Class / Patent application number | Description | Number of patent applications / Date published |
257304000 | Storage node isolated by dielectric from semiconductor substrate | 10 |
20080217671 | METHODS FOR FORMING SEMICONDUCTOR STRUCTURES WITH BURIED ISOLATION COLLARS AND SEMICONDUCTOR STRUCTURES FORMED BY THESE METHODS - A semiconductor structure including a trench formed in a substrate and a buried isolation collar that extends about sidewalls of the trench. The buried isolation collar is constituted by an insulator formed from a buried porous region of substrate material. The porous region is formed from a buried doped region defined using masking and ion implantation or by masking the trench sidewalls and using dopant diffusion. Advantageously, the porous region is transformed to an oxide insulator by an oxidation process. The semiconductor structure may be a storage capacitor of a memory cell further having a buried plate about the trench and a capacitor node inside the trench that is separated from the buried plate by a node dielectric formed on the trench sidewalls. | 09-11-2008 |
20080251828 | ENHANCED ATOMIC LAYER DEPOSITION - A method of enhanced atomic layer deposition is described. In an embodiment, the enhancement is the use of plasma. Plasma begins prior to flowing a second precursor into the chamber. The second precursor reacts with a prior precursor to deposit a layer on the substrate. In an embodiment, the layer includes at least one element from each of the first and second precursors. In an embodiment, the layer is TaN. In an embodiment, the precursors are TaF | 10-16-2008 |
20080251829 | MEMORY DEVICE AND FABRICATION METHOD THEREOF - A fabrication method of a memory device is disclosed. A substrate having a trench is provided, comprising a trench capacitor, a conductive column, a collar dielectric layer and a top dielectric layer therein. A gate structure with spacers on sidewalls is disposed on the substrate and neighboring the trench. An opening is formed on the substrate between the collar dielectric layer and the gate structure. Next, a portion of the top dielectric layer and the collar dielectric layer is removed to expose a portion of the conductive column. An insulating layer is deposited on the gate structure and the exposed conductive column, filling the opening. The insulating layer is etched to expose a portion of the capacitor-side region of the substrate and the conductive column. A transmissive strap is formed by selective deposition, electrically connecting the capacitor-side region of the substrate and the conductive column. | 10-16-2008 |
20080308854 | SEMICONDUCTOR MEMORY DEVICE AND FABRICATION METHOD THEREOF - A semiconductor memory device including a cylinder hole extended in a thickness direction of an insulating film; a capacitor configured from a lower electrode, which is formed on an inner surface of the cylinder hole, and an upper electrode, which is formed on a surface of the lower electrode via a capacitance insulating film; and a capacitance contact plug which is embedded in the insulating film and a portion thereof is exposed inside the cylinder hole so as to be electrically connected with the lower electrode due to the lower electrode covering a surface of this exposed portion, wherein the capacitance contact plug is provided by the portion, which is exposed inside the cylinder hole, being extended from a bottom portion side towards an upper portion side of the cylinder hole. | 12-18-2008 |
20100001330 | SEMICONDUCTOR DEVICE, DATA ELEMENT THEREOF AND METHOD OF FABRICATING THE SAME - A method of fabricating a semiconductor device is provided. The method comprises: (a) providing a first and a second conductor; (b) providing a conductive layer; (c) forming a part of the conductive layer into a data storage layer by a plasma oxidation process, wherein the data storage layer is positioned between the first and the second conductor. | 01-07-2010 |
20100006914 | Nonvolatile semiconductor memory device, and method for manufacturing nonvolatile semiconductor memory device - A nonvolatile semiconductor memory device includes a semiconductor substrate that includes a trench, a charge storage layer that is formed inside of the trench, a first gate that is formed above a side surface and a bottom surface of the trench, a second gate that is formed beside the first gate, and that is formed above the charge storage layer, a first diffusion region that is formed on the semiconductor substrate inside of the trench, and a second diffusion region that is formed on the semiconductor substrate outside of the trench. | 01-14-2010 |
20100213523 | eDRAM MEMORY CELL STRUCTURE AND METHOD OF FABRICATING - A deep trench structure process for forming a deep trench in a silicon on insulator (SOI) substrate. The SOI substrate has a bulk silicon layer, a buried oxide (BOX) layer and an SOI layer. In the process, the trench fill is recessed only to a level within the SOI layer so as to avoid lateral etching of the BOX layer. The buried strap is then formed followed by the STI oxide. | 08-26-2010 |
20120305998 | HIGH DENSITY MEMORY CELLS USING LATERAL EPITAXY - In a vertical dynamic memory cell, monocrystalline semiconductor material of improved quality is provided for the channel of an access transistor by lateral epitaxial growth over an insulator material (which complements the capacitor dielectric in completely surrounding the storage node except at a contact connection structure, preferably of metal, from the access transistor to the storage node electrode) and etching away a region of the lateral epitaxial growth including a location where crystal lattice dislocations are most likely to occur; both of which features serve to reduce or avoid leakage of charge from the storage node. An isolation structure can be provided in the etched region such that space is provided for connections to various portions of a memory cell array. | 12-06-2012 |
20130175595 | INTEGRATED CIRCUIT INCLUDING DRAM AND SRAM/LOGIC - An integrated circuit includes an SOI substrate with a unitary N+ layer below the BOX, a P region in the N+ layer, an eDRAM with an N+ plate, and logic/SRAM devices above the P region. The P region functions as a back gate of the logic/SRAM devices. An optional intrinsic (undoped) layer can be formed between the P back gate layer and the N+ layer to reduce the junction field and lower the junction leakage between the P back gate and the N+ layer. In another embodiment an N or N+ back gate can be formed in the P region. The N+ back gate functions as a second back gate of the logic/SRAM devices. The N+ plate of the SOI eDRAM, the P back gate, and the N+ back gate can be electrically biased at the same or different voltage potentials. Methods to fabricate the integrated circuits are also disclosed. | 07-11-2013 |
20150145010 | DYNAMIC RANDOM ACCESS MEMORY CELL EMPLOYING TRENCHES LOCATED BETWEEN LENGTHWISE EDGES OF SEMICONDUCTOR FINS - After formation of semiconductor fins in an upper portion of a bulk semiconductor substrate, a shallow trench isolation layer is formed, which includes a dielectric material and laterally surround lower portions of each semiconductor fin. Trenches are formed between lengthwise sidewalls of neighboring pairs of semiconductor fins. Portions of the shallow trench isolation layer laterally surrounding each trench provide electrical isolation between the buried plate and access transistors. A strap structure can be formed by etching a via cavity overlying a portion of each trench and a source region of the corresponding access transistor, and filling the via cavity with a conductive material. A trench top oxide structure electrically isolates an inner electrode of each trench capacitor from an overlying gate line for the access fin field effect transistor. | 05-28-2015 |