS AND MEASUREMENT METHOD - The present invention provides a measurement apparatus for measuring a shape of an object to be measured, comprising a measuring head configured to perform measurement in a first measurement mode and perform measurement in a second measurement mode having measurement accuracy higher than that of the first measurement mode, a detection unit configured to detect an occupancy region of the object to be measured, and a control unit configured to control the measuring head, wherein in the first measurement mode, the control unit moves, based on a detection result of the detection unit, the measuring head not to touch the object to be measured, and in the second measurement mode, the control unit moves, based on a measurement result in the first measurement mode, the measuring head to satisfy an allowable condition in the second measurement mode. | 07-03-2014 |