Class / Patent application number | Description | Number of patent applications / Date published |
359365000 | Two or more in a series | 60 |
20080212170 | CATADIOPTRIC PROJECTION OBJECTIVE - A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; | 09-04-2008 |
20080247036 | Catadioptric microscope objective employing immersion liquid for use in broad band microscopy - An objective for imaging specimens is disclosed. The objective receives light energy from a light energy source configured to provide light energy in a wavelength range of approximately 480 to 660 nanometers, employs a Mangin mirror arrangement in conjunction with an immersion liquid to provide a numerical aperture in excess of 1.0 and a field size in excess of 0.05 millimeters, where every element in the objective has a diameter of less than approximately 40 millimeters. | 10-09-2008 |
20080297889 | CATADIOPTRIC PROJECTION OBJECTIVE - A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane;
| 12-04-2008 |
20090027768 | Catadioptric imaging system, exposure apparatus, and device manufacturing method - A catadioptric imaging optical system of a high numerical aperture in which various aberrations are properly corrected without using a reflection surface having an aspherical shape of high order or a reciprocal optical element. The catadioptric imaging optical system forms an image of a first plane on a second plane and includes a first imaging system for forming a first intermediate image of the first plane based on light from the first plane, a second imaging system having two concave reflection mirrors for forming a second intermediate image of the first plane based on light from the first intermediate image, and a third imaging system for forming a final image of the first plane on the second plane based on light from the second intermediate image. The two concave reflection mirrors have prolate spheroidal-shaped reflection surfaces. | 01-29-2009 |
20090046357 | CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES - In general, in a first aspect, the invention features a system that includes a microlithography projection optical system. The microlithography projection optical system includes a plurality of elements arranged so that during operation the plurality of elements image radiation at a wavelength λ from an object plane to an image plane. At least one of the elements is a reflective element that has a rotationally-asymmetric surface positioned in a path of the radiation. The rotationally-asymmetric surface deviates from a rotationally-symmetric reference surface by a distance of about λ or more at one or more locations of the rotationally-asymmetric surface. | 02-19-2009 |
20090097106 | Reflective-Type Projection Optical System and Exposure Apparatus Equipped with the Reflective-Type Projection Optical System - A reflective-type projection optical system has 8 reflective mirrors that form a reduced image of a first surface on a second surface. A first reflective imaging optical system (G | 04-16-2009 |
20090153954 | Off-Axis Catadioptric Projection Optical System for Lithography - The present invention is directed to off-axis catadioptric projection optical systems for use in lithography tools for processing modulated light used to form an image on a substrate, such as a semiconductor wafer or flat panel display. In one embodiment the optical system includes an off-axis mirror segment, a fold mirror, a relay, an aperture stop and a refractive lens group. Modulated light is transmitted through the system to form an image on a substrate. In a second embodiment the projection system includes an off-axis mirror segment, an aperture stop and a refractive lens group. In a third embodiment the projection system includes an off-axis mirror segment, a negative refractive lens group, a concave mirror, a relay, an aperture stop, and a refractive lens group. A method to produce a device using a lithographic apparatus including a projection system with an off-axis mirror segment as the first element in a projection optics system is also provided. | 06-18-2009 |
20090190208 | CATADIOPTRIC PROJECTION OBJECTIVE - A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D | 07-30-2009 |
20090296204 | HIGH-NA PROJECTION OBJECTIVE WITH ASPHERIC LENS SURFACES - A projection objective for imaging a pattern provided in an object surface onto an image surface of the projection objective has an object-side imaging subsystem for creating a final intermediate image closest to the image surface from radiation coming from the object surface and an image-side imaging subsystem for directly imaging the final intermediate image onto the image surface. The image-side imaging subsystem includes at least one aspheric primary correcting lens having an aspheric primary correcting surface. The object-side imaging subsystem includes a secondary correcting group having at least one secondary correcting lens having an aspheric secondary correcting surface. Conditions involving maximum incidence angles and subaperture offsets at the correcting surfaces are given which should be observed to obtain sufficient aberration correction at very high image-side numerical apertures NA. | 12-03-2009 |
20100014153 | CATADIOPTRIC PROJECTION OBJECTIVE - A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D | 01-21-2010 |
20100053739 | Laser device providing an adjusted field distribution for laser beams thereof - An exemplary laser device includes a laser source and an optical module. The laser source is configured for emitting a laser beam in the TEM | 03-04-2010 |
20100172019 | PROJECTION OBJECTIVE AND PROJECTION EXPOSURE APPARATUS INCLUDING THE SAME - A reduction projection objective for projection lithography has a plurality of optical elements configured to image an effective object field arranged in an object surface of the projection objective into an effective image field arranged in an image surface of the projection objective at a reducing magnification ratio |β|<1. The optical elements form a dry objective adapted with regard to aberrations to a gaseous medium with refractive index n′<1.01 filling an image space of finite thickness between an exit surface of the projection objective and the image surface. The optical elements include a largest lens having a maximum lens diameter D | 07-08-2010 |
20100188738 | Optical imaging device and imaging method for microscopy - The present invention relates to an optical imaging device, in particular for microscopy, with a first optical element group and a second optical element group, wherein the first optical element group and the second optical element group, on an image plane, form an image of an object point of an object plane. The first optical element group comprises a first optical element with a reflective first optical surface and a second optical element with a reflective second optical surface. The second optical element group comprises a third optical element with a reflective third optical surface. The first optical element and the second optical element are formed and arranged such that on formation of the image of the object point, in each case a multiple reflection of at least one imaging beam takes place on the first optical surface and the second optical surface. | 07-29-2010 |
20100253999 | CATADIOPTRIC PROJECTION OBJECTIVE - A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption. | 10-07-2010 |
20100265572 | CATADIOPTRIC PROJECTION OBJECTIVE - A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D | 10-21-2010 |
20110176205 | INTEGRATED TELESCOPE BAFFLE AND MIRROR SUPPORT - A telescope design having an integrated baffle is disclosed herein. The integrated baffle is configured as both a baffle and a mirror support. The integrated baffle can be shaped to the F-cone between the primary and secondary mirrors of a given telescope design. The baffle design can be adjusted to minimize or otherwise reduce the total obscuration of the baffle to improve the optical throughput. The interior facing surfaces of the integrated baffle can be configured with corner reflectors, so that the detector views itself, instead of the baffle. | 07-21-2011 |
20110211252 | CATADIOPTRIC PROJECTION OBJECTIVE - A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D | 09-01-2011 |
20110235167 | CATADIOPTRIC PROJECTION OBJECTIVE - A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption. | 09-29-2011 |
20110261444 | Catadioptric Projection Objective With Mirror Group - A catadioptric projection objective for imaging an off-axis object field arranged in an object surface of the projection objective onto an off-axis image field arranged in an image surface of the projection objective has a front lens group, a mirror group comprising four mirrors and having an object side mirror group entry, an image side mirror group exit, and a mirror group plane aligned transversly to the optical axis and arranged geometrically between the mirror group entry and the mirror group exit; and a rear lens group. The mirrors of the mirror group are arranged such that at least one intermediate image is positioned inside the mirror group between mirror group entry and mirror group exit, and that radiation coming from the mirror group entry passes at least four times through the mirror group plane and is reflected at least twice on a concave mirror surface of the mirror group prior to exiting the mirror group at the mirror group exit. The mirror group entry is positioned in a region where radiation exiting the front lens group has an entry chief ray height. A second reflecting area is positioned in a region where radiation impinging on the second mirror has a second chief ray height deviating from the entry chief ray height in a first direction; and a fourth reflecting area is positioned in a region where radiation impinging on the fourth mirror has a fourth chief ray height deviating from the entry chief ray height in a second direction opposite to the first direction. | 10-27-2011 |
20120002273 | CATADIOPTRIC PROJECTION OBJECTIVE WITH PUPIL CORRECTION - The disclosure provides a catadioptric projection objective which includes a plurality of optical elements, including first, second and third refractive objection parts. Optical elements arranged between an object surface and a first pupil surface form a Fourier lens group that includes a negative lens group arranged optically close to the first pupil surface. The Fourier lens group is configured such that a Petzval radius R | 01-05-2012 |
20120092760 | PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD - A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective. The projection objective includes a first objective part that includes one or more refractive optical elements to image the pattern provided in the object plane into a first intermediate image, a second objective part that consists of reflective optical elements including at least one concave mirror to image the first intermediate image into a second intermediate image, and a third objective part that includes one or more refractive optical elements to image the second intermediate imaging onto the image plane. The projection objective includes at lease one double asphere having a first aspheric surface and a second aspheric surface immediately adjacent to the first aspheric surface, the double asphere being formed by facing adjacent aspheric surfaces of two consecutive lenses. | 04-19-2012 |
20120176671 | WIDE SPECTRAL COVERAGE ROSS CORRECTED CASSEGRAIN-LIKE TELESCOPE - Various embodiments provide a Cassegrain-like telescope. The Cassegrain-like telescope includes a primary mirror; a secondary mirror spaced apart from the primary mirror, the primary mirror and the second mirror configured to form a focal surface; and an optical aberrations corrector having a plurality of lenses, the optical aberrations corrector being disposed between the secondary mirror and the focal surface, the optical aberration corrector being configured to correct optical aberrations of the primary mirror and the secondary mirror. A material of the plurality of lenses is selected to transmit radiation in a wavelength range between approximately 0.4 μm and approximately 12 μm, and is selected to have variations in refractive index below about 0.05 so as to reduce chromatic aberration to a level such that an average root mean square of wave front error (RMS WFE) is less than approximately 0.08. | 07-12-2012 |
20120188636 | METHOD FOR CORRECTING A LITHOGRAPHY PROJECTION OBJECTIVE, AND SUCH A PROJECTION OBJECTIVE - A method for correcting at least one image defect of a projection objective of a lithography projection exposure machine, the projection objective comprising an optical arrangement composed of a plurality of lenses and at least one mirror, the at least one mirror having an optically operative surface that can be defective and is thus responsible for the at least one image defect, comprises the steps of: at least approximately determining a ratio VM of principal ray height h | 07-26-2012 |
20120236397 | Two Mirror Optical System - A new and useful optical system is provided, which is particularly useful as an optical relay for an aerial imaging system (AIS). The optical system preferably comprises a two element catadioptric lens where a beam transmitted by makes two reflections before leaving the first solid glass (catadioptric) element, then reflects off the second (mirror) element, makes a fourth reflection off the outside surface of the first element and then passes through a hole in the center of the second element. When the optical system is used as an AIS relay, it substantially captures the NA of the projection lens with which it is associated, and simplifies the structure of the AIS relay. In addition, the AIS relay is configured to minimize the affects of stray light. | 09-20-2012 |
20120250147 | CATADIOPTRIC PROJECTION OBJECTIVE - A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D | 10-04-2012 |
20130100524 | MICRODISPLAY-BASED HEAD-UP DISPLAY SYSTEM - A head-up display (HUD) system is provided. The HUD system comprises a microdisplay-based projection system, a diffuser, a relay optical system, and a combiner. The microdisplay-based HUD system includes aberration correction capabilities and may easily and effectively replace a CRT-based HUD system in aircrafts while providing light-weight, multi-color, superior imaging capabilities with a large field-of-view. | 04-25-2013 |
20130128343 | SPECTRA SHAPING DEVICE FOR CHIRPED PULSE AMPLIFICATION - A spectra shaping apparatus for chirped pulse amplification (CPA): uses a spectrum decomposing system with CTSI construction, a spectrum synthesizing system with CTSI structure that is optically symmetrical to the decomposing structure, and a spectrum shaping system including an aperture and a planar reflector for spectrum shaping function design. The apparatus accomplishes the following functions: firstly decomposing the spectrum of a chirped temporal pulse laser to a spectral domain; then shaping the spectrum in the spectral domain; finally synthesizing un-shiftily this shaped spectrum in the spectral domain into a temporal chirped pulse with a designed shape. The apparatus has the feature of fabricating easy, compacting the structure, requiring less space, and cheap in cost etc., which it can be the different types of configuration for different circumstance application, which it can be not only utilized in a general laser spectrum shaping and spectrum modulation, but also can be utilized for a high energy and ultra-high peak-power laser system in chirped pulse amplification with a large caliber and with a chirped pulse bandwidth of a few nanometers. | 05-23-2013 |
20130182317 | PRISM OPTICAL SYSTEM, AND IMAGE DISPLAY APPARATUS AND IMAGING APPARATUS INCORPORATING THE SAME - The invention provides a prism optical system includes a prism in which a space formed by at least two optical surfaces mutually decentered with respect to an axial chief ray of an incident light beam is filled up with a medium having a refractive index of greater than 1. At least two optical surfaces are rotationally asymmetric surfaces, five internal reflections take place inside the prism, and there is an intermediate image formed inside the prism, which image is in turn formed outside the prism. | 07-18-2013 |
20130222896 | VIRTUAL IMAGE DISPLAY APPARATUS - An intermediate image is formed inside a prism by a projection lens and the like. Image light, totally reflected, in the order of a third surface, a first surface and a second surface, on two or more surfaces thereof, reaches an eye of an observer after passing through the first surface. Thus, it is possible to decrease the thickness of the prism and to reduce the size and weight of the entire optical system. Further, it is possible to realize a bright high-performance display with a wide viewing angle. With respect to external light, it is possible to pass the external light through the first surface and the third surface, for example, for observation. Further, by setting diopter at this time to about 0, it is possible to reduce defocusing or warp of the external light when the external light is observed in a see-through manner. | 08-29-2013 |
20130286472 | RETICLE UNIT, OPTICAL INSTRUMENT, AND RIFLE SCOPE - Provided are a reticle unit that can secure excellent visibility of a reticle regardless of the background and an optical instrument including the reticle unit. A reticle unit | 10-31-2013 |
20130308181 | CATADIOPTRIC OPTICAL SYSTEM WITH HIGH NUMERICAL APERTURE - An optical system includes a first optical group configured to form, at a first intermediate image plane, a first intermediate image of an object disposed at an object plane; a second optical group and a third optical group configured to form, at an image plane, a final image of the object based on the first intermediate image. The first optical group consists of a solid lens having a first surface and a concave second surface facing the first surface; the solid lens is configured to collect light originated at the object and to reflect thereinside at least twice the collected light. The second optical group includes at least one mangin mirror and the third optical group includes a plurality of lenses. The first, second and third optical groups can appropriately control axial chromatic aberration and Petzval curvature, so that imaging with high NA illumination may be performed. | 11-21-2013 |
20130329282 | CATADIOPTRIC OPTICAL ELEMENT AND OPTICAL SYSTEM INCLUDING SAME - A catadioptric lens comprises, a first surface configured to introduce a ray within the catadioptric lens; and a second surface, with a reflective film, configured to reflect the introduced ray to the first surface; the second surface having a first reflection area and a second reflection area surrounded by the first reflection area, wherein the ray, which has been introduced from the first surface and has traveled to the first reflection area, is reflected on the first reflection area by total internal reflection, and the ray, which has been introduced from the first surface and has traveled to the second reflection area, is reflected by the reflective film. | 12-12-2013 |
20140049814 | METHOD OF MANUFACTURING ADVANCED GRID STRUCTURE, ADVANCED GRID STRUCTURE, AND SPACE TELESCOPE USING ADVANCED GRID STRUCTURE - Provided is an advanced grid structure manufactured by a lamination step of laminating a first tape prepreg group, a second tape prepreg group, and a third tape prepreg group repeatedly in the stated order on a forming die, in which grooves ( | 02-20-2014 |
20140300957 | CATADIOPTRIC PROJECTION OBJECTIVE WITH PUPIL CORRECTION - A projection objective includes a plurality of optical elements configured so that, during use of the projection objective, radiation follows a path through the projection objective to image an object field in an object surface onto an image field in an image surface. The optical elements define a first group of refractive optical elements; a second group of optical elements downstream of the first group of refractive optical elements along the path, the second group of optical elements comprising a concave mirror; and a third group of refractive optical elements downstream of the second group of optical elements along the path. The projection objective has a first pupil surface along the path, and the projection objective comprises a Fourier lens group comprising a negative lens group arranged so that an absolute value of a Petzval radius at the first pupil surface is greater than 150 mm. | 10-09-2014 |
20140376086 | CATADIOPTRIC PROJECTION OBJECTIVE WITH TWO INTERMEDIATE IMAGES AND NO MORE THAN FOUR LENSES BETWEEN THE APERTURE STOP AND IMAGE PLANE - A projection objective for imaging a pattern provided in an object plane onto an image plane includes: a first objective part to image the pattern provided in the object plane to a first intermediate image, wherein all of the elements in the first objective part having optical power to image the pattern are refractive elements; a second objective part that includes at least one concave mirror to image the first intermediate image to a second intermediate image; and a third objective part to image the second intermediate image to the image plane, wherein all of the elements in the third objective part having optical power are refractive elements. An aperture stop is positioned in the third objective part and there are no more than four lenses in the third objective part between the aperture stop and the image plane. The projection objective has an image side numerical aperture >0.9. | 12-25-2014 |
20150015941 | METHOD FOR EXTRACTING OPTICAL ENERGY FROM AN OPTICAL BEAM - A method includes generating a primary beam using light emitted by a light-source. The method includes generating a secondary beam using a portion of the light using a lens of a telescope. The lens includes one or more refraction elements positioned on a first surface of the lens, and the secondary beam is generated by diverting the portion of the light using the one or more refraction elements. | 01-15-2015 |
20150043063 | CATADIOPTRIC SYSTEM AND IMAGE PICKUP APPARATUS INCLUDING THE SYSTEM - A catadioptric system includes: a catadioptric unit configured to form an intermediate image of an object; a refracting portion configured to form an image of the intermediate image; a first field lens configured to guide optical flux from the catadioptric unit to the refracting portion; and a second field lens configured to guide the optical flux from the refracting portion toward an image side. The first and the second field lenses each include a positive lens and a negative lens adjacent to each other, and wherein where νIFLp1 and νIFLn1 are respectively Abbe numbers of materials of the positive lens and the negative lens of the first field lens, and νFLp1 and νFLn1 are respectively Abbe numbers of materials of the positive lens and the negative lens of the second field lens, conditions | 02-12-2015 |
20150062697 | VIRTUAL IMAGE DISPLAY APPARATUS - An intermediate image is formed inside a light guide member by a projection lens or the like, whereby a small optical system having a wide viewing angle and high performance is provided. At least one curved surface among curved surfaces forming an optical system is an opposite-sign curvature curved surface having an opposite-sign curvature point different in curvature depending on direction, whereby the optical system is placed in a satisfactory aberration correction state. | 03-05-2015 |
20150362719 | OPTICAL SYSTEM FOR ENDOSCOPE AND ENDOSCOPE - An optical system for an endoscope includes an objective lens, a relay lens arrangement, and a correction optical system disposed in an optical path on a proximal end side of the objective lens. The correction optical system corrects curvature of field caused by the relay lens arrangement. In the optical system for an endoscope, the correction optical system includes at least one concave mirror having an aspherical surface. | 12-17-2015 |
20160011410 | ROBUST SUPPORT STRUCTURE FOR AN OPTICAL REFLECTING TELESCOPE | 01-14-2016 |
20160025960 | TELESCOPIC CONTROL OF HIGH POWER LASER PROPAGATION - The present invention provides a reflective telescopic system, to control the generation of filamentation of ultrashort and intense laser pulses that includes: a flat mirror, an adaptive reflective mirror, a dichroic convex mirror, an off-axis parabolic mirror, and a first laser source. The convex mirror and the adaptive reflective mirror are mounted on an independent breadboard and set on a translation stage. The propagation axis of the laser beam reflected by the mirror should correspond to the off-axis of the parabolic mirror. The parabolic mirror reflects the beam at a specific angle. Finally, the propagation axis between the dichroic convex mirror and the off-axis parabolic mirror, the propagation axis between the flat mirror and the adaptive reflective mirror, and the axis of the translation stage should be substantially parallel to each other. The present invention also contemplates the boresighting of a weak laser beam from a second laser source. | 01-28-2016 |
20160147051 | Miltonian Mirror for Oblique Catoptric Telescopes - One embodiment of a front-surface mirror ( | 05-26-2016 |
359366000 | Concave, convex combination | 18 |
20080252964 | LIGHT COLLIMATING SYSTEM FOR SCHMIDT-CASSEGRAIN TELESCOPE - Disclosed is a light collimating system for mounting at the primary focus of a Schmidt-Cassegrain telescope (SCT) in place of the secondary mirror. The system comprises a housing containing a plurality of lens elements optimized to reduce optical aberrations. The resulting system has a focal ratio of approximately f/2, a short exposure time for optical imaging, and a wide field of view with very little distortion. The housing is attached to the corrector plate of the SCT by a pair of rings held together by a plurality of screws that further facilitate the alignment and rotation of the light collimating system. | 10-16-2008 |
20080285121 | CATADIOPTRIC PROJECTION OBJECTIVE - A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane;
| 11-20-2008 |
20080310014 | CATADIOPTRIC PROJECTION OBJECTIVE - A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; | 12-18-2008 |
20090059358 | Chromatically corrected catadioptric objective and projection exposure apparatus including the same - A catadioptric objective includes a plurality of optical elements arranged along an optical axis to image a pattern from an object field in an object surface of the objective to an image field in an image surface region of the objective at an image-side numerical aperture NA with electromagnetic radiation from a wavelength band around a central wavelength λ. The optical elements include a concave mirror and a plurality of lenses. The projection objective forms an image of the pattern in a respective Petzval surface for each wavelength λ of a wavelength band, the Petzval surfaces deviating from each other for different wavelengths. In embodiments, a longitudinal departure p of the Petzval surface at a given wavelength from a planar reference surface at an edge field point of the image field (at maximum image height y′), measured parallel to the optical axis in the image surface region, varies with the wavelength λ according to dp/dλ<(0.2λ/NA | 03-05-2009 |
20090141344 | HIGH-RESOLUTION OPTICAL IMAGING SYSTEMS - High-resolution imaging systems are provided. In one embodiment, an imaging system based on a Cassegrain or Schmidt-Cassegrain objective, with coaxial primary and secondary mirrors, is provided with a microdisplacement mechanism acting on the secondary mirror to displace the image on a focusing array. In another embodiment, two co-axial Cassegrain-type objectives are provided one within the other with a common focal plane array, which therefore detects combined wide field-of-view and narrow field-of-view images. | 06-04-2009 |
20100110539 | REFLECTIVE TRIPLET OPTICAL FORM WITH EXTERNAL REAR APERTURE STOP FOR COLD SHIELDING - An all-reflecting, non-relayed optical system having an aperture stop and an optical axis and configured to provide images of objects. The system includes a positive power primary mirror configured to receive radiation from the objects, a negative power secondary mirror configured to receive the radiation reflected from the primary mirror and a positive power tertiary mirror configured to receive the radiation reflected from the secondary mirror. The system further includes a focal plane configured to receive the radiation reflected from the tertiary mirror and to form an image of the objects. The aperture stop of the optical system is located between the tertiary mirror and the image plane. Accordingly, the image plane may be cold shielded to prevent or reduce radiation reflected from the optical elements that interferes with the desired image. | 05-06-2010 |
20100149632 | Optical imaging device and imaging method for microscopy - The present invention relates to an optical imaging device, in particular for microscopy, with a first optical element group and a second optical element group, wherein the first optical element group and the second optical element group, on an image plane, form an image of an object point of an object plane via at least one imaging ray having an imaging ray path. The first optical element group comprises a first optical element with a reflective first optical surface in the imaging ray path and a second optical element with a reflective second optical surface in the imaging ray path, wherein the first optical surface is concave. The second optical element group comprises a third optical element with a concave reflective third optical surface in the imaging ray path and a fourth optical element with a convex reflective fourth optical surface in the imaging ray path without light passage aperture. | 06-17-2010 |
20110085235 | ALL-REFLECTIVE RELAYED FOCAL TELESCOPE DERIVED FROM THE FIRST TWO MIRRORS OF AN AFOCAL THREE-MIRROR ANASTIGMAT - An optical system includes a primary mirror of a positive-powered concave substantially paraboloidal configuration configured to reflect light incident thereupon; a secondary mirror of a negative-powered convex hyperboloidal configuration facing the primary mirror configured to receive the light reflected from the primary mirror and redirect the light reflected from the primary mirror; a positive-powered tertiary mirror configured to substantially reimage and reflect divergent light rays incident from the secondary mirror; and a powered quaternary mirror configured to receive the reimaged light rays from the tertiary mirror, and to relay the received reimaged light rays to a focal point. | 04-14-2011 |
20110216400 | Optical apparatus for magnifying a view of an object at a distance - Described are new magnifying apparatus based on two dimensional arrays of micro magnifying modules (MMMs) positioned along a plane perpendicular to the axis of the MMMs. In addition, the structure may include a two dimensional array of micro beam multipliers (MBMs) to improve the quality of the image. The micro beam multipliers are positioned along a plane parallel to the array of micro magnifying modules. The array of micro magnifying modules, with or without the micro beam multipliers, may be constructed as a thin plate with a thickness of a few millimeters, through which the object is viewed. An object at a distance appears in the magnifying apparatus as a magnified image and the magnifying apparatus can be used for viewing an object at a distance in a way similar to the use of a conventional magnifier for viewing an object in a short distance. | 09-08-2011 |
20120026581 | PRECISION OPITCAL MOUNT - An optical apparatus has a primary optical element having a primary spherical optical surface with a primary center of curvature, wherein the primary spherical optical surface has a peripheral portion that extends outside a usable aperture of the optical apparatus, and a secondary optical element. A mount suspends the secondary optical element spaced apart from the primary optical element, wherein the mount comprises a number of leg sections, each leg section extending between the primary and secondary optical elements. Each leg section terminates in a spherical mating surface that rests against the peripheral portion of the primary optical element. The spherical mating surface has a mating surface center of curvature that is substantially concentric with the primary center of curvature. | 02-02-2012 |
20120127566 | MAGNIFYING IMAGING OPTICAL SYSTEM AND METROLOGY SYSTEM WITH AN IMAGING OPTICAL SYSTEM OF THIS TYPE - A magnifying imaging optical system is disclosed that has precisely three mirrors, which image an object field in an object plane into an image field in an image plane. A ratio between a transverse dimension of the image field and a transverse dimension measured in the same direction of a useful face of the last mirror before the image field is greater than 3. In a further aspect, the magnifying imaging optical system is disclosed that has at least three mirrors, which image an object field in an object plane in an image field in an image plane. A first mirror in the beam path after the object field is concave, a second mirror is also concave and a third mirror is convex. An angle of incidence of imaging beams on the last mirror before the image field is less than 15°. | 05-24-2012 |
20120200914 | TWO MIRROR UNOBSCURED TELESCOPES WITH TILTED FOCAL SURFACES - New families of two mirror unobscured telescopes with compact Schiefspiegler, eccentric pupil Cassegrain geometries, incorporating aspheres, tilted and decentered secondaries, and tilted decentered focal surfaces. These variables allow control of focal surface tilt. All embodiments, from f/5 to f/16, are totally reflecting, fully baffled systems, with wide diffraction limited FOVs and unobscured aperture MTFs. Systems optimized with the focal plane normal to the gut ray are well suited for visual and general use. They can incorporate a variable iris for f/number control and allow focusing along the gut ray with minimal field tilt. Systems optimized with a fixed focal plane tilt are well suited for high resolution, wide field collimators and IR scene generators. Any light reflected at focus can be trapped, eliminating Narcissus or “cats eye” effects. Additionally, this reflection can be used to provide a uniform “background” irradiance field. | 08-09-2012 |
20120218630 | Wide Angle Telescope with Five Mirrors - A wide angle catoptric telescope comprises five successive off-axis mirrors. The first mirror or entrance mirror of the five mirrors is concave. The entrance pupil of the telescope is real and situated in front of this said first mirror. The second and the fourth mirror are convex. The third and the fifth mirror are concave. The optical combination is telecentric, and the image field is plane. | 08-30-2012 |
20130329283 | CATADIOPTRIC OPTICAL SYSTEM WITH TOTAL INTERNAL REFLECTION FOR HIGH NUMERICAL APERTURE IMAGING - A catadioptric optical system includes, in order from an object side to an image side and arranged along an optical axis, a first catadioptric unit, a second catadioptric unit disposed in axial alignment with the first catadioptric unit and with a space therebetween; and a lens group disposed in axial alignment with the first and second catadioptric optical units. Light rays arriving from an object plane undergo a first reflection at the image-side surface of the first catadioptric optical unit, a second reflection at the object-side surface of the first catadioptric optical unit, a third reflection at the image-side surface of the second catadioptric optical unit, and a fourth reflection at the object-side surface of the second catadioptric optical unit. Advantageously, the sum the outward Petzval curvatures is cancelled out by the sum of inward Petzval curvatures. | 12-12-2013 |
20140118819 | OPTICAL DEVICE, IMAGING SYSTEM WHICH INCORPORATES THE OPTICAL DEVICE AND METHOD IMPLEMENTED BY THE IMAGING SYSTEM FOR IMAGING A SPECIMEN - An optical device is described herein which is a four mirror objective with a large numerical aperture and a small central obscuration. The four mirror objective places two Schwarzschild-like objectives in series with respect to one another. This allows a large numerical aperture, a long working distance, and small central obscuration. Each objective has a primary and secondary mirror. An imaging device and method for imaging a specimen are also described herein. | 05-01-2014 |
20140254003 | REFLECTIVE OPTICAL SYSTEM AND ASTRONOMICAL OBSERVATION DEVICE USING THE SAME - A reflective optical system includes: a telescope section which includes a concave primary mirror and a concave secondary mirror; and a collimator section which includes at least one concave mirror disposed in a tilted manner with respect to an optical axis of the telescope section and at least one convex mirror disposed in a tilted manner with respect to the optical axis of the telescope section and on which converged light flux is incident, the collimator section receiving light flux from the telescope section. | 09-11-2014 |
20150370058 | TELECENTRIC , WIDE-FIELD FLUORESCENCE SCANNING SYSTEMS AND METHODS - Wide-field fluorescence imaging systems and methods. A bi-telecentric optical imaging system comprising imaging optics arranged and positioned such that a first telecentric space is created or exists between a sample platform and an entry aperture stop wherein Principal or chief rays from a plurality of field points on the sample platform are parallel to each other when passing through a first filter; and such that a second telecentric space is created or exists between a light detector and an exit aperture stop wherein the Principal or chief rays from the plurality of field points are parallel to each other when passing through a second filter. In this manner, light collected from different points in the field of view pass through the first filter at the same angles and also through the second filter at the same angles to thereby reduce or eliminate angular spectral shifting effects. | 12-24-2015 |
20160187640 | Optically Correcting Configuration for a Reflector Telescope - An optically correcting configuration for a reflector telescope allows the reflector telescope to implement an auto-guiding system and an auto-focusing system without interrupting the regular capture of incoming light. The auto-guiding system and/or the auto-focusing system are in optical communication with a secondary optical output. The reflector telescope allows incoming light to travel towards a collecting mirror, from the collecting mirror to a redirecting mirror, and from the redirecting mirror to a primary optical output. A portion of the incoming light travels to the secondary optical output through an optical diverting feature of the redirecting mirror and is used in the analysis for the auto-guiding system and/or the auto-focusing system. Consequently, the redirecting mirror is positioned in between the primary optical output and the secondary optical output. | 06-30-2016 |