Class / Patent application number | Description | Number of patent applications / Date published |
417423400 | Turbomolecular pump | 13 |
20080206079 | Turbo-molecular pump and touchdown bearing device - A touchdown bearing device includes an outer ring fixed to a housing, an inner ring radially opposed to the outer ring, an intermediate ring radially interposed between the outer ring and the inner ring, a first ball interposed between the outer ring and the intermediate ring, and a second ball interposed between the intermediate ring and the inner ring. The touchdown bearing device is configured so that when a magnetic bearing normally operate, a rotary shaft and the inner ring are brought into a noncontact state, and that meanwhile, when the magnetic bearing does not normally operate, the rotary shaft is supported by the inner ring so as to support the rotary shaft against the housing. | 08-28-2008 |
20080240948 | DEVICE FOR CONTAINING CATASTROPHIC FAILURE OF A TURBOMOLECULAR PUMP - A device for containing the catastrophic failure of a vacuum pumping system is described. The vacuum pumping system includes a turbo-molecular pump (TMP) configured to be coupled to a vacuum processing system at an inlet end. The TMP includes a longitudinal axis substantially parallel to an axis of rotation of the TMP and a first lateral axis substantially perpendicular to the longitudinal axis. The vacuum system also includes a containment device configured to mitigate the catastrophic failure of the TMP by impeding only one translational degree of freedom (DOF) and only one rotational DOF of the movement of the TMP. Impeding only one translational DOF includes impeding translational motion of the TMP in a first lateral direction substantially parallel to the first lateral axis. Impeding only one rotational DOF includes impeding rotation of the TMP about the longitudinal axis. | 10-02-2008 |
20080304985 | TURBO-MOLECULAR PUMP - Disclosed is a turbo-molecular pump, which comprises: a blade pumping section having a plurality of rotor blades and a plurality of stator blades which are alternately arranged in plural stages along an axial direction of the pump; and a thread groove pumping section having a cylindrical-shaped screw stator, and a rotor cylinder adapted to be rotated inside the screw stator. The rotor cylinder has a lower edge surface located on an upstream side relative to a downstream edge of the screw stator with respect to the axial direction. The turbo-molecular pump of the present invention can minimize flying-out of broken pieces of the rotor cylinder from a discharge port. | 12-11-2008 |
20090208354 | SUPPORT FOR ROLLING BEARING - A support for a rolling bearing of the kind equipped with an outer rotating ring for a rotary vacuum pump, the support comprising an inner portion that can be associated with the rotating ring, a fastening outer portion and a connecting portion, interposed between the inner and outer portions, wherein the connecting portion is a frusto-conical resilient element. | 08-20-2009 |
20090246048 | TURBO VACUUM PUMP - An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator blades which are disposed alternately in a casing, and a main shaft for supporting the rotor blades. A gas bearing is used as a bearing for supporting the main shaft in a thrust direction, spiral grooves are formed in both surfaces of a stationary part of the gas bearing, and the stationary part having the spiral grooves is placed between an upper rotating part and a lower rotating part which are fixed to the main shaft. A thrust magnetic bearing for canceling out a thrust force generated by the differential pressure between a discharge side and an intake side by an evacuation action of the pumping suction is provided. | 10-01-2009 |
20100047095 | VACUUM PUMP - A vacuum pump ( | 02-25-2010 |
20100047096 | TURBO VACUUM PUMP AND SEMICONDUCTOR MANUFACTURING APPARATUS HAVING THE SAME - A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached. | 02-25-2010 |
20100196180 | VACUUM PUMP - A vacuum pump ( | 08-05-2010 |
20100303653 | TURBOMOLECULAR PUMP - A turbomolecular pump ( | 12-02-2010 |
20100322798 | RAPIDLY ROTATING VACUUM PUMP - A rapidly rotating vacuum pump includes: a magnet-mounted rotor driven by an electric drive motor with a predetermined constant nominal rotational frequency (f | 12-23-2010 |
20100322799 | TURBOMOLECULAR PUMP - A turbomolecular pump ( | 12-23-2010 |
20110014073 | TURBO-MOLECULAR PUMP - A turbo-molecular pump includes a base | 01-20-2011 |
20150064033 | VACUUM PUMP AND ARRANGEMENT WITH VACUUM PUMP - A vacuum pump includes a housing having an axial inlet a pumping unit including a stator, a rotor rotatably supported in the stator, and a drive for driving the rotor. At least one housing part which has at least one outlet, is placed on the housing in an axial direction and is connected with the housing. | 03-05-2015 |